JPH0225564U - - Google Patents
Info
- Publication number
- JPH0225564U JPH0225564U JP10394488U JP10394488U JPH0225564U JP H0225564 U JPH0225564 U JP H0225564U JP 10394488 U JP10394488 U JP 10394488U JP 10394488 U JP10394488 U JP 10394488U JP H0225564 U JPH0225564 U JP H0225564U
- Authority
- JP
- Japan
- Prior art keywords
- substrate holder
- chamber
- inlet chamber
- substrate
- cooling water
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 9
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 5
- 238000004544 sputter deposition Methods 0.000 claims description 3
- 239000000498 cooling water Substances 0.000 claims 3
- 230000000149 penetrating effect Effects 0.000 claims 1
- 238000001816 cooling Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10394488U JPH0225564U (cs) | 1988-08-05 | 1988-08-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10394488U JPH0225564U (cs) | 1988-08-05 | 1988-08-05 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0225564U true JPH0225564U (cs) | 1990-02-20 |
Family
ID=31335225
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10394488U Pending JPH0225564U (cs) | 1988-08-05 | 1988-08-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0225564U (cs) |
-
1988
- 1988-08-05 JP JP10394488U patent/JPH0225564U/ja active Pending
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| EP0902632B1 (en) | Water-driven cleaning device | |
| JPS5925946B2 (ja) | 熱交換器 | |
| RU93052377A (ru) | Усовершенствование в устройстве, выталкивающем полую струю | |
| JPH0419474B2 (cs) | ||
| JPH0225564U (cs) | ||
| US4207650A (en) | Cleaner using high velocity air jets having a double valve having an equal number of jet nozzles operating at all times | |
| JPH0131282Y2 (cs) | ||
| CN220496641U (zh) | 一种具有清洁功能的低速离心机 | |
| JPS6010656Y2 (ja) | 回転円筒型濾過器 | |
| JPS5856725U (ja) | ロ−タリ−バルブ | |
| JPS5937657Y2 (ja) | 氷片供給装置の貯氷庫 | |
| JPS6310474Y2 (cs) | ||
| JPS5919915Y2 (ja) | ロ−タリ−式熱処理装置 | |
| JPH02138422U (cs) | ||
| FI77218C (fi) | Arrangemang foer kylning av ett centrifugalhjul som anvaends vid framstaellning av mineralullsfiber. | |
| JPS61158900U (cs) | ||
| JPS63124350U (cs) | ||
| JPS62139291U (cs) | ||
| JPS62114712U (cs) | ||
| JPS6231922U (cs) | ||
| RU95116172A (ru) | Аппарат для контакта газа и жидкости | |
| JPH038926Y2 (cs) | ||
| JPS59169730U (ja) | 回転式水洗ブラシ | |
| JPH0379423U (cs) | ||
| JPH01149472U (cs) |