JPH02285247A - Humidity sensitive element - Google Patents
Humidity sensitive elementInfo
- Publication number
- JPH02285247A JPH02285247A JP10459489A JP10459489A JPH02285247A JP H02285247 A JPH02285247 A JP H02285247A JP 10459489 A JP10459489 A JP 10459489A JP 10459489 A JP10459489 A JP 10459489A JP H02285247 A JPH02285247 A JP H02285247A
- Authority
- JP
- Japan
- Prior art keywords
- moisture
- humidity
- temperature
- water
- polymer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000463 material Substances 0.000 claims abstract description 15
- 239000002861 polymer material Substances 0.000 claims description 13
- 229920000642 polymer Polymers 0.000 claims description 12
- 230000015556 catabolic process Effects 0.000 claims description 3
- 230000009477 glass transition Effects 0.000 claims description 2
- 238000002844 melting Methods 0.000 claims description 2
- 230000008018 melting Effects 0.000 claims description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 abstract description 29
- 238000010521 absorption reaction Methods 0.000 abstract description 3
- 238000001179 sorption measurement Methods 0.000 abstract description 3
- 229920002521 macromolecule Polymers 0.000 abstract 3
- 241001274961 Rubus repens Species 0.000 abstract 1
- 239000003814 drug Substances 0.000 abstract 1
- 230000007774 longterm Effects 0.000 abstract 1
- 230000035945 sensitivity Effects 0.000 description 10
- 229920006217 cellulose acetate butyrate Polymers 0.000 description 7
- 239000000758 substrate Substances 0.000 description 7
- 239000012528 membrane Substances 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 4
- 239000004721 Polyphenylene oxide Substances 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 3
- 125000004063 butyryl group Chemical group O=C([*])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 3
- 238000009833 condensation Methods 0.000 description 3
- 230000005494 condensation Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000007654 immersion Methods 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000003993 interaction Effects 0.000 description 2
- 229910052697 platinum Inorganic materials 0.000 description 2
- 229920003229 poly(methyl methacrylate) Polymers 0.000 description 2
- 229920002492 poly(sulfone) Polymers 0.000 description 2
- -1 polybutylene terephthalate Polymers 0.000 description 2
- 229920000570 polyether Polymers 0.000 description 2
- 229920006393 polyether sulfone Polymers 0.000 description 2
- 239000004926 polymethyl methacrylate Substances 0.000 description 2
- 229930182556 Polyacetal Natural products 0.000 description 1
- 239000004695 Polyether sulfone Substances 0.000 description 1
- 239000004697 Polyetherimide Substances 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 229920006125 amorphous polymer Polymers 0.000 description 1
- 238000009412 basement excavation Methods 0.000 description 1
- 125000000484 butyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 229920000620 organic polymer Polymers 0.000 description 1
- 229920002239 polyacrylonitrile Polymers 0.000 description 1
- 229920001230 polyarylate Polymers 0.000 description 1
- 229920001707 polybutylene terephthalate Polymers 0.000 description 1
- 239000004417 polycarbonate Substances 0.000 description 1
- 229920000515 polycarbonate Polymers 0.000 description 1
- 229920001601 polyetherimide Polymers 0.000 description 1
- 239000005020 polyethylene terephthalate Substances 0.000 description 1
- 229920000139 polyethylene terephthalate Polymers 0.000 description 1
- 229920006254 polymer film Polymers 0.000 description 1
- 229920006324 polyoxymethylene Polymers 0.000 description 1
- 229920006380 polyphenylene oxide Polymers 0.000 description 1
- 230000004043 responsiveness Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000003786 synthesis reaction Methods 0.000 description 1
Landscapes
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は・有機高分子を感湿膜の感湿材料として用いて
なる感湿素子に関するものである。DETAILED DESCRIPTION OF THE INVENTION [Industrial Field of Application] The present invention relates to a moisture-sensitive element using an organic polymer as a moisture-sensitive material of a moisture-sensitive film.
従来よシこの種の感湿素子としては、例えばセルロース
アセテートブチレート（以下ＣＡＤと称する）高分子を
感湿材料として用い、この感湿材料によシ形成される感
湿膜の電気容量値変化を湿度検出に利用し九感湿容量素
子が例えば特開昭６２−８８９５１号公報などにより提
案されている。Conventionally, this type of moisture-sensitive element uses, for example, cellulose acetate butyrate (hereinafter referred to as CAD) polymer as a moisture-sensitive material, and changes in the capacitance of a moisture-sensitive film formed from this moisture-sensitive material. A nine-humidity-sensitive capacitive element utilizing the above for humidity detection has been proposed, for example, in Japanese Patent Application Laid-open No. 88951/1983.
この種の感湿素子において、感湿材料であるＣＡＨの収
着水分量は、ブチリル基１７％のＣＡＢでは第５図に示
すように温度３０℃、相対湿度９０ＳＲＨにおける平衡
状態でポリマ１？当り、約７０〜９０ＴＲ９／Ｌ？であ
った。In this type of moisture-sensitive element, the amount of moisture sorbed by CAH, which is a moisture-sensitive material, is determined by the amount of moisture sorbed by polymer 1?CAB with 17% butyryl groups in an equilibrium state at a temperature of 30°C and a relative humidity of 90SRH, as shown in Figure 5. Hit, about 70-90TR9/L? Met.
しかしながら、このように構成される感湿素子は、感湿
膜の高分子材料としてＣＡＢを用いているので、ヒステ
リシス（吸湿過程と脱湿過程とでの感湿特性の差）が２
〜４％ＲＨ（約２５℃、測定間隔５分）であり、理想的
な１＊ＲＨ以下のヒステリシスが達成できないという問
題があった。また、ヒステリシスには湿度依存性があシ
、約４０℃程度の高温度で同一条件で測定すると、高温
度となることによシ、ヒステリシスが２〜３％ＲＨ程度
増加するという問題があつな。さらに長時間同一雰囲気
中に放置されると、湿度履歴の効果がちシ、ヒステリシ
スの変化、感湿特性の変化がある。However, since the moisture-sensitive element configured in this way uses CAB as the polymer material of the moisture-sensitive film, the hysteresis (difference in moisture-sensing characteristics between the moisture absorption process and the moisture removal process) is 2.
~4% RH (approximately 25° C., measurement interval 5 minutes), and there was a problem that the ideal hysteresis of 1*RH or less could not be achieved. In addition, hysteresis has humidity dependence, and when measured under the same conditions at a high temperature of about 40°C, there is a problem that the hysteresis increases by about 2 to 3% RH due to the high temperature. . Furthermore, if the device is left in the same atmosphere for a long time, the humidity history tends to change, the hysteresis changes, and the moisture sensitivity changes.
例えば相対湿度１１ＳＲＨの常温度で長時間にわたって
放置すると、初期にヒステリシスが２ＳＲＨの感湿素子
が４〜６％ＲＨと大きくなる。さらに約８４ｅｓＲＨの
常温度で長期間にわたって放置すると、初期のヒステリ
シス２ＳＲＨの感湿素子が１％ＲＨＱ度と小さくなるが
、感湿特性は１０〜９０％ＲＨにおいて、５〜７１Ｈ程
度出力が犬きくな９、ドリフトする。また、相対湿度９
０１Ｈでの電気容量値と１０チＲＨでの電気容量値との
比（Ｃｓｏ／Ｃｉｏ ）が変化するという問題があった
。さらに温度４０℃。For example, if the humidity sensing element is left at room temperature with a relative humidity of 11 SRH for a long period of time, a humidity sensitive element with an initial hysteresis of 2 SRH will increase to 4 to 6% RH. Furthermore, if left for a long period of time at a normal temperature of approximately 84esRH, the initial hysteresis 2SRH humidity sensing element will be as small as 1%RHQ degree, but the humidity sensitivity characteristics will be as low as 5 to 71H at 10 to 90%RH. 9. Drift. Also, relative humidity 9
There was a problem in that the ratio (Cso/Cio) between the capacitance value at 01H and the capacitance value at 10H RH changed. Furthermore, the temperature is 40℃.
相対湿度９０チＲＨ程度の高温高湿度条件、結露。High temperature and high humidity conditions with a relative humidity of about 90 degrees RH, and condensation.
水中浸漬、温度−湿度サイクルなどにより、感湿特性が
＋側に大きくドリフトするなどの問題があった。There was a problem in that the moisture sensitivity characteristics greatly drifted to the + side due to immersion in water, temperature-humidity cycles, etc.
これらの問題点の発生は、感湿膜として感湿材料の収着
水分量（吸水率）が理想的な容量式もしくはインピーダ
ンス式感湿素子としては大きすぎることにより、感湿膜
中の水分子同志の相互作用により応答性が変化したシ、
測定湿度雰囲気での平衡収着水分量が変化し、出力ドリ
フトを生じるものであつな。These problems occur because the amount of absorbed moisture (water absorption rate) of the moisture-sensitive material is too large for an ideal capacitive or impedance-type moisture-sensitive element, resulting in water molecules in the moisture-sensitive membrane. Responsiveness changed due to peer interaction,
The equilibrium sorbed moisture content in the measured humidity atmosphere changes, causing output drift.
したがって本発−明は、前述した従来の問題に鑑みてな
されたものであシ、その目的は、低温度から高温度およ
び低湿度から高湿度までの各種の使用範囲において、ヒ
ステリシスが小さり、マた、高湿度、高温高湿度、湿度
サイクル、低湿度放置。Therefore, the present invention has been made in view of the above-mentioned conventional problems, and its purpose is to reduce hysteresis in various usage ranges from low temperature to high temperature and from low humidity to high humidity. High humidity, high temperature and high humidity, humidity cycle, and low humidity.
結露もしくは水浸漬などの各種の使用奈件に長期間にわ
たって晒されても安定した出力値が得られる感湿素子を
提供することにある。It is an object of the present invention to provide a moisture sensing element that can obtain a stable output value even when exposed to various conditions of use such as dew condensation or immersion in water for a long period of time.
本発明による感湿素子は、温度３０℃、相対湿度９０Ｓ
ＲＨにおける平衡収着水分量が高分子１％ｒ当９１０〜
４０η含む高分子を用いて感湿膜を形成するものである
。The humidity sensing element according to the present invention has a temperature of 30°C and a relative humidity of 90S.
Equilibrium sorption water content at RH is 910 to 1% r of polymer
A moisture-sensitive film is formed using a polymer containing 40η.
本発明による他の感湿素子は、高分子として熱変形温度
が１２０℃以上もしくは連続使用温度が１００℃以上の
非結晶性高分子を用いて感湿膜を形成するものである。Another moisture-sensitive element according to the present invention forms a moisture-sensitive film using an amorphous polymer having a heat deformation temperature of 120° C. or higher or a continuous use temperature of 100° C. or higher.
本発明によるさらに他の感湿素子は、高分子としてガラ
ス転移点が１００℃もしくは融点が１５０℃以上の結晶
性高分子を用いて感湿膜を形成するものである。In yet another moisture-sensitive element according to the present invention, a moisture-sensitive film is formed using a crystalline polymer having a glass transition point of 100° C. or a melting point of 150° C. or higher.
本発明による他の感湿素子は、絶縁破壊の強さが１４Ｋ
Ｖ／■以上の高分子を用いて感湿膜を形成するものであ
る。Another moisture sensitive element according to the present invention has a dielectric breakdown strength of 14K.
A moisture-sensitive film is formed using a polymer having a ratio of V/■ or more.
本発明による他の感湿素子は、体積固有抵抗が１０１４
０／ａｎ ”以上の高分子を用いて感湿膜を形成するも
のである。Another moisture sensitive element according to the present invention has a volume resistivity of 1014
A moisture-sensitive film is formed using a polymer with a molecular weight of 0/an'' or more.
本発明による感湿素子においては、感湿膜に高分子材料
を用いることによシ、収着水分量が低くなシ、ヒステリ
シスが小さくなって感湿素子としての感度の確保を図っ
てその感湿特性の改善が促される。In the moisture-sensitive element according to the present invention, by using a polymeric material for the moisture-sensitive film, the amount of absorbed moisture is low and the hysteresis is reduced, ensuring the sensitivity of the moisture-sensitive element. Improves moisture properties.
以下、図面を用いて本発明の実施例を詳細に説明する。 Embodiments of the present invention will be described in detail below with reference to the drawings.
第１図は本発明による感湿素子の一実施例を示す斜視図
、第２図はその平面図である。これらの図において、１
は例えばアルミナ基板、ガラス基板、熱酸化シリコン基
板などからなる絶縁性基板、２はこの絶縁性基板１の上
面部に形成された例えば白金などからなる下部電極、３
はこの下部電極２に交差するように積層塗着された感湿
膜、４はこの感湿膜３上に形成された例えば金などから
なる上部電極である。すなわち、感湿膜３ｔ−下部電極
２と上部電極４とでサンドインチ状に挾み込み、この感
湿膜３の相対湿度に対する電気容量値変化を検出すべく
、下部電極２および上部電極４にそれぞれリード線２ａ
および４ａが接続されている。FIG. 1 is a perspective view showing an embodiment of a moisture-sensitive element according to the present invention, and FIG. 2 is a plan view thereof. In these figures, 1
2 is an insulating substrate made of, for example, an alumina substrate, a glass substrate, a thermally oxidized silicon substrate, etc.; 2 is a lower electrode made of, for example, platinum, formed on the upper surface of the insulating substrate 1; 3 is a lower electrode made of, for example, platinum;
4 is a moisture-sensitive film laminated and coated so as to cross this lower electrode 2, and 4 is an upper electrode made of, for example, gold, formed on this humidity-sensitive film 3. That is, the humidity sensitive membrane 3t is sandwiched between the lower electrode 2 and the upper electrode 4 in a sandwich-like manner, and in order to detect the change in capacitance value of the moisture sensitive membrane 3 with respect to relative humidity, the lower electrode 2 and the upper electrode 4 are connected to each other. Each lead wire 2a
and 4a are connected.
このように構成される感湿素子において、その感湿膜３
は、ポリサルフオン、ポリエーテルサルフオン、ポリエ
ーテルイミド、ポリフェニレンオキサイド、ポリカーボ
ネート、ボリアリレート。In the moisture-sensitive element configured in this way, the moisture-sensitive film 3
are polysulfone, polyether sulfone, polyetherimide, polyphenylene oxide, polycarbonate, and polyarylate.
ポリメタクリル酸メチル、ポリアクリロニトリル。Polymethyl methacrylate, polyacrylonitrile.
ポリブチレンテレフタレート、ポリエチレンテレフタレ
ート、ポリエーテルエーテルケント、ポリエーテルケン
トもしくはポリアセタールを主成分とする高分子の感湿
材料によシ形成される。It is formed from a moisture-sensitive polymeric material whose main component is polybutylene terephthalate, polyethylene terephthalate, polyether ether Kent, polyether Kent, or polyacetal.
次にこのように構成された感湿素子について説明する。Next, a moisture sensing element configured as described above will be explained.
まず、水晶撮動子上に上述した高分子材料を約１０μｍ
以下に薄く塗布して感湿膜を形成し、恒温度雰囲気中に
挿入して水晶振動子の発掘周波数の変化によυこの感湿
膜に収着した水の質量を約３０℃で測定した。ま九、同
一の高分子材料を前記絶縁性基板１上に形成した下側電
極２上に約１０μｍ以下に薄く塗布して感湿膜３′ｔ−
形成し、さらに上側電極４を形成して電気容量比と相対
湿度との関係を約３０℃で測定した。この結果、感湿膜
３を形成する高分子材料をセルロースアセテートブチレ
ート（ブチル基１７チ）とした場合は、高分子膜の形成
方法、膜厚、熱処理方法もしくは上側電極４の形成方法
により、収着水分量および感湿特性は第６図に示すよう
に微妙に変化するが、収着水分量は７０〜９０■で６１
、ヒステリシスは２〜４＊ＲＨ＋ Ｃｏｏ／Ｃｏｏは１
．２１〜１．４１であった。これに比較して高分子材料
をセルロースアセテートブチレート（ブチリル基５０％
）とした場合は、収着水分量は４０〜６０叩であシ、ヒ
ステリシスは１〜２ ’％ ＲＨ、Ｃ９０／ ＣＩＯは
１．１０〜１．２０であった。First, the above-mentioned polymer material was placed on the crystal camera to a thickness of about 10 μm.
The following was applied thinly to form a moisture-sensitive film, which was then inserted into a constant-temperature atmosphere and the mass of water adsorbed on the film was measured at approximately 30°C by changing the excavation frequency of a crystal oscillator. . (9) The same polymeric material is coated on the lower electrode 2 formed on the insulating substrate 1 to a thickness of about 10 μm or less to form a moisture sensitive film 3't-.
After forming the upper electrode 4, the relationship between the capacitance ratio and the relative humidity was measured at about 30°C. As a result, when the polymer material forming the moisture sensitive film 3 is cellulose acetate butyrate (17 butyl groups), depending on the polymer film formation method, film thickness, heat treatment method, or upper electrode 4 formation method, The amount of sorbed water and moisture sensitivity change slightly as shown in Figure 6, but the amount of sorbed water is 70 to 90 cm.
, hysteresis is 2~4*RH+ Coo/Coo is 1
．． It was 21-1.41. In comparison, the polymer material is cellulose acetate butyrate (50% butyryl groups).
), the amount of sorbed water was 40 to 60%, the hysteresis was 1 to 2'% RH, and the C90/CIO was 1.10 to 1.20.
また、高分子材料をポリメタクリル酸メチルとした場合
は、収着水分量は１０〜３０ｍ９であり、ヒステリシス
は０．５〜１ チＲＨ、Ｃ９０／Ｃ１０は１．０６〜１
．１５ と良好であった。さらに同様にポリエーテルサ
ルフオンとした場合は収着水分量は１０〜３０■であシ
、ヒステリシスは０．５〜１．５％ＲＨ、Ｃ９０／ＣＩ
Ｏは１．１２〜１．１７と良好であった。また同様にポ
リサルフオンとした場合は収着水分量はｌＯ〜１５■で
あり、ヒステリシスは０．２〜１．（ＩＲＨ。In addition, when the polymer material is polymethyl methacrylate, the amount of sorbed water is 10 to 30 m9, the hysteresis is 0.5 to 1 RH, and the C90/C10 is 1.06 to 1.
．． 15, which was good. Similarly, when polyether sulfon is used, the amount of sorbed water is 10 to 30 cm, the hysteresis is 0.5 to 1.5% RH, and C90/CI.
O was 1.12 to 1.17, which was good. Similarly, when polysulfone is used, the amount of sorbed water is 10 to 15 cm, and the hysteresis is 0.2 to 1. (I.R.H.
Ｃｓｏ／Ｃｘｏは１．０５〜１．０８と良好であった。Cso/Cxo was good at 1.05 to 1.08.
また、セルロースアセテートブチレート（ブチリル１フ
チ）の収着水分量と感湿特性との関係と、相対湿度１０
％ＲＨ→６０チＲＨ→１０チＲＨと測定湿度を変えて測
定し九データと、相対湿度６０１ＲＨ以上に測定領域を
増やした場合とのヒステリシスの変化からも、高分子材
料中に存在する水分子の量が感湿特性を大きく変えてい
ることが明らかである。In addition, the relationship between the amount of sorbed water and moisture sensitivity characteristics of cellulose acetate butyrate (1 border of butyryl) and the relative humidity of 10
From the data obtained by changing the measurement humidity from %RH to 60 RH to 10 RH, and from the change in hysteresis when increasing the measurement area to a relative humidity of 601 RH or higher, water molecules present in the polymer material can be determined. It is clear that the amount of water significantly changes the moisture sensitivity properties.
すなわち、相対湿度６０％ＲＨ以下では、収着水分量が
３５〜４０ｍ９／９−程度であるため、ヒステリシスは
０．３〜０．４＊ＲＨとなり、感湿特性の直線性が極め
て良好である。ところが、相対湿度６０％ＲＨ以上では
収着水分量が４０’９．Ｑ−と超えてしまうため、水分
子間のインタラクションが起シ、徐々にヒステリシスが
大きくなる。例えば相対湿度１０％ＲＨ→７０チＲ１（
−＋１０％ＲＨと測定した場合、最大収着水分量は４０
〜４５ダ／Ｐ程度であり、ヒステリシスは１．２〜１．
５チＲＨ、相対湿度１０％ＲＨ→８０％ＲＨ→１０％Ｒ
Ｈと測定した場合、最大の収着水分量は５０〜５５〜／
ｙ−程度であシ、ヒステリシスは１．５〜２．１＊ＲＨ
であった。すなわち、収着水分量が増加するにつれてヒ
ステリシスが大きくなシ、直線性が低下している。これ
らのデータから感湿特性が高分子材料の収着水分量と大
きな相関があることが明らかであり、ヒステリシスの目
標仕様をｌ５ＲＨ以下と設定した場合、収着水分量は４
０■／Ｐ以下としなければならない。ここで示したデー
タは代表的なものであり、ヒステリシスは製造方法およ
びその条件により変化するものである。That is, at a relative humidity of 60% RH or less, the amount of sorbed water is about 35 to 40 m9/9, so the hysteresis is 0.3 to 0.4*RH, and the linearity of the moisture sensitivity characteristics is extremely good. . However, at a relative humidity of 60% RH or higher, the amount of sorbed water is 40'9. Since Q- is exceeded, interaction between water molecules occurs, and hysteresis gradually increases. For example, relative humidity 10%RH → 70chiR1 (
- When measured at +10%RH, the maximum amount of water sorbed is 40
~45 Da/P, and the hysteresis is 1.2~1.
5chi RH, relative humidity 10%RH → 80%RH → 10%R
When measured as H, the maximum amount of sorbed water is 50~55~/
y-degree, hysteresis is 1.5~2.1*RH
Met. That is, as the amount of sorbed water increases, the hysteresis increases and the linearity decreases. It is clear from these data that the moisture sensitivity characteristics have a strong correlation with the amount of sorbed water in the polymer material, and when the target specification of hysteresis is set to 15RH or less, the amount of sorbed water is 4.
Must be less than 0■/P. The data shown here are representative, and the hysteresis varies depending on the manufacturing method and conditions.
また、測定法、その条件およびセンサの温湿度履歴によ
シ変化するものである。したがって第３図および第４図
に示す特性曲線はある幅を有することになる。また、相
対湿度９０１Ｈにおける収着水分量１０〜４０〜／？な
る高分子材料を用い、第１図および第２図に示す感湿素
子を製作した場合、その容量比Ｃｏｏ／Ｃｓｏは１．０
５〜１．２０であった。It also varies depending on the measurement method, its conditions, and the temperature and humidity history of the sensor. Therefore, the characteristic curves shown in FIGS. 3 and 4 have a certain width. In addition, the amount of sorbed water at a relative humidity of 901H is 10 to 40/? When the moisture-sensitive element shown in FIGS. 1 and 2 is manufactured using a polymer material, the capacitance ratio Coo/Cso is 1.0.
It was 5 to 1.20.
なお、前述した実施例において、感湿膜３を構成する高
分子材料の熱的特性については、湿度センサの使用温度
範囲が通常−３０〜１００℃であることから、上部電極
４が破壊されたシ、センサ特性に大きな変化が発生する
ことは全くない。ま念、絶縁破壊強度については、高分
子材料膜厚０．５〜１０μｍにおいて、±１．５〜±５
ｖの電圧を連続して印加しても全く問題がなかった。さ
らに体積固有抵抗についても見損回路と組合せて測定し
ても何ら全く問題が発生しなかつ九。In addition, in the above-mentioned embodiment, regarding the thermal characteristics of the polymeric material constituting the humidity sensitive membrane 3, since the operating temperature range of the humidity sensor is usually -30 to 100°C, the upper electrode 4 was destroyed. However, no major changes occur in the sensor characteristics. Please note that the dielectric breakdown strength is ±1.5 to ±5 when the polymer material film thickness is 0.5 to 10 μm.
There was no problem at all even when a voltage of V was continuously applied. Furthermore, no problems occurred even when measuring the volume resistivity in combination with the missed circuit.
以上説明したように本発明による感湿素子によれば、ヒ
ステリシスはＩＪＲＨ以下が達成されるとともに温度依
存性もなくなった。また、長時間にわたって同一雰囲気
中に放置されても出力ドリフトが小さく、容量比変化も
小さい。さらに高温高湿放置、結露、水中浸漬、温湿度
サイクルなどによっても感湿特性のドリフトが小さい。As explained above, according to the humidity sensing element according to the present invention, the hysteresis is achieved to be less than IJRH, and temperature dependence is also eliminated. Further, even if the device is left in the same atmosphere for a long time, the output drift is small and the capacitance ratio change is small. Furthermore, the moisture sensitivity characteristics have little drift due to exposure to high temperatures and high humidity, dew condensation, immersion in water, temperature and humidity cycles, etc.
さらに湿度センナの使用雰囲気に合わせた耐薬品、耐環
境性の良いセンサを供給することができる。また、高分
子材料の合成などによる材料設計が可能となるなどの極
めて優れた効果が得られる。Furthermore, it is possible to supply a sensor with good chemical and environmental resistance suitable for the atmosphere in which the humidity sensor is used. In addition, extremely excellent effects such as material design by synthesis of polymeric materials become possible can be obtained.
第１図は本発明による感湿素子の一実施例を示す斜視図
、第２図はこの感湿素子の平面図、第３図は本発明によ
る感湿素子の吸着水分量とヒステリシスとの関係を示す
図、第４図は本発明による感湿素子の吸着水分量と容量
比との関係を示す図、第５図は従来の感湿素子（ブチリ
ル基１７％のＣＡＢ ）の収着水分量と相対湿度との関
係を示す図、第６図は従来の感湿素子（ブチリル基１７
％のＣＡＢ）の感湿特性を示す図である。
１・・・・絶縁性基板、２・・・・下部電極、３・−・
・感湿膜、４１１・拳・上部電極、２ａ、４ａ嘩・拳・
リード線。FIG. 1 is a perspective view showing an embodiment of the humidity sensing element according to the present invention, FIG. 2 is a plan view of this humidity sensing element, and FIG. 3 is the relationship between the amount of adsorbed moisture and hysteresis of the humidity sensing element according to the present invention. FIG. 4 is a diagram showing the relationship between the amount of adsorbed moisture and the capacity ratio of the moisture sensing element according to the present invention, and FIG. Figure 6 is a diagram showing the relationship between
% CAB). 1... Insulating substrate, 2... Lower electrode, 3...
・Moisture sensitive membrane, 411・Fist・Top electrode, 2a, 4a Fight・Fist・
Lead.
Claims (5)
着水分量が高分子１ｇｒ当１０〜４０ｍｇ含む高分子材
料を感湿膜として備えてなる感湿素子。(1) A moisture-sensitive element comprising, as a moisture-sensitive film, a polymeric material having an equilibrium sorbed moisture content of 10 to 40 mg per gram of polymer at a temperature of 30° C. and a relative humidity of 90% RH.
、熱変形温度が１２０℃以上もしくは連続使用温度が１
００℃以上の高分子とした感湿素子。(2) In the moisture-sensitive element according to claim 1, the polymer material has a heat distortion temperature of 120°C or higher or a continuous use temperature of 120°C or higher.
Moisture-sensitive element made of polymer with a temperature of 00°C or higher.
、ガラス転移点が１００℃もしくは融点が１５０℃以上
の高分子とした感湿素子。(3) The moisture-sensitive element according to claim 1, wherein the polymer material is a polymer having a glass transition point of 100°C or a melting point of 150°C or higher.
、体積固有抵抗が１０＾１＾４Ω／ｃｍ＾３以上の高分
子とした感湿素子。(4) The moisture-sensitive element according to claim 1, wherein the polymer material is a polymer having a volume resistivity of 10^1^4 Ω/cm^3 or more.
、絶縁破壊強度が１４ＫＶ／ｍｍ以上の高分子とした感
湿素子。(5) The moisture sensing element according to claim 1, wherein the polymer material is a polymer having a dielectric breakdown strength of 14 KV/mm or more.
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10459489A JP2719830B2 (en) | 1989-04-26 | 1989-04-26 | Moisture sensitive element |
| EP90304370A EP0395349B2 (en) | 1989-04-26 | 1990-04-24 | Moisture sensitive element |
| DE69021925T DE69021925T3 (en) | 1989-04-26 | 1990-04-24 | Moisture sensitive element. |
| US07/515,096 US5069069A (en) | 1989-04-26 | 1990-04-26 | Moisture-sensitive element for moisture sensors |
| FI902096A FI99054C (en) | 1989-04-26 | 1990-04-26 | Capacitive humidity sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10459489A JP2719830B2 (en) | 1989-04-26 | 1989-04-26 | Moisture sensitive element |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02285247A true JPH02285247A (en) | 1990-11-22 |
| JP2719830B2 JP2719830B2 (en) | 1998-02-25 |
Family
ID=14384755
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10459489A Expired - Lifetime JP2719830B2 (en) | 1989-04-26 | 1989-04-26 | Moisture sensitive element |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JP2719830B2 (en) |
| FI (1) | FI99054C (en) |
-
1989
- 1989-04-26 JP JP10459489A patent/JP2719830B2/en not_active Expired - Lifetime
-
1990
- 1990-04-26 FI FI902096A patent/FI99054C/en active IP Right Grant
Also Published As
| Publication number | Publication date |
|---|---|
| JP2719830B2 (en) | 1998-02-25 |
| FI99054B (en) | 1997-06-13 |
| FI99054C (en) | 1997-09-25 |
| FI902096A0 (en) | 1990-04-26 |
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