JPH0225868B2 - - Google Patents
Info
- Publication number
- JPH0225868B2 JPH0225868B2 JP59130077A JP13007784A JPH0225868B2 JP H0225868 B2 JPH0225868 B2 JP H0225868B2 JP 59130077 A JP59130077 A JP 59130077A JP 13007784 A JP13007784 A JP 13007784A JP H0225868 B2 JPH0225868 B2 JP H0225868B2
- Authority
- JP
- Japan
- Prior art keywords
- silicon carbide
- silicon
- carbon
- powder
- sintering
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims description 37
- 229910010271 silicon carbide Inorganic materials 0.000 claims description 33
- 238000005245 sintering Methods 0.000 claims description 22
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 17
- 229910052799 carbon Inorganic materials 0.000 claims description 16
- LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Chemical compound [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 claims description 14
- 238000004519 manufacturing process Methods 0.000 claims description 9
- 229910052710 silicon Inorganic materials 0.000 claims description 9
- 239000010703 silicon Substances 0.000 claims description 9
- 238000010304 firing Methods 0.000 claims description 8
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 6
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 claims description 3
- 229910052796 boron Inorganic materials 0.000 claims description 3
- 150000001722 carbon compounds Chemical class 0.000 claims description 3
- SIWVEOZUMHYXCS-UHFFFAOYSA-N oxo(oxoyttriooxy)yttrium Chemical compound O=[Y]O[Y]=O SIWVEOZUMHYXCS-UHFFFAOYSA-N 0.000 claims description 3
- 239000005011 phenolic resin Substances 0.000 claims description 3
- 150000003377 silicon compounds Chemical class 0.000 claims description 3
- 239000000377 silicon dioxide Substances 0.000 claims description 3
- 150000001491 aromatic compounds Chemical class 0.000 claims description 2
- 150000001639 boron compounds Chemical class 0.000 claims description 2
- 239000011261 inert gas Substances 0.000 claims description 2
- -1 polymethylphenylene Polymers 0.000 claims description 2
- 238000000034 method Methods 0.000 description 24
- 239000000843 powder Substances 0.000 description 19
- 239000007789 gas Substances 0.000 description 12
- 238000000354 decomposition reaction Methods 0.000 description 9
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 7
- 238000001272 pressureless sintering Methods 0.000 description 6
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 description 5
- 229910002091 carbon monoxide Inorganic materials 0.000 description 5
- 238000006243 chemical reaction Methods 0.000 description 5
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 4
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- WSFSSNUMVMOOMR-UHFFFAOYSA-N Formaldehyde Chemical compound O=C WSFSSNUMVMOOMR-UHFFFAOYSA-N 0.000 description 4
- 238000000576 coating method Methods 0.000 description 4
- 239000002002 slurry Substances 0.000 description 4
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 3
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 3
- 239000011248 coating agent Substances 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 239000001301 oxygen Substances 0.000 description 3
- 229910052760 oxygen Inorganic materials 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- AZDRQVAHHNSJOQ-UHFFFAOYSA-N alumane Chemical class [AlH3] AZDRQVAHHNSJOQ-UHFFFAOYSA-N 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 2
- 229910010293 ceramic material Inorganic materials 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- 235000019441 ethanol Nutrition 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 229930195733 hydrocarbon Natural products 0.000 description 2
- 150000002430 hydrocarbons Chemical class 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 229920003023 plastic Polymers 0.000 description 2
- 239000004033 plastic Substances 0.000 description 2
- 238000001953 recrystallisation Methods 0.000 description 2
- KXGFMDJXCMQABM-UHFFFAOYSA-N 2-methoxy-6-methylphenol Chemical compound [CH]OC1=CC=CC([CH])=C1O KXGFMDJXCMQABM-UHFFFAOYSA-N 0.000 description 1
- 239000004215 Carbon black (E152) Substances 0.000 description 1
- 239000004372 Polyvinyl alcohol Substances 0.000 description 1
- 229910003902 SiCl 4 Inorganic materials 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 229920001971 elastomer Polymers 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000001125 extrusion Methods 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000001746 injection moulding Methods 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 229920001568 phenolic resin Polymers 0.000 description 1
- 229920002451 polyvinyl alcohol Polymers 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- 238000007582 slurry-cast process Methods 0.000 description 1
- 238000000859 sublimation Methods 0.000 description 1
- 230000008022 sublimation Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Ceramic Products (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP59130077A JPS6036377A (ja) | 1984-06-26 | 1984-06-26 | 高密度炭化珪素質焼結体の製造法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP59130077A JPS6036377A (ja) | 1984-06-26 | 1984-06-26 | 高密度炭化珪素質焼結体の製造法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6036377A JPS6036377A (ja) | 1985-02-25 |
JPH0225868B2 true JPH0225868B2 (fr) | 1990-06-06 |
Family
ID=15025434
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP59130077A Granted JPS6036377A (ja) | 1984-06-26 | 1984-06-26 | 高密度炭化珪素質焼結体の製造法 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6036377A (fr) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5070049A (en) * | 1987-12-16 | 1991-12-03 | Ibiden, Co. Ltd. | Starting composition for the production of silicon carbide and method of producing the same |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS54144411A (en) * | 1978-05-01 | 1979-11-10 | Carborundum Co | Alphaasilicon carbide sintered ceramic body having isometric micro structure |
JPS55167178A (en) * | 1979-06-18 | 1980-12-26 | Toyota Motor Co Ltd | Manufacture of silicon carbide sintered body |
JPS565377A (en) * | 1979-06-25 | 1981-01-20 | Atomic Energy Authority Uk | Manufacture of fine ceramic product |
-
1984
- 1984-06-26 JP JP59130077A patent/JPS6036377A/ja active Granted
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS54144411A (en) * | 1978-05-01 | 1979-11-10 | Carborundum Co | Alphaasilicon carbide sintered ceramic body having isometric micro structure |
JPS55167178A (en) * | 1979-06-18 | 1980-12-26 | Toyota Motor Co Ltd | Manufacture of silicon carbide sintered body |
JPS565377A (en) * | 1979-06-25 | 1981-01-20 | Atomic Energy Authority Uk | Manufacture of fine ceramic product |
Also Published As
Publication number | Publication date |
---|---|
JPS6036377A (ja) | 1985-02-25 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US4351787A (en) | Process for sintering reaction bonded silicon nitride | |
US4004934A (en) | Sintered dense silicon carbide | |
US4354991A (en) | Dense sintered silicon carbide ceramic | |
IE43834B1 (en) | Sintered silicon carbide ceramic body | |
US4761339A (en) | Sintered ceramic articles and method for production thereof | |
JPS5844630B2 (ja) | シリコ−ンカ−バイドシヨウケツセイケイタイノ セイゾウホウホウ | |
JPS621346B2 (fr) | ||
US4530808A (en) | Binder removal from thermoplastically formed SiC article | |
JPH0127993B2 (fr) | ||
JPH0225868B2 (fr) | ||
JPH0329743B2 (fr) | ||
JPS6332841B2 (fr) | ||
GB2215738A (en) | Method of preparing silicon carbide sintered body | |
JPH0138075B2 (fr) | ||
US3956193A (en) | Conductivity of silicon nitride | |
JPS61201662A (ja) | 複合セラミツクスの製造法 | |
JP2916934B2 (ja) | サイアロン質焼結体の製造方法 | |
JPH01115888A (ja) | 半導体製造用治具の製造方法 | |
JPH0146472B2 (fr) | ||
JPS5915112B2 (ja) | 高密度炭化珪素焼結体の製造方法 | |
JPS5891060A (ja) | 炭化珪素質焼結体の製造法 | |
JPS61286267A (ja) | 窒化アルミニウム質焼結体の製造方法 | |
JP2000026177A (ja) | 珪素・炭化珪素セラミックスの製造方法 | |
JPH024550B2 (fr) | ||
JPS6369758A (ja) | 炭化けい素焼結体の製造方法 |