JPH02246389A - Gas laser oscillator - Google Patents
Gas laser oscillatorInfo
- Publication number
- JPH02246389A JPH02246389A JP6884689A JP6884689A JPH02246389A JP H02246389 A JPH02246389 A JP H02246389A JP 6884689 A JP6884689 A JP 6884689A JP 6884689 A JP6884689 A JP 6884689A JP H02246389 A JPH02246389 A JP H02246389A
- Authority
- JP
- Japan
- Prior art keywords
- gas pressure
- gas
- gear chamber
- laser
- solenoid valve
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000003595 mist Substances 0.000 claims abstract description 15
- 230000010355 oscillation Effects 0.000 claims description 16
- 230000001105 regulatory effect Effects 0.000 claims description 8
- 230000003287 optical effect Effects 0.000 claims description 3
- 238000007599 discharging Methods 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 2
- 238000000605 extraction Methods 0.000 description 2
- 238000011144 upstream manufacturing Methods 0.000 description 2
- 239000003795 chemical substances by application Substances 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/02—Constructional details
- H01S3/03—Constructional details of gas laser discharge tubes
- H01S3/036—Means for obtaining or maintaining the desired gas pressure within the tube, e.g. by gettering, replenishing; Means for circulating the gas, e.g. for equalising the pressure within the tube
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Optics & Photonics (AREA)
- Lasers (AREA)
Abstract
Description
【発明の詳細な説明】
産業上の利用分野
本発明は、各種レーザ加工などに用いる放電管の軸方向
と光軸方向が一致したガスレーザ発振装置に関するもの
である。DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application The present invention relates to a gas laser oscillation device in which the axial direction of a discharge tube and the optical axis direction coincide with each other for use in various laser processing.
従来の技術
従来のガスレーザ発振装置は、第４図に示すものであっ
た。この図において、ガラスなどの誘電体からなる放電
管１には全反射鏡２と部分反射鏡３を、この放電管１の
放電空間４の両端に固定配置して光共振器を形成してい
る。前記部分反射鏡３からはレーザビーム５が出力する
。放電管１の放電空間４と、その両端部付近を連通ずる
送気管６と、放電空間４の中央部と送気管６の中央部と
を連通し、放電空間４での放電により温度上昇したレー
ザガスの温度を低下させるための熱交換器７．８および
この熱交換器７．８の間に配置゛しし−ザガスを循環さ
せるブロワ９を配設した管路１０とで循環路を形成し、
レーザガスは矢印Ｍの方向に循環している。2. Description of the Related Art A conventional gas laser oscillation device is shown in FIG. In this figure, a discharge tube 1 made of a dielectric material such as glass has a total reflection mirror 2 and a partial reflection mirror 3 fixedly arranged at both ends of a discharge space 4 of the discharge tube 1 to form an optical resonator. . A laser beam 5 is output from the partially reflecting mirror 3. The discharge space 4 of the discharge tube 1 is connected to the air pipe 6 which communicates with the vicinity of both ends of the discharge space 4, and the central part of the discharge space 4 and the central part of the air pipe 6 are connected, and the laser gas whose temperature has increased due to the discharge in the discharge space 4 is connected. A circulation path is formed by a heat exchanger 7.8 for reducing the temperature of the heat exchanger 7.8 and a pipe 10 having a blower 9 disposed between the heat exchanger 7.8 and a blower 9 for circulating the gas,
Laser gas is circulating in the direction of arrow M.
第５図には、前記ブロワ９の周辺の詳細な構造を示して
いる。前記熱交換器７，８およびブロワ９を配設した管
路１０のブロワ９の下流側に、常時一定量の新しいレー
ザガスを補給するためのレーザガス補絵管１１を接続し
、またブロワ９の上流側にレーザガス引抜管１２の一端
側を接続し、このレーザガス引抜管１２には他端側に前
記レーザガス補絵管１１により補給した量に相当する量
のレーザガスを常時系外へ排出するための真空ポンプ１
３を接続するとともに、前記真空ポンプ！３の近傍にレ
ーザガス系内のレーザガス圧を一定にするためのガス圧
調整電磁弁工４を、管路ｌＯの近傍にレーザガス系内へ
のオイルミスト流入を防止するためのガスフィルタ１５
をそれぞれ配設し、さらに前記ブロワ９のギア室９ａと
レーザガス引抜管１２のガス圧調整電磁弁１４の上流側
とを連通ずる吸引管１６を設け、ブロワ９のギア室９ａ
から発生するオイルミストをトラップし液化して前記ギ
ア室９ａに戻すためのオイルトラップ１７を配設してい
る。また前記管路１０のレーザガス引抜管１２の接続部
付近にレーザガス圧を検出するためのガス圧センサ１８
を設置し。FIG. 5 shows a detailed structure around the blower 9. A laser gas supplementary pipe 11 is connected to the downstream side of the blower 9 of the conduit 10 in which the heat exchangers 7, 8 and the blower 9 are arranged, and the laser gas supplementary pipe 11 is connected to the upstream side of the blower 9 for constantly replenishing a constant amount of new laser gas. One end side of a laser gas extraction tube 12 is connected to the side, and a vacuum is provided at the other end of the laser gas extraction tube 12 for constantly discharging an amount of laser gas corresponding to the amount supplied by the laser gas supplementary picture tube 11 to the outside of the system. pump 1
3 and the vacuum pump! A gas pressure adjusting solenoid valve 4 for keeping the laser gas pressure in the laser gas system constant is provided near the pipe 10, and a gas filter 15 is provided near the pipe 10 for preventing oil mist from flowing into the laser gas system.
Further, a suction pipe 16 is provided that communicates the gear chamber 9a of the blower 9 with the upstream side of the gas pressure adjustment solenoid valve 14 of the laser gas drawing pipe 12, and the gear chamber 9a of the blower 9 is
An oil trap 17 is provided for trapping oil mist generated from the engine, liquefying it, and returning it to the gear chamber 9a. Further, a gas pressure sensor 18 for detecting the laser gas pressure is located near the connection part of the laser gas drawing pipe 12 of the pipeline 10.
Set up.
かつ設定ガス圧と前記ガス圧センサ１８からの信号を比
較して前記ガス正調ｍｆｌ磁弁１４を開閉するための自
動制御回路１９を設けている。Further, an automatic control circuit 19 is provided for comparing the set gas pressure and the signal from the gas pressure sensor 18 to open and close the gas regular adjustment mfl magnetic valve 14.
上記の従来のガスレーザ装置における、レーザガス圧を
一定にするその動作について説明する。The operation of keeping the laser gas pressure constant in the conventional gas laser device described above will be described.
レーザガス補絵管１１から常時新しいレーザガスが補給
されてくるので、補給量の分だけ真空ポンプ１３により
レーザガス系外に排出してやらなければならない、その
とき、真空ポンプ１３の排気速度の変動などの影響を除
外するためにガス圧調整電磁弁１４を自動制御回路１９
により開閉し排気量を調整する。自動制御回路１９はガ
ス圧センサＩ８からの情輻と設定ガス圧とを常時比較し
てレーザガス系内のガス圧を一定になるようにガス圧調
整電磁弁１４を制御している。Since new laser gas is constantly replenished from the laser gas supplementary picture tube 11, the amount of replenishment must be discharged from the laser gas system by the vacuum pump 13. At this time, the influence of fluctuations in the pumping speed of the vacuum pump 13 must be taken into consideration. Automatic control circuit 19 to exclude gas pressure regulating solenoid valve 14
Open and close to adjust exhaust volume. The automatic control circuit 19 constantly compares the information from the gas pressure sensor I8 and the set gas pressure, and controls the gas pressure adjustment solenoid valve 14 so that the gas pressure in the laser gas system is constant.
発明が解決しようとする課題
しかし第６図に示すように、ブロワ９のギア室９ａの内
部のガス圧がガス圧調整電磁弁１４の開閉により変動す
るために、ギア室９ａの内部のオイルミストが多量にオ
イルトラップ１７に流入する。Problem to be Solved by the Invention However, as shown in FIG. 6, since the gas pressure inside the gear chamber 9a of the blower 9 fluctuates due to the opening and closing of the gas pressure regulating solenoid valve 14, oil mist inside the gear chamber 9a A large amount of oil flows into the oil trap 17.
その結果、オイルトラップ１７ではとりきれなかったオ
イルミストがガス圧調整電磁弁１４に流入し、前記ガス
圧調整電磁弁１４を固着させるなど１機能を麻痺させガ
ス圧コントロールが不可能になるという問題があった。As a result, the oil mist that could not be removed by the oil trap 17 flows into the gas pressure regulating solenoid valve 14, causing the gas pressure regulating solenoid valve 14 to become stuck, paralyzing one function, and making it impossible to control the gas pressure. was there.
この発明は、かかる問題を解決するためになされたもの
で、ブロワのギア室からのオイルミスト流出を最少限に
抑制し、信頼性の高い安定したガスレーザ発振装置を提
供することを目的とする。The present invention was made to solve this problem, and an object of the present invention is to provide a highly reliable and stable gas laser oscillation device that minimizes the outflow of oil mist from the gear chamber of the blower.
課題を解決するための手段
上記課題を解決するために本発明のガスレーザ発振装置
は、ブロワのギア室のガス圧を一定にするためのギア室
電磁弁およびブロワのギア室内のガス圧を検出するため
のギア室ガス圧センサを設け、前記ギア室ガス圧センサ
の信号によりギア室電磁弁を自動制御回路を用いて制御
するようにしたものである。Means for Solving the Problems In order to solve the above problems, the gas laser oscillation device of the present invention includes a gear chamber solenoid valve for making the gas pressure in the gear chamber of the blower constant, and a gear chamber solenoid valve that detects the gas pressure in the gear chamber of the blower. A gear chamber gas pressure sensor is provided for the gear chamber gas pressure sensor, and a gear chamber solenoid valve is controlled using an automatic control circuit based on a signal from the gear chamber gas pressure sensor.
作用
上記構成により、ギア室ガス圧センサの信号に基づいて
ギア室電磁弁を自動制御回路を用いて制御して、ブロワ
のギア室のガス圧を一定にすることができ、それにより
ブロワのギア室からのオイルミストの流出を防止し、ガ
ス正調１１１を磁弁を問題なく動作させることができる
。Effect With the above configuration, it is possible to control the gear chamber solenoid valve using the automatic control circuit based on the signal from the gear chamber gas pressure sensor to keep the gas pressure in the gear chamber of the blower constant. It is possible to prevent oil mist from flowing out of the chamber and to operate the gas control valve 111 without any problem.
実施例 以下１本発明の実施例を図面に基づいて説明する。Example An embodiment of the present invention will be described below based on the drawings.
第１図は本発明の一実施例のガスレーザ発振装置におけ
る要部の概略構成図である。なお本実施例のガスレーザ
発振装置は、上記の第４図と第５図に示す従来のガスレ
ーザ発振装置と基本的構造は同一であり、したがって同
一部材は同一゛符号を付し、かつ従来との相違部分だけ
を説明し、その他の説明を省略する。第１図において、
吸引管１６のオイルトラップ１７の出口側にギア室電磁
弁２０を設け、かつブロワ９のギア室９ａの内部にギア
室ガス圧センサ２１を設ける。そして、自動制御回路１
９により、ギア室ガス圧センサ２１からの信号を常時設
定ガス圧信号と比較して、ギア室９ａの内部のガス圧が
一定かつ設定ガス圧になるようにギア室電磁弁２０を開
閉するように設定している。このとき、設定ガス圧はブ
ロワ９の吸入レーザガス圧と同じとする。その理由は、
ブロワ９のギア室９ａとロータ室９ｂのシール部を介し
てのオイルミストのロータ室９ｂの内部への逆流を防ぐ
ためである。そのときのブロワ９のギア室９ａの内部の
ガス圧力の様子を従来例と比較したのが第２図であるが
１本実施例のガスレーザ発振装置ではブロワのギア室９
ａの内部のガス圧力がガス圧調整電磁弁１４の開閉にも
かかわらず、一定に保たれていることがわかる。また、
第３図に示すように従来例に比べ本実施例のガスレーザ
発振装置においては、オイルミスト発生量が著しく少な
く、シたがってガス圧調整電磁弁１４へ流入するオイル
ミストは激減して、前記ガス圧調整電磁弁１４を長期間
円滑に動作させることができ、極めて信頼性の高ぃ安定
した性能を有している。FIG. 1 is a schematic diagram of the main parts of a gas laser oscillation device according to an embodiment of the present invention. The gas laser oscillation device of this embodiment has the same basic structure as the conventional gas laser oscillation device shown in FIGS. Only the different parts will be explained and other explanations will be omitted. In Figure 1,
A gear chamber solenoid valve 20 is provided on the outlet side of the oil trap 17 of the suction pipe 16, and a gear chamber gas pressure sensor 21 is provided inside the gear chamber 9a of the blower 9. And automatic control circuit 1
9, the signal from the gear chamber gas pressure sensor 21 is constantly compared with the set gas pressure signal, and the gear chamber solenoid valve 20 is opened and closed so that the gas pressure inside the gear chamber 9a is constant and equal to the set gas pressure. It is set to . At this time, the set gas pressure is the same as the suction laser gas pressure of the blower 9. The reason is,
This is to prevent oil mist from flowing back into the rotor chamber 9b through the seal portion between the gear chamber 9a and rotor chamber 9b of the blower 9. Figure 2 shows a comparison of the gas pressure inside the gear chamber 9a of the blower 9 with that of the conventional example.
It can be seen that the gas pressure inside a is kept constant despite the opening and closing of the gas pressure regulating solenoid valve 14. Also,
As shown in FIG. 3, compared to the conventional example, in the gas laser oscillation device of this embodiment, the amount of oil mist generated is significantly smaller, and therefore, the amount of oil mist flowing into the gas pressure regulating solenoid valve 14 is drastically reduced, and the gas The pressure regulating solenoid valve 14 can operate smoothly for a long period of time, and has extremely reliable and stable performance.
発明の効果
以上のように、本発明のガスレーザ発振装置においては
、ブロワのギア室のガス圧を一定にするためのギア室電
磁弁とギア室内のガス圧を検出するギア室ガス圧センサ
とを設けたことにより、ギア室内のガス圧が一定に保た
れ、オイルミストの発生が激減し、信頼性が高く安定で
、レーザ加工にすぐれた性能を発揮する。Effects of the Invention As described above, the gas laser oscillation device of the present invention includes a gear chamber solenoid valve for keeping the gas pressure in the gear chamber of the blower constant and a gear chamber gas pressure sensor for detecting the gas pressure in the gear chamber. By installing this, the gas pressure in the gear chamber is kept constant, the generation of oil mist is drastically reduced, and it is highly reliable and stable, and exhibits excellent performance in laser processing.
第１図は本発明の一実施例のガスレーザ発振装置におけ
る要部の概略構成図、第２図は同ガスレーザ発振装置に
おけるブロワのギア室内ガス圧の変動を示す図、第３図
は同ガスレーザ発振装置と従来例とのオイルミスト発生
量を示す図、第４図は従来のガスレーザ発振装置の全体
構成図、第５図は同従来のガスレーザ発振装置の要部の
構成図、第６図は同従来のガスレーザ発振装置における
ブロワのギア室内ガス圧の変動を示す図である。
１・・・放電管、９・・・ブロワ、９ａ・・・ギア室、
１１・・・レーザガス補絵管、１３・・・真空ポンプ
、１４・・・ガス圧調整電磁弁、１５・・・ガスフィル
タ、１７・・・オイルトラップ、 １８・・・ガス圧セ
ンサ、 １９・・・自動制御回路、２０・・・ギア室電
磁弁、２１・・・ギア室ガス圧センサ。
代理人 森 本 義 弘
第３図
４ＦＩＪ’１
第４図Fig. 1 is a schematic configuration diagram of the main parts of a gas laser oscillation device according to an embodiment of the present invention, Fig. 2 is a diagram showing fluctuations in gas pressure in the gear chamber of a blower in the same gas laser oscillation device, and Fig. 3 is a diagram showing the gas laser oscillation device. Figure 4 shows the overall configuration of the conventional gas laser oscillation device, Figure 5 shows the configuration of the main parts of the conventional gas laser oscillation device, and Figure 6 shows the amount of oil mist generated between the device and the conventional example. It is a figure which shows the fluctuation|variation of the gas pressure in the gear chamber of the blower in the conventional gas laser oscillation device. 1...Discharge tube, 9...Blower, 9a...Gear room,
11... Laser gas supplementary picture tube, 13... Vacuum pump, 14... Gas pressure adjustment solenoid valve, 15... Gas filter, 17... Oil trap, 18... Gas pressure sensor, 19. ...Automatic control circuit, 20...Gear chamber solenoid valve, 21...Gear chamber gas pressure sensor. Agent Yoshihiro MorimotoFigure 3 4FIJ'1 Figure 4
Claims (1)
ガスを流すためのブロワ、前記レーザガス系内のレーザ
ガス圧を一定にするためのガス圧調整電磁弁、前記ブロ
ワのギア室から発生するオイルミストをトラップし液化
して前記ギア室にもどすためのオイルトラップ、前記ギ
ア室のガス圧を一定にするためのギア室電磁弁、前記ブ
ロワの吸入レーザガス圧を検出するためのガス圧センサ
、前記ギア室のガス圧を検出するためのギア室ガス圧セ
ンサ、設定ガス圧に対し前記ガス圧センサ信号と比較し
て前記ガス圧調整電磁弁および前記ギア室電磁弁を開閉
するための自動制御回路、常時一定量の新しいレーザガ
スを補給するためのレーザガス補絵管、レーザガス系内
ヘのオイルミスト流入を防止するためのガスフィルタお
よび前記レーザガス系内に補給した量のレーザガスを常
時前記レーザガス系外に排出するための真空ポンプを具
備したことを特徴とするガスレーザ発振装置。1. A blower for flowing laser gas in the optical axis direction within the laser gas system including the discharge tube, a gas pressure adjustment solenoid valve for keeping the laser gas pressure in the laser gas system constant, and trapping oil mist generated from the gear chamber of the blower. an oil trap for liquefying the gas and returning it to the gear chamber; a gear chamber solenoid valve for keeping the gas pressure in the gear chamber constant; a gas pressure sensor for detecting the suction laser gas pressure of the blower; a gear chamber gas pressure sensor for detecting gas pressure; an automatic control circuit for comparing the gas pressure sensor signal with respect to a set gas pressure to open and close the gas pressure regulating solenoid valve and the gear chamber solenoid valve; always constant; A laser gas supplementary tube for replenishing a new amount of laser gas, a gas filter for preventing oil mist from entering into the laser gas system, and a device for constantly discharging the amount of laser gas replenished into the laser gas system to the outside of the laser gas system. A gas laser oscillation device characterized by being equipped with a vacuum pump.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6884689A JPH02246389A (en) | 1989-03-20 | 1989-03-20 | Gas laser oscillator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6884689A JPH02246389A (en) | 1989-03-20 | 1989-03-20 | Gas laser oscillator |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02246389A true JPH02246389A (en) | 1990-10-02 |
Family
ID=13385458
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6884689A Pending JPH02246389A (en) | 1989-03-20 | 1989-03-20 | Gas laser oscillator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02246389A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2010103777A1 (en) * | 2009-03-12 | 2010-09-16 | パナソニック株式会社 | Laser oscillator and laser material processing machine |
| JP2010212551A (en) * | 2009-03-12 | 2010-09-24 | Panasonic Corp | Laser oscillation device and laser beam machine |
-
1989
- 1989-03-20 JP JP6884689A patent/JPH02246389A/en active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2010103777A1 (en) * | 2009-03-12 | 2010-09-16 | パナソニック株式会社 | Laser oscillator and laser material processing machine |
| JP2010212551A (en) * | 2009-03-12 | 2010-09-24 | Panasonic Corp | Laser oscillation device and laser beam machine |
| CN102341976A (en) * | 2009-03-12 | 2012-02-01 | 松下电器产业株式会社 | Laser oscillator and laser material processing machine |
| JP5218639B2 (en) * | 2009-03-12 | 2013-06-26 | パナソニック株式会社 | Laser oscillation device and laser processing machine |
| US9379511B2 (en) | 2009-03-12 | 2016-06-28 | Panasonic Intellectual Property Management Co., Ltd. | Laser oscillator and laser machining apparatus |
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