JPH02252225A - Laminating method for ceramic green sheet - Google Patents
Laminating method for ceramic green sheetInfo
- Publication number
- JPH02252225A JPH02252225A JP7531589A JP7531589A JPH02252225A JP H02252225 A JPH02252225 A JP H02252225A JP 7531589 A JP7531589 A JP 7531589A JP 7531589 A JP7531589 A JP 7531589A JP H02252225 A JPH02252225 A JP H02252225A
- Authority
- JP
- Japan
- Prior art keywords
- sheet
- plasticizer
- ceramic
- green sheet
- laminated
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000919 ceramic Substances 0.000 title claims abstract description 32
- 238000010030 laminating Methods 0.000 title claims abstract description 10
- 238000000034 method Methods 0.000 title claims description 34
- 239000004014 plasticizer Substances 0.000 claims abstract description 63
- 239000002002 slurry Substances 0.000 claims abstract description 17
- 238000001035 drying Methods 0.000 claims abstract description 10
- 238000003475 lamination Methods 0.000 claims description 28
- 238000005507 spraying Methods 0.000 claims description 5
- 239000002904 solvent Substances 0.000 abstract description 11
- DOIRQSBPFJWKBE-UHFFFAOYSA-N dibutyl phthalate Chemical compound CCCCOC(=O)C1=CC=CC=C1C(=O)OCCCC DOIRQSBPFJWKBE-UHFFFAOYSA-N 0.000 abstract description 8
- 239000011230 binding agent Substances 0.000 abstract description 7
- 229920005989 resin Polymers 0.000 abstract description 7
- 239000011347 resin Substances 0.000 abstract description 7
- 238000007796 conventional method Methods 0.000 abstract description 5
- 238000000576 coating method Methods 0.000 abstract description 3
- 239000011248 coating agent Substances 0.000 abstract description 2
- 230000001070 adhesive effect Effects 0.000 abstract 2
- 238000010586 diagram Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 5
- 239000010410 layer Substances 0.000 description 5
- 238000005238 degreasing Methods 0.000 description 4
- 230000032798 delamination Effects 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 4
- 238000000465 moulding Methods 0.000 description 4
- 238000010276 construction Methods 0.000 description 3
- 238000009826 distribution Methods 0.000 description 3
- 238000010304 firing Methods 0.000 description 3
- 239000002994 raw material Substances 0.000 description 3
- 239000003985 ceramic capacitor Substances 0.000 description 2
- 239000000843 powder Substances 0.000 description 2
- 239000007921 spray Substances 0.000 description 2
- 239000003990 capacitor Substances 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- NBVXSUQYWXRMNV-UHFFFAOYSA-N fluoromethane Chemical compound FC NBVXSUQYWXRMNV-UHFFFAOYSA-N 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229920002037 poly(vinyl butyral) polymer Polymers 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
- 239000011800 void material Substances 0.000 description 1
Landscapes
- Ceramic Capacitors (AREA)
Abstract
Description
【発明の詳細な説明】
産業上の利用分野
本発明は、セラミックグリーンシートを積層してセラミ
ックを成形する工法において、グリーンシートの積層密
着性を向上させる方法に関するものであり、セラミック
コンデンサ等の製法に有効である。[Detailed Description of the Invention] Industrial Application Field The present invention relates to a method for improving the lamination adhesion of green sheets in a method of laminating ceramic green sheets to form a ceramic, and the present invention relates to a method for manufacturing ceramic capacitors, etc. It is effective for
従来の技術
セラミックの成形方法として、セラミックスラリ−をキ
ャリアフィルムにドクターブレード等を用いて薄く塗布
してできたグリーンシートを積層して成形する方法があ
る。この方法では積層されたグリーンシートのシート間
の密着性が、セラミックの成形に重要となる。このセラ
ミックグリーンシートの積層密着性には、シート中に存
在する可塑剤量が大きく影響を与えることが知られてい
る。BACKGROUND ART As a method for molding ceramics, there is a method of laminating and molding green sheets made by thinly applying ceramic slurry to a carrier film using a doctor blade or the like. In this method, the adhesion between the stacked green sheets is important for forming the ceramic. It is known that the amount of plasticizer present in the sheet greatly influences the lamination adhesion of the ceramic green sheet.
従来のグリーンシート積層密着までの工程を第2図に示
す。可塑剤は、セラミック原料粉体φバインダー樹脂・
溶剤と共に分散機に投入され、混練・分散してスラリー
が作製される。このスラリーをキャリアフィルム上に薄
く塗布・乾燥したグリーンシートを巻取り保管する。次
に積層工程でグリーンシートを裁断し、キャリアフィル
ムより剥離し、積層して加圧密着を繰り返し、目的とす
る厚みに積層する方法が取られていた。従来、グリーン
シートの積層工程において、このシート表面が十分な積
層密着性を得るように、スラリー中に多量の可塑剤を添
加していた。Figure 2 shows the conventional process of stacking and adhering green sheets. Plasticizer is ceramic raw material powder φ binder resin.
It is put into a dispersion machine together with a solvent, and is kneaded and dispersed to create a slurry. This slurry is thinly applied onto a carrier film, and the dried green sheet is rolled up and stored. Next, in the lamination process, the green sheets were cut, peeled off from the carrier film, laminated, and pressed together repeatedly to achieve the desired thickness. Conventionally, in the green sheet lamination process, a large amount of plasticizer has been added to the slurry so that the sheet surface has sufficient lamination adhesion.
発明が解決しようとする課題
従来の技術ではスラリー状態で可塑剤を添加するため、
グリーンシート1状態で可塑剤40シート1内に第4図
に示すように厚み方向に均一に存在する。そのため一定
のシート積層密着性を得るのに必要な可塑剤の量は、バ
インダー樹脂と同程度が要求されている。この多量の可
塑剤40は、シート積層品を焼成して焼結体8を形成す
ると、第8図に示すごとく、脱脂工程の長時間化、また
脱脂不十分の結果、焼結体θ中のボイド7の発生につな
がる。Problems to be solved by the invention In the conventional technology, plasticizer is added in a slurry state.
In the green sheet 1, the plasticizer 40 exists uniformly in the thickness direction within the sheet 1 as shown in FIG. Therefore, the amount of plasticizer required to obtain a certain level of sheet lamination adhesion is required to be approximately the same as that of the binder resin. When the sheet laminate is fired to form the sintered body 8, this large amount of plasticizer 40 causes the degreasing process to take a long time and the degreasing to be insufficient, as shown in FIG. This leads to the generation of void 7.
また、従来技術ではスラリー塗布後の溶剤乾燥工程で可
塑剤が揮散し、シート積層密着性が悪くなり、焼成時に
、第7図に示すごとく、焼結体6中のデラミネーション
8(層間剥離)の発生につながる。特に、シート厚が薄
くなるほど揮散量は多くなるので、今後のシート薄膜化
の方向にとって問題が大きくなる。このシートからの可
塑剤の揮散はシート表面で起こるため、積層密着性に与
える影響は非常に大きい。In addition, in the conventional technology, the plasticizer volatilizes during the solvent drying process after applying the slurry, resulting in poor sheet lamination adhesion, and delamination 8 (delamination) in the sintered body 6 during firing, as shown in FIG. leading to the occurrence of In particular, the thinner the sheet, the greater the amount of volatilization, which will become a bigger problem in the future direction of sheet thinning. Since the volatilization of the plasticizer from the sheet occurs on the sheet surface, it has a very large effect on the lamination adhesion.
本発明は以上のような従来技術の課題を鑑み、グリーン
シート中の可塑剤含有量を減少させ、しかもシート乾燥
条件がシート積層密着性に影響を及ぼさないことを目的
として開発された技術である。The present invention is a technology developed in view of the problems of the prior art as described above, with the aim of reducing the plasticizer content in green sheets and also ensuring that the sheet drying conditions do not affect the sheet lamination adhesion. .
課題を解決するための手段
このような従来技術の課題を解決するために、本発明は
、以下に示す手段を用いるものである。Means for Solving the Problems In order to solve the problems of the prior art, the present invention uses the following means.
キャリアフィルムにセラミックスラリ−を塗布してセラ
ミックグリーンシートを形成し、そのシートを乾燥後、
可塑剤をシート表面に添加して、セラミックグリーンシ
ートに積層時のシート密着性を付与するセラミックグリ
ーンシートの積層方法であり、可塑剤のシート表面添加
方法としては、たとえば可塑剤溶液を塗布、または可塑
剤を噴霧する方法である。A ceramic green sheet is formed by applying ceramic slurry to a carrier film, and after drying the sheet,
This is a ceramic green sheet lamination method in which a plasticizer is added to the sheet surface to give the ceramic green sheets sheet adhesion during lamination. Examples of methods for adding plasticizer to the sheet surface include applying a plasticizer solution or This method involves spraying a plasticizer.
第1図に示す工程のように可塑剤を添加しないか、もし
くは従来必要とされている量以下を添加してスラリーを
作製する。このスラリーをキャリアフィルム上に塗布し
てセラミックグリーンシートを形成し、このシートを乾
燥後、シートを裁断−剥離・積層する直前に、シート表
面に可塑剤を添加してセラミックグリーンシートを積層
する方法を用いる。可塑剤のシート表面への添加方法と
しては、バインダー樹脂を溶かさず、しかも乾燥が容易
な溶剤に溶かした可塑剤溶液をシート表面に塗布する方
法と、可塑剤をシート表面に直接噴霧する方法が挙げら
れる。このようにしてシート表面に添加した可塑剤でシ
ートに積層密着性の賦与を行う工法を用いて課題を解決
する。As in the process shown in FIG. 1, a slurry is prepared by adding no plasticizer or adding less than the amount conventionally required. A method in which this slurry is applied onto a carrier film to form a ceramic green sheet, and after this sheet is dried, a plasticizer is added to the sheet surface immediately before the sheet is cut, peeled, and laminated to laminate the ceramic green sheet. Use. There are two methods of adding plasticizer to the sheet surface: one is to apply a plasticizer solution dissolved in a solvent that does not dissolve the binder resin and is easy to dry, and the other is to spray the plasticizer directly onto the sheet surface. Can be mentioned. In this way, the problem is solved by using a method of imparting lamination adhesion to the sheet using a plasticizer added to the sheet surface.
作用
本発明ではグリーンシート1の表面に可塑剤を添加する
ことで、第3図に示すように、従来の技術に比べて少量
の添加量でもシート表面2の近゛傍に可塑剤4のリッチ
な層が形成される。このシート表面2の近傍にリッチな
状態で存在する可塑剤4が、シート積層時の加圧条件下
でシート表面2に浮きだし、シート間の密着性に大きく
貢献する。Operation In the present invention, by adding a plasticizer to the surface of the green sheet 1, as shown in FIG. layers are formed. The plasticizer 4 present in a rich state in the vicinity of the sheet surface 2 floats onto the sheet surface 2 under pressurized conditions during sheet lamination, and greatly contributes to the adhesion between the sheets.
このようにして少量の可塑剤で良好なシート積層性が得
られるので、可塑剤による焼成時の不都合が低減できる
。In this way, good sheet lamination properties can be obtained with a small amount of plasticizer, so that inconveniences caused by plasticizers during firing can be reduced.
また1、シート表面へあ可塑剤の添加は、シートの乾燥
後に行うので、従来の技術のように乾燥条件の差による
シート積層密着性の不都合は起こらない。In addition, 1. Since the plasticizer is added to the sheet surface after the sheet is dried, there is no problem with sheet lamination adhesion due to differences in drying conditions as in the prior art.
実施例
セラミックグリーンシートの積層密着性を向上させるた
めに本発明では、第1図に示す工程のように可塑剤を添
加しないか、もしくは従来必要とされている量以下を添
加してスラリーを作製する。Example In order to improve the lamination adhesion of ceramic green sheets, in the present invention, as in the process shown in Fig. 1, a slurry is prepared by adding no plasticizer or adding less than the amount conventionally required. do.
このスラリーをキャリアフィルム上に塗布してセラミッ
クグリーンシートを形成し、このシートを乾燥後、シー
トを裁断・剥離・積層する直前に、シート表面に可塑剤
を添加してセラミックグリーンシートを積層する方法を
用いる。可塑剤のシート表面への添加方′法としては、
バインダー樹脂を溶かさず、しかも乾燥が容易な溶剤に
溶かした可塑剤溶液をシート表面に塗布する方法と、可
塑剤をシート表面に直接噴霧する方法が挙げられる。A method in which this slurry is applied onto a carrier film to form a ceramic green sheet, and after this sheet is dried, a plasticizer is added to the sheet surface immediately before the sheet is cut, peeled, and laminated to laminate the ceramic green sheet. Use. The method for adding plasticizer to the sheet surface is as follows:
Methods include applying a plasticizer solution dissolved in a solvent that does not dissolve the binder resin and is easy to dry onto the sheet surface, and spraying the plasticizer directly onto the sheet surface.
このようにしてシート表面に添加した可塑剤でシートに
積層密着性の賦与を行う方法を採用した。In this way, a method was adopted in which the plasticizer added to the sheet surface imparts lamination adhesion to the sheet.
本発明はセラミックグリーンシートを積層するセラミッ
ク成形法に広く利用できるが、ここでは積層セラミック
コンデンサに適用した実施例を第5図とともに説明する
。Although the present invention can be widely used in ceramic molding methods for laminating ceramic green sheets, an embodiment in which the present invention is applied to a laminated ceramic capacitor will be described with reference to FIG.
セラミック原料粉体100に対し、バインダー樹脂とし
てポリビニルブチラールを10、溶剤を90の割合で加
え、分散機を用いてセラミックスラリ−を作成した。こ
のスラリーをキャリアフィルム(PET)3上にドクタ
ーブレードを用いて、乾燥膜厚で50μmになるように
塗布し、80℃で1時間乾燥してグリーンシート1を作
成した(a)。To 100 parts of the ceramic raw material powder, 10 parts of polyvinyl butyral as a binder resin and 90 parts of a solvent were added, and a ceramic slurry was prepared using a disperser. This slurry was applied onto a carrier film (PET) 3 using a doctor blade to a dry film thickness of 50 μm, and dried at 80° C. for 1 hour to produce a green sheet 1 (a).
このシート1への可塑剤4の添加は、次の2方法のいず
れかで行った(b)。可塑剤4にはフタル酸ジブチル(
DBP)を用いた。The plasticizer 4 was added to the sheet 1 by one of the following two methods (b). Plasticizer 4 is dibutyl phthalate (
DBP) was used.
可塑剤溶液塗布法:可塑剤4を溶かし、しかもバインダ
ー樹脂を溶かさず、揮散しやすい溶剤(今回はフロン系
溶剤を用いた)でDBPを希釈し、1〜20%とDBP
の濃度を変えた溶液を作成した。この溶液を先のグリー
ンシート1に塗布し、40℃の温風で溶剤を除去した。Plasticizer solution application method: Dissolve plasticizer 4, but do not dissolve the binder resin, and dilute DBP with a solvent that easily evaporates (in this case, a fluorocarbon solvent was used) to give a concentration of 1 to 20% DBP.
Solutions with varying concentrations were created. This solution was applied to the green sheet 1, and the solvent was removed with warm air at 40°C.
可塑剤噴霧法:可塑剤4 (DBP)を噴霧機でグリー
ンシートに噴霧した。この時の噴霧量は時間で制御した
。Plasticizer spraying method: Plasticizer 4 (DBP) was sprayed onto the green sheet using a sprayer. The amount of spray at this time was controlled by time.
上記のようにしてシート表面2に可塑剤4を添加したシ
ート1を、積層に適した大きさに裁断した。The sheet 1 with the plasticizer 4 added to the sheet surface 2 as described above was cut into a size suitable for lamination.
次にこの裁断したシート1を積層して成形を行った。先
ず、土台となる1層目のシート1の上に、積層する2層
目のシートlをキャリアフィルム3より剥離させて重ね
合わせ(C)、加圧して密着させた(d)。同様に、3
層目、4層目と積層を繰り返し、目的とする厚みにまで
積層を行った(e)。このようにして目的の厚みにまで
積層されたシート5を更にコンデンサとして必要な大き
さに裁断し、キャリアフィルム3より剥離して成形を行
った。Next, the cut sheets 1 were laminated and molded. First, the second layer sheet 1 to be laminated was peeled off from the carrier film 3 and superimposed on the first layer sheet 1 serving as a base (C), and was pressed into close contact with the sheet 1 (D). Similarly, 3
Lamination was repeated for the 4th layer and the 4th layer until the desired thickness was reached (e). The sheet 5 thus laminated to a desired thickness was further cut into a size required for a capacitor, and was peeled off from the carrier film 3 to perform molding.
本発明と従来の方法に関して、シート1中に存在する可
塑剤4の量(シートより抽出して分析した値)とシート
積層密着強度の関係を第9図に示す。従来の方法に比べ
、本発明では可塑剤量が50%以下でも十分な積層密着
性を得ることができた。FIG. 9 shows the relationship between the amount of plasticizer 4 present in the sheet 1 (a value extracted from the sheet and analyzed) and the sheet lamination adhesion strength for the present invention and the conventional method. Compared to conventional methods, the present invention was able to obtain sufficient lamination adhesion even when the amount of plasticizer was 50% or less.
発明の効果
本発明によるセラミックグリーンシートの積層方法は従
来の技術と比較して、グリーンシート乾燥後に可塑剤を
シートの表面に添加するので、少量の可塑剤でシート表
面層に十分な積層密着性を付与することができる。つま
り、必要なシート積層密着性を得るために要求される可
塑剤の量は本発明によって少量で済み、このことにより
、シート積層品の脱脂工程の時間短縮を行い、脱脂不十
分による焼結体のボイド発生を防ぐ効果がある。Effects of the Invention Compared to conventional techniques, the method for laminating ceramic green sheets according to the present invention adds a plasticizer to the surface of the sheet after drying the green sheet, so that a small amount of plasticizer can provide sufficient lamination adhesion to the sheet surface layer. can be granted. In other words, the amount of plasticizer required to obtain the necessary sheet lamination adhesion is reduced by the present invention, which reduces the time required for the degreasing process of sheet laminated products, and eliminates the need for sintered compacts due to insufficient degreasing. This has the effect of preventing the generation of voids.
また、本発明では積層密着性に大きく寄与する可塑剤は
シート塗布台乾燥後にシート表面に与えられるので、シ
ート積層密着性はスラリー塗布後の溶剤乾燥条件に大き
な影響を受けず、焼結体のデラミネーションの発生を防
ぐ効果がある。この効果はシートの膜厚が更に薄くなり
、可塑剤の揮散が問題となる今後、益々重要になる。In addition, in the present invention, the plasticizer, which greatly contributes to lamination adhesion, is applied to the sheet surface after drying the sheet coating table, so sheet lamination adhesion is not significantly affected by the solvent drying conditions after slurry application, and the sintered body It has the effect of preventing the occurrence of delamination. This effect will become even more important in the future as sheet thicknesses become thinner and plasticizer volatilization becomes a problem.
本発明では、従来の技術と比較してシート表面への可塑
剤添加工程が1工程増加するが、この工程は簡単な工程
であるため大きな欠点とはならない。可塑剤添加方法の
内、可塑剤溶液塗布方法はシートに均一な添加と塗布量
のコントロールが容易である利点があり、可塑剤噴霧方
法では簡単な装置で安定した供給ができる利点がある。In the present invention, the step of adding a plasticizer to the sheet surface is increased by one step compared to the conventional technology, but this step is a simple step and therefore does not pose a major drawback. Among the plasticizer addition methods, the plasticizer solution coating method has the advantage of uniform addition to the sheet and easy control of the amount applied, while the plasticizer spraying method has the advantage of being able to supply stably with a simple device.
従って、本発明はセラミックグリーンシートの積層方法
として、極めて利用価値の高い方法である。Therefore, the present invention is an extremely useful method for laminating ceramic green sheets.
第1図は本発明でのセラミックの原料混合から焼成まで
の工法概略図、第2図は従来の工法を示す概略図、第3
図は本発明でのグリーンシート中での可塑剤の分布を示
す図、第4図は従来法での可塑剤の分布を示す図、第5
図←→=哨吻→は本発明の一実施例におけるグリーンシ
ートの積層工程断面図、第6図、第7図は焼結体の欠陥
であるボイド(空洞)とデラミネーシヨン(層間剥離)
をそれぞれ示す図、第8図はグリーンシートの厚みとグ
リーンシート乾燥時の可塑剤揮散量の関係を示す図、第
9図はグリーンシート中の可塑剤の量と積層密着性の関
係を示す図である。
1・・・グリーンシート、2・・−シート表面、3・−
・キャリアフィルム、4・φ・可塑剤、5県Φ・積層さ
れたシート。
代理人の氏名 弁理士 粟野重孝 はか1名グリーンシ
ート
クリーンシート
第
図
第
図
第8図
ぺ
錫
図Figure 1 is a schematic diagram of the ceramic construction method according to the present invention from mixing raw materials to firing, Figure 2 is a schematic diagram showing the conventional construction method, and Figure 3 is a schematic diagram showing the conventional construction method.
Figure 4 shows the distribution of plasticizer in the green sheet according to the present invention, Figure 4 shows the distribution of plasticizer in the conventional method, and Figure 5 shows the distribution of plasticizer in the green sheet according to the present invention.
Figures ←→ = sentinel → are cross-sectional views of the green sheet lamination process in one embodiment of the present invention, and Figures 6 and 7 are voids and delaminations that are defects in the sintered body.
Figure 8 is a diagram showing the relationship between the thickness of the green sheet and the amount of plasticizer volatilized during drying of the green sheet, and Figure 9 is a diagram showing the relationship between the amount of plasticizer in the green sheet and lamination adhesion. It is. 1...green sheet, 2...-sheet surface, 3...-
・Carrier film, 4 φ, plasticizer, 5 prefecture φ, laminated sheet. Name of agent: Patent attorney Shigetaka Awano (1 person) Green Sheet Clean Sheet Figure 8 Figure 8
Claims (2)
てセラミックグリーンシートを形成し、前記シートを乾
燥後、可塑剤を前記シート表面に添加し、前記セラミッ
クグリーンシートを積層させることを特徴とするセラミ
ックグリーンシートの積層方法。(1) A ceramic green sheet characterized in that a ceramic green sheet is formed by applying a ceramic slurry to a carrier film, and after drying the sheet, a plasticizer is added to the surface of the sheet, and the ceramic green sheets are laminated. Lamination method.
を塗布するか又は可塑剤を噴霧することを特徴とする特
許請求の範囲第1項記載のセラミックグリーンシートの
積層方法。(2) The method for laminating ceramic green sheets according to claim 1, wherein the method for adding the plasticizer to the sheet surface includes applying a plasticizer solution or spraying the plasticizer.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7531589A JPH02252225A (en) | 1989-03-27 | 1989-03-27 | Laminating method for ceramic green sheet |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7531589A JPH02252225A (en) | 1989-03-27 | 1989-03-27 | Laminating method for ceramic green sheet |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH02252225A true JPH02252225A (en) | 1990-10-11 |
Family
ID=13572702
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7531589A Pending JPH02252225A (en) | 1989-03-27 | 1989-03-27 | Laminating method for ceramic green sheet |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH02252225A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009200439A (en) * | 2008-02-25 | 2009-09-03 | Tdk Corp | Laminated electronic component manufacturing method |
-
1989
- 1989-03-27 JP JP7531589A patent/JPH02252225A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009200439A (en) * | 2008-02-25 | 2009-09-03 | Tdk Corp | Laminated electronic component manufacturing method |
JP4600490B2 (en) * | 2008-02-25 | 2010-12-15 | Tdk株式会社 | Manufacturing method of multilayer electronic component |
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