JPH0229382U

JPH0229382U -

Info

Publication number: JPH0229382U
Application number: JP10688888U
Authority: JP
Priority date: 1988-08-12
Filing date: 1988-08-12
Publication date: 1990-02-26

Description

[Brief explanation of the drawing]

第１図は、本考案による多数の金属パイプを密
接して結合した金属管の第１の実施例の正面図、
側断面図および製造工程を示す図である。第２図
は、本考案による多数の金属パイプを密接して結
合した金属管の第２の実施例の正面図、側断面図
および製造工程を示す図である。第３図は前記の
ようにして構成さた多数の金属パイプを密接して
結合した金属管を、ガスの流量計測に用いる層流
管に応用した例を示す側断面図である。第４図〜
第１１図は、それぞれ本考案による多数の金属パ
イプを密接して結合した金属管の他の実施例を示
す正面図および側断面図である。第１２図は、は
マスフローコントローラの原理構成を示すブロツ
ク図である。第１３図〜第１５図は、それぞれ従
来の多数の金属パイプを密接して結合した金属管
を示す正面図、および側断面図である。第１６図
は、さらに他の従来例を示す図である。１ａ……金属パイプ、１ｂ……エレメント。 FIG. 1 is a front view of a first embodiment of a metal pipe in which a number of metal pipes are closely connected according to the present invention;
It is a side sectional view and a figure showing a manufacturing process. FIG. 2 shows a front view, a side sectional view, and a manufacturing process of a second embodiment of a metal tube in which a plurality of metal pipes are closely connected according to the present invention. FIG. 3 is a side sectional view showing an example in which a metal tube formed by closely connecting a large number of metal pipes constructed as described above is applied to a laminar flow tube used for measuring the flow rate of gas. Figure 4~
FIG. 11 is a front view and a side sectional view, respectively, showing another embodiment of a metal tube in which a plurality of metal pipes are closely connected according to the present invention. FIG. 12 is a block diagram showing the principle structure of the mass flow controller. FIGS. 13 to 15 are a front view and a side sectional view, respectively, showing a conventional metal pipe in which a number of metal pipes are closely connected. FIG. 16 is a diagram showing still another conventional example. 1a...Metal pipe, 1b...Element.

Claims

[Scope of Claim for Utility Model Registration] (1) The outer circumference of a thin metal straight pipe is cut to the required length, the outer periphery is plated with metal or a metal brazing agent is applied, and the pipe is cut to the required length to form a metal cylinder. A large number of metal pipes constituted by closely inserting them into the openings of the elements and assembling them and then heating to melt the metal plating or metal solder to join adjacent metal pipes and the inner wall of the element are closely connected. metal tubes joined together. (2) A metal plating agent or a metal brazing agent is filled between the metal pipes or between the inner wall surface of the element and the metal pipes by heat treatment, the plurality of metal pipes being closely connected. metal tube. (3) The metal pipe in which the plurality of metal pipes are closely joined together according to claim 1 or 2, wherein the metal pipes and the element are made of a stainless steel alloy, and the plating agent and the brazing agent are a nickel plating agent and a nickel brazing agent.