JPH0229724Y2 - - Google Patents
Info
- Publication number
- JPH0229724Y2 JPH0229724Y2 JP1166985U JP1166985U JPH0229724Y2 JP H0229724 Y2 JPH0229724 Y2 JP H0229724Y2 JP 1166985 U JP1166985 U JP 1166985U JP 1166985 U JP1166985 U JP 1166985U JP H0229724 Y2 JPH0229724 Y2 JP H0229724Y2
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- sensor
- photoelectric sensor
- substrate
- emitting section
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 235000012431 wafers Nutrition 0.000 claims description 49
- 239000000758 substrate Substances 0.000 claims description 10
- 238000006243 chemical reaction Methods 0.000 claims description 5
- 238000005259 measurement Methods 0.000 description 15
- 238000003860 storage Methods 0.000 description 12
- 238000000034 method Methods 0.000 description 7
- 230000001360 synchronised effect Effects 0.000 description 3
- 238000011109 contamination Methods 0.000 description 2
- 230000003247 decreasing effect Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- 238000007781 pre-processing Methods 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 238000007493 shaping process Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1166985U JPH0229724Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1985-01-30 | 1985-01-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1166985U JPH0229724Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1985-01-30 | 1985-01-30 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61127639U JPS61127639U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1986-08-11 |
| JPH0229724Y2 true JPH0229724Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1990-08-09 |
Family
ID=30494002
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1166985U Expired JPH0229724Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1985-01-30 | 1985-01-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0229724Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH069218B2 (ja) * | 1989-02-28 | 1994-02-02 | 国際電気株式会社 | ウェーハ枚数計数装置 |
| JPH0697673B2 (ja) * | 1990-02-15 | 1994-11-30 | 国際電気株式会社 | ウェーハ枚数計数装置 |
-
1985
- 1985-01-30 JP JP1166985U patent/JPH0229724Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61127639U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1986-08-11 |
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