JPH022696A - Laser oscillator - Google Patents
Laser oscillatorInfo
- Publication number
- JPH022696A JPH022696A JP63148919A JP14891988A JPH022696A JP H022696 A JPH022696 A JP H022696A JP 63148919 A JP63148919 A JP 63148919A JP 14891988 A JP14891988 A JP 14891988A JP H022696 A JPH022696 A JP H022696A
- Authority
- JP
- Japan
- Prior art keywords
- laser
- gas
- turbo
- blower
- pole piece
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005291 magnetic effect Effects 0.000 claims abstract description 24
- 239000011553 magnetic fluid Substances 0.000 claims abstract description 19
- 230000010355 oscillation Effects 0.000 claims abstract description 19
- 230000003287 optical effect Effects 0.000 claims abstract description 12
- 238000011109 contamination Methods 0.000 abstract description 4
- 239000004519 grease Substances 0.000 abstract description 3
- 238000000034 method Methods 0.000 abstract 1
- 239000003921 oil Substances 0.000 description 12
- 238000005096 rolling process Methods 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
- 230000008878 coupling Effects 0.000 description 3
- 238000010168 coupling process Methods 0.000 description 3
- 238000005859 coupling reaction Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 239000007788 liquid Substances 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 2
- 238000005461 lubrication Methods 0.000 description 2
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 150000002148 esters Chemical class 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 239000003302 ferromagnetic material Substances 0.000 description 1
- SZVJSHCCFOBDDC-UHFFFAOYSA-N iron(II,III) oxide Inorganic materials O=[Fe]O[Fe]O[Fe]=O SZVJSHCCFOBDDC-UHFFFAOYSA-N 0.000 description 1
- 239000010687 lubricating oil Substances 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/02—Constructional details
- H01S3/03—Constructional details of gas laser discharge tubes
- H01S3/036—Means for obtaining or maintaining the desired gas pressure within the tube, e.g. by gettering, replenishing; Means for circulating the gas, e.g. for equalising the pressure within the tube
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は加工用ＣＯ□レーザ等の高出力レーザに関し、
詳細には小型軽量化し、発振特性、信頼性、保守性を改
良したＣＯ□レーザ発振装置に関する。[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to a high-power laser such as a CO□ laser for processing,
Specifically, the present invention relates to a CO□ laser oscillation device that is smaller and lighter and has improved oscillation characteristics, reliability, and maintainability.
第３図に従来技術によるＣＯ□レーザのレーザ発振装置
の構成を示す。図において、放電管Ｉの両端には出力結
合鏡２と全反射鏡３が設置されている。又放電管１の外
側には２枚の金属電極４および５が取り付けられており
、その間に高周波電圧が高周波電源６によって印加され
、放電管１内に高周波グロー放電が発生してレーザ励起
が行われる。放電管ｌ内のレーザビーム光軸を１３で、
また出力結合鏡２から外部に取り出されるレーザビーム
光軸を１４でそれぞれ示す。FIG. 3 shows the configuration of a conventional CO□ laser oscillation device. In the figure, an output coupling mirror 2 and a total reflection mirror 3 are installed at both ends of a discharge tube I. Further, two metal electrodes 4 and 5 are attached to the outside of the discharge tube 1, and a high frequency voltage is applied between them by a high frequency power source 6, and a high frequency glow discharge is generated within the discharge tube 1 to perform laser excitation. be exposed. The optical axis of the laser beam inside the discharge tube l is 13,
Further, the optical axis of the laser beam taken out from the output coupling mirror 2 is indicated by 14, respectively.
レーザ発振装置起動時には先ず最初に真空ポンプ１２に
よって装置内部全体が排気される。ついでバルブ１１が
開放になり所定流量のレーザガスがボンベ１０から導か
れ装置内のガス圧は規定値に達し、その後は真空ポンプ
１２の排気と補給ガス導入が続き、ガス圧は規定値に保
たれたまま、レーザガスの一部は継続して新鮮ガスに置
換されることになりガス汚染を防止する。When the laser oscillation device is started, the entire interior of the device is first evacuated by the vacuum pump 12. Then, the valve 11 is opened and a predetermined flow rate of laser gas is guided from the cylinder 10, and the gas pressure inside the device reaches the specified value.After that, the vacuum pump 12 continues to exhaust and supply gas is introduced, and the gas pressure is maintained at the specified value. However, part of the laser gas is continuously replaced with fresh gas, thereby preventing gas contamination.
さらに第３図では送風機９によってレーザガスを装置内
で循環している。この目的はレーザガスの冷却にある。Furthermore, in FIG. 3, the laser gas is circulated within the apparatus by a blower 9. Its purpose is to cool the laser gas.
Ｃｏ２レーザでは注入電気エネルギーの約２０％がレー
ザ光に変換され、他はガス加熱に消費される。ところが
理論によればレーザ発振利得は絶対温度Ｔの−（３／２
）乗に比例するので発振効率を上昇させるためにレーザ
ガスの強制冷却が必要である。レーザガスは約Ｌｏｏｍ
／ ｓ ｅ ｃの流速で放電管内を通過し矢印で示す方
向に流れ冷却器８に導かれる。ここでは主として放電に
よる加熱エネルギーが除去される。送風機９では圧縮熱
が発生するのでガスは放電管１に再度導かれる前に冷却
器７を通過する。これらの冷却器７及び８は周知である
ので詳細な説明は省略する。In a Co2 laser, about 20% of the injected electrical energy is converted into laser light, and the rest is consumed for gas heating. However, according to theory, the laser oscillation gain is -(3/2) of the absolute temperature T.
), so forced cooling of the laser gas is necessary to increase the oscillation efficiency. Laser gas is approximately Loom
The liquid passes through the discharge tube at a flow rate of /sec, flows in the direction shown by the arrow, and is guided to the cooler 8. Here, heating energy mainly due to discharge is removed. Since compression heat is generated in the blower 9, the gas passes through the cooler 7 before being led to the discharge tube 1 again. Since these coolers 7 and 8 are well known, detailed explanation will be omitted.
第４図に従来のターボブロワの構造を示す。ターボ翼１
６はシャフトに取り付けたロータ１７と、ステータ１８
から構成されるモータによって、約１０万ＰＰＭの高速
回転で回転される。そのため低速のルーツブロワに比較
して回転数に逆比例して体積が小さくなっている。さら
に、シャフトの支持にころがり軸受や気体軸受を使用し
ている。FIG. 4 shows the structure of a conventional turbo blower. turbo wing 1
6 is a rotor 17 attached to a shaft and a stator 18
It is rotated at a high speed of approximately 100,000 PPM by a motor consisting of: Therefore, compared to a low-speed Roots blower, the volume is smaller in inverse proportion to the rotation speed. Additionally, rolling bearings and gas bearings are used to support the shaft.
第４図はころがり軸受の場合を示す。ころがり軸受１９
及び２０の潤滑は高速回転のためオイルを定期的に軸受
に供給するオイルジェットやオイルエア潤滑が使用され
ている。第４図においてはころがり軸１９および２０に
オイル供給ユニット２１が空気を使用してオイルを霧化
し通路２２あるいは２３よりころがり軸受に供給する。Figure 4 shows the case of a rolling bearing. Rolling bearing 19
For the lubrication of 20 and 20, oil jet or oil-air lubrication is used to periodically supply oil to the bearings due to high-speed rotation. In FIG. 4, an oil supply unit 21 uses air to atomize oil to the rolling shafts 19 and 20, and supplies the atomized oil to the rolling bearings through passages 22 or 23.
また、オイルがレーザガス中に侵入しないように微少隙
間のラビリンス２４が形成されている。Further, a labyrinth 24 with a minute gap is formed to prevent oil from entering the laser gas.
第３図及び第４図に示す従来のレーザ発振装置では以下
のような課題がある。The conventional laser oscillation device shown in FIGS. 3 and 4 has the following problems.
第一は潤滑油にオイルを使用しているので油成分がラビ
リンスの隙間からレーザガス中に混入して光学部品を汚
染し、出力低下やモード変形をもたらすことである。こ
のため高出力ＣＯ２レーザでは常時レーザガスの置換を
行っており運転経費のかなりの部分を占める。それを行
っても定期的に光学部品を交換したりクリーニングした
りする必要があり、メンテナンスに多大な労力を必要と
している。First, since oil is used as the lubricating oil, the oil component enters the laser gas through the labyrinth gap and contaminates the optical components, resulting in a decrease in output and mode deformation. For this reason, in high-power CO2 lasers, the laser gas is constantly replaced, which accounts for a considerable portion of operating costs. Even if this is done, it is necessary to periodically replace or clean the optical components, which requires a great deal of effort for maintenance.
本発明はこのような点に鑑みてなされたものであり、タ
ーボ翼と駆動系が磁性流体で分離されているレーザ発振
装置を提供することを目的とする。The present invention has been made in view of these points, and an object of the present invention is to provide a laser oscillation device in which a turbo blade and a drive system are separated by a magnetic fluid.
該送風機がレーザガス中で回転するターボ翼から構成さ
れ、該ターボ翼と駆動系が磁性流体で分離されているこ
とを特徴とするレーザ発振装置が、提供される。There is provided a laser oscillation device characterized in that the blower is composed of a turbo blade that rotates in laser gas, and the turbo blade and the drive system are separated by a magnetic fluid.
ターボブロワの送風機において、レーザガス中のターボ
翼と大気中の駆動系の間に液体中にマグネタイトなどの
強磁性体の固体粒子（直径０．ＯＩＩＩｍ程度）を安定
分散させたいわゆる磁性流体を磁気力によって保持して
いるので、完全にターボ翼と駆動系が遮断されることに
よって、オイルによる光学部品の汚染がなくなる。In the blower of a turbo blower, a so-called magnetic fluid, in which solid particles of ferromagnetic material such as magnetite (about 0.03 m in diameter) are stably dispersed in the liquid, is applied between the turbo blades in the laser gas and the drive system in the atmosphere using magnetic force. This completely shuts off the turbo blades and drive system, eliminating contamination of optical components with oil.
本発明では上記課題を解決するために、気体放電によっ
てレーザ励起をする放電管、レーザ発振を行わせる光共
振器、送風機および冷却器によってレーザガスを強制冷
却させるガス循環装置等から構成されるレーザ発振装置
において、〔実施例〕
以下、本発明の一実施例を図面に基づいて説明する。In order to solve the above problems, the present invention provides a laser oscillation device that includes a discharge tube that excites the laser by gas discharge, an optical resonator that causes laser oscillation, and a gas circulation device that forcibly cools the laser gas using a blower and a cooler. In the apparatus, [Embodiment] An embodiment of the present invention will be described below based on the drawings.
第１図に本発明のレーザ発振装置の一実施例の構成図を
示す。第４図と同一の構成要素には同一の符合が付して
あり、その詳細な説明は省略する。FIG. 1 shows a configuration diagram of an embodiment of a laser oscillation device of the present invention. Components that are the same as those in FIG. 4 are given the same reference numerals, and detailed explanation thereof will be omitted.
ここで、ターボ翼１６は遠心翼を示しているが斜流翼で
あっても軸流翼であってもよい。Although the turbo blades 16 are shown as centrifugal blades, they may be diagonal flow blades or axial flow blades.
ターボ翼１６と軸受１９の間で、磁極片′Ｓ５と磁石２
７によって磁気回路をし、シャフトと磁極片２５隙間に
磁性流体２６を保持している。磁性流体２６のベース液
はエステル系やアルキルナフタリン系の溶液であり、十
分軸受１９で使用するオイルやグリースを遮断すること
ができる。Between the turbo blade 16 and the bearing 19, the magnetic pole piece 'S5 and the magnet 2
7 forms a magnetic circuit, and a magnetic fluid 26 is held in the gap between the shaft and the magnetic pole piece 25. The base liquid of the magnetic fluid 26 is an ester-based or alkylnaphthalene-based solution, and can sufficiently block oil and grease used in the bearing 19.
第２図に磁性流体を保持するための詳細図を示す。図に
おいて、１６はターボブロワ、２５は磁極片であり、２
７は磁石である。２８は磁石２７によって形成される磁
気回路であり、磁極片２５の先端の磁界強度が最大にな
る。FIG. 2 shows a detailed diagram for holding the magnetic fluid. In the figure, 16 is a turbo blower, 25 is a magnetic pole piece, and 2
7 is a magnet. 28 is a magnetic circuit formed by the magnet 27, and the magnetic field strength at the tip of the magnetic pole piece 25 is maximum.
この磁極片２５の先端の部分に磁性流体２６を供給する
と、磁気力により磁性流体２６は磁界の強い場所、すな
わち磁極片２５の先端に拘束される。この結果、ターボ
ブロワ１６と軸受１９側との圧力差に耐え、シール効果
を発揮する。また、シャフトの回転による遠心力にも耐
えうる。When the magnetic fluid 26 is supplied to the tip of the magnetic pole piece 25, the magnetic force causes the magnetic fluid 26 to be restrained at a location where the magnetic field is strong, that is, at the tip of the magnetic pole piece 25. As a result, it can withstand the pressure difference between the turbo blower 16 and the bearing 19 side, and exhibits a sealing effect. It can also withstand centrifugal force due to rotation of the shaft.
なお、第２図では磁極は１段で構成したが、磁極片１段
当たりで、磁性流体が耐えられる圧力差は０．５気圧程
度であるので、必要に応じて磁極片の突起部を複数にし
たり、磁極片の段数を増やすこともできる。In Figure 2, the magnetic pole is constructed with one stage, but since the pressure difference that the magnetic fluid can withstand is approximately 0.5 atmospheres per stage of magnetic pole piece, multiple protrusions of the magnetic pole piece can be used as needed. It is also possible to increase the number of stages of magnetic pole pieces.
以上説明したように本発明では、ターボ翼と駆動系を磁
性流体で分離したので、オイルやグリースがレーザガス
中のターボブロワ側に侵入することがまったくなくなる
ためオイルによる光学部品の汚染がなくなり、レーザ出
力及びビーム特性の劣化がなくなる。As explained above, in the present invention, since the turbo blades and the drive system are separated by magnetic fluid, there is no possibility of oil or grease entering the turbo blower side in the laser gas, which eliminates contamination of optical components by oil and increases laser output. and deterioration of beam characteristics is eliminated.
第１図は本発明のターボブロワの構造図、第２図は磁性
流体部分の詳細図、
第３図は従来のＣｏｔ レーザのレーザ発振装置の構成
図、
第４図は従来のターボブロワの構成図である。
１ 放電管
２− 出力結合鏡
３−−−−−・・−・−・・−全反射鏡４．５・−・・
・・−・−・−・・電極６・−・・・・−・・−高周波
電源
７．８−−−−−−−−−−−一・−冷却器９−・−−
ｍ−−−−・・−・・送風機１０−・−・・−−−一−
−−・・ガスボンベ１２・・・・・−−−−−・−・・
・真空ポンプ１３・−・・−−−−−ｍ−・・・共振器
内レーザビーム光軸１４−−−−−−−−−−−−−−
一共振器外レーザビーム光軸１６・−・・・−・・−・
−・−・−ターボ翼１７−・・・−・−・・−・ロータ
１８・・・−−−−−・−・・−・ステーク１９．２０
−−−−−−−−−−・−・−ころがり軸受２５−−−
−−一・−・−磁極片
２６−−−−−−−−−−−−−−一磁性流体２７−・
・・−−−−−−一−−磁石
第１図Fig. 1 is a structural diagram of the turbo blower of the present invention, Fig. 2 is a detailed view of the magnetic fluid part, Fig. 3 is a structural diagram of a conventional Cot laser laser oscillation device, and Fig. 4 is a structural diagram of a conventional turbo blower. be. 1 Discharge tube 2- Output coupling mirror 3----- Total reflection mirror 4.5--
・・−・−・−・・Electrode 6・−・・・・−・・−High frequency power supply 7.8−−−−−−−−−−−1・−Cooler 9−・−−
m------・・・・Blower 10−・−・・−−−1−
−−・・Gas cylinder 12・・・・−−−−−・−・・
・Vacuum pump 13 -------m-...Intra-cavity laser beam optical axis 14------------
One extra-cavity laser beam optical axis 16・−・−・・−・
−・−・−Turbo blade 17−・−・−・・−・Rotor 18・・・−−−−−・−・・−・Stake 19.20
−−−−−−−−−−・−・−Rolling bearing 25−−−
---1・--Magnetic pole piece 26---------------1 magnetic fluid 27-・
・・－－－－－－１－－Magnet Figure 1
Claims (3)
ーザ発振を行わせる光共振器、送風機および冷却器によ
ってレーザガスを強制冷却させるガス循環装置等から構
成されるレーザ発振装置において、該送風機がレーザガ
ス中で回転するターボ翼から構成され、該ターボ翼と駆
動系が磁性流体で分離されていることを特徴とするレー
ザ発振装置。(1) In a laser oscillation device consisting of a discharge tube that excites the laser by gas discharge, an optical resonator that performs laser oscillation, a gas circulation device that forcibly cools the laser gas using a blower and a cooler, the blower is in the laser gas. 1. A laser oscillation device comprising a turbo blade that rotates at a speed, the turbo blade and a drive system being separated by a magnetic fluid.
複数にしたことを特徴とする特許請求の範囲第１項記載
のレーザ発振装置。(2) The laser oscillation device according to claim 1, wherein the magnetic pole piece has a plurality of protrusions for holding the magnetic fluid.
数にしたことを特徴とする特許請求の範囲第１項記載の
レーザ発振装置。(3) The laser oscillation device according to claim 1, wherein the number of stages of magnetic pole pieces for holding the magnetic fluid is plural.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63148919A JPH022696A (en) | 1988-06-16 | 1988-06-16 | Laser oscillator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63148919A JPH022696A (en) | 1988-06-16 | 1988-06-16 | Laser oscillator |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH022696A true JPH022696A (en) | 1990-01-08 |
Family
ID=15463594
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP63148919A Pending JPH022696A (en) | 1988-06-16 | 1988-06-16 | Laser oscillator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH022696A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2017101593A (en) * | 2015-12-01 | 2017-06-08 | トヨタ紡織株式会社 | Motor and electric supercharger with the same |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59106168A (en) * | 1982-12-10 | 1984-06-19 | Matsushita Electric Ind Co Ltd | Laser oscillator |
| JPS59111382A (en) * | 1982-12-17 | 1984-06-27 | Hitachi Ltd | Oscillator for carbon-dioxide gas laser |
| JPS59152680A (en) * | 1983-02-21 | 1984-08-31 | Komatsu Ltd | Crossflow type laser device |
| JPS6327084A (en) * | 1986-07-20 | 1988-02-04 | Nikon Corp | Laser apparatus with differential pressure cell |
-
1988
- 1988-06-16 JP JP63148919A patent/JPH022696A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59106168A (en) * | 1982-12-10 | 1984-06-19 | Matsushita Electric Ind Co Ltd | Laser oscillator |
| JPS59111382A (en) * | 1982-12-17 | 1984-06-27 | Hitachi Ltd | Oscillator for carbon-dioxide gas laser |
| JPS59152680A (en) * | 1983-02-21 | 1984-08-31 | Komatsu Ltd | Crossflow type laser device |
| JPS6327084A (en) * | 1986-07-20 | 1988-02-04 | Nikon Corp | Laser apparatus with differential pressure cell |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2017101593A (en) * | 2015-12-01 | 2017-06-08 | トヨタ紡織株式会社 | Motor and electric supercharger with the same |
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