JPH023097U - - Google Patents
Info
- Publication number
- JPH023097U JPH023097U JP1988079431U JP7943188U JPH023097U JP H023097 U JPH023097 U JP H023097U JP 1988079431 U JP1988079431 U JP 1988079431U JP 7943188 U JP7943188 U JP 7943188U JP H023097 U JPH023097 U JP H023097U
- Authority
- JP
- Japan
- Prior art keywords
- casing
- rotating shaft
- axial hole
- turbo
- molecular pump
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004519 grease Substances 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/042—Turbomolecular vacuum pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/58—Cooling; Heating; Diminishing heat transfer
- F04D29/582—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps
- F04D29/584—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps cooling or heating the machine
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
- F05D2240/00—Components
- F05D2240/60—Shafts
- F05D2240/61—Hollow
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Thermal Sciences (AREA)
- Non-Positive Displacement Air Blowers (AREA)
Description
第１図は本考案の一実施例を示すターボ分子ポ
ンプの断面図、第２図はグリース注入器の説明図
、第３図は従来のターボ分子ポンプの断面図であ
る。
１０１……下部ケーシング、１０２……モータ
シヤフト、１４……軸受、１０３，１６……軸受
ブラケツト、１０４……ヒートパイプ挿入穴、１
０９……ヒートパイプ、１１０……ヒートパイプ
固定板、１１１……放熱フイン、１１２……フア
ン。
FIG. 1 is a sectional view of a turbo-molecular pump showing an embodiment of the present invention, FIG. 2 is an explanatory view of a grease injector, and FIG. 3 is a sectional view of a conventional turbo-molecular pump. 101... Lower casing, 102... Motor shaft, 14... Bearing, 103, 16... Bearing bracket, 104... Heat pipe insertion hole, 1
09...Heat pipe, 110...Heat pipe fixing plate, 111...Radiation fin, 112...Fan.
Claims (1)
回転軸と、この回転軸を支承する軸受とを有する
ターボ分子ポンプにおいて、前記回転軸の軸心部
に軸方向孔を形成し、この軸方向孔にその受熱部
が収容されその放熱部が前記ケーシングの外部に
突出するようにヒートパイプを設置したことを特
徴とするターボ分子ポンプ。 In a turbo-molecular pump having a casing, a rotating shaft disposed within the casing, and a bearing supporting the rotating shaft, an axial hole is formed in the axial center of the rotating shaft, and the axial hole is provided with an axial hole. A turbo-molecular pump characterized in that a heat pipe is installed so that a heat receiving part is housed and a heat radiating part of the heat pipe protrudes outside the casing.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988079431U JPH023097U (en) | 1988-06-17 | 1988-06-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988079431U JPH023097U (en) | 1988-06-17 | 1988-06-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH023097U true JPH023097U (en) | 1990-01-10 |
Family
ID=31304310
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988079431U Pending JPH023097U (en) | 1988-06-17 | 1988-06-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH023097U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009121466A (en) * | 2007-11-13 | 2009-06-04 | Pfeiffer Vacuum Gmbh | Vacuum pump |
| JP2013100760A (en) * | 2011-11-08 | 2013-05-23 | Shimadzu Corp | Integrated turbo molecular pump |
| WO2021149741A1 (en) * | 2020-01-23 | 2021-07-29 | エドワーズ株式会社 | Rotary apparatus and vacuum pump |
-
1988
- 1988-06-17 JP JP1988079431U patent/JPH023097U/ja active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009121466A (en) * | 2007-11-13 | 2009-06-04 | Pfeiffer Vacuum Gmbh | Vacuum pump |
| JP2013100760A (en) * | 2011-11-08 | 2013-05-23 | Shimadzu Corp | Integrated turbo molecular pump |
| WO2021149741A1 (en) * | 2020-01-23 | 2021-07-29 | エドワーズ株式会社 | Rotary apparatus and vacuum pump |
| JP2021116716A (en) * | 2020-01-23 | 2021-08-10 | エドワーズ株式会社 | Rotary device and vacuum pump |