JPH0226247U - - Google Patents
Info
- Publication number
- JPH0226247U JPH0226247U JP10363588U JP10363588U JPH0226247U JP H0226247 U JPH0226247 U JP H0226247U JP 10363588 U JP10363588 U JP 10363588U JP 10363588 U JP10363588 U JP 10363588U JP H0226247 U JPH0226247 U JP H0226247U
- Authority
- JP
- Japan
- Prior art keywords
- storage container
- transfer device
- wafer
- wafer transfer
- wafers
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 235000012431 wafers Nutrition 0.000 claims 5
- 238000010586 diagram Methods 0.000 description 3
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10363588U JPH0226247U (cs) | 1988-08-04 | 1988-08-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10363588U JPH0226247U (cs) | 1988-08-04 | 1988-08-04 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0226247U true JPH0226247U (cs) | 1990-02-21 |
Family
ID=31334647
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10363588U Pending JPH0226247U (cs) | 1988-08-04 | 1988-08-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0226247U (cs) |
-
1988
- 1988-08-04 JP JP10363588U patent/JPH0226247U/ja active Pending
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPS58138340U (ja) | ウエハの洗浄・エツチング用キヤリア | |
| JPH0226247U (cs) | ||
| JPH0272546U (cs) | ||
| JPS6099531U (ja) | ウエハーホルダ | |
| JPH0169791U (cs) | ||
| JPS5957309U (ja) | 容器保持具 | |
| JPS6033497U (ja) | 半導体装置用収納容器 | |
| JPS58126044U (ja) | 衛生具収納器 | |
| JPS5941178U (ja) | 調味料容器 | |
| JPS6391479U (cs) | ||
| JPS61193081U (cs) | ||
| JPS5916141U (ja) | キヤリアケ−ス | |
| JPS5884050U (ja) | 灰皿兼用スプン容器 | |
| JPS63102685U (cs) | ||
| JPS6257132U (cs) | ||
| JPS62197628U (cs) | ||
| JPH0366888U (cs) | ||
| JPS6132077U (ja) | 半導体ウエハ−の運搬用トレイ | |
| JPS6455293U (cs) | ||
| JPS6159345U (cs) | ||
| JPS5933414U (ja) | 姿勢正し器具 | |
| JPH01129835U (cs) | ||
| JPS626208U (cs) | ||
| JPS61148838U (cs) | ||
| JPS59162434U (ja) | 容器支持用把手 |