JPH02267850A - イオン注入により形成される耐酸化面を有するモリブデン箔部材を持つ石英製ランプエンベロープ - Google Patents
イオン注入により形成される耐酸化面を有するモリブデン箔部材を持つ石英製ランプエンベロープInfo
- Publication number
- JPH02267850A JPH02267850A JP32980489A JP32980489A JPH02267850A JP H02267850 A JPH02267850 A JP H02267850A JP 32980489 A JP32980489 A JP 32980489A JP 32980489 A JP32980489 A JP 32980489A JP H02267850 A JPH02267850 A JP H02267850A
- Authority
- JP
- Japan
- Prior art keywords
- oxidation
- lamp
- lamp assembly
- molybdenum
- molybdenum foil
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 title claims abstract description 85
- 229910052750 molybdenum Inorganic materials 0.000 title claims abstract description 85
- 239000011733 molybdenum Substances 0.000 title claims abstract description 85
- 239000011888 foil Substances 0.000 title claims abstract description 64
- 239000010453 quartz Substances 0.000 title claims description 27
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 title claims description 27
- 238000005468 ion implantation Methods 0.000 title claims description 12
- 239000002344 surface layer Substances 0.000 claims abstract description 22
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims abstract description 11
- 229910052804 chromium Inorganic materials 0.000 claims abstract description 11
- 239000011651 chromium Substances 0.000 claims abstract description 11
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 claims abstract description 10
- 229910052782 aluminium Inorganic materials 0.000 claims abstract description 10
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims abstract description 10
- 239000000126 substance Substances 0.000 claims abstract description 10
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 5
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims abstract description 5
- 229910052763 palladium Inorganic materials 0.000 claims abstract description 5
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 5
- 239000010703 silicon Substances 0.000 claims abstract description 5
- 229910052715 tantalum Inorganic materials 0.000 claims abstract description 5
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 claims abstract description 5
- 229910052719 titanium Inorganic materials 0.000 claims abstract description 5
- 239000010936 titanium Substances 0.000 claims abstract description 5
- 239000000203 mixture Substances 0.000 claims abstract description 4
- 238000007789 sealing Methods 0.000 claims abstract description 4
- 230000003647 oxidation Effects 0.000 claims description 55
- 238000007254 oxidation reaction Methods 0.000 claims description 55
- 230000002401 inhibitory effect Effects 0.000 claims description 30
- 238000000576 coating method Methods 0.000 claims description 25
- 239000000463 material Substances 0.000 claims description 21
- 239000011248 coating agent Substances 0.000 claims description 19
- 238000000034 method Methods 0.000 claims description 11
- 239000003112 inhibitor Substances 0.000 claims description 10
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 claims description 10
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims description 8
- 229910010271 silicon carbide Inorganic materials 0.000 claims description 8
- 150000002500 ions Chemical class 0.000 claims description 7
- 238000004519 manufacturing process Methods 0.000 claims description 7
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 4
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 4
- 229910052751 metal Inorganic materials 0.000 abstract description 3
- 239000002184 metal Substances 0.000 abstract description 3
- 150000002739 metals Chemical class 0.000 abstract description 3
- 230000008901 benefit Effects 0.000 description 3
- 229910001507 metal halide Inorganic materials 0.000 description 3
- 150000005309 metal halides Chemical class 0.000 description 3
- 238000000429 assembly Methods 0.000 description 2
- 230000000712 assembly Effects 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 229910052736 halogen Inorganic materials 0.000 description 2
- 230000008018 melting Effects 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- 229910000476 molybdenum oxide Inorganic materials 0.000 description 2
- PQQKPALAQIIWST-UHFFFAOYSA-N oxomolybdenum Chemical class [Mo]=O PQQKPALAQIIWST-UHFFFAOYSA-N 0.000 description 2
- 229910052721 tungsten Inorganic materials 0.000 description 2
- 239000010937 tungsten Substances 0.000 description 2
- -1 tungsten halogen Chemical class 0.000 description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- QRRWWGNBSQSBAM-UHFFFAOYSA-N alumane;chromium Chemical compound [AlH3].[Cr] QRRWWGNBSQSBAM-UHFFFAOYSA-N 0.000 description 1
- 238000010420 art technique Methods 0.000 description 1
- 239000004568 cement Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 229910001430 chromium ion Inorganic materials 0.000 description 1
- 239000011247 coating layer Substances 0.000 description 1
- 230000001143 conditioned effect Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 230000001627 detrimental effect Effects 0.000 description 1
- 238000010891 electric arc Methods 0.000 description 1
- 238000005538 encapsulation Methods 0.000 description 1
- 238000009501 film coating Methods 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 239000007943 implant Substances 0.000 description 1
- 238000002513 implantation Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 230000035515 penetration Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 239000013077 target material Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/02—Details
- H01J61/36—Seals between parts of vessels; Seals for leading-in conductors; Leading-in conductors
- H01J61/366—Seals for leading-in conductors
- H01J61/368—Pinched seals or analogous seals
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J5/00—Details relating to vessels or to leading-in conductors common to two or more basic types of discharge tubes or lamps
- H01J5/32—Seals for leading-in conductors
- H01J5/38—Pinched-stem or analogous seals
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J5/00—Details relating to vessels or to leading-in conductors common to two or more basic types of discharge tubes or lamps
- H01J5/46—Leading-in conductors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/24—Manufacture or joining of vessels, leading-in conductors or bases
- H01J9/28—Manufacture of leading-in conductors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/24—Manufacture or joining of vessels, leading-in conductors or bases
- H01J9/32—Sealing leading-in conductors
- H01J9/323—Sealing leading-in conductors into a discharge lamp or a gas-filled discharge device
- H01J9/326—Sealing leading-in conductors into a discharge lamp or a gas-filled discharge device making pinched-stem or analogous seals
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Vessels And Coating Films For Discharge Lamps (AREA)
- Semiconductor Lasers (AREA)
- Physical Vapour Deposition (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US28775588A | 1988-12-21 | 1988-12-21 | |
| US287755 | 1988-12-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02267850A true JPH02267850A (ja) | 1990-11-01 |
Family
ID=23104197
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP32980489A Pending JPH02267850A (ja) | 1988-12-21 | 1989-12-21 | イオン注入により形成される耐酸化面を有するモリブデン箔部材を持つ石英製ランプエンベロープ |
Country Status (4)
| Country | Link |
|---|---|
| EP (1) | EP0375402B1 (fr) |
| JP (1) | JPH02267850A (fr) |
| CA (1) | CA2006129C (fr) |
| DE (1) | DE68928611T2 (fr) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0657912B1 (fr) * | 1993-12-08 | 1998-04-01 | Ushiodenki Kabushiki Kaisha | Procédé de connection d'une feuille de molybdène à une portion d'un conducteur de molybdène et méthode de production d'une pièce de lampe hermétiquement incluse utilisant ledit procédé |
| WO2000010193A1 (fr) * | 1998-08-13 | 2000-02-24 | Koninklijke Philips Electronics N.V. | Lampe électrique possédant un conducteur de courant externe recouvert |
| EP1797580A2 (fr) * | 2004-09-30 | 2007-06-20 | Koninklijke Philips Electronics N.V. | Lampe electrique |
| WO2007012995A2 (fr) | 2005-07-26 | 2007-02-01 | Philips Intellectual Property & Standards Gmbh | Lampe et son procede de fabrication |
| DE102007059340B4 (de) | 2006-12-19 | 2019-10-24 | Osram Gmbh | Stromzuführungssystem |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| NL7501272A (nl) * | 1975-02-04 | 1976-08-06 | Philips Nv | Electrische lamp. |
| JPS5544786A (en) * | 1978-09-27 | 1980-03-29 | Hitachi Ltd | Pressure sensor |
| NL183794B (nl) * | 1979-02-26 | Philips Nv | Hogedrukkwikontladingslamp. | |
| JPS60194043A (ja) * | 1984-03-14 | 1985-10-02 | Toshiba Corp | 管球ウエルズ |
| GB8429740D0 (en) * | 1984-11-24 | 1985-01-03 | Emi Plc Thorn | Lead wires in pinch seals |
| DE3775218D1 (de) * | 1986-09-20 | 1992-01-23 | Fraunhofer Ges Forschung | Verfahren zur erweiterung der aufloesung einer zeilen- oder matrixkamera. |
-
1989
- 1989-12-20 DE DE1989628611 patent/DE68928611T2/de not_active Expired - Fee Related
- 1989-12-20 EP EP19890313370 patent/EP0375402B1/fr not_active Expired - Lifetime
- 1989-12-20 CA CA 2006129 patent/CA2006129C/fr not_active Expired - Fee Related
- 1989-12-21 JP JP32980489A patent/JPH02267850A/ja active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| DE68928611T2 (de) | 1998-11-12 |
| DE68928611D1 (de) | 1998-04-23 |
| CA2006129A1 (fr) | 1990-06-21 |
| EP0375402A3 (fr) | 1991-03-27 |
| EP0375402A2 (fr) | 1990-06-27 |
| EP0375402B1 (fr) | 1998-03-18 |
| CA2006129C (fr) | 1994-03-08 |
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