JPH02290472A - Compressing device of helium for cryogenic refrigerator - Google Patents
Compressing device of helium for cryogenic refrigeratorInfo
- Publication number
- JPH02290472A JPH02290472A JP11098489A JP11098489A JPH02290472A JP H02290472 A JPH02290472 A JP H02290472A JP 11098489 A JP11098489 A JP 11098489A JP 11098489 A JP11098489 A JP 11098489A JP H02290472 A JPH02290472 A JP H02290472A
- Authority
- JP
- Japan
- Prior art keywords
- coil
- cooling coil
- helium
- cooling
- casing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000001307 helium Substances 0.000 title claims abstract description 23
- 229910052734 helium Inorganic materials 0.000 title claims abstract description 23
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 title claims abstract description 23
- 238000001816 cooling Methods 0.000 claims abstract description 44
- 239000007789 gas Substances 0.000 claims abstract description 40
- 230000006835 compression Effects 0.000 claims description 21
- 238000007906 compression Methods 0.000 claims description 21
- 239000003921 oil Substances 0.000 claims description 16
- 239000010687 lubricating oil Substances 0.000 claims description 5
- 238000005057 refrigeration Methods 0.000 claims 1
- 238000009834 vaporization Methods 0.000 abstract description 5
- 230000008016 vaporization Effects 0.000 abstract description 5
- 239000007788 liquid Substances 0.000 abstract description 3
- KYKAJFCTULSVSH-UHFFFAOYSA-N chloro(fluoro)methane Chemical compound F[C]Cl KYKAJFCTULSVSH-UHFFFAOYSA-N 0.000 abstract 5
- 230000002093 peripheral effect Effects 0.000 abstract 2
- 238000010276 construction Methods 0.000 abstract 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 16
- NBVXSUQYWXRMNV-UHFFFAOYSA-N fluoromethane Chemical compound FC NBVXSUQYWXRMNV-UHFFFAOYSA-N 0.000 description 8
- 238000009833 condensation Methods 0.000 description 5
- 230000005494 condensation Effects 0.000 description 5
- 239000002826 coolant Substances 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
- 230000008020 evaporation Effects 0.000 description 2
- 239000004020 conductor Substances 0.000 description 1
- 239000000498 cooling water Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
Landscapes
- Compressor (AREA)
Abstract
Description
【発明の詳細な説明】
（産業上の利用分野）
本発明は、数Ｋ〜数十Ｋ程度の極低温レベルを得る冷凍
機に組込まれて使用されるヘリウム圧縮装置に関する。DETAILED DESCRIPTION OF THE INVENTION (Industrial Application Field) The present invention relates to a helium compression device that is incorporated into a refrigerator that achieves a cryogenic level of several K to several tens of K.
（従来の技術）
従来、特開昭Ｅｌ １−２８５４Ｅｌ １号公報に開示
され、かつ、第２図に示すように、この種圧縮装置から
吐出される高圧ヘリウムガスは２００’Ｃ以上の高温に
達し、油分離効率の低下や油劣化を招くことから、圧縮
機のケーシング（Ｋ）の外周部に、冷却水を循環させる
水コイル（Ｗ）を配設して、これに高圧のヘリウムガス
が流通される吐出ガスコイル（Ｈ）を付設し、吐出ガス
を冷却するようにしている。(Prior Art) Conventionally, as disclosed in Japanese Unexamined Patent Publication No. 1-2854El 1 and shown in FIG. Therefore, a water coil (W) for circulating cooling water is installed around the outer periphery of the compressor casing (K), and high-pressure helium gas is injected into this coil. A discharge gas coil (H) is provided to cool the discharge gas.
この場合、熱交換により水コイル（Ｗ）内に発生する気
泡を流れに逆らわずに上方に抜いてやる必要があるため
、その入口部（ａ）を下方に出口部（ｂ）を上方に位置
させている。又、水により冷却される吐出ガスは、水と
は対向流とし、温度の低下が進む出口部では低温の水と
熱交換させ、高温のままの入口部では昇温された水と熱
交換さ．せるほうが、全体として熱交換効率が高くなる
ため、その入口部（Ｃ）を上方に出口部（ｄ）を下方に
位置させている。In this case, the air bubbles generated in the water coil (W) due to heat exchange must be drawn upward without going against the flow, so the inlet part (a) should be positioned downward and the outlet part (b) should be upward. I'm letting you do it. In addition, the discharged gas cooled by water flows in the opposite direction to the water, so that it exchanges heat with low-temperature water at the outlet where the temperature continues to decrease, and with heated water at the inlet where the temperature remains high. ．． Since the heat exchange efficiency as a whole is higher when the tube is placed in the upper part, the inlet part (C) is located at the upper part and the outlet part (d) is located at the lower part.
又、同様に、高温とされる潤滑油の温度を低減するため
、油循環コイル（０）を、その入口部（ｅ）が上方に出
口部（ｆ）が下方に位置するように冷却コイル（Ｗ）に
付設している。Similarly, in order to reduce the temperature of the high-temperature lubricating oil, the oil circulation coil (0) is installed in a cooling coil ( It is attached to W).
（発明が解決しようとする問題点）
以上のものは、冷却媒体に水を用い、吐出ガス又は潤滑
油との間で主に顕熱のやりとりで冷却を行うものだから
、対向流にして熱交換効率を向上させる必要があり、下
から上に向かう水コイル（Ｗ）に対し吐出ガスコイル（
Ｈ）及び油循環コイル（０）を上から下に向かわせてお
り、順次温度低下が進み低温とされる出口側の吐出ガス
コイル（Ｗ）及び油循環コイル（０）が下方に位置され
ることになるため、この下方部分で結露が発生すると、
直ちにこの結露水が下方に垂れてしまう問題が起こるの
である。(Problem to be solved by the invention) The above method uses water as a cooling medium and performs cooling mainly by exchanging sensible heat with the discharged gas or lubricating oil. It is necessary to improve the efficiency, and the discharge gas coil (
H) and oil circulation coil (0) are oriented from top to bottom, and the discharge gas coil (W) and oil circulation coil (0) on the outlet side, where the temperature gradually decreases and becomes low temperature, are located at the bottom. Therefore, if condensation occurs in this lower part,
A problem immediately arises in which this condensed water drips downward.
このため、通常、ケーシング（Ｋ）の下部には、結露水
を受け止めるドレンバンを配置し、又、その排水機構を
設ける必要が生じて構成が複雑化するのである。For this reason, it is usually necessary to arrange a drain van to catch the condensed water in the lower part of the casing (K) and to provide a drainage mechanism therefor, which complicates the structure.
本発明では、冷却媒体にフロンを用い、被冷却媒体とな
る吐出ガス等の流通方向を変更することにより、結露の
垂れ下がりの問題を防止できて吐出ガス等の良好な冷却
を行うことができる極低温冷凍機用のヘリウム圧縮装置
を提供することを主たる目的とするものである。In the present invention, by using Freon as the cooling medium and changing the flow direction of the discharged gas, etc., which is the medium to be cooled, the problem of dripping due to dew condensation can be prevented, and the discharged gas, etc. can be cooled well. The main objective is to provide a helium compression device for a low temperature refrigerator.
（課題を解決するための手段）
そこで本発明では、ケーシング（１）の内部に圧縮要素
（３）を備え、低圧のヘリウムガスを吸入して圧縮し、
高圧のヘリウムガスを吐出するようにした極低温冷凍機
用のヘリウム圧縮装置であって、前記ケーシング（１）
の外周部に、フロンを循環させる冷却コイル（６）をそ
の入口部が下方に出口部が上部に位置するように配設す
ると共に、高圧のヘリウムガスを流通させる吐出ガスコ
イル（７）を、その入口部が下方に出口部が上方に位置
するように、前記冷却コイル（６）に熱交換可能に付設
することにした。(Means for Solving the Problem) Therefore, in the present invention, a compression element (3) is provided inside the casing (1), and low pressure helium gas is sucked and compressed.
A helium compression device for a cryogenic refrigerator configured to discharge high-pressure helium gas, the casing (1)
A cooling coil (6) for circulating fluorocarbons is arranged on the outer periphery of the cooling coil so that its inlet is located at the bottom and its outlet is located at the top. The cooling coil (6) is attached to the cooling coil (6) so that heat exchange is possible so that the inlet part is located below and the outlet part is located above.
又、加えて、前記ケーシング（１）の内部に充填した潤
滑油を循環させる油循環コイル（８）を、その入口部が
下方に出口部が上方に位置するように、前記冷却コイル
（θ）に熱交換可能に付設することにした。In addition, the oil circulation coil (8) for circulating the lubricating oil filled inside the casing (1) is arranged so that the inlet part thereof is located downward and the outlet part thereof is located upwardly. It was decided to attach it so that it could be heat exchanged.
更に、上記構成において、運転の起動時、前記冷却コイ
ル（６）にフロンを循環させた後に、前記圧縮要素（３
）を駆動する起動制御手段（９）を設けることにした。Furthermore, in the above configuration, at the start of operation, after the fluorocarbon is circulated through the cooling coil (6), the compression element (3
) is provided.
（作用）
フロンは冷却コイル（６）中を下から上に流れるため、
蒸発による気化ガスが下流個に円滑に取出せる。又、吐
出ガスは吐出ガスコイル（７）中を下から上に流れ、フ
ロンの流れとは対向流にはならないが、冷却は、フロン
の大き゜な蒸発潜熱により行われ、しかも、冷却コイル
（６）の上下で温度差が殆どなくなることから、対向流
としなくとも十分な冷却が行える。しかも、このとき、
冷却の進んだ吐出ガスの出口部が上方に位置され、高温
側が下方に位置されるため、低温側の上部で結露が発生
しても、その結露水は下方側の高温部分で蒸発される。(Function) Since Freon flows from the bottom to the top in the cooling coil (6),
Vaporized gas caused by evaporation can be smoothly taken out downstream. Furthermore, the discharged gas flows from bottom to top in the discharged gas coil (7), and although it does not flow in the opposite direction to the flow of fluorocarbons, cooling is performed by the large latent heat of vaporization of the fluorocarbons, and the cooling coil (6) Since there is almost no temperature difference between the upper and lower sides, sufficient cooling can be achieved even without countercurrent flow. Moreover, at this time,
Since the outlet of the cooled discharged gas is located at the top and the high temperature side is located at the bottom, even if condensation occurs on the upper part of the low temperature side, the condensed water is evaporated at the high temperature part on the lower side.
又、同様に、油循環コイル（８）に流通される油も、下
から上に流れるから、低温の上部出口側で発生する結露
水が下方に垂れるまでの間に蒸発される。Similarly, since the oil flowing through the oil circulation coil (8) also flows from the bottom to the top, the condensed water generated on the low-temperature upper outlet side is evaporated before it drips downward.
更に、起動制御手段（９）により、その運転の起動時、
冷却コイル（６）にフロンを循環させた後１に、圧縮要
素（３）を駆動すれば、フロンによる冷却負荷を軽減で
き、起動開始当初から良好な冷却が行える。Furthermore, the start control means (9) controls, at the start of the operation,
If the compression element (3) is driven after the fluorocarbon is circulated through the cooling coil (6), the cooling load due to the fluorocarbon can be reduced, and good cooling can be performed from the beginning of startup.
（実施例）
第１図に示すものは、極低温膨張機やジュールトムソン
熱交換回路等の極低温冷凍機ユニー／ ト（Ｕ）に接続
するヘリウム圧縮装置であり、密閉形のケーシング（１
）の内部に、モータ（２）で駆動するロータリー式の圧
縮要素（３）を備え、吸入管（４）から吸入する低圧の
ヘリウムガスをシリンダ室（３０）で圧縮し、ケーシン
グ（１）の内部を経て、吐出管（５）から高圧のヘリウ
ムガスを吐出するようにしている。吐出管（５）には油
分離器（５０）を接続し、分離油をキャビラＵ（５１）
を介して吸入管（４）に戻すようにしている。（５２）
は水分等の吸着器、（５３）は低圧ヘリウムの圧力変動
を吸収するサージボトルである。(Example) What is shown in Fig. 1 is a helium compression device connected to a cryogenic refrigerator unit (U) such as a cryogenic expander or a Joule-Thomson heat exchange circuit.
) is equipped with a rotary compression element (3) driven by a motor (2), which compresses low-pressure helium gas taken in from the suction pipe (4) in the cylinder chamber (30), and compresses the helium gas in the casing (1). High-pressure helium gas is discharged from the discharge pipe (5) through the interior. An oil separator (50) is connected to the discharge pipe (5), and the separated oil is sent to the cabin U (51).
The water is returned to the suction pipe (4) through the pipe. (52)
(53) is a surge bottle that absorbs pressure fluctuations of low-pressure helium.
以上の構成において、ケーシング（１）の外周部に、フ
ロンを循環させる冷却コイル（６）を、その入口部（θ
ａ）が下方に出口部（６ｂ）が上方に位置するように巻
回状に配設し、この冷却コイル（６）に、フロン用圧縮
機（８１）、凝縮Ｗ （８２） 、膨張弁（６３）を備
える冷却ユニッ｝ （８０）を接続して、前記膨張弁（
６２）を流出した低圧液状のフロンを、その下方から上
方に流通させ、蒸発させる。In the above configuration, the cooling coil (6) for circulating fluorocarbon is placed around the outer periphery of the casing (1) at its inlet (θ
A) is arranged in a winding manner so that the outlet part (6b) is located at the bottom and the outlet part (6b) is located at the top. 63) is connected to the cooling unit (80), and the expansion valve (
The low-pressure liquid Freon flowing out of 62) is caused to flow upward from below and evaporate.
又、前記吐出管（５）に連続する吐出ガスコイル（７）
を、その入口部（７ａ）が下方に出口部（７ｂ）が上方
に位置するように、前記冷却コイル（６）の上部側に熱
交換可能に付設し、冷却コイル（６）を流通する低圧液
状のフロンの蒸発潜熱により、吐出ガスコイル（７）を
流通する吐出ガスを冷却させる。Further, a discharge gas coil (7) continuous with the discharge pipe (5)
is attached to the upper side of the cooling coil (6) for heat exchange so that the inlet part (7a) is located downward and the outlet part (7b) is located upward, and the low pressure flowing through the cooling coil (6) is The latent heat of vaporization of liquid fluorocarbon cools the discharge gas flowing through the discharge gas coil (7).
更に、前記ケーシング（１）の底部には、潤滑油を充填
しており、底部から油潤滑コイル（８）を引延ばして、
その入口部（８ａ）を下に出口部（８ｂ）を上に位置さ
せて、前記冷却コイル（６）の下部側に熱交換器可能に
付設し、その出口部をオリフィス（８０）を介して、前
記吸入管（４）に接続する。Furthermore, the bottom of the casing (1) is filled with lubricating oil, and an oil-lubricated coil (8) is extended from the bottom.
A heat exchanger is attached to the lower side of the cooling coil (6) with the inlet part (8a) located below and the outlet part (8b) above. , connected to the suction pipe (4).
尚、前記冷却コイル（６）及び吐出ガスフィル（７）、
油循環コイル（８）は、熱電導体（１０）で覆っている
。In addition, the cooling coil (6) and the discharge gas filter (7),
The oil circulation coil (8) is covered with a thermoelectric conductor (10).
以上の構成によれば、フロンは冷却コイル（６）中を下
から上に流れるため、蒸発による気化ガスが下流側に円
滑に取出せる。又、吐出ガスは吐出ガスコイル（７）中
を下から上に流れ、フロンの流れとは対向流にはならな
いが、冷却は、フロンの大きな蒸発潜熱により行われ、
冷却コイル（６）の上下で温度差が殆どなくなることか
ら、対向流としなくとも十分な冷却が行える。しかも、
このとき、冷却の進んだ吐出ガスの出口部が上方に位置
され、高温側が下方に位置されるため、低温側の上部で
結露が発生しても、その結露水は下方倒の高温部分で蒸
発されるため、結露水が下に垂れることが防止できる。According to the above configuration, since the freon flows from the bottom to the top in the cooling coil (6), the vaporized gas due to evaporation can be smoothly extracted to the downstream side. In addition, the discharged gas flows from bottom to top in the discharged gas coil (7), and although it does not flow in the opposite direction to the flow of fluorocarbons, cooling is performed by the large latent heat of vaporization of fluorocarbons.
Since there is almost no temperature difference between the upper and lower portions of the cooling coil (6), sufficient cooling can be achieved even without countercurrent flow. Moreover,
At this time, the outlet of the discharged gas that has been cooled is located at the top, and the high temperature side is located at the bottom, so even if condensation occurs at the top of the low temperature side, the condensed water will evaporate in the high temperature part that is tilted downward. This prevents condensed water from dripping down.
従って、下部にドレンバン及びその排出機構を設ける必
要がない。同様に、油循環コイル（８）に流通される油
も、下から上に流れるから、低温の上部出口側で発生す
る結露水が下方に垂れるまでの間に蒸発でき、ドレンパ
ン等は必要ナい。Therefore, there is no need to provide a drain bun and its discharge mechanism in the lower part. Similarly, since the oil flowing through the oil circulation coil (8) flows from the bottom to the top, the condensed water generated at the low-temperature upper outlet side can evaporate before it drips downward, eliminating the need for a drain pan, etc. .
又、以上の構成において、運転の起動時、まず初めに前
記冷却コイル（６）にフロンを循環させ、その後に、前
記圧縮要素（３）を駆動する起動制御手段（９）を設け
る。具体的にはフロン側起動手段（９１）によりフロン
側圧縮機（６１）のモータＮ３ １ ａ）を駆動した後
、タイマ手段（９３）で一定時間計時した後に、ヘリウ
ム側起動手段（９２）により圧縮要素（３）に結合した
モータ（２）を駆動する。この場合には、フロン側圧縮
機（６１）の負荷を軽減でき、起動開始当初から良好な
冷却が行えると共に、起動時間差により起動電流のピー
ク値を低減できる利点も得られる。Further, in the above configuration, at the start of operation, start control means (9) is provided which first circulates Freon through the cooling coil (6) and then drives the compression element (3). Specifically, after the motor N3 1 a) of the fluorocarbon side compressor (61) is driven by the fluorocarbon side starting means (91) and after a certain period of time is measured by the timer means (93), the helium side starting means (92) is started. Drive a motor (2) coupled to a compression element (3). In this case, the load on the fluorocarbon side compressor (61) can be reduced, good cooling can be performed from the beginning of startup, and there is also an advantage that the peak value of the startup current can be reduced due to the startup time difference.
（発明の効果）
以上、本発明によれば、フロンの蒸発潜熱により吐出ガ
ス又は油の冷却を行い、吐出ガスコイル（７）又は油循
環、コイル（８）を下から上に向かわせるようにしたか
ら、低温側の上部で結露が゛発生しても、その結露水は
下方側の高温部分で蒸発されるため、下部に別途ドレン
バン等を設置する必要がなく、良好な吐出ガス冷却又は
油冷却を行えるのである。(Effects of the Invention) As described above, according to the present invention, the discharged gas or oil is cooled by the latent heat of vaporization of freon, and the discharged gas coil (7) or oil circulation and coil (8) are directed from the bottom to the top. Therefore, even if condensation occurs in the upper part on the low temperature side, the condensed water is evaporated in the high temperature part on the lower side, so there is no need to install a separate drain van etc. at the lower part, and good discharge gas cooling or oil cooling is possible. It is possible to do this.
加えて、起動制御手段（９）により、その運転の起動時
、冷却コイル（６）にフロンを循環させた後に、圧縮要
素（３）を駆動すれば、フロンによる冷却負荷を軽減で
き、起動開始当初から良好な冷却が行えるのである。In addition, if the compression element (3) is driven by the startup control means (9) after circulating Freon through the cooling coil (6) at the time of startup, the cooling load due to Freon can be reduced and the start-up is started. Good cooling can be achieved from the beginning.
第１図は本発明に係る圧縮装置の構成図、第２図は従来
例の構成図である。
（１）・・・・ケーシング
（３）・・・・圧縮要素
（６）・・・・冷却コイル
（７）・・・・吐出ガスコイル
（８）・・・・油循環コイル
（９）・・・・起動制御手段
（８ ａ， ７ ａｌ ８ ａ）・・・・入口部（
６ｂ，７ｂ，８ｂ）・・・・出口部FIG. 1 is a block diagram of a compression device according to the present invention, and FIG. 2 is a block diagram of a conventional example. (1) Casing (3) Compression element (6) Cooling coil (7) Discharge gas coil (8) Oil circulation coil (9) ...Start-up control means (8 a, 7 al 8 a) ... Entrance part (
6b, 7b, 8b)...exit part
Claims (1)
低圧のヘリウムガスを吸入して圧縮し、高圧のヘリウム
ガスを吐出するようにした極低温冷凍機用のヘリウム圧
縮装置であって、前記ケーシング（１）の外周部に、フ
ロンを循環させる冷却コイル（６）をその入口部が下方
に出口部が上部に位置するように配設すると共に、高圧
のヘリウムガスを流通させる吐出ガスコイル（７）を、
その入口部が下方に出口部が上方に位置するように、前
記冷却コイル（６）に熱交換可能に付設していることを
特徴とする極低温冷凍機用のヘリウム圧縮装置。 ２）前記ケーシング（１）の内部に充填した潤滑油を循
環させる油循環コイル（８）を、その入口部が下方に出
口部が上方に位置するように、前記冷却コイル（６）に
熱交換可能に付設している請求項１記載の極低温冷凍機
用のヘリウム圧縮装置。 ３）運転の起動時、前記冷却コイル（６）にフロンを循
環させた後に、前記圧縮要素（３）を駆動する起動制御
手段（９）を備える請求項１又は請求項２記載の極低温
冷凍機用のヘリウム圧縮装置。[Claims] 1) A compression element (3) is provided inside the casing (1),
A helium compression device for a cryogenic refrigerator that sucks and compresses low-pressure helium gas and discharges high-pressure helium gas, the cooling coil circulating fluorocarbons around the outer periphery of the casing (1). (6) is arranged so that its inlet part is located at the bottom and the outlet part is located at the top, and a discharge gas coil (7) through which high-pressure helium gas flows,
A helium compression device for a cryogenic refrigerator, characterized in that the helium compression device for a cryogenic refrigerator is attached to the cooling coil (6) for heat exchange so that the inlet portion is located below and the outlet portion is located above. 2) The oil circulation coil (8) that circulates the lubricating oil filled inside the casing (1) is heat exchanged with the cooling coil (6) so that the inlet part is located downward and the outlet part is located upward. 2. A helium compression device for a cryogenic refrigerator as claimed in claim 1, wherein the helium compression device is optionally attached. 3) The cryogenic refrigeration according to claim 1 or claim 2, further comprising a start-up control means (9) that drives the compression element (3) after circulating fluorocarbons through the cooling coil (6) at the time of start-up of operation. Helium compression equipment for aircraft.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11098489A JPH0733932B2 (en) | 1989-04-28 | 1989-04-28 | Helium compressor for cryocoolers |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11098489A JPH0733932B2 (en) | 1989-04-28 | 1989-04-28 | Helium compressor for cryocoolers |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02290472A true JPH02290472A (en) | 1990-11-30 |
| JPH0733932B2 JPH0733932B2 (en) | 1995-04-12 |
Family
ID=14549455
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11098489A Expired - Fee Related JPH0733932B2 (en) | 1989-04-28 | 1989-04-28 | Helium compressor for cryocoolers |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0733932B2 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0461263U (en) * | 1990-10-01 | 1992-05-26 | ||
| CN106461285A (en) * | 2014-04-25 | 2017-02-22 | 株式会社瑞蓝 | Cryogenic refrigeration system |
-
1989
- 1989-04-28 JP JP11098489A patent/JPH0733932B2/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0461263U (en) * | 1990-10-01 | 1992-05-26 | ||
| CN106461285A (en) * | 2014-04-25 | 2017-02-22 | 株式会社瑞蓝 | Cryogenic refrigeration system |
| JP2017514101A (en) * | 2014-04-25 | 2017-06-01 | スナム カンパニー リミテッド | Cryogenic refrigeration system |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0733932B2 (en) | 1995-04-12 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |