JPH02248827A - Airtight terminal for pressure sensor and manufacture thereof - Google Patents
Airtight terminal for pressure sensor and manufacture thereofInfo
- Publication number
- JPH02248827A JPH02248827A JP6949289A JP6949289A JPH02248827A JP H02248827 A JPH02248827 A JP H02248827A JP 6949289 A JP6949289 A JP 6949289A JP 6949289 A JP6949289 A JP 6949289A JP H02248827 A JPH02248827 A JP H02248827A
- Authority
- JP
- Japan
- Prior art keywords
- outer ring
- metal outer
- layer
- silicon
- nickel
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 11
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims abstract description 80
- 239000010410 layer Substances 0.000 claims abstract description 71
- 239000002184 metal Substances 0.000 claims abstract description 56
- 229910052751 metal Inorganic materials 0.000 claims abstract description 56
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 52
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 52
- 239000010703 silicon Substances 0.000 claims abstract description 52
- 229910052759 nickel Inorganic materials 0.000 claims abstract description 40
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims abstract description 30
- 239000010931 gold Substances 0.000 claims abstract description 30
- 229910052737 gold Inorganic materials 0.000 claims abstract description 30
- 239000002356 single layer Substances 0.000 claims abstract description 11
- 238000007747 plating Methods 0.000 claims description 61
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims description 43
- 238000003780 insertion Methods 0.000 claims description 15
- 230000037431 insertion Effects 0.000 claims description 15
- 239000011521 glass Substances 0.000 claims description 11
- 238000000034 method Methods 0.000 claims description 6
- 238000007789 sealing Methods 0.000 claims description 3
- 230000005496 eutectics Effects 0.000 abstract description 11
- 229910021334 nickel silicide Inorganic materials 0.000 abstract description 8
- RUFLMLWJRZAWLJ-UHFFFAOYSA-N nickel silicide Chemical compound [Ni]=[Si]=[Ni] RUFLMLWJRZAWLJ-UHFFFAOYSA-N 0.000 abstract description 8
- 238000010438 heat treatment Methods 0.000 abstract description 6
- 230000015572 biosynthetic process Effects 0.000 abstract 2
- OFLYIWITHZJFLS-UHFFFAOYSA-N [Si].[Au] Chemical compound [Si].[Au] OFLYIWITHZJFLS-UHFFFAOYSA-N 0.000 description 7
- 230000002093 peripheral effect Effects 0.000 description 5
- 238000005219 brazing Methods 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 229910000833 kovar Inorganic materials 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
Landscapes
- Measuring Fluid Pressure (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は圧力センサー用気密端子及びその製造方法に関
する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to an airtight terminal for a pressure sensor and a method for manufacturing the same.
圧力センサーには種々のタイプのものがあるが、その一
つとして第４図に示すような構造の圧力センサーが知ら
れている。There are various types of pressure sensors, one of which is known as a pressure sensor having a structure as shown in FIG.
この圧力センサーは、金属外環１の中央の開口、例えば
通気口２に気体導入用のパイプ３をロウ付けすると共に
、その周りの複数のリード挿通孔４にリード５をそれぞ
れ挿通してガラス６で封着して成る気密端子を使用した
ものであって、シリコン台座７を金属外環１の通気口周
縁部に気密に固着すると共に、該台座７に圧力検知用の
ダイアフラム８を気密に取付けてリード５とワイヤーボ
ンディングし、その上からキャップ９を被せ金属外環１
に気密に固着したものである。This pressure sensor is constructed by brazing a pipe 3 for introducing gas into a central opening of a metal outer ring 1, such as a vent 2, and inserting leads 5 into a plurality of lead insertion holes 4 around the pipe 3 through a glass plate 6. The silicon pedestal 7 is hermetically fixed to the peripheral edge of the vent of the metal outer ring 1, and a diaphragm 8 for pressure detection is hermetically attached to the pedestal 7. wire bond to the lead 5, cover the cap 9 over it, and attach the metal outer ring 1.
It is airtightly fixed to the
この圧力センサーに使用される気密端子は、第５図に示
すように、その金属外環１の表面がニッケルめっき層１
０とその外側の金めつき層１１で二重被覆されたもので
あり、しかして、シリコン台座７は、加熱によりシリコ
ン台座７と金めっき層１１の接合界面に金−シリコン共
晶層（図示せず）を形成させることによって、金属外環
１の通気口２の周縁部に気密に固着されている。As shown in FIG. 5, the airtight terminal used in this pressure sensor has a metal outer ring 1 whose surface is coated with a nickel plating layer 1.
The silicon pedestal 7 is double-coated with a gold-plated layer 11 on the outside and a gold-plated layer 11 on the outside thereof. (not shown) is airtightly fixed to the peripheral edge of the vent hole 2 of the metal outer ring 1.
しかしながら、上記のように金属外環１の表面がニッケ
ルめっき層１０と金めっき層１１で二重被覆されている
と、金めつき層１１が極めて薄い場合、あるいはシリコ
ン台座７の固着のための加熱時間が長くなった場合、シ
リコン台座７の装着時に金−シリコン共晶層が金めつき
層１１の厚み全体にわたって形成され、該共晶層中のシ
リコンがニッケルめっき層１０と反応してニッケルめっ
き層ＩＯとの界面にニッケルシリサイドを生成すること
がある。このニッケルシリサイドは極めて脆い絶縁物で
あるため、ニッケルめっき層１０との界面にそのような
脆いニッケルシリサイドが生成すると、圧力検知時にシ
リコン台座７が気体や液体の圧力で金属外環１から剥脱
する恐れがあり、また剥脱しない場合でも、シリコン台
座７と金属外環ｌとの間に微小間隙を生じて圧力センサ
ー内外の圧力がリークする恐れがある。However, if the surface of the metal outer ring 1 is double coated with the nickel plating layer 10 and the gold plating layer 11 as described above, if the gold plating layer 11 is extremely thin or the If the heating time is longer, a gold-silicon eutectic layer is formed over the entire thickness of the gold plating layer 11 when the silicon pedestal 7 is attached, and the silicon in the eutectic layer reacts with the nickel plating layer 10 to form nickel. Nickel silicide may be generated at the interface with the plating layer IO. Since this nickel silicide is an extremely brittle insulator, if such brittle nickel silicide is generated at the interface with the nickel plating layer 10, the silicon pedestal 7 will peel off from the metal outer ring 1 due to the pressure of gas or liquid when pressure is detected. Furthermore, even if the silicon pedestal 7 and the metal outer ring 1 do not come off, there is a risk that a minute gap will be created between the silicon pedestal 7 and the metal outer ring l, causing pressure inside and outside the pressure sensor to leak.
前記の課題を解決するため、本発明の圧力センサー用気
密端子は、中央の開口の周りに複数のリード挿通孔を有
する金属外環の該リード挿通孔にリードを挿通してガラ
スで封着すると共に、金属外環の表面をニッケルめっき
層とその外側の金めつき層で二重被覆して成る圧力セン
サー用気密端子において、その金属外環の開口周縁部の
シリコン台座装着予定面を、ニッケルめっき層がない金
めつき層のみの単層被覆面としたことを特徴としている
。In order to solve the above problems, the airtight terminal for a pressure sensor of the present invention has a metal outer ring having a plurality of lead insertion holes around a central opening, and the leads are inserted into the lead insertion holes and sealed with glass. In addition, in an airtight terminal for a pressure sensor in which the surface of the metal outer ring is double-coated with a nickel plating layer and an outer gold plating layer, the surface where the silicon pedestal is to be attached at the periphery of the opening of the metal outer ring is coated with nickel. It is characterized by having a single-layer coated surface with only a gold plating layer, with no plating layer.
そして、この圧力センサー用気密端子を製造する本発明
の製造方法は、中央の開口の周りに複数のリード挿通孔
を有する金属外環の上記リード挿通孔にリードを挿通し
てガラスで封着した後又は封着する前に、金属外環の表
面にニッケルめっきを行い、この金属外環の開口周縁部
のシリコン台座固着予定面のニッケルめっき層を除去し
てから、更に金めつきを行うことを特徴としている。The manufacturing method of the present invention for manufacturing this airtight terminal for a pressure sensor involves inserting a lead into the lead insertion hole of a metal outer ring having a plurality of lead insertion holes around the central opening and sealing it with glass. After or before sealing, perform nickel plating on the surface of the metal outer ring, remove the nickel plating layer on the surface where the silicon pedestal is to be fixed at the periphery of the opening of this metal outer ring, and then perform gold plating. It is characterized by
本発明の圧力センサー用気密端子は、その金属外環の開
口周縁部のシリコン台座固着予定面を、ニッケフルめっ
き層がない金めつき層のみの単層被覆面としであるので
、圧力センサーの組立工程において金属外環のシリコン
台座固着予定面にシリコン台座を固着する際、加熱によ
りシリコン台座固着予定面の金めつき層の厚み全体にわ
たって金−シリコン共晶層が形成されても、該共晶層中
のシリコンがニッケル層と反応して脆いニッケルシリサ
イドを生成することはない。In the airtight terminal for a pressure sensor of the present invention, the surface on which the silicon pedestal is to be fixed at the opening periphery of the metal outer ring is a single-layer coated surface with only a gold plating layer without a nickel full plating layer, so that the pressure sensor can be assembled. When fixing a silicon pedestal to the silicon pedestal fixing surface of the metal outer ring in the process, even if a gold-silicon eutectic layer is formed over the entire thickness of the gold plating layer on the silicon pedestal fixing surface due to heating, the eutectic The silicon in the layer does not react with the nickel layer to form brittle nickel silicide.
また、本発明の製造方法は、ニッケルめっきを行った金
属外環の開口周縁部のシリコン台座固着予定面のニッケ
ルめっき層を除去してから更に金めつきを行うので、シ
リコン台座固着予定面が金めつき層のみの単層被覆面と
なる。Furthermore, in the manufacturing method of the present invention, gold plating is performed after removing the nickel plating layer on the surface to which the silicon pedestal is to be fixed at the periphery of the opening of the nickel-plated metal outer ring, so that the surface to which the silicon pedestal is to be fixed is removed. The surface is coated with a single layer of gold plating.
以下、図面を参照しながら本発明の実施例を詳述する。 Embodiments of the present invention will be described in detail below with reference to the drawings.
第１図は本発明の一実施例に係る圧力センサー用気密端
子の断面図、第２図は同気密端子の要部拡大断面図であ
る。FIG. 1 is a sectional view of an airtight terminal for a pressure sensor according to an embodiment of the present invention, and FIG. 2 is an enlarged sectional view of a main part of the airtight terminal.
第１図において、１はコバールや４２合金より成る金属
外環で、この金属外環ｌの中央には開口、例えば通気口
２が形成されており、この通気口２の周りには複数（こ
の実施例では４つ）のり−ド挿通孔４が形成されている
。この金属外環１の下面の通気口周縁部には気体導入用
のパイプ３がロウ付けされており、また金属外環１の外
周縁にはキャップ９を嵌合する段部１２が周設されてい
る。In Fig. 1, reference numeral 1 denotes a metal outer ring made of Kovar or 42 alloy, and an opening, for example, a vent hole 2, is formed in the center of this metal outer ring l. In the embodiment, four glued insertion holes 4 are formed. A pipe 3 for introducing gas is brazed to the periphery of the vent on the lower surface of the metal outer ring 1, and a stepped portion 12 into which a cap 9 is fitted is provided around the outer periphery of the metal outer ring 1. ing.
そして、この金属外環１の各リード挿通孔４にはリード
５がそれぞれ挿通され、ガラス６で封着されて圧力セン
サー用気密端子が構成され′ている。A lead 5 is inserted into each lead insertion hole 4 of the metal outer ring 1 and sealed with a glass 6 to form an airtight terminal for a pressure sensor.
上記の金属外環１の表面は、第２図に示すように、通気
口２周縁部のシリコン台座固着予定面１３を除いて、ニ
ッケルめっき層１０とその外側の金めつき層１１で二重
被覆されており、シリコン台座固着予定面１３はニッケ
ルめっき層１０のない金めつき層１１のみの単層被覆面
となっている。As shown in FIG. 2, the surface of the metal outer ring 1 is double coated with a nickel plating layer 10 and a gold plating layer 11 outside the nickel plating layer 10, except for the surface 13 where the silicon pedestal is to be fixed at the peripheral edge of the vent hole 2. The surface 13 to which the silicon pedestal is to be fixed is a single layer coated surface of only the gold plating layer 11 without the nickel plating layer 10.
ニッケルめっき層１０は金属外環１を保護する下地めっ
き層であり、その厚さは２〜５μｍ程度であることが好
ましい。２μより薄くなると金属外環１の保護が不充分
となり、逆に５μｍより厚くなるとめっき時間が長くな
り、消費電力も多くなる等の不都合を生じるからである
。これに対し、金めつき層１１は金−シリコン共晶層を
形成してシリコン台座を気密に固着するためのものであ
り、その厚さは少なくとも１．２μｍ以上であることが
好ましい。１．２μｍより薄くなると、充分な金−シリ
コン共晶層の形成が困難となってシリコン台座の固着強
度や気密性の低下を招く恐れがある。The nickel plating layer 10 is a base plating layer that protects the metal outer ring 1, and preferably has a thickness of about 2 to 5 μm. This is because if it is thinner than 2 μm, the protection of the metal outer ring 1 will be insufficient, and if it is thicker than 5 μm, the plating time will be longer and power consumption will be increased. On the other hand, the gold plating layer 11 is for forming a gold-silicon eutectic layer to airtightly fix the silicon pedestal, and preferably has a thickness of at least 1.2 μm or more. When the thickness is less than 1.2 μm, it becomes difficult to form a sufficient gold-silicon eutectic layer, which may lead to a decrease in the fixing strength and airtightness of the silicon pedestal.
以上のように構成された圧力センサー用気密端子は、圧
力センサー組立工程において、金属外環１の通気口２周
縁部のシリコン台座固着予定面１３にシリコン台座７が
気密に固着され、該台座７に圧力検知用のダイアフラム
８が気密に取付けられる。そして、このダイアフラム８
の各端子と各リード５がワイヤーボンディングされ、そ
の上からキャップ９が金属外環１の段部１２に気密に固
着されて、圧力センサーが組立てられる。この場合、金
属外環１のシリコン台座固着予定面１３へのシリコン台
座７の固着は、従来と同様に加熱により該シリコン台座
７と金めっき層１１との接合界面に金−シリコン共晶層
（図示せず）を形成させることによって行われるが、そ
の際、金めつき層Ｉｆの厚み全体にわたって金−シリコ
ン共晶層がされたとしても、シリコン台座固着予定面１
３はニッケルめっき層１０のない金めつきｆｆ１ｌｌの
みの単層被覆面であるから、金−シリコン共晶層中のシ
リコンがニッケル層と反応して脆いニッケルシリサイド
を生成することはない。従って、本発明の気密端子を用
いて組立てた圧力センサーは、金属外環ｌのシリコン台
座固着予定面１３とシリコン台座７の固着強度や気密性
が優れているので、圧力検知時にシリコン台座７が気体
圧で金属外環１から剥脱したり、シリコン台座７と金属
外環１との間に微小間隙を生じて圧力センサー内外の気
体や液体がリークしたりする恐れが皆無に等しくなる。In the pressure sensor airtight terminal configured as described above, in the pressure sensor assembly process, the silicon pedestal 7 is hermetically fixed to the silicon pedestal fixing surface 13 at the peripheral edge of the vent 2 of the metal outer ring 1. A diaphragm 8 for pressure detection is airtightly attached to. And this diaphragm 8
Each terminal and each lead 5 are wire-bonded, and the cap 9 is hermetically fixed to the stepped portion 12 of the metal outer ring 1 from above, thereby assembling the pressure sensor. In this case, the silicon pedestal 7 is fixed to the silicon pedestal fixing surface 13 of the metal outer ring 1 by heating, as in the conventional method, to form a gold-silicon eutectic layer ( At that time, even if a gold-silicon eutectic layer is formed over the entire thickness of the gold plating layer If, the silicon pedestal fixing surface 1
Since 3 is a single layer coated surface of only gold plating ff1ll without the nickel plating layer 10, the silicon in the gold-silicon eutectic layer does not react with the nickel layer to form brittle nickel silicide. Therefore, the pressure sensor assembled using the airtight terminal of the present invention has excellent adhesion strength and airtightness between the silicon pedestal fixing surface 13 of the metal outer ring l and the silicon pedestal 7, so that the silicon pedestal 7 is fixed when pressure is detected. There is almost no possibility that the metal outer ring 1 will come off due to gas pressure or that a minute gap will be created between the silicon pedestal 7 and the metal outer ring 1 and that gas or liquid inside and outside the pressure sensor will leak.
次に、本発明製造方法の実施例を詳述する。Next, examples of the manufacturing method of the present invention will be described in detail.
本発明の製造方法は、リード５を金属外環１のυ〜ド挿
通孔４に封着する前に金属外環１をめっき処理する実施
例と、リード５を封着した後めっき処理する実施例に大
別される。The manufacturing method of the present invention includes an embodiment in which the metal outer ring 1 is plated before the lead 5 is sealed in the υ~D insertion hole 4 of the metal outer ring 1, and an embodiment in which the metal outer ring 1 is plated after the lead 5 is sealed. It can be broadly classified into examples.
前者の場合は、予めバイブ３をロウ付けする前の金属外
環１をバレルめっき装置等に入れて、金属外環１の表面
全体にニッケルめっきを行い、所定厚みのニッケルめっ
き層ｌＯを形成する。このように金属外環１のめっき処
理が終わると、金属外環１の各リード挿通孔４にリード
５とガラス６を挿入し、加熱炉でガラス６を加熱溶融さ
せてリード５を封着し、圧力センサー用気密端子を得る
。In the former case, the metal outer ring 1 before the vibrator 3 is brazed is placed in a barrel plating device or the like, and the entire surface of the metal outer ring 1 is plated with nickel to form a nickel plating layer lO of a predetermined thickness. . When the plating process of the metal outer ring 1 is completed in this way, the leads 5 and glass 6 are inserted into each lead insertion hole 4 of the metal outer ring 1, and the glass 6 is heated and melted in a heating furnace to seal the leads 5. , obtain an airtight terminal for pressure sensor.
そして、この圧力センサー用気密端子の金属外環１の通
気口２周縁部のシリコン台座固着予定面１３のニッケル
めっき層を除去してから、更に別途ニ・７ケルめっきを
施しておいたバイブ３をロウ付けして全体に金めつきを
行い、所定厚みの金めつき層１０を形成する。このよう
にすると、金属外環１のシリコン台座固着予定面１３は
、ニッケルめっき層１０がない金めつき層１１のみの単
層被覆面となり、それ以外の表面はニッケルめっき層１
０とその外側の金めつき層１０で二重被覆されることに
なる。After removing the nickel plating layer on the silicon pedestal fixing surface 13 at the peripheral edge of the vent hole 2 of the metal outer ring 1 of this pressure sensor airtight terminal, the vibrator 3 was further plated with Nickel 7. The whole is gold-plated by brazing to form a gold-plated layer 10 of a predetermined thickness. In this way, the silicon pedestal fixing surface 13 of the metal outer ring 1 becomes a single layer coated surface of only the gold plating layer 11 without the nickel plating layer 10, and the other surfaces are coated with the nickel plating layer 1.
0 and the outer gold plating layer 10.
シリコン台座固着予定面１３のニッケルめっき層１０の
除去する手段としては種々の手段を採用できるが、好ま
しい除去手段としては、第３図に示すように砥石１４を
回転させながら金属外環Ｉのシリコン台座固着予定面１
３に圧接して該予定面１３のニッケルめっき１１１０を
研磨除去する手段が挙げられる。Although various means can be used to remove the nickel plating layer 10 on the surface 13 to which the silicon pedestal is to be fixed, a preferable method is to remove the silicon on the metal outer ring I while rotating the grindstone 14 as shown in FIG. Pedestal fixing surface 1
For example, the nickel plating 1110 on the scheduled surface 13 can be removed by pressing the nickel plating 1110 on the planned surface 13.
後者の実施例の場合は、めっき処理をしていない金属外
環１の各リード挿通孔４にリード５とガラス６を挿入し
、加熱炉でガラス６を加熱溶融させてリード５を封着し
てから、バイブ３をロウ付けし、これをバレルめっき装
置等に入れて表面全体にニッケルめっきを行い、所定厚
みのニッケルめっき層１０を形成する。そして、金属外
環１のシリコン台座固着予定面１３のニッケルめっき層
１０を前記の回転砥石１４によって研暦除去してから、
更に全面に金めつきを行い、所定厚みの金めつき層１０
を形成して、圧力センサー用気密端子を得る。In the case of the latter embodiment, the leads 5 and glass 6 are inserted into each lead insertion hole 4 of the unplated metal outer ring 1, and the glass 6 is heated and melted in a heating furnace to seal the leads 5. Then, the vibrator 3 is brazed, and placed in a barrel plating device or the like, and the entire surface is nickel plated to form a nickel plating layer 10 of a predetermined thickness. Then, the nickel plating layer 10 on the silicon pedestal fixing surface 13 of the metal outer ring 1 is removed by the grindstone 14, and then
Furthermore, gold plating is performed on the entire surface, and a gold plating layer 10 of a predetermined thickness is formed.
to obtain an airtight terminal for the pressure sensor.
以上の説明から明らかなように、本発明の圧力センサー
用気密端子は、金属外環の開口周縁部のシリコン台座固
着予定面を、ニッケツルめっき層のない金めつき層のみ
の単層被覆面とすることにより、該シリコン台座固着予
定面にシリコン台座を固着しても脆いニッケルシリサイ
ドが生成されないようにしたため、シリコン台座の固着
強度が大きく気密性が高い圧力センサーを得ることがで
き、圧力検知時にシリコン台座が流体圧で剥脱したり、
シリコン台座と金属外環との間に生じた微小間隙を通じ
て圧力センサー内外の圧力がリークするのを満足に防止
できるといった効果を奏する。As is clear from the above description, in the airtight terminal for a pressure sensor of the present invention, the surface on which the silicon pedestal is to be fixed at the periphery of the opening of the metal outer ring is a single-layer covered surface consisting of only a gold plating layer without a nickel plating layer. By doing this, brittle nickel silicide is not generated even if the silicon pedestal is fixed to the surface to which the silicon pedestal is to be fixed, making it possible to obtain a pressure sensor with high adhesion strength of the silicon pedestal and high airtightness. The silicon pedestal may peel off due to fluid pressure,
This has the effect of satisfactorily preventing pressure inside and outside the pressure sensor from leaking through the minute gap created between the silicon pedestal and the metal outer ring.
そして、本発明の製造方法によれば、このような圧力セ
ンサー用気密端子を、何ら特別な装置を用いないで能率
良く且つ容易に大量生産することができる。According to the manufacturing method of the present invention, such airtight terminals for pressure sensors can be efficiently and easily mass-produced without using any special equipment.
【図面の簡単な説明】
第１図は本発明の一実施例に係る圧力センサ用気密端子
の断面図、第２図は同気密端子の要部拡大断面図、第３
図はニッケルめっき層の除去手段の一例を示す説明図で
ある。
第４図は従来の圧力センサーの断面図、第５図は同圧力
センサーの要部拡大断面図である。
■・・・金属外環、
２・・・開口（通気口）、
４・・・リード挿通孔、
５・・・リード、
６・・・ガラス、
７・・・シリコン台座、
１０・・・ニッケルめっき層、
１１・・・金めつき層、
１３・・・シリコン台座固着予定面。
第１図[Brief Description of the Drawings] Fig. 1 is a sectional view of an airtight terminal for a pressure sensor according to an embodiment of the present invention, Fig. 2 is an enlarged sectional view of a main part of the airtight terminal, and Fig. 3 is an enlarged sectional view of a main part of the airtight terminal.
The figure is an explanatory view showing an example of a means for removing a nickel plating layer. FIG. 4 is a sectional view of a conventional pressure sensor, and FIG. 5 is an enlarged sectional view of a main part of the same pressure sensor. ■...Metal outer ring, 2...Opening (vent), 4...Lead insertion hole, 5...Lead, 6...Glass, 7...Silicon pedestal, 10...Nickel Plating layer, 11... Gold plating layer, 13... Silicon pedestal fixing surface. Figure 1
Claims (2)
金属外環の該リード挿通孔にリードを挿通してガラスで
封着すると共に、金属外環の表面をニッケルめっき層と
その外側の金めっき層で二重被覆して成る圧力センサー
用気密端子において、上記金属外環の開口周縁部のシリ
コン台座固着予定面を、ニッケルめっき層がない金めっ
き層のみの単層被覆面としたことを特徴とする圧力セン
サー用気密端子。(1) A metal outer ring has multiple lead insertion holes around the central opening. Leads are inserted into the lead insertion holes and sealed with glass, and the surface of the metal outer ring is coated with a nickel plating layer and the outer layer. In an airtight terminal for a pressure sensor that is double coated with a gold plating layer, the surface on which the silicon pedestal is to be fixed at the periphery of the opening of the metal outer ring is a single layer coated surface of only the gold plating layer without the nickel plating layer. An airtight terminal for pressure sensors featuring:
金属外環の上記リード挿通孔にリードを挿通してガラス
で封着した後又は封着する前に、金属外環の表面にニッ
ケルめっきを行い、この金属外環の開口周縁部のシリコ
ン台座固着予定面のニッケルめっき層を除去してから、
更に金属外環に金めっきを行うことを特徴とする圧力セ
ンサー用気密端子の製造方法。(2) After or before inserting the lead into the lead insertion hole of the metal outer ring that has multiple lead insertion holes around the central opening and sealing it with glass, apply nickel to the surface of the metal outer ring. After plating and removing the nickel plating layer on the surface where the silicon pedestal is to be fixed around the opening of this metal outer ring,
A method for manufacturing an airtight terminal for a pressure sensor, further comprising gold plating the metal outer ring.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6949289A JPH02248827A (en) | 1989-03-22 | 1989-03-22 | Airtight terminal for pressure sensor and manufacture thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6949289A JPH02248827A (en) | 1989-03-22 | 1989-03-22 | Airtight terminal for pressure sensor and manufacture thereof |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02248827A true JPH02248827A (en) | 1990-10-04 |
Family
ID=13404261
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6949289A Pending JPH02248827A (en) | 1989-03-22 | 1989-03-22 | Airtight terminal for pressure sensor and manufacture thereof |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02248827A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000162070A (en) * | 1998-11-27 | 2000-06-16 | Matsushita Electric Works Ltd | Semiconductor pressure sensor |
| US6491979B1 (en) | 1998-07-17 | 2002-12-10 | Daikin Industries, Ltd. | Fluorine-containing surface treatment composition |
-
1989
- 1989-03-22 JP JP6949289A patent/JPH02248827A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6491979B1 (en) | 1998-07-17 | 2002-12-10 | Daikin Industries, Ltd. | Fluorine-containing surface treatment composition |
| JP2000162070A (en) * | 1998-11-27 | 2000-06-16 | Matsushita Electric Works Ltd | Semiconductor pressure sensor |
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