JPH0232027U - - Google Patents
Info
- Publication number
- JPH0232027U JPH0232027U JP11079088U JP11079088U JPH0232027U JP H0232027 U JPH0232027 U JP H0232027U JP 11079088 U JP11079088 U JP 11079088U JP 11079088 U JP11079088 U JP 11079088U JP H0232027 U JPH0232027 U JP H0232027U
- Authority
- JP
- Japan
- Prior art keywords
- atmosphere
- substrate
- conduction pipe
- sensor chip
- diaphragm
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 4
- 238000001514 detection method Methods 0.000 claims description 2
- 239000004065 semiconductor Substances 0.000 claims 2
- 239000011148 porous material Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
- 230000003321 amplification Effects 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
Landscapes
- Measuring Fluid Pressure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11079088U JPH0232027U (da) | 1988-08-24 | 1988-08-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11079088U JPH0232027U (da) | 1988-08-24 | 1988-08-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0232027U true JPH0232027U (da) | 1990-02-28 |
Family
ID=31348269
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11079088U Pending JPH0232027U (da) | 1988-08-24 | 1988-08-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0232027U (da) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001318017A (ja) * | 2000-05-09 | 2001-11-16 | Yamatake Corp | 差圧・圧力発信器 |
| JP2005106796A (ja) * | 2003-08-05 | 2005-04-21 | Fuji Koki Corp | 圧力センサ |
| JP2008241489A (ja) * | 2007-03-28 | 2008-10-09 | Nidec Copal Electronics Corp | 隔膜式圧力センサ |
-
1988
- 1988-08-24 JP JP11079088U patent/JPH0232027U/ja active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001318017A (ja) * | 2000-05-09 | 2001-11-16 | Yamatake Corp | 差圧・圧力発信器 |
| JP2005106796A (ja) * | 2003-08-05 | 2005-04-21 | Fuji Koki Corp | 圧力センサ |
| JP2008241489A (ja) * | 2007-03-28 | 2008-10-09 | Nidec Copal Electronics Corp | 隔膜式圧力センサ |