JPH02308500A - Electrically programmable and erasable nonvolatile semiconductor memory - Google Patents
Electrically programmable and erasable nonvolatile semiconductor memoryInfo
- Publication number
- JPH02308500A JPH02308500A JP1129148A JP12914889A JPH02308500A JP H02308500 A JPH02308500 A JP H02308500A JP 1129148 A JP1129148 A JP 1129148A JP 12914889 A JP12914889 A JP 12914889A JP H02308500 A JPH02308500 A JP H02308500A
- Authority
- JP
- Japan
- Prior art keywords
- write
- cycle
- erase
- memory cell
- rewrite
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 title claims description 8
- 238000001514 detection method Methods 0.000 claims abstract description 6
- 238000010586 diagram Methods 0.000 description 8
- 230000000694 effects Effects 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 239000008186 active pharmaceutical agent Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000003795 chemical substances by application Substances 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
Landscapes
- Read Only Memory (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は電気的書込み消去可能な不揮発性半導体記憶装
置に関し、特にメモリセルの消去ザイク乞書込みサイク
ルをもつ電気的書込み消去可能な不揮発性半導体記憶装
置に関する。[Detailed Description of the Invention] [Field of Industrial Application] The present invention relates to an electrically programmable and erasable nonvolatile semiconductor memory device, and more particularly to an electrically programmable and erasable nonvolatile semiconductor memory device that has a memory cell erase cycle and write cycle. Regarding storage devices.
従来の電気的書込み消去可能な不揮発性半導体記憶装置
においては、消去・書込み時間を設定するためのタイマ
ー回路を有している。A conventional electrically programmable and erasable nonvolatile semiconductor memory device has a timer circuit for setting erasing and writing times.
このタイマー回路で設定する時間TT1Mは、たとえば
発振回路出力を分周するなどして幅の長いパルスを作り
、メモリセルに実際に消去、書込みを行なうのに必要な
時間T2RとTWRの和よりも長くなるようにしである
。書換えを開始してがらT、工、。The time TT1M set by this timer circuit is longer than the sum of the time T2R and TWR required to create a long pulse by frequency-dividing the oscillation circuit output and actually erase or write to the memory cell. It's meant to be long. T, engineering, while starting rewriting.
経過すると、メモリセルな読み出して状態を確認したす
せず、無条件に書換えを終了していた。When the time elapsed, the rewriting was completed unconditionally without reading the memory cells and confirming their status.
上述した従来の電気的書込み消去可能な不揮発性半導体
記憶装置は、実際のセルの消去、書込みに必要な時間T
ER,TwBとは独立にタイマー回路により消去・書込
み時間を設定しているので、次のような欠点がある。In the conventional electrically programmable and erasable nonvolatile semiconductor memory device described above, the time T required for actual cell erasing and writing is
Since the erase/write time is set by a timer circuit independently of ER and TwB, there are the following drawbacks.
タイマー回路で設定する時間T TrMは、タイマー回
路を構成する半導体素子の拡散条件依存性や動作温度依
存性によりばらつきを生じる。また、T、□、TWRも
同じくこれら依存性を持つため、いかなる動作条件にお
いてもTrtM> (T□+’rw、)となるよ−うに
十分マージンを持たせなければならない。また、書換え
終了時にセルの状態をチェックしていないため、書換え
繰返しによってセルの消去、書込み性能が劣化した場合
には、書換え完了の信頼性は低下するという欠点がある
。The time TTrM set by the timer circuit varies depending on the diffusion conditions and operating temperature of the semiconductor elements constituting the timer circuit. Furthermore, since T, □, and TWR similarly have these dependencies, a sufficient margin must be provided so that TrtM>(T□+'rw,) under any operating conditions. Furthermore, since the state of the cell is not checked at the end of rewriting, there is a drawback that if the erase and write performance of the cell deteriorates due to repeated rewriting, the reliability of rewriting completion will decrease.
また、たとえばTT工、が低温側で短かく高温側で長く
なるのに対してTz*、T□が低温側で長く高温側で短
かくなる、という傾向をもつ場合、低温側でT7rx>
(TER+ TWR)となるようTTfMを設定する
必要がある。これを主に高温環境下で使用する場合、T
TLM> (T+:i+TwR)となり、セルの実力に
対して長時間消去、書込みを行なうためにセルに余計な
ストレスが加わり、劣化を早めるという欠点も生じる。Also, for example, if TT work tends to be short on the low temperature side and long on the high temperature side, whereas Tz*, T□ tends to be long on the low temperature side and short on the high temperature side, then T7rx> on the low temperature side
It is necessary to set TTfM so that (TER+TWR). When using this mainly in a high temperature environment, T
TLM>(T+:i+TwR), and since erasing and writing are performed for a long time compared to the cell's ability, extra stress is applied to the cell, which has the disadvantage of accelerating deterioration.
本発明の電気的書込み消去可能な不揮発性半導体記憶装
置は、電機的に書込み消去可能なメモリセルと、このメ
モリセルに対し、クロック信号により消去サイクル時に
消去、読出しを交互にくり返えし行ない、消去終了後の
書込みサイクル時に書込み、読出しを交互にくり返し行
う制御回路と、前記消去サイクル時に前記メモリセルか
ら読出されたデータが消去レベルとなったとき前記制御
回路に消去終了を通知する消去終了信号を出力し、前記
書込みサイクル時に前記メモリセルから読出されたデー
タが書込みデータレベルとなったとき書換え終了信号を
出力する書換え終了検知回路とを有している。The electrically programmable and erasable nonvolatile semiconductor memory device of the present invention includes an electrically programmable and erasable memory cell, and the memory cell is alternately erased and read during an erase cycle using a clock signal. , a control circuit that alternately repeats writing and reading during a write cycle after the end of erasure, and an erase end that notifies the control circuit of the end of erasure when the data read from the memory cell during the erase cycle reaches an erase level. and a rewrite end detection circuit that outputs a rewrite end signal when data read from the memory cell during the write cycle reaches a write data level.
次に、本発明の実施例について図面を参照して説明する
。Next, embodiments of the present invention will be described with reference to the drawings.
第1図は本発明の第1の実施例を示す回路図である。FIG. 1 is a circuit diagram showing a first embodiment of the present invention.
この実施例 は、電気的に書込み消去可能なメモリセル
11を配列したメモリセルアレイ1と、このメモリセル
アレイlに対しクロック信号CLKにより消去サイクル
時に消去、読出しを交互にくり返えし行ない、消去終了
後の書込みサイクル時に書込み、読みだいを交互にくり
返えし行なう制御回路2をゲート回路G。−G、とセン
ス増幅器4とDフリップフロップ6とを備え、データラ
ッチ回路5からのデータとメモリセルアレイ1からのデ
ータとを比較し消去サイクル時にメモリセルアレイ1か
ら読出されたデータが消去レベルとなったとき制御回路
1に消去終了を通知する消去終了信号を出力し、書込み
サイクル時にメモリセルアレイlから読出されたデータ
が書込みデータレベルとなったとき書換え終了信号を出
力する書換え終了検知回路3とを有する構成となってい
る。In this embodiment, a memory cell array 1 in which electrically programmable and erasable memory cells 11 are arranged, and a memory cell array 1 are alternately erased and read during an erase cycle using a clock signal CLK, and the erase is completed. A gate circuit G serves as a control circuit 2 that alternately repeats writing and reading during a subsequent write cycle. -G, a sense amplifier 4, and a D flip-flop 6, the data from the data latch circuit 5 and the data from the memory cell array 1 are compared, and the data read from the memory cell array 1 during the erase cycle becomes the erase level. and a rewrite end detection circuit 3 which outputs an erase end signal to notify the control circuit 1 of the end of erasing when the write cycle occurs, and outputs a rewrite end signal when the data read from the memory cell array l reaches the write data level during the write cycle. It is configured to have
次に、この実施例の動作について説明する。Next, the operation of this embodiment will be explained.
第2図はこの実施例の動作を説明するための各部信号の
波形図である。FIG. 2 is a waveform diagram of various signals for explaining the operation of this embodiment.
ここでvppはメモリセル11の消去、書込みに用いる
高電圧、斜線部分はフローティング状態を示す。Here, vpp is a high voltage used for erasing and writing the memory cell 11, and the shaded area indicates a floating state.
書換えサイクルの開始と共にり四ツク信号CLKが動作
し、その周期τごとに制御回路2によりメモリセル11
のソース、ゲート、ドレインに印加する電圧VS、VG
、VDを切り換え、消去サイクル時には消去(’rg)
と読み出しくT8)とを交互に、また書込みサイクル時
には書込み(Tw)と読み出しくTR)とを交互に行う
。At the start of the rewriting cycle, the four-way signal CLK operates, and the control circuit 2 controls the memory cell 11 at each period τ.
Voltages VS, VG applied to the source, gate, and drain of
, switch VD and erase ('rg) during erase cycle.
and reading (T8) are performed alternately, and during a write cycle, writing (Tw) and reading (TR) are performed alternately.
消去サイクル中は期待値D1.は書換を行なっているバ
イト中の全ビットについて111 ++となるようにし
、読み出されたデータDS、が0″の間は消去をくり返
すが、メモリセル11が消去さ九て出力が“1;′に変
わると書換え終了検知回路3は消去終了信号を発生して
消去サイクルを終了する。During the erase cycle, the expected value D1. is set to 111++ for all bits in the byte being rewritten, and while the read data DS is 0'', erasing is repeated, but when the memory cell 11 is erased, the output becomes 1. ;', the rewriting end detection circuit 3 generates an erase end signal and ends the erase cycle.
次の書込みサイクルにおいては、データラッチ回路5に
ラッチされているデータをそのまま期待値とする。今、
DIO=“1°’、DI=”O”とすると、DSOは消
去終了後書込みを行なわない。In the next write cycle, the data latched in the data latch circuit 5 is used as the expected value. now,
When DIO="1°" and DI="O", the DSO does not write after erasing.
DSLは消去終了直後は“l″であるが、書込みを繰返
してDSIが“0°′に変わると全続出しデータは期待
値と一致して書込み終了信号を発生し、全書換えサイク
ルを終了する。DSL is "1" immediately after erasing is completed, but when writing is repeated and DSI changes to "0°', all successive data matches the expected value, a write end signal is generated, and the entire rewrite cycle is completed. .
第3図は本発明の第2の実施例の回路図、第4図は各信
号の波形図である。FIG. 3 is a circuit diagram of a second embodiment of the present invention, and FIG. 4 is a waveform diagram of each signal.
この実施例では、メモリセルアレイ1の代りにこのメモ
リセルアレイ1内のメモリセル11と同じ構造のダミー
セルフを持っており、このダミーセルフに消去、書込み
を行ない、読み出すことで消去、書込み終了を検知する
。In this embodiment, instead of the memory cell array 1, a dummy self having the same structure as the memory cell 11 in the memory cell array 1 is provided, and by performing erasing and writing to this dummy self and reading it, the completion of erasing and writing is detected. do.
ダミーセルフは第1の実施例と同様に周期τで消去2読
み出し、書込み、読み出しを行ない、センス増幅器4出
力DSが書込み状態“0”から消去状態“1”に変化し
た時を検出して消去終了。As in the first embodiment, the dummy self performs erase 2 reading, writing, and reading at the period τ, detects when the sense amplifier 4 output DS changes from the write state "0" to the erase state "1", and erases it. end.
“′1′°から′0′′への変化を検出して書込み終了
を検知する。The end of writing is detected by detecting a change from '1'° to '0''.
この実施例では、期待値との比較を必要としない、書換
えサイクル中に読み出すセルの数が少ない等の理由で制
御回路が簡略化されるという利点がある。This embodiment has the advantage that the control circuit is simplified because it does not require comparison with an expected value and the number of cells read during a rewrite cycle is small.
また、通常のメモリセルはダミーセル読出し中にも書換
え動作を行なっているため、ダミーセルの倍の時間書換
えを行なうことになる。従って第1の実施例に比べてセ
ルに加わるストレスは大きくなるが、逆にこのことによ
ってダミーセルの製造ばらつきに対するマージンをとる
ことができる。Further, since a normal memory cell performs a rewriting operation even while reading a dummy cell, rewriting takes twice as long as the dummy cell. Therefore, the stress applied to the cell is greater than that in the first embodiment, but on the other hand, this makes it possible to provide a margin for manufacturing variations in the dummy cells.
また、ダミーセルと通常のメモリーセルでは製造条件依
存性や温度依存性は同じになるため、従来技術と比較す
るとマージンの設定の容易さ、セルへの余計なストレス
の防止という点ではやはり有利となる。Additionally, since dummy cells and regular memory cells have the same dependence on manufacturing conditions and temperature, this technology is advantageous in terms of ease of setting margins and prevention of unnecessary stress on cells compared to conventional technology. .
以上説明したように本発明は、実際のセルの書込み、消
去状態を検知して消去、書込みを終了させるため、タイ
マー回路を使用する従来例のように実際のセルの実力と
のマージンを考慮する必要は全くなく、消去、書込み完
了に対する信頼性は非常に高くなる、という効果がある
。As explained above, the present invention detects the write/erase state of the actual cell and terminates the erase/write, taking into consideration the margin with the actual cell performance, unlike the conventional example using a timer circuit. This is not necessary at all, and the effect is that the reliability of erasing and writing completion is extremely high.
また、実際にセルへの消去、書込みが終了した時点が外
部からみた消去、書込み終了時と一致するので、セルに
余計なストレスガ加わらず、セルの寿命を長くする効果
もある。Furthermore, since the time when erasing and writing to the cell actually ends coincides with the time when erasing and writing are completed as seen from the outside, no unnecessary stress is applied to the cell, which has the effect of lengthening the life of the cell.
さらに、消去時間と書込み時間とが異なる場合、タイマ
ー回路による時間設定では、異なる2種類のパルス幅を
もつパルスを作らねばならず回路が複雑になるが、本発
明ではその点を考慮する必要は全くない。Furthermore, when the erasing time and writing time are different, when setting the time using a timer circuit, pulses with two different pulse widths must be created, which complicates the circuit. However, in the present invention, there is no need to take this point into consideration. Not at all.
第1図は本発明の第1の実施例の回路図、第2図は第1
図における各信号の波形図、第3図は本発明の第2の実
施例の回路図、第4図は第2図における各信号の波形図
である。
1・・・メモリアルアレイ、2.2A・・・・・・制御
回路、3.3A・・・・・・書換え終了検知回路、4・
・・・・・センス増幅器、5・・・・・・データラッチ
回路、6・・・・・・Dフリップフロップ、7・・・・
・・ダミーセル、8・・・・・・RSSフリップフロラ
フ、11・・・・・・メモリセルI Go〜GIG・・
・・・・ゲート回路。
代理人 弁理士 内 原 音
r′“”−7”7゛′″′=
瀦
扉 : 1算4圀FIG. 1 is a circuit diagram of a first embodiment of the present invention, and FIG. 2 is a circuit diagram of a first embodiment of the present invention.
FIG. 3 is a circuit diagram of the second embodiment of the present invention, and FIG. 4 is a waveform diagram of each signal in FIG. 2. 1... Memorial array, 2.2A... Control circuit, 3.3A... Rewriting completion detection circuit, 4.
... sense amplifier, 5 ... data latch circuit, 6 ... D flip-flop, 7 ...
...Dummy cell, 8...RSS flip flow rough, 11...Memory cell I Go~GIG...
...Gate circuit. Agent Patent Attorney Uchihara Oto r'""-7"7゛'"'= Door: 1 calculation 4 koku
Claims (1)
ルに対し、クロック信号により消去サイクル時に消去、
読出しを交互にくり返えし行ない、消去終了後の書込み
サイクル時に書込み、読み出しを交互にくり返し行う制
御回路と、前記消去サイクル時に前記メモリセルから読
出されたデータが消去レベルとなったとき前記制御回路
に消去終了を通知する消去終了信号を出力し、前記書込
みサイクル時に前記メモリセルから読出されたデータが
書込みデータレベルとなったとき書換え終了信号を出力
する書換え終了検知回路とを有することを特徴とする電
気的書込み消去可能な不揮発性半導体記憶装置。A memory cell that is electrically programmable and erasable, and a clock signal that erases and erases the memory cell during an erase cycle.
a control circuit that alternately repeats reading, and performs writing and reading alternately during a write cycle after completion of erasure; and a control circuit that performs data read from the memory cell during the erase cycle when the data reaches an erase level. It is characterized by comprising a rewrite end detection circuit that outputs an erase end signal to notify a circuit of the end of erasure, and outputs a rewrite end signal when data read from the memory cell during the write cycle reaches a write data level. An electrically programmable and erasable nonvolatile semiconductor memory device.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1129148A JPH02308500A (en) | 1989-05-22 | 1989-05-22 | Electrically programmable and erasable nonvolatile semiconductor memory |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1129148A JPH02308500A (en) | 1989-05-22 | 1989-05-22 | Electrically programmable and erasable nonvolatile semiconductor memory |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH02308500A true JPH02308500A (en) | 1990-12-21 |
Family
ID=15002325
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1129148A Pending JPH02308500A (en) | 1989-05-22 | 1989-05-22 | Electrically programmable and erasable nonvolatile semiconductor memory |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH02308500A (en) |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05182481A (en) * | 1991-10-30 | 1993-07-23 | Mitsubishi Electric Corp | Semiconductor memory writing and erasing electrically |
US5398204A (en) * | 1992-11-09 | 1995-03-14 | Seiko Epson Corporation | Nonvolatile semiconductor system |
US5475249A (en) * | 1992-06-09 | 1995-12-12 | Seiko Epson Corporation | Nonvolatile semiconductor device to erase with a varying potential difference |
JPH08249895A (en) * | 1995-03-10 | 1996-09-27 | Nec Corp | Nonvolatile semiconductor memory |
US6219280B1 (en) | 1998-12-02 | 2001-04-17 | Nec Corporation | Nonvolatile semiconductor memory device and erase verify method therefor |
JP2005339763A (en) * | 2005-03-18 | 2005-12-08 | Fujitsu Ltd | Semiconductor storage device |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS542633A (en) * | 1977-06-08 | 1979-01-10 | Mitsubishi Electric Corp | Writing method to nonvoltile memory |
JPS59110096A (en) * | 1982-12-13 | 1984-06-25 | Mitsubishi Electric Corp | Nonvolatile semiconductor memory device |
JPS62164299A (en) * | 1986-01-13 | 1987-07-20 | Mitsubishi Electric Corp | Microcomputer device |
JPS63291297A (en) * | 1987-05-22 | 1988-11-29 | Nec Corp | Non-volatile memory capable of writing and erasing |
-
1989
- 1989-05-22 JP JP1129148A patent/JPH02308500A/en active Pending
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS542633A (en) * | 1977-06-08 | 1979-01-10 | Mitsubishi Electric Corp | Writing method to nonvoltile memory |
JPS59110096A (en) * | 1982-12-13 | 1984-06-25 | Mitsubishi Electric Corp | Nonvolatile semiconductor memory device |
JPS62164299A (en) * | 1986-01-13 | 1987-07-20 | Mitsubishi Electric Corp | Microcomputer device |
JPS63291297A (en) * | 1987-05-22 | 1988-11-29 | Nec Corp | Non-volatile memory capable of writing and erasing |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05182481A (en) * | 1991-10-30 | 1993-07-23 | Mitsubishi Electric Corp | Semiconductor memory writing and erasing electrically |
US5475249A (en) * | 1992-06-09 | 1995-12-12 | Seiko Epson Corporation | Nonvolatile semiconductor device to erase with a varying potential difference |
US5798546A (en) * | 1992-06-09 | 1998-08-25 | Seiko Epson Corporation | Nonvolatile semiconductor device |
US5398204A (en) * | 1992-11-09 | 1995-03-14 | Seiko Epson Corporation | Nonvolatile semiconductor system |
JPH08249895A (en) * | 1995-03-10 | 1996-09-27 | Nec Corp | Nonvolatile semiconductor memory |
US6219280B1 (en) | 1998-12-02 | 2001-04-17 | Nec Corporation | Nonvolatile semiconductor memory device and erase verify method therefor |
JP2005339763A (en) * | 2005-03-18 | 2005-12-08 | Fujitsu Ltd | Semiconductor storage device |
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