JPH02239413A - Lead terminal structure for thin film magnetic head - Google Patents
Lead terminal structure for thin film magnetic headInfo
- Publication number
- JPH02239413A JPH02239413A JP6001989A JP6001989A JPH02239413A JP H02239413 A JPH02239413 A JP H02239413A JP 6001989 A JP6001989 A JP 6001989A JP 6001989 A JP6001989 A JP 6001989A JP H02239413 A JPH02239413 A JP H02239413A
- Authority
- JP
- Japan
- Prior art keywords
- lead
- magnetic head
- insulating layer
- thin film
- film magnetic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010409 thin film Substances 0.000 title claims abstract description 25
- 239000010408 film Substances 0.000 claims abstract description 8
- 230000001681 protective effect Effects 0.000 claims abstract description 7
- 239000000758 substrate Substances 0.000 claims abstract description 5
- 239000011347 resin Substances 0.000 description 14
- 229920005989 resin Polymers 0.000 description 14
- 238000010586 diagram Methods 0.000 description 10
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 7
- 238000007747 plating Methods 0.000 description 6
- 230000015572 biosynthetic process Effects 0.000 description 4
- 238000007740 vapor deposition Methods 0.000 description 4
- 238000007796 conventional method Methods 0.000 description 3
- 238000004544 sputter deposition Methods 0.000 description 3
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000009413 insulation Methods 0.000 description 2
- MTPVUVINMAGMJL-UHFFFAOYSA-N trimethyl(1,1,2,2,2-pentafluoroethyl)silane Chemical compound C[Si](C)(C)C(F)(F)C(F)(F)F MTPVUVINMAGMJL-UHFFFAOYSA-N 0.000 description 2
- 101100136092 Drosophila melanogaster peng gene Proteins 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- 238000000034 method Methods 0.000 description 1
Landscapes
- Magnetic Heads (AREA)
Abstract
Description
【発明の詳細な説明】
〔概要］
磁気ディスク装置に使用される薄膜磁気ヘッドのリード
端子構造に関し、
リード端子部を同一平面上の形成でなく、立体化により
その形状を変え、小型軽量化した薄膜磁気ヘッドのリー
ド端子構造を提供することを目的とし、
基板上に絶縁層を介して磁極部、コイル部、保護膜層よ
りなるＦｉｌ！磁気ヘッドのリード端子構造であって、
前記コイル部終端より引き出される複数個のリード部を
、絶縁層を介し相互に重なり合う立体構造として構成す
る．
〔産業上の利用分野〕
本発明は、磁気ディスク装置に使用される薄膜磁気ヘッ
ドのリード端子構造に関する，近年、磁気ディスク装置
は高速アクセス化の傾向にあり、それに伴いヘッドスラ
イダの小型軽量化が必要とされている＃薄膜磁気ヘッド
は、従来のモノシリンクヘッドに比べると小型軽量化が
容易であり、有利であるが、素子部及びリード端子部は
ある程度の大きさを持つため、より軽量化を計る場合、
従来の薄膜磁気ヘッドでは限界があった．
〔従来の技術〕
第４図（イ）（口）は従来の薄膜磁気ヘッドの概略図で
ある．
第４図（イ）において、スライダ１はフラットな複数の
レール２と、該レール２の前端に空気流入のための図示
しないテーバを、後端に薄膜磁気へッド３を設けている
．４は溝である。[Detailed Description of the Invention] [Summary] Regarding the lead terminal structure of a thin-film magnetic head used in a magnetic disk drive, the lead terminal part is not formed on the same plane, but its shape is changed by making it three-dimensional, thereby reducing the size and weight. The purpose of this film is to provide a lead terminal structure for a thin film magnetic head, and the Fil! A lead terminal structure of a magnetic head,
A plurality of lead parts drawn out from the terminal end of the coil part are formed into a three-dimensional structure in which they overlap each other with an insulating layer in between. [Industrial Field of Application] The present invention relates to the lead terminal structure of a thin-film magnetic head used in a magnetic disk drive.In recent years, magnetic disk drives have tended to have higher access speeds, and with this trend, head sliders have been made smaller and lighter. #Thin-film magnetic heads that are needed are advantageous because they are easier to make smaller and lighter than conventional mono-link heads, but the element part and lead terminal part have a certain size, so they are lighter. When measuring the
Conventional thin-film magnetic heads had limitations. [Prior Art] Figure 4 (a) (opening) is a schematic diagram of a conventional thin film magnetic head. In FIG. 4(a), the slider 1 has a plurality of flat rails 2, a taber (not shown) for air inflow at the front end of the rails 2, and a thin film magnetic head 3 at the rear end. 4 is a groove.
第４図（口）は薄膜磁気ヘッドの形状拡大図である．図
において、５は下部磁性層と上部磁性層よりなる磁極部
、６はコイル部、７はリード部、８は端子部を示す．な
お、薄膜磁気ヘッド３は図では２個あるが、実際に使用
するのは１個で、他の１個は予備となる．
さらに、薄膜磁気ヘッドの素子形状を第５図に示す．
第５図において、薄膜磁気ヘッド素子は、アルミナチタ
ンカーバイト等の基板ｌａ上に、アルミナ（Ａｊ！ｇｏ
ｓ）絶縁層１０を形成し、その上に下部磁性層ｌ１を、
さらに、その上に樹脂絶縁層１２を積層し、その樹脂絶
縁層１２の上に、第１のコイル層６ａ（リード部７ａを
含む）と、樹脂絶縁層１２をそれぞれ積層する．次に第
２のコイル層６ｂ（ リード部７ｂを含む）と、樹脂絶
縁層１２とを積層して、上部磁性層１３を形成後にコイ
ル終端のリード部？ａ， ？ｂ上に端子部８ａ、８ｂを
形成後、アルミナ（ＡＡ２０，）保護膜層１４で覆い、
その保護膜層１４をラップし端子部８ａ、８ｂを露出し
形成している。Figure 4 (opening) is an enlarged view of the shape of the thin-film magnetic head. In the figure, 5 is a magnetic pole part consisting of a lower magnetic layer and an upper magnetic layer, 6 is a coil part, 7 is a lead part, and 8 is a terminal part. Although there are two thin-film magnetic heads 3 in the figure, only one is actually used, and the other one is reserved. Furthermore, the element shape of the thin film magnetic head is shown in Figure 5. In FIG. 5, the thin film magnetic head element is made of alumina (Aj!go) on a substrate la of alumina titanium carbide or the like.
s) forming an insulating layer 10, and a lower magnetic layer l1 thereon;
Further, a resin insulating layer 12 is laminated thereon, and a first coil layer 6a (including the lead portion 7a) and a resin insulating layer 12 are laminated on the resin insulating layer 12, respectively. Next, the second coil layer 6b (including the lead portion 7b) and the resin insulating layer 12 are laminated to form the upper magnetic layer 13, and then the lead portion at the end of the coil is formed. a, ? After forming the terminal parts 8a and 8b on b, cover with alumina (AA20,) protective film layer 14,
The protective film layer 14 is wrapped to expose the terminal portions 8a and 8b.
スライダ１の大きさは、基本的には素子部（磁極部５、
コイル部６）及びリード端子部（リード部７、端子部８
）により制約を受けることになるが、従来の磁気ヘッド
では、コイル６ａ、６ｂのリード部７及び端子部８ａ、
８ｂは（第５図参照）同一平面上に形成されているため
、リード部７同士、端子部８ａ、８ｂが互いに接触しな
いように形成する必要がある．また、端子部８の輻ａも
、出力を引き出すためのリード線をボンディングする上
で０．２鋪程度を必要とする．
しかし、一般にスライダ１の大きさは、高さＨ＝０．８
５ｍ、幅＝３．２ ｙｍ、長さ＝４ｍである．上記のよ
うに端子部８の幅ａ ＝０．２ ｍを必要とし、さらに
、端子間ｂも接触しないためには、０．２−が必要であ
るので、現状の高さＨ＝０．８５鵬は可成キツイ寸法で
ある．
このような従来の薄膜磁気ヘッドをより小型軽量化する
ことは困難であった．
そこで、本発明はリード端子部を同一平面上の形成でな
く、立体化によりその形状を変え、小型軽量化した薄膜
磁気ヘッドのリード端子構造を提供することを目的とす
る．
〔課題を解決するための手段〕
前記問題点は、第１図（イ）（口）に示されるように、
基板ｌａ上に絶縁層１０、１２を介して磁極部５、コイ
ル部６、保護膜層１４よりなる薄ｒｙｉ４磁気ヘッドの
リード端子構造であって、
前記コイル部６終端より引き出される複数個のリード部
７を、絶縁層１２を介し相互に重なり合う立体構造とし
た本発明の薄膜磁気ヘッドのリード端子構造によって解
決される。The size of the slider 1 basically depends on the element part (magnetic pole part 5,
coil part 6) and lead terminal part (lead part 7, terminal part 8)
), but in the conventional magnetic head, the lead portions 7 and terminal portions 8a of the coils 6a, 6b,
8b (see FIG. 5) are formed on the same plane, so it is necessary to form them so that the lead parts 7 and the terminal parts 8a and 8b do not come into contact with each other. Furthermore, the radius a of the terminal portion 8 also requires approximately 0.2 mm in order to bond the lead wire for drawing out the output. However, generally the size of slider 1 is height H=0.8
5m, width = 3.2 ym, length = 4m. As mentioned above, the width a of the terminal portion 8 is required to be 0.2 m, and furthermore, in order to prevent contact between the terminals b, 0.2- is required, so the current height H = 0.85 Peng is extremely tall. It has been difficult to make such conventional thin-film magnetic heads smaller and lighter. Therefore, an object of the present invention is to provide a lead terminal structure for a thin-film magnetic head that is smaller and lighter in size and weight by changing the shape of the lead terminal portion by making it three-dimensional instead of forming it on the same plane. [Means for solving the problem] As shown in Figure 1 (a), the above problem is as follows.
A lead terminal structure of a thin RYI4 magnetic head consisting of a magnetic pole part 5, a coil part 6, and a protective film layer 14 on a substrate la with insulating layers 10 and 12 interposed therebetween, and a plurality of leads drawn out from the terminal end of the coil part 6. This problem is solved by the lead terminal structure of the thin film magnetic head of the present invention in which the portions 7 have a three-dimensional structure in which they overlap each other with the insulating layer 12 in between.
即ち、本発明では、第１図（口）のようにリード部７及
び端子部８において、絶縁層を介して相互重なり合う立
体構造としたことにより、リード部７、端子部８の形状
、方向が同一平面上の形成のような制約がなく、或る程
度自由に決められる結果、スライダの小型軽量化ができ
た。That is, in the present invention, the shape and direction of the lead part 7 and the terminal part 8 can be changed by forming the lead part 7 and the terminal part 8 into a three-dimensional structure in which they overlap each other with an insulating layer in between, as shown in FIG. There is no restriction such as formation on the same plane, and as a result, the slider can be determined freely to a certain extent, and as a result, the slider can be made smaller and lighter.
例えば、素子の２つのリード端子部を図示のように重ね
て形状を変えた結果、スライダ高さ１１を従来の０．８
５ｍから０．５ ｔｍ程度までに、スライダ幅Ｗを従来
の３．２ ｍから２．０ ａｍ程度まで、それぞれ小型
化することができた。For example, as a result of changing the shape of the two lead terminals of the element by overlapping them as shown in the figure, the slider height 11 was reduced to 0.8 from the conventional height.
It was possible to reduce the slider width W from 5 m to about 0.5 tm, and from the conventional 3.2 m to about 2.0 am.
また、コイル層６より引き出されたリード部７間に介在
させる絶縁層１２は、コイル間絶縁層形成時に同時形成
できる．即ち、コイル間絶縁層をリード部７同士が重な
る部分を絶縁するように、従来より延ばすだけでよ《、
工数の増加がなく実現できる．
〔実施例〕
第１図（イ）（口）は本発明の一実施例の説明する図で
あり、（イ）はスライダの後端部、（口）は（イ）のＡ
−Ａ断面を示す．なお、全図を通じて同一符号は同一対
象物を示す。Further, the insulating layer 12 interposed between the lead portions 7 drawn out from the coil layer 6 can be formed at the same time as forming the inter-coil insulating layer. That is, the inter-coil insulating layer can be simply extended from the conventional method so as to insulate the parts where the lead parts 7 overlap.
This can be achieved without increasing the number of man-hours. [Example] Figure 1 (a) (opening) is a diagram explaining an embodiment of the present invention, (a) shows the rear end of the slider, and (opening) shows A in (a).
-A cross section is shown. Note that the same reference numerals indicate the same objects throughout the figures.
第１図（イ）において、スライダ１はフラットな複数の
レール２と、図示しないが該レール２の前端に空気流入
のためのテーバを、後端に薄［ｉ気ヘッド３を設けてい
る．４は溝であり、５は下部磁性層と上部磁性層よりな
る磁極部、６はコイル部、７はリード部で、第１図（口
）のようにリード部７間に樹脂絶縁層１２を介在させ、
立体構造としている。８は端子部で、リード部７にそれ
ぞれ接続される．なお、薄膜磁気ヘッド３がスライダｌ
の両端に設けているが、実際に使用するのは１個で、他
は予備である．
上記のように薄膜磁気ヘッド素子の２つのリード端子部
を立体構造としたことにより、リード端子部が従来の同
一平面のような制約がなく、自由に決められるので、前
述の作用欄で説明したようにスライダが小型軽量化でき
る。In FIG. 1(a), the slider 1 has a plurality of flat rails 2, a taper (not shown) for air inflow at the front end of the rail 2, and a thin air head 3 at the rear end. 4 is a groove, 5 is a magnetic pole portion consisting of a lower magnetic layer and an upper magnetic layer, 6 is a coil portion, and 7 is a lead portion, and as shown in Fig. 1 (opening), a resin insulating layer 12 is placed between the lead portions 7. intervene,
It has a three-dimensional structure. 8 is a terminal part, which is connected to each lead part 7. Note that the thin film magnetic head 3 is connected to the slider l.
They are installed at both ends of the holder, but only one is actually used; the others are reserved. As mentioned above, by making the two lead terminal parts of the thin film magnetic head element three-dimensional, there is no restriction that the lead terminal parts are on the same plane in the past, and they can be freely determined. The slider can be made smaller and lighter.
具体的に、本発明の薄膜磁気ヘッド素子の形成を第２図
により説明する．
薄ｉ磁気ヘッドのＦｔｌＷＩ形成を下記に説明する．■
スライダとなるアルミナチタンカーバイト等の基＆１
ａ上に、アルミナ（ＡｆｚＯｓ）絶縁層１０を形成（ス
パッタリング等）する．
■ その上に下部磁性層ｌ１を形成（スバッタ、蒸着、
メッキ等）する．
■ その下部磁性層１】上に、樹脂絶縁層１２を形成（
塗布）する．
■ 次に、第１のコイル層６ａを形成（スバッタ、蒸着
、メッキ等）する．（リード部７ａを含む）■ 次に、
樹脂絶縁層１２を形成（塗布）する．この時の樹脂絶縁
層１２を、リード７ａとリード部７ｂの間に介在するよ
うに塗布する．この塗布が従来と違う．
■ 第２のコイル層６ｂを形成（スバシタ、蒸着、メッ
キ等）する．（リード部７ｂを含む）■ 樹脂絶縁層１
２を形成（ｖ！布）する．■ 上部磁性層１３を形成（
スパッタ、蒸着、メッキ等）する。Specifically, the formation of the thin film magnetic head element of the present invention will be explained with reference to FIG. The formation of FtlWI in a thin-i magnetic head will be explained below. ■
Base of alumina titanium carbide etc. which becomes the slider &1
Form an alumina (AfzOs) insulating layer 10 on the substrate a (by sputtering, etc.). ■ Form the lower magnetic layer l1 on top of it (splatter, evaporation,
plating, etc.). ■ On top of the lower magnetic layer 1, a resin insulating layer 12 is formed (
coating). (2) Next, the first coil layer 6a is formed (by sputtering, vapor deposition, plating, etc.). (Including lead part 7a)■ Next,
Form (coat) the resin insulating layer 12. At this time, the resin insulating layer 12 is applied so as to be interposed between the lead 7a and the lead portion 7b. This application is different from conventional methods. ■ Form the second coil layer 6b (subashita, vapor deposition, plating, etc.). (Including lead part 7b) ■ Resin insulation layer 1
Form 2 (v! cloth). ■ Forming the upper magnetic layer 13 (
sputtering, vapor deposition, plating, etc.).
■ 端子部８ａ、８ｂを引き出す（メッキ）．［相］
上部をアルミナ（ＡｆｚＯ３）保護膜１ｉ１４を形成（
スバッタ、蒸着、メッキ等）する。■ Pull out the terminal parts 8a and 8b (plating). [phase]
An alumina (AfzO3) protective film 1i14 is formed on the upper part (
spatter, vapor deposition, plating, etc.).
■ アルミナ（Ａ ｌ ｚ ０３）保護膜層１４をラッ
プして端子部８を露出し形成する．
本発明では、リード部７ａ、７ｂが絶縁層を介して相互
に重なり合う立体構造を、上記工程■の樹脂絶縁層１２
を形成（塗布）する時、第１のコイル６ａ上の樹脂絶縁
層１２の塗布において、リード部７ｂと７８が絶縁する
ように塗布して実現している．この点が従来と違う点で
あり、他の工程は全《同じである．
また、上記リード部に介在させる樹脂絶縁層１２は、上
記■工程のコイル間絶縁層形成時に同時形成できるので
、工数の増加がなく実現できる，第３図は本発明の他の
実施例の説明図である。■ Wrap the alumina (Alz 03) protective film layer 14 to expose and form the terminal portion 8. In the present invention, the three-dimensional structure in which the lead portions 7a and 7b overlap each other with an insulating layer interposed between them is replaced by the resin insulating layer 12 in step (2) above.
When forming (coating) the resin insulating layer 12 on the first coil 6a, the resin insulation layer 12 is coated so that the lead parts 7b and 78 are insulated. This point is different from the conventional method; all other processes are the same. Furthermore, since the resin insulating layer 12 interposed in the lead portion can be formed simultaneously with the formation of the inter-coil insulating layer in step (1) above, it can be realized without increasing the number of man-hours. FIG. 3 is an explanation of another embodiment of the present invention. It is a diagram.
第３図は１つのスライダ１′に１ヘッド素子タイプの薄
膜磁気ヘッドである。この場合でもり一ド部７及び端子
部８においても、絶縁層を介して相互に重なり合う立体
構造とし、リード端子部の形状を図示のように形成する
．５は磁性層、６はコイル層である．
上記構造とすることで、例えば、スライダ高さＨ＝０．
８閣、スライダ幅Ｗ＝０．５ ｍ、スライダ長さＤ＝０
．５ｓｍ 程度まで小型化、軽量化が可能である．
以上のようにリード端子部を同一平面上の形成でなく、
立体化によりその形状が変えられる結果、スライダの小
型軽量化が可能となった．〔発明の効果〕
以上説明したように本発明によれば、リード端子部を立
体構造化したことにより、薄膜磁気ヘッドのスライダ形
状が工数を増加することなく、小型、軽量化が可能とな
り、高速アクセス可能な磁気ディスク装置を提供するこ
とができる。FIG. 3 shows a thin film magnetic head of one head element type for one slider 1'. In this case, the lead portion 7 and the terminal portion 8 also have a three-dimensional structure in which they overlap each other via an insulating layer, and the shape of the lead terminal portion is formed as shown in the figure. 5 is a magnetic layer, and 6 is a coil layer. With the above structure, for example, the slider height H=0.
8 cabinets, slider width W = 0.5 m, slider length D = 0
．． It is possible to reduce the size and weight to about 5sm. As mentioned above, the lead terminals are not formed on the same plane.
By making the slider three-dimensional, its shape can be changed, making it possible to make the slider smaller and lighter. [Effects of the Invention] As explained above, according to the present invention, by forming the lead terminal portion into a three-dimensional structure, the slider shape of the thin-film magnetic head can be made smaller and lighter without increasing the number of man-hours, and can be used at high speeds. An accessible magnetic disk device can be provided.
第１図（イ）（口）は本発明の一実施例を説明する図、
第２図は本発明の素子形状の説明図、
第３図は本発明の他の実施例の説明図、第４図（イ）（
口）は従来の薄膜磁気ヘッドの概略図、
第５図は従来の素子形状の説明図である。
図において、
１はスライダ、
２はレール、
３は磁気ヘッド、
４は溝、
５は磁極部、
６はコイル部、
７はリード部、
８は端子部、
１０は絶縁層、寺＃４ヰ
１１は下部磁性層、
１２は樹脂絶縁層、
ｌ３は上部磁性層、
本発明の幻形状ｆ）説明図
第２図
本発明のイＱｆ）東兜イデｌの脱明図
第 ３ 図Fig. 1 (a) (opening) is a diagram for explaining one embodiment of the present invention, Fig. 2 is a diagram for explaining the element shape of the present invention, and Fig. 3 is a diagram for explaining another embodiment of the present invention. Figure 4 (a) (
Figure 5 is a schematic diagram of a conventional thin film magnetic head, and Fig. 5 is an explanatory diagram of a conventional element shape. In the figure, 1 is a slider, 2 is a rail, 3 is a magnetic head, 4 is a groove, 5 is a magnetic pole part, 6 is a coil part, 7 is a lead part, 8 is a terminal part, 10 is an insulating layer, and temple #4-11 12 is the lower magnetic layer, 12 is the resin insulating layer, 13 is the upper magnetic layer, Illusion shape of the present invention f) Explanatory diagram Figure 2 A Qf) Illustrated diagram of the present invention Figure 3
Claims (1)
（５）、コイル部（６）、保護膜層（１４）よりなる薄
膜磁気ヘッドのリード端子構造であって、前記コイル部
（６）終端より引き出される複数個のリード部（７）を
、絶縁層（１２）を介し相互に重なり合う立体構造とし
たことを特徴とする薄膜磁気ヘッドのリード端子構造。A lead terminal structure of a thin film magnetic head consisting of a magnetic pole part (5), a coil part (6), and a protective film layer (14) on a substrate (1a) via insulating layers (10, 12), the coil part (6) A lead terminal structure for a thin film magnetic head, characterized in that a plurality of lead parts (7) drawn out from the terminal end have a three-dimensional structure in which they overlap each other with an insulating layer (12) in between.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6001989A JPH02239413A (en) | 1989-03-13 | 1989-03-13 | Lead terminal structure for thin film magnetic head |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6001989A JPH02239413A (en) | 1989-03-13 | 1989-03-13 | Lead terminal structure for thin film magnetic head |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02239413A true JPH02239413A (en) | 1990-09-21 |
Family
ID=13129932
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6001989A Pending JPH02239413A (en) | 1989-03-13 | 1989-03-13 | Lead terminal structure for thin film magnetic head |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02239413A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0320021U (en) * | 1989-07-07 | 1991-02-27 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01243214A (en) * | 1988-03-24 | 1989-09-27 | Hitachi Ltd | Multi-channel thin film magnetic head and its manufacture |
-
1989
- 1989-03-13 JP JP6001989A patent/JPH02239413A/en active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01243214A (en) * | 1988-03-24 | 1989-09-27 | Hitachi Ltd | Multi-channel thin film magnetic head and its manufacture |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0320021U (en) * | 1989-07-07 | 1991-02-27 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US5384432A (en) | Two-layered tape lead wire for magnetic head | |
| JPH02239413A (en) | Lead terminal structure for thin film magnetic head | |
| JPS60157711A (en) | Thin film magnetic head | |
| US4583143A (en) | Wiring for thin film magnetic head | |
| JPH0630130B2 (en) | Method of manufacturing thin film magnetic head | |
| JPS61217921A (en) | Thin film video head | |
| JPH0636214A (en) | Coil component | |
| JPH0395715A (en) | Thin film magnetic head and its manufacture | |
| JPH01144336A (en) | Stator of capacitor motor | |
| NL8501144A (en) | MAGNETIC TRANSFER HEAD. | |
| JPH0690973B2 (en) | Superconducting coil | |
| JPS60145512A (en) | Magnetic head | |
| JPS589210A (en) | Thin-film coil device | |
| JPS61177611A (en) | Magnetic head | |
| JPH0916910A (en) | Multichannel thin-film magnetic head assembly and its manufacture | |
| JPS6369012A (en) | Manufacture of magnetic head for video magnetic tape apparatus | |
| JPH01224908A (en) | Thin film magnetic head for perpendicular recording | |
| JPS59172107A (en) | Thin-film magnetic head and its manufacture | |
| JPS61229220A (en) | Production of thin film magnetic head | |
| JPS61114411A (en) | Inline manufacture of coil for electric equipment | |
| JPH05101323A (en) | Magnetic head device | |
| JPS6363115A (en) | Thin film magnetic head | |
| JPH08212514A (en) | Thin-film magnetic head and its production | |
| JPS60242510A (en) | Thin film magnetic head | |
| CN1154784A (en) | Method for making inductor |