JPH0230951U - - Google Patents
Info
- Publication number
- JPH0230951U JPH0230951U JP10876088U JP10876088U JPH0230951U JP H0230951 U JPH0230951 U JP H0230951U JP 10876088 U JP10876088 U JP 10876088U JP 10876088 U JP10876088 U JP 10876088U JP H0230951 U JPH0230951 U JP H0230951U
- Authority
- JP
- Japan
- Prior art keywords
- coating device
- photoresist
- photoresist coating
- roller
- ultrasonic oscillator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011248 coating agent Substances 0.000 claims description 7
- 238000000576 coating method Methods 0.000 claims description 7
- 229920002120 photoresistant polymer Polymers 0.000 claims description 7
- 239000007788 liquid Substances 0.000 claims description 3
- 238000004140 cleaning Methods 0.000 claims 1
- 238000005406 washing Methods 0.000 description 1
Landscapes
- Coating Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10876088U JPH0230951U (de) | 1988-08-19 | 1988-08-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10876088U JPH0230951U (de) | 1988-08-19 | 1988-08-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0230951U true JPH0230951U (de) | 1990-02-27 |
Family
ID=31344398
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10876088U Pending JPH0230951U (de) | 1988-08-19 | 1988-08-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0230951U (de) |
-
1988
- 1988-08-19 JP JP10876088U patent/JPH0230951U/ja active Pending