JPH0230952U - - Google Patents
Info
- Publication number
- JPH0230952U JPH0230952U JP10876188U JP10876188U JPH0230952U JP H0230952 U JPH0230952 U JP H0230952U JP 10876188 U JP10876188 U JP 10876188U JP 10876188 U JP10876188 U JP 10876188U JP H0230952 U JPH0230952 U JP H0230952U
- Authority
- JP
- Japan
- Prior art keywords
- photoresist
- workpiece
- coating
- organic solvent
- precoating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000576 coating method Methods 0.000 claims description 5
- 229920002120 photoresistant polymer Polymers 0.000 claims description 5
- 239000011248 coating agent Substances 0.000 claims description 3
- 239000003960 organic solvent Substances 0.000 claims description 3
- 239000007788 liquid Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000004528 spin coating Methods 0.000 description 1
Landscapes
- Coating Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10876188U JPH0230952U (de) | 1988-08-19 | 1988-08-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10876188U JPH0230952U (de) | 1988-08-19 | 1988-08-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0230952U true JPH0230952U (de) | 1990-02-27 |
Family
ID=31344400
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10876188U Pending JPH0230952U (de) | 1988-08-19 | 1988-08-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0230952U (de) |
-
1988
- 1988-08-19 JP JP10876188U patent/JPH0230952U/ja active Pending