JPH023097U - - Google Patents
Info
- Publication number
- JPH023097U JPH023097U JP1988079431U JP7943188U JPH023097U JP H023097 U JPH023097 U JP H023097U JP 1988079431 U JP1988079431 U JP 1988079431U JP 7943188 U JP7943188 U JP 7943188U JP H023097 U JPH023097 U JP H023097U
- Authority
- JP
- Japan
- Prior art keywords
- casing
- rotating shaft
- axial hole
- turbo
- molecular pump
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004519 grease Substances 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/042—Turbomolecular vacuum pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/58—Cooling; Heating; Diminishing heat transfer
- F04D29/582—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps
- F04D29/584—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps cooling or heating the machine
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
- F05D2240/00—Components
- F05D2240/60—Shafts
- F05D2240/61—Hollow
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Thermal Sciences (AREA)
- Non-Positive Displacement Air Blowers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988079431U JPH023097U (el) | 1988-06-17 | 1988-06-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988079431U JPH023097U (el) | 1988-06-17 | 1988-06-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH023097U true JPH023097U (el) | 1990-01-10 |
Family
ID=31304310
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988079431U Pending JPH023097U (el) | 1988-06-17 | 1988-06-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH023097U (el) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009121466A (ja) * | 2007-11-13 | 2009-06-04 | Pfeiffer Vacuum Gmbh | 真空ポンプ |
| JP2013100760A (ja) * | 2011-11-08 | 2013-05-23 | Shimadzu Corp | 一体型ターボ分子ポンプ |
| WO2021149741A1 (ja) * | 2020-01-23 | 2021-07-29 | エドワーズ株式会社 | 回転装置及び真空ポンプ |
-
1988
- 1988-06-17 JP JP1988079431U patent/JPH023097U/ja active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009121466A (ja) * | 2007-11-13 | 2009-06-04 | Pfeiffer Vacuum Gmbh | 真空ポンプ |
| JP2013100760A (ja) * | 2011-11-08 | 2013-05-23 | Shimadzu Corp | 一体型ターボ分子ポンプ |
| WO2021149741A1 (ja) * | 2020-01-23 | 2021-07-29 | エドワーズ株式会社 | 回転装置及び真空ポンプ |
| JP2021116716A (ja) * | 2020-01-23 | 2021-08-10 | エドワーズ株式会社 | 回転装置及び真空ポンプ |