JPH0226247U - - Google Patents
Info
- Publication number
- JPH0226247U JPH0226247U JP10363588U JP10363588U JPH0226247U JP H0226247 U JPH0226247 U JP H0226247U JP 10363588 U JP10363588 U JP 10363588U JP 10363588 U JP10363588 U JP 10363588U JP H0226247 U JPH0226247 U JP H0226247U
- Authority
- JP
- Japan
- Prior art keywords
- storage container
- transfer device
- wafer
- wafer transfer
- wafers
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 235000012431 wafers Nutrition 0.000 claims 5
- 238000010586 diagram Methods 0.000 description 3
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10363588U JPH0226247U (tr) | 1988-08-04 | 1988-08-04 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10363588U JPH0226247U (tr) | 1988-08-04 | 1988-08-04 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0226247U true JPH0226247U (tr) | 1990-02-21 |
Family
ID=31334647
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10363588U Pending JPH0226247U (tr) | 1988-08-04 | 1988-08-04 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0226247U (tr) |
-
1988
- 1988-08-04 JP JP10363588U patent/JPH0226247U/ja active Pending
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