JPH0229724Y2 - - Google Patents

Info

Publication number
JPH0229724Y2
JPH0229724Y2 JP1166985U JP1166985U JPH0229724Y2 JP H0229724 Y2 JPH0229724 Y2 JP H0229724Y2 JP 1166985 U JP1166985 U JP 1166985U JP 1166985 U JP1166985 U JP 1166985U JP H0229724 Y2 JPH0229724 Y2 JP H0229724Y2
Authority
JP
Japan
Prior art keywords
wafer
sensor
photoelectric sensor
substrate
emitting section
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1166985U
Other languages
English (en)
Japanese (ja)
Other versions
JPS61127639U (OSRAM
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1166985U priority Critical patent/JPH0229724Y2/ja
Publication of JPS61127639U publication Critical patent/JPS61127639U/ja
Application granted granted Critical
Publication of JPH0229724Y2 publication Critical patent/JPH0229724Y2/ja
Expired legal-status Critical Current

Links

JP1166985U 1985-01-30 1985-01-30 Expired JPH0229724Y2 (OSRAM)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1166985U JPH0229724Y2 (OSRAM) 1985-01-30 1985-01-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1166985U JPH0229724Y2 (OSRAM) 1985-01-30 1985-01-30

Publications (2)

Publication Number Publication Date
JPS61127639U JPS61127639U (OSRAM) 1986-08-11
JPH0229724Y2 true JPH0229724Y2 (OSRAM) 1990-08-09

Family

ID=30494002

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1166985U Expired JPH0229724Y2 (OSRAM) 1985-01-30 1985-01-30

Country Status (1)

Country Link
JP (1) JPH0229724Y2 (OSRAM)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH069218B2 (ja) * 1989-02-28 1994-02-02 国際電気株式会社 ウェーハ枚数計数装置
JPH0697673B2 (ja) * 1990-02-15 1994-11-30 国際電気株式会社 ウェーハ枚数計数装置

Also Published As

Publication number Publication date
JPS61127639U (OSRAM) 1986-08-11

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