JPH02290090A - Q switch laser device - Google Patents

Q switch laser device

Info

Publication number
JPH02290090A
JPH02290090A JP1111059A JP11105989A JPH02290090A JP H02290090 A JPH02290090 A JP H02290090A JP 1111059 A JP1111059 A JP 1111059A JP 11105989 A JP11105989 A JP 11105989A JP H02290090 A JPH02290090 A JP H02290090A
Authority
JP
Japan
Prior art keywords
circuit
signal
switch
laser
high frequency
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1111059A
Other languages
Japanese (ja)
Inventor
Keiji Okino
沖野 圭司
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP1111059A priority Critical patent/JPH02290090A/en
Publication of JPH02290090A publication Critical patent/JPH02290090A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/10Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
    • H01S3/11Mode locking; Q-switching; Other giant-pulse techniques, e.g. cavity dumping
    • H01S3/1123Q-switching
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/10Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
    • H01S3/10038Amplitude control
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/10Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
    • H01S3/13Stabilisation of laser output parameters, e.g. frequency or amplitude
    • H01S3/1306Stabilisation of the amplitude
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/10Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
    • H01S3/13Stabilisation of laser output parameters, e.g. frequency or amplitude
    • H01S3/136Stabilisation of laser output parameters, e.g. frequency or amplitude by controlling devices placed within the cavity

Abstract

PURPOSE:To facilitate adjustment by providing a source voltage control circuit which controls the voltage of a high frequency circuit in a Q switch laser device and making the laser output of a switch first pulse weak. CONSTITUTION:In a Q switch element drive circuit 8, a clock signal 15 which is generated by a Q switch oscillation timing circuit 9 is inputted in a source voltage control circuit 14 and is divided into a signal 16 that is lacking in the first pulse and a signal 17 that has the first pulse only. On the other hand, a high frequency signal 18 given from a high frequency generating circuit 10 is modulated by the signal 16 in a high frequency amplification circuit 11. Further, the signal 17 given from the circuit 14 controls the voltage of a source circuit 13 and the output of the circuit 11. The output signal 21 of the circuit 11 is given to the Q switch element 5 of a laser oscillator 1 and makes the initial peak value of a laser output that is outputted by the oscillator 1 small. This approach facilitates adjustment without being affected by a clock signal.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は,Qスイッチレーザ装置に関する。[Detailed description of the invention] [Industrial application field] The present invention relates to a Q-switched laser device.

以下金日 〔従来の技術〕 従来,Qスイッチレーザ装置は,第4図(a)に示すよ
りなQスイッチ素子を駆動するQスイッチ素子駆動回路
のクロ,ク入力信号25を,第4図(b)に示すように
減衰させた制御信号26とすることによシ,超音波Qス
イッチ素子駆動用の出力信号27を第4図(c)の様に
制御して,第5図(d)に示すようQスイッチレーザの
初期に発生する定常状態と比較して尖頭値の大きなレー
ザ出力信号28を弱め,定常出力後のレーザ出力29と
同等レベルのレーザ出力が得られてからQスイッチレー
ザを発振させていた。
[Prior art] Conventionally, a Q-switched laser device has a Q-switch element drive circuit that drives a Q-switch element as shown in Fig. 4(a). By using the attenuated control signal 26 as shown in b), the output signal 27 for driving the ultrasonic Q-switch element is controlled as shown in FIG. As shown in , the laser output signal 28, which has a large peak value compared to the steady state that occurs in the initial stage of the Q-switched laser, is weakened, and the Q-switched laser is started after the laser output signal 28 is at the same level as the laser output 29 after the steady state output is obtained. was oscillating.

〔発明が解決しようとする課題〕[Problem to be solved by the invention]

上述した従来のQスイッチレーザ装置は,Qスイッチ素
子駆動回路のクロック入力信号を第4図(b)に示すよ
うに制御するため,高周波を発生する超音波Qスイッチ
素子駆動用出力信号27が増幅されるときにクロック入
力信号の影響を受けやすく,制御時間,波形の制御など
に制限が出る。このため高周波増幅回路の調整やインピ
ーダンスマッチング回路の調整に時間を必要とする。
In the conventional Q-switch laser device described above, in order to control the clock input signal of the Q-switch element drive circuit as shown in FIG. 4(b), the ultrasonic Q-switch element drive output signal 27 that generates a high frequency is amplified. It is susceptible to the influence of the clock input signal when it is used, and there are restrictions on control time, waveform control, etc. Therefore, it takes time to adjust the high frequency amplifier circuit and the impedance matching circuit.

また,制御時間に制限を受けることは,信号入力からレ
ーザ発振までにレーザを発振しない時間を要するため,
装置使用上信号入力からレーザ発振まで装置駆動のタイ
ミングをとる必要があるという欠点がある。
In addition, the control time is limited because it takes time for the laser not to oscillate from signal input to laser oscillation.
There is a drawback in that when using the device, it is necessary to time the device drive from signal input to laser oscillation.

本発明は従来のもののこのような課題を解決しようとす
るもので,クロック信号の影響を受けず,調整の容易な
Qスイッチレーザ装置を提供するものである。
The present invention aims to solve these problems of the conventional devices, and provides a Q-switched laser device that is not affected by a clock signal and is easy to adjust.

〔課題を解決するための手段〕[Means to solve the problem]

本発明のQスイッチレーザ装置は,共振ミラーと,レー
ザ媒質と,Qスイノチ素子と,前記レーザ媒質を励起す
る励起源と,励起源用電源と,Qスイッチ発振タイミン
グをきめるクロック列に基いてQスイッチ素子を駆動す
るQスイッチ素子駆動回路とから構成されるQスイッチ
レーザ装置において,前記Qスイッチ素子駆動回路が前
記・ぐルス列をQスイッチ発振開始時にそのファースト
ノクルスを弱めるよう制御する手段を含むことを特徴と
するものである。
The Q-switched laser device of the present invention includes a resonant mirror, a laser medium, a Q-suinochi element, an excitation source for exciting the laser medium, a power supply for the excitation source, and a Q-switch based on a clock train that determines the Q-switch oscillation timing. In a Q-switch laser device comprising a Q-switch element drive circuit that drives a switch element, the Q-switch element drive circuit includes means for controlling the Glucose train so as to weaken its first noculus when Q-switch oscillation starts. It is characterized by containing.

〔実施例〕 次に本発明を図面を参照して説明する。〔Example〕 Next, the present invention will be explained with reference to the drawings.

第1図は本発明の一実施例であるQスイッチレーザ装置
のブロック図でちる。
FIG. 1 is a block diagram of a Q-switched laser device which is an embodiment of the present invention.

第1図のQスイッチレーザ装置は,レーザ発振器1を構
成する共振器ミラ〒2,3と,レーザ媒質4と,Qスイ
ッチ素子5と,レーザ媒質を励起する励起源6と,励起
用電源7と,Qスイッチ素子を駆動する駆動回路8によ
り構成される。
The Q-switched laser device shown in FIG. 1 includes resonator mirrors 2 and 3 constituting a laser oscillator 1, a laser medium 4, a Q-switch element 5, an excitation source 6 for exciting the laser medium, and an excitation power source 7. and a drive circuit 8 that drives the Q switch element.

Qスイッチ素子駆動回路8を更に詳細に説明すれば,こ
の回路はQスイッチ発振タイミング回路(クロック回路
)9と,高周波発生回路10と,高周波増幅回路11と
,インピーダンスマノチング回路12と,電源回路13
と,電源電圧制御回路14とにより構成される。
To explain the Q-switch element drive circuit 8 in more detail, this circuit includes a Q-switch oscillation timing circuit (clock circuit) 9, a high-frequency generation circuit 10, a high-frequency amplification circuit 11, an impedance manoching circuit 12, and a power supply circuit. 13
and a power supply voltage control circuit 14.

第2図に本装置の動作を示すタイミング図を示すO Qスイッチ発振タイミング回路(クロック回路)9によ
り発生した第2図(a)に示すクロノク信号15は電源
電圧制御回路14に入力され,第2図(b)の第1のパ
ルスの欠けた信号16と,第2図(c)の第1の・ぐル
スだけの信号17となる。高周波発生回路10により作
り出された第2図(d)の高周波信号18は,高周波増
幅回路11の初段(図には区分してない)において,第
2図(b)の第1パルスの欠けた信号16によシ変調さ
れ,第2図(.)の被変調信号19をつくり出す。
FIG. 2 shows a timing diagram showing the operation of this device. The clock signal 15 shown in FIG. 2(a) generated by the OQ switch oscillation timing circuit (clock circuit) 9 is input to the power supply voltage control circuit 14, This results in a signal 16 lacking the first pulse in FIG. 2(b) and a signal 17 containing only the first pulse in FIG. 2(c). The high-frequency signal 18 shown in FIG. 2(d) generated by the high-frequency generating circuit 10 is generated by the missing first pulse of FIG. The signal 16 is modulated to produce a modulated signal 19 shown in FIG. 2(.).

一方,電源電圧制御回路14からの第2図(C)の単一
パルスの信号17は,電源回路13の電圧を,第2図(
f)の20の様に制御し,高周波増幅回路11の後段の
出力を第2図(g)の21の様に制御する。
On the other hand, the single pulse signal 17 in FIG. 2(C) from the power supply voltage control circuit 14 controls the voltage of the power supply circuit 13 in FIG.
The output of the latter stage of the high frequency amplifier circuit 11 is controlled as shown in 21 in FIG. 2(g).

Qスイッチ発振は第2図(g)の変調された高周波信号
21の立下がり22 .23により出力されるが,第2
図(g)の変調された高周波信号21の立下が923で
は,立下がりに時間がかかるため,出力されるレーザ出
力の尖頭値は第2図(h)に示すよう急激に立下がった
もの31よシ小さく30のようになる。
Q-switch oscillation occurs at the falling edge 22 . of the modulated high frequency signal 21 in FIG. 2(g). 23, but the second
When the fall of the modulated high-frequency signal 21 in Figure 2 (g) is 923, it takes time for the fall to occur, so the peak value of the output laser output suddenly falls as shown in Figure 2 (h). It's smaller than 31, like 30.

上記の実施例ではファーストパルスである電源回路13
,出力電圧20と第2・ぐルス以下のクロックパルス列
16を別々に作り,高周波増幅回路ll内で2段に分け
て高周波出力信号21,22.23(第2図(f))を
形成しているが,これは三角波ハルスの出力電圧20と
矩形波パルスのクロノク信号16が異質のものであるの
で2段に分けた方が回路が簡単化されるためである。
In the above embodiment, the power supply circuit 13 is the first pulse.
, the output voltage 20 and the clock pulse train 16 below the second pulse are created separately, and the high frequency output signals 21, 22, 23 (FIG. 2(f)) are formed in two stages within the high frequency amplifier circuit ll. However, this is because the output voltage 20 of the triangular wave Hals and the chronograph signal 16 of the rectangular wave pulse are different, so dividing them into two stages will simplify the circuit.

しかしながら上記2種のiPルスを合成した形の第3図
に示すような信号を作シこれで直接に高周波信号18を
変調すると,回路は複雑になるが,変調された高周波の
立ち下がり信号22よシも短時間に立下がる。このため
Qスイッチの定常状態のレーザ出力の尖頭値は強く安定
したものとなる。
However, if the signal shown in FIG. 3 is created by combining the above two types of IP pulses and directly modulates the high frequency signal 18, the circuit becomes complicated, but the falling signal 22 of the modulated high frequency Yoshi also stands down for a short time. Therefore, the peak value of the laser output in the steady state of the Q switch becomes strong and stable.

この実施例では,尖頭値の大きなレーザ出力が得られる
ため,加工特性が良くなる利点がある。
In this embodiment, since a laser output with a large peak value can be obtained, there is an advantage that processing characteristics are improved.

〔発明の効果〕〔Effect of the invention〕

以上説明したように本発明は,高周波回路の電圧を制御
する電源電圧制御回路をQスイッチレーザ装置に付加し
てQスイッチのファーストノクルスのレーザ出力を弱め
ることによJ,Qスイッチ発振タイミング信号(クロ,
ク信号)の周波数に影響を受す,調整が容易なファース
トパルス制御を可能とする効果がちる。
As explained above, the present invention adds a power supply voltage control circuit for controlling the voltage of the high frequency circuit to the Q switch laser device and weakens the laser output of the first noculus of the Q switch, thereby producing a J, Q switch oscillation timing signal. (Black,
This has the effect of enabling easy-to-adjust first-pulse control, which is affected by the frequency of the clock signal).

この装置によシ被加工物が繊細でレーザ装置の出力変化
に対して加工特性が影響を受けるようなンーザ} リミ
ングの分野で生産性を向上できる効果がある。
This device has the effect of improving productivity in the field of laser rimming, where the workpiece is delicate and the machining characteristics are affected by changes in the output of the laser device.

回路。circuit.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明の一実施例のブロック図,第2図は第1
図の回路のタイミング図,第3図は第2の実施例のタイ
ミング図,第4図は従来装置におけるタイミング図であ
る。 記号の説明:1・・・レーザ発振器,2,3・・・共振
器ミラー,4・・・レーザ媒質,5・・Qスイッチ素子
,6・・・励起源,7・・・励起於用電源,8・・・Q
スイッチ素子駆動回路,9・・・Qスイッチ発振タイミ
ング回路(クロック回路),10・・・高周波発生回路
,11・・・高周波増幅回路,12・・・インぎーダン
スマッチング回路,13・・・電源回路,14・・・電
源電圧制御−692一
Fig. 1 is a block diagram of one embodiment of the present invention, and Fig. 2 is a block diagram of an embodiment of the present invention.
FIG. 3 is a timing diagram of the circuit shown in the figure, FIG. 3 is a timing diagram of the second embodiment, and FIG. 4 is a timing diagram of the conventional device. Explanation of symbols: 1...Laser oscillator, 2, 3...Resonator mirror, 4...Laser medium, 5...Q switch element, 6...Excitation source, 7...Power source for excitation ,8...Q
Switch element drive circuit, 9... Q switch oscillation timing circuit (clock circuit), 10... High frequency generation circuit, 11... High frequency amplification circuit, 12... Input dance matching circuit, 13... Power supply Circuit, 14...Power supply voltage control-692-

Claims (1)

【特許請求の範囲】[Claims] 1、共振器ミラーと、レーザ媒質と、Qスイッチ素子と
、前記レーザ媒質を励起する励起源と、励起源用電源と
、Qスイッチ発振タイミングをきめるクロック列に基い
てQスイッチ素子を駆動するQスイッチ素子駆動回路と
から構成されるQスイッチレーザ装置において、前記Q
スイッチ素子駆動回路が前記パルス列をQスイッチ発振
開始時にそのファーストパルスを弱めるよう制御する手
段を含むことを特徴とするQスイッチレーザ装置。
1. A resonator mirror, a laser medium, a Q-switch element, an excitation source that excites the laser medium, a power source for the excitation source, and a Q-switch that drives the Q-switch element based on a clock train that determines the Q-switch oscillation timing. In a Q-switched laser device comprising a switch element drive circuit, the Q
A Q-switch laser device, characterized in that the switch element drive circuit includes means for controlling the pulse train so as to weaken the first pulse at the time of starting Q-switch oscillation.
JP1111059A 1989-04-28 1989-04-28 Q switch laser device Pending JPH02290090A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1111059A JPH02290090A (en) 1989-04-28 1989-04-28 Q switch laser device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1111059A JPH02290090A (en) 1989-04-28 1989-04-28 Q switch laser device

Publications (1)

Publication Number Publication Date
JPH02290090A true JPH02290090A (en) 1990-11-29

Family

ID=14551360

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1111059A Pending JPH02290090A (en) 1989-04-28 1989-04-28 Q switch laser device

Country Status (1)

Country Link
JP (1) JPH02290090A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004202532A (en) * 2002-12-25 2004-07-22 Nec Corp Method and device for laser beam marking
JP2010115698A (en) * 2008-11-14 2010-05-27 Miyachi Technos Corp Fiber laser beam machining device and fiber laser beam machining method

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004202532A (en) * 2002-12-25 2004-07-22 Nec Corp Method and device for laser beam marking
JP2010115698A (en) * 2008-11-14 2010-05-27 Miyachi Technos Corp Fiber laser beam machining device and fiber laser beam machining method

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