JPH0230951U - - Google Patents
Info
- Publication number
- JPH0230951U JPH0230951U JP10876088U JP10876088U JPH0230951U JP H0230951 U JPH0230951 U JP H0230951U JP 10876088 U JP10876088 U JP 10876088U JP 10876088 U JP10876088 U JP 10876088U JP H0230951 U JPH0230951 U JP H0230951U
- Authority
- JP
- Japan
- Prior art keywords
- coating device
- photoresist
- photoresist coating
- roller
- ultrasonic oscillator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011248 coating agent Substances 0.000 claims description 7
- 238000000576 coating method Methods 0.000 claims description 7
- 229920002120 photoresistant polymer Polymers 0.000 claims description 7
- 239000007788 liquid Substances 0.000 claims description 3
- 238000004140 cleaning Methods 0.000 claims 1
- 238000005406 washing Methods 0.000 description 1
Landscapes
- Coating Apparatus (AREA)
Description
第１図は本考案をドクターバー方式フオトレジ
スト塗布装置に適用した実施例を示す破断図、第
２図は本考案をドクターロール方式フオトレジス
ト塗布装置に適用した実施例を示す断面図、第３
図は従来のドクターバー方式フオトレジスト塗布
装置を示す破断図である。
３……シール、４……フオトレジスト給液口、
５……洗液給液口、６……排液口、７……超音波
発振子、８……バー、９……搬送ベルト、１１…
…コーテイングローラ、１２……バツクアツプロ
ーラ、２１……ドクターバー、２２……ドクター
ローラ。
FIG. 1 is a cutaway view showing an embodiment in which the present invention is applied to a doctor bar type photoresist coating device, FIG. 2 is a sectional view showing an embodiment in which the present invention is applied to a doctor roll type photoresist coating device, and FIG.
The figure is a cutaway view showing a conventional doctor bar type photoresist coating device. 3...Seal, 4...Photoresist liquid supply port,
5...Washing liquid supply port, 6...Drain port, 7...Ultrasonic oscillator, 8...Bar, 9...Transport belt, 11...
...Coating roller, 12...Backup roller, 21...Doctor bar, 22...Doctor roller.
Claims (1)
トを一旦保持し、これをワークに転写するフオト
レジスト塗布装置において、超音波発振子を内蔵
する液体洗浄ユニツトを装備したことを特徴とす
るフオトレジスト塗布装置。 A photoresist coating device that temporarily holds a photoresist in a groove formed on the circumference of a roller and transfers it onto a workpiece, the photoresist coating device being equipped with a liquid cleaning unit containing a built-in ultrasonic oscillator. Coating device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10876088U JPH0230951U (en) | 1988-08-19 | 1988-08-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10876088U JPH0230951U (en) | 1988-08-19 | 1988-08-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0230951U true JPH0230951U (en) | 1990-02-27 |
Family
ID=31344398
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10876088U Pending JPH0230951U (en) | 1988-08-19 | 1988-08-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0230951U (en) |
-
1988
- 1988-08-19 JP JP10876088U patent/JPH0230951U/ja active Pending