JPH0226246U - - Google Patents
Info
- Publication number
- JPH0226246U JPH0226246U JP10425588U JP10425588U JPH0226246U JP H0226246 U JPH0226246 U JP H0226246U JP 10425588 U JP10425588 U JP 10425588U JP 10425588 U JP10425588 U JP 10425588U JP H0226246 U JPH0226246 U JP H0226246U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- wafer transfer
- transfer device
- transfer plate
- coated
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000001681 protective effect Effects 0.000 claims 1
Landscapes
- Specific Conveyance Elements (AREA)
- Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10425588U JPH0226246U (zh) | 1988-08-05 | 1988-08-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10425588U JPH0226246U (zh) | 1988-08-05 | 1988-08-05 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0226246U true JPH0226246U (zh) | 1990-02-21 |
Family
ID=31335812
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10425588U Pending JPH0226246U (zh) | 1988-08-05 | 1988-08-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0226246U (zh) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100316712B1 (ko) * | 1999-06-22 | 2001-12-12 | 윤종용 | 화학기계적 연마장치에 웨이퍼를 로딩/언로딩하기 위한 로드컵의 페디스탈 |
-
1988
- 1988-08-05 JP JP10425588U patent/JPH0226246U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100316712B1 (ko) * | 1999-06-22 | 2001-12-12 | 윤종용 | 화학기계적 연마장치에 웨이퍼를 로딩/언로딩하기 위한 로드컵의 페디스탈 |