JPH02308101A - Infrared transmissive material - Google Patents
Infrared transmissive materialInfo
- Publication number
- JPH02308101A JPH02308101A JP1127807A JP12780789A JPH02308101A JP H02308101 A JPH02308101 A JP H02308101A JP 1127807 A JP1127807 A JP 1127807A JP 12780789 A JP12780789 A JP 12780789A JP H02308101 A JPH02308101 A JP H02308101A
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- zinc sulfide
- cerium fluoride
- film
- transmitting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000463 material Substances 0.000 title claims abstract description 23
- 239000005083 Zinc sulfide Substances 0.000 claims abstract description 19
- 229910052984 zinc sulfide Inorganic materials 0.000 claims abstract description 19
- QCCDYNYSHILRDG-UHFFFAOYSA-K cerium(3+);trifluoride Chemical compound [F-].[F-].[F-].[Ce+3] QCCDYNYSHILRDG-UHFFFAOYSA-K 0.000 claims abstract description 18
- 239000000758 substrate Substances 0.000 claims abstract description 16
- DRDVZXDWVBGGMH-UHFFFAOYSA-N zinc;sulfide Chemical compound [S-2].[Zn+2] DRDVZXDWVBGGMH-UHFFFAOYSA-N 0.000 claims abstract description 15
- 238000000576 coating method Methods 0.000 abstract description 10
- 239000011248 coating agent Substances 0.000 abstract description 8
- 230000000694 effects Effects 0.000 abstract description 4
- 230000003287 optical effect Effects 0.000 abstract description 2
- 239000010408 film Substances 0.000 description 22
- MZQZQKZKTGRQCG-UHFFFAOYSA-J thorium tetrafluoride Chemical compound F[Th](F)(F)F MZQZQKZKTGRQCG-UHFFFAOYSA-J 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000002285 radioactive effect Effects 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 238000002834 transmittance Methods 0.000 description 2
- ZSLUVFAKFWKJRC-IGMARMGPSA-N 232Th Chemical compound [232Th] ZSLUVFAKFWKJRC-IGMARMGPSA-N 0.000 description 1
- KRHYYFGTRYWZRS-UHFFFAOYSA-M Fluoride anion Chemical compound [F-] KRHYYFGTRYWZRS-UHFFFAOYSA-M 0.000 description 1
- 229910052776 Thorium Inorganic materials 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
Landscapes
- Surface Treatment Of Optical Elements (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は赤外線を透過する材料に関し、特に波長１０μ
ｍ付近の赤外線を殆んど反射することなく透過し、光学
部品や窓材などに有利に適用しうる材料に関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a material that transmits infrared rays, particularly at a wavelength of 10 μm.
The present invention relates to a material that transmits infrared rays in the vicinity of m with almost no reflection, and can be advantageously applied to optical components, window materials, etc.
波長１０μｍ付近の赤外線は地球の大気中での吸収が少
なく、比較的低温な物体かちも放射されているため、こ
の波長領域の赤外線を検出し、画像化する技術は極めて
多様な用途への応用が期待されている。赤外線検出装置
を外気から保護するためには、赤外線を透過する材料で
製作した窓で外気から遮断する必要があり、この窓材に
は赤外線を透過するだけでなく、機械的強度が要求され
る。そのため、このような構造材的強度をもった材料と
しては、硫化亜鉛（ＺｎＳ）が用いられている。しかし
、一般的に光の透過窓材は屈折率が大気と異なることが
原因で表面反射により透過率が減少する。このような表
面反射による損失を防ぐためには透過材表面に所定の条
件（屈折率、膜厚）を満足する薄膜をコーティングする
ことにより反射防止を行なう必要がある。従来用いられ
ていた所定の条件を満足する薄膜材料としては放射性元
素であるトリウムの弗化物ＴｈＦ、が用いられていた。Infrared rays with a wavelength of around 10 μm are poorly absorbed in the Earth's atmosphere, and are also emitted by relatively low-temperature objects, so technology to detect and image infrared rays in this wavelength range can be applied to an extremely wide variety of applications. is expected. In order to protect an infrared detection device from the outside air, it is necessary to use a window made of a material that transmits infrared rays to shield it from the outside air, and this window material must not only be able to transmit infrared rays, but also have mechanical strength. . Therefore, zinc sulfide (ZnS) is used as a material with such structural strength. However, since the refractive index of light-transmitting window materials is generally different from that of the atmosphere, the transmittance decreases due to surface reflection. In order to prevent such loss due to surface reflection, it is necessary to prevent reflection by coating the surface of the transmitting material with a thin film that satisfies predetermined conditions (refractive index, film thickness). ThF, a fluoride of thorium, which is a radioactive element, has been used as a conventional thin film material that satisfies predetermined conditions.
従来、反射防止膜として用いられていたトリウムの弗化
物は放射能があるため、取り扱いが危険である上、膜の
硬さが十分でなく、キズがつき易いなど耐久性に問題が
あった。Thorium fluoride, which has been conventionally used as an antireflection film, is radioactive and therefore dangerous to handle, and the film is not sufficiently hard and has problems with durability, such as being easily scratched.
本発明は上記技術水準に鑑み、トリウムの弗化物に代る
反射防止膜を有し、トリウムの弗化物におけるような問
題点のない赤外線透過材料を提供しようとするものであ
る。In view of the above-mentioned state of the art, the present invention aims to provide an infrared transmitting material which has an antireflection film in place of thorium fluoride and is free from the problems encountered with thorium fluoride.
硫化亜鉛（ＺｎＳ）基板の反射防止膜としては、膜の屈
折率が基板の屈折率の平方根に近い値であることが必要
であるが、本発明者らはこのような屈折率をもち、硬質
で１０μｍ付近の赤外線を透過する膜材料として、弗化
セリウム（Ｃａｂｓ）が適してしることを見い出し、こ
の材料を硫化亜鉛上にコーティングすれば、広い透過波
長領域が得られることの知見を得た。As an antireflection coating for a zinc sulfide (ZnS) substrate, it is necessary that the refractive index of the film be close to the square root of the refractive index of the substrate. We discovered that cerium fluoride (Cabs) is suitable as a film material that transmits infrared light in the vicinity of 10 μm, and found that by coating zinc sulfide with this material, a wide transmission wavelength range can be obtained. Ta.
本発明はこの知見に奪番基いて完成されたものであって
、硫化亜鉛基板と、該基板に被覆された弗化セリウム膜
とからなることｉ特徴とする赤外線透過材料である。The present invention was completed based on this knowledge, and is an infrared transmitting material characterized by comprising a zinc sulfide substrate and a cerium fluoride film coated on the substrate.
本発明の硫化亜鉛に被覆する弗化セリウム膜は、硫化亜
鉛の片面だけでもよく、また両面に設けてもよい。The cerium fluoride film coated on the zinc sulfide of the present invention may be provided on only one side of the zinc sulfide, or may be provided on both sides.
弗化セリウムのみのコーティングで硬質な反射防止膜が
形成できるため、成膜が極めて容易となる。A hard antireflection film can be formed by coating only cerium fluoride, making film formation extremely easy.
以下、本発明の一実施例を第１図によって説明する。第
１図中、ｌは硫化亜鉛ＺｎＳ基板、２は弗化セリウムＣ
ｅＦｓ膜である。An embodiment of the present invention will be described below with reference to FIG. In Figure 1, l is a zinc sulfide ZnS substrate, 2 is a cerium fluoride C
It is an eFs film.
弗化セリウム膜２は真空蒸着法で成膜を行ない、成膜時
の硫化亜鉛基板１の温度を３００℃とすれば、弗化セリ
ウム膜２の屈折率が所定の値に近ずき成膜速度を５人／
秒とすれば、これよりも速い速度で成膜した弗化セリウ
ム膜よりも硬質な膜になる。The cerium fluoride film 2 is formed by a vacuum evaporation method, and if the temperature of the zinc sulfide substrate 1 during film formation is 300°C, the refractive index of the cerium fluoride film 2 approaches a predetermined value. Speed 5 people/
If the time is seconds, the film will be harder than a cerium fluoride film formed at a faster rate.
上記の方法で弗化セリウム膜を蒸着すると、屈折率１．
”５０の硬質な反射防止膜を形成できる。When a cerium fluoride film is deposited by the above method, the refractive index is 1.
``50 hard anti-reflection coatings can be formed.
硫化亜鉛基板１の両面に、この方法で１，６７μｍの弗
化セリウム膜２をコーティングすることにより（弗化セ
リウムの膜厚により透過する赤外線の波長が変る）、波
長１０３ｍ付近の赤外線透過率は９６％となる。By coating both sides of the zinc sulfide substrate 1 with a 1.67 μm cerium fluoride film 2 using this method (the wavelength of the transmitted infrared rays changes depending on the thickness of the cerium fluoride film), the infrared transmittance at a wavelength of around 103 m is It becomes 96%.
以上の実施例は硫化亜鉛基板の両面に弗化セリウム膜を
形成した場合を示したが、硫化亜鉛基板の片面のみに弗
化セリウム膜を形成させるだけでもよい。Although the above embodiment shows the case where the cerium fluoride film is formed on both sides of the zinc sulfide substrate, it is also possible to form the cerium fluoride film only on one side of the zinc sulfide substrate.
本発明の赤外線透過材料は、反射防止膜である弗化セリ
ウムの膜厚にもよるが波長１０μｍ付近で特に反射防止
効果があり、赤外線を９０％以上透過する波長領域は７
．５〜１１．０μｍと広く、従って赤外線広帯域透過材
料として有効である。The infrared transmitting material of the present invention has a particularly antireflection effect at a wavelength of around 10 μm, although it depends on the thickness of the cerium fluoride that is the antireflection film, and the wavelength region in which more than 90% of infrared rays are transmitted is 7.
．． It has a wide range of 5 to 11.0 μm, and is therefore effective as an infrared broadband transmitting material.
第一図は本発明の一実施例の概略図である。 FIG. 1 is a schematic diagram of an embodiment of the present invention.
Claims (1)
からなることを特徴とする赤外線透過材料。An infrared transmitting material comprising a zinc sulfide substrate and a cerium fluoride film coated on the substrate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1127807A JPH02308101A (en) | 1989-05-23 | 1989-05-23 | Infrared transmissive material |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1127807A JPH02308101A (en) | 1989-05-23 | 1989-05-23 | Infrared transmissive material |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02308101A true JPH02308101A (en) | 1990-12-21 |
Family
ID=14969163
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1127807A Pending JPH02308101A (en) | 1989-05-23 | 1989-05-23 | Infrared transmissive material |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02308101A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06281811A (en) * | 1993-03-29 | 1994-10-07 | Nec Corp | Dome |
| US10101547B2 (en) | 2012-12-21 | 2018-10-16 | Furukawa Electric Co., Ltd. | Fixing structure for optical fiber, semiconductor laser module, and fixing method for optical fiber |
-
1989
- 1989-05-23 JP JP1127807A patent/JPH02308101A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06281811A (en) * | 1993-03-29 | 1994-10-07 | Nec Corp | Dome |
| US10101547B2 (en) | 2012-12-21 | 2018-10-16 | Furukawa Electric Co., Ltd. | Fixing structure for optical fiber, semiconductor laser module, and fixing method for optical fiber |
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