JPH0224322B2 - - Google Patents
Info
- Publication number
- JPH0224322B2 JPH0224322B2 JP11781681A JP11781681A JPH0224322B2 JP H0224322 B2 JPH0224322 B2 JP H0224322B2 JP 11781681 A JP11781681 A JP 11781681A JP 11781681 A JP11781681 A JP 11781681A JP H0224322 B2 JPH0224322 B2 JP H0224322B2
- Authority
- JP
- Japan
- Prior art keywords
- pattern
- circuit
- corner
- information
- area
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000013461 design Methods 0.000 claims description 45
- 238000001514 detection method Methods 0.000 claims description 37
- 238000007689 inspection Methods 0.000 claims description 35
- 238000003860 storage Methods 0.000 description 24
- 230000007547 defect Effects 0.000 description 23
- 238000010586 diagram Methods 0.000 description 19
- 238000003384 imaging method Methods 0.000 description 19
- 238000003708 edge detection Methods 0.000 description 17
- 238000005520 cutting process Methods 0.000 description 16
- 239000000428 dust Substances 0.000 description 9
- 238000000605 extraction Methods 0.000 description 9
- 238000000034 method Methods 0.000 description 9
- 238000012360 testing method Methods 0.000 description 7
- 238000012546 transfer Methods 0.000 description 6
- 239000000284 extract Substances 0.000 description 4
- 230000000717 retained effect Effects 0.000 description 4
- 206010047571 Visual impairment Diseases 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000011159 matrix material Substances 0.000 description 3
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- 238000011960 computer-aided design Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 230000005764 inhibitory process Effects 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 230000004044 response Effects 0.000 description 2
- 238000005070 sampling Methods 0.000 description 2
- 230000008859 change Effects 0.000 description 1
- 238000012937 correction Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000009499 grossing Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T7/00—Image analysis
- G06T7/0002—Inspection of images, e.g. flaw detection
- G06T7/0004—Industrial image inspection
- G06T7/001—Industrial image inspection using an image reference approach
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T2207/00—Indexing scheme for image analysis or image enhancement
- G06T2207/30—Subject of image; Context of image processing
- G06T2207/30108—Industrial image inspection
- G06T2207/30164—Workpiece; Machine component
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Biochemistry (AREA)
- Theoretical Computer Science (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Quality & Reliability (AREA)
- Analytical Chemistry (AREA)
- Computer Vision & Pattern Recognition (AREA)
- General Health & Medical Sciences (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56117816A JPS5821107A (ja) | 1981-07-29 | 1981-07-29 | パタ−ン検査装置 |
| US06/400,681 US4479145A (en) | 1981-07-29 | 1982-07-22 | Apparatus for detecting the defect of pattern |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56117816A JPS5821107A (ja) | 1981-07-29 | 1981-07-29 | パタ−ン検査装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5821107A JPS5821107A (ja) | 1983-02-07 |
| JPH0224322B2 true JPH0224322B2 (fr) | 1990-05-29 |
Family
ID=14720960
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP56117816A Granted JPS5821107A (ja) | 1981-07-29 | 1981-07-29 | パタ−ン検査装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5821107A (fr) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0675038B2 (ja) * | 1983-03-11 | 1994-09-21 | ケイエルエイ・インストラメンツ・コ−ポレ−シヨン | 光学検査装置 |
| JPS60123709A (ja) * | 1983-12-09 | 1985-07-02 | Hitachi Ltd | パタ−ン検査装置 |
| JP4768489B2 (ja) * | 2006-03-29 | 2011-09-07 | 株式会社東芝 | パターン検査方法及びマスクの製造方法 |
| KR101251372B1 (ko) * | 2008-10-13 | 2013-04-05 | 주식회사 고영테크놀러지 | 3차원형상 측정방법 |
-
1981
- 1981-07-29 JP JP56117816A patent/JPS5821107A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5821107A (ja) | 1983-02-07 |
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