JPH02228538A - Gas identification sensor system - Google Patents
Gas identification sensor systemInfo
- Publication number
- JPH02228538A JPH02228538A JP5056389A JP5056389A JPH02228538A JP H02228538 A JPH02228538 A JP H02228538A JP 5056389 A JP5056389 A JP 5056389A JP 5056389 A JP5056389 A JP 5056389A JP H02228538 A JPH02228538 A JP H02228538A
- Authority
- JP
- Japan
- Prior art keywords
- frequency
- sensor system
- impedance
- change
- identification sensor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000007789 gas Substances 0.000 claims description 34
- 239000013078 crystal Substances 0.000 claims description 23
- 230000010355 oscillation Effects 0.000 claims description 7
- 239000012528 membrane Substances 0.000 claims description 2
- 210000000170 cell membrane Anatomy 0.000 claims 1
- 239000000470 constituent Substances 0.000 claims 1
- 150000002632 lipids Chemical class 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- 238000005259 measurement Methods 0.000 abstract description 5
- HVYWMOMLDIMFJA-DPAQBDIFSA-N cholesterol Chemical compound C1C=C2C[C@@H](O)CC[C@]2(C)[C@@H]2[C@@H]1[C@@H]1CC[C@H]([C@H](C)CCCC(C)C)[C@@]1(C)CC2 HVYWMOMLDIMFJA-DPAQBDIFSA-N 0.000 abstract description 4
- 239000010453 quartz Substances 0.000 abstract description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract description 4
- 235000012000 cholesterol Nutrition 0.000 abstract description 2
- 239000000126 substance Substances 0.000 abstract description 2
- 239000010408 film Substances 0.000 description 10
- 229920006254 polymer film Polymers 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 3
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 3
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 2
- 102000004856 Lectins Human genes 0.000 description 2
- 108090001090 Lectins Proteins 0.000 description 2
- 239000003205 fragrance Substances 0.000 description 2
- 239000002523 lectin Substances 0.000 description 2
- PGMYKACGEOXYJE-UHFFFAOYSA-N pentyl acetate Chemical compound CCCCCOC(C)=O PGMYKACGEOXYJE-UHFFFAOYSA-N 0.000 description 2
- 229920005597 polymer membrane Polymers 0.000 description 2
- PSQYTAPXSHCGMF-BQYQJAHWSA-N β-ionone Chemical compound CC(=O)\C=C\C1=C(C)CCCC1(C)C PSQYTAPXSHCGMF-BQYQJAHWSA-N 0.000 description 2
- SFEOKXHPFMOVRM-UHFFFAOYSA-N (+)-(S)-gamma-ionone Natural products CC(=O)C=CC1C(=C)CCCC1(C)C SFEOKXHPFMOVRM-UHFFFAOYSA-N 0.000 description 1
- NFLGAXVYCFJBMK-RKDXNWHRSA-N (+)-isomenthone Natural products CC(C)[C@H]1CC[C@@H](C)CC1=O NFLGAXVYCFJBMK-RKDXNWHRSA-N 0.000 description 1
- WTEVQBCEXWBHNA-UHFFFAOYSA-N Citral Natural products CC(C)=CCCC(C)=CC=O WTEVQBCEXWBHNA-UHFFFAOYSA-N 0.000 description 1
- NFLGAXVYCFJBMK-UHFFFAOYSA-N Menthone Chemical compound CC(C)C1CCC(C)CC1=O NFLGAXVYCFJBMK-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 229940043350 citral Drugs 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- WTEVQBCEXWBHNA-JXMROGBWSA-N geranial Chemical compound CC(C)=CCC\C(C)=C\C=O WTEVQBCEXWBHNA-JXMROGBWSA-N 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 229930007503 menthone Natural products 0.000 description 1
- 238000010408 sweeping Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Landscapes
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
この発明は、化学工業、環境計測分野におけるガスの計
測、識別を行う装置に関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a device for measuring and identifying gases in the chemical industry and environmental measurement field.
この発明の水晶振動子のインピーダンス変化と共振周波
数変化の比を指標とするガス識別センサーシステムは、
感応膜を有する水晶振動子、電気的インピーダンスおよ
び共振周波数測定装置、記録装置（または表示装置）か
ら構成され、ガスの濃度の測定と識別を行う装置である
。このうち、インピーダンスおよび共振周波数測定装置
は、周波数走引型インピーダンスアナライザーとコンピ
ューター、または、発振回路と周波数カウンターと高周
波電流計から構成した。The gas identification sensor system of this invention uses the ratio of impedance change and resonant frequency change of a crystal resonator as an index.
This device consists of a crystal resonator with a sensitive film, an electrical impedance and resonance frequency measuring device, and a recording device (or display device), and measures and identifies the concentration of gas. Among these, the impedance and resonance frequency measuring device was composed of a frequency scanning impedance analyzer and a computer, or an oscillation circuit, a frequency counter, and a high-frequency ammeter.
さらに、識別能を高めるため水晶振動子の電気的インピ
ーダンス変化と共振周波数変化の比、および、２つの水
晶振動子の共振周波数変化の比を指標とし、ガスの識別
を行なうガス識別センサーシステムは、少なくとも、感
応膜を有する複数の水晶振動子と同数のリレー、インピ
ーダンスおよび共振周波数測定装置、記録装置（または
表示装置）より構成される。Furthermore, in order to improve identification ability, the gas identification sensor system uses the ratio of the electrical impedance change of a crystal oscillator to the resonance frequency change, and the ratio of the resonance frequency changes of two crystal oscillators as indicators to identify gases. It consists of at least a plurality of crystal oscillators each having a sensitive film, the same number of relays, an impedance and resonance frequency measuring device, and a recording device (or display device).
この装置によって、これまでの水晶振動子センサーシス
テムに比べて、より少ないセンサー素子でガスの識別が
行えるようになった。This device allows gas identification to be performed using fewer sensor elements than previous quartz crystal sensor systems.
従来、圧電素子とくに水晶振動子を利用したガスセンサ
ーでは、ガスの識別のために複数の有機薄膜で被覆した
水晶振動子を用い、発振回路によって、発振周波数を測
定する方法がとられていた。Conventionally, gas sensors using piezoelectric elements, particularly crystal oscillators, have used a crystal oscillator coated with a plurality of organic thin films to identify gases, and have used an oscillation circuit to measure the oscillation frequency.
従来の発振周波数を指標とする測定法でガスの識別を行
なう場合、１つのセンサーについて、共振周波数変化と
いう１つの指標しか得られないため、識別を行なうため
に数多くのセンサーを使用する必要があった。When identifying gases using the conventional measurement method that uses oscillation frequency as an index, only one index, the resonant frequency change, can be obtained for one sensor, so it is necessary to use many sensors for identification. Ta.
上記の課題を解決するために、新たに水晶振動子のイン
ピーダンス変化と共振周波数変化の２つの指標を利用し
、この比を求めることによって、ガスの識別を行なわせ
ることにした。さらに、感応膜の異なる２つの水晶振動
子の共振周波数変化の比を合わせて使用することによっ
て、識別の効果を高めた。In order to solve the above-mentioned problem, it was decided to use two new indicators, the impedance change and the resonant frequency change of the crystal resonator, and to determine the ratio of the two indicators to identify the gas. Furthermore, by using the same ratio of resonance frequency changes of two crystal oscillators with different sensitive films, the discrimination effect was enhanced.
これまで水晶振動子ガスセンサーの共振周波数変化は、
５ａｕｒｅｂｒｅｙの式に従うとされていた。しかし、
５ａｕｒｅｂｒｅｙの式では、水晶振動子表面の弾性的
な膜に限って適用されるものであり、高分子膜のよ）な
粘弾性的な膜では、そのまま適用することはできない。Until now, the resonant frequency change of a crystal oscillator gas sensor has been
It was said to follow the formula of 5 aurebrey. but,
The aurebrey equation is applicable only to elastic films on the surface of a crystal resonator, and cannot be directly applied to viscoelastic films such as polymer films.
従って、実際の周波数変化は、５ＨｕｒｅｂｒｅｙＯ式
から計算される値と異なると考えられる。一方、高分子
膜の粘弾性的な性質から、水晶振動子などの圧電素子表
面における振動に対して、摩擦抵抗を与えることになる
。圧電素子において、この機械的な摩擦抵抗は、電気的
な共振抵抗に反映されることが既に知られている［Ｈ，
Ｍｕｒａｍａｔｓｕｅｔ ａｌ、、Ａｎａｌ、Ｃｈｅ
ｍ、、６０ （１９８８）２１４２］。ここで、共振抵
抗は、高分子膜の密度と粘度に依存して変化すると考え
られる。したがって、ガスが高分子膜に吸着した場合、
まず、密度の変化として共振抵抗が変化する。これに加
えて、高分子膜の粘弾性的性質（特に粘性的性質）が変
化することによって、さらに共振抵抗の値が変化すると
考えられる。ここで、吸着するガスの種類によって、膜
の構造変化への寄与が異なることから、吸着するガスに
よって、共振周波数変化と共振抵抗の比は、異なる変化
をするものであり、これを利用することによって、ガス
識別が可能となる。Therefore, the actual frequency change is considered to be different from the value calculated from the 5 HurebreyO formula. On the other hand, the viscoelastic properties of the polymer film provide frictional resistance to vibrations on the surface of a piezoelectric element such as a crystal resonator. It is already known that in piezoelectric elements, this mechanical frictional resistance is reflected in electrical resonance resistance [H,
Muramatsuet al,,Anal,Che
m,, 60 (1988) 2142]. Here, the resonance resistance is considered to change depending on the density and viscosity of the polymer film. Therefore, when gas is adsorbed on the polymer membrane,
First, the resonance resistance changes as the density changes. In addition to this, it is thought that the value of resonance resistance further changes due to changes in the viscoelastic properties (particularly viscous properties) of the polymer membrane. Here, since the contribution to the structural change of the film differs depending on the type of adsorbed gas, the ratio of resonance frequency change and resonant resistance changes differently depending on the adsorbed gas, and this can be utilized. This allows gas identification.
以下、この発明の実施例を図面に基づいて説明する。第
１図ａは、本発明のガスセンサーシステムの模式図を示
したものである。第１図ａにおいて、高分子膜４をコー
トした圧電素子１は、圧電素子の電気的インピーダンス
および共振周波数測定装置２に接続され、装置２には、
記録装置（または表示装置）３が接続されている。Embodiments of the present invention will be described below based on the drawings. FIG. 1a shows a schematic diagram of the gas sensor system of the present invention. In FIG. 1a, a piezoelectric element 1 coated with a polymer film 4 is connected to a piezoelectric element electrical impedance and resonance frequency measuring device 2, which includes:
A recording device (or display device) 3 is connected.
第１図すは、２つの高分子膜被覆圧電素子として、アゾ
レクチン膜５とアゾレクチン／コレステロール３：１の
混合膜６を被覆したＡＴカット９ＭＨｚの水晶振動子７
．７ａとリレー８．８ａを用い、電気的インピーダンス
および共振周波数測定装置２として、インピーダンスア
ナライザーとコンピューターを使用するセンサーシステ
ムの模式図である。第１図すにおいて、水晶振動子７．
７ａはフローセル９中に固定され、このフローセル９中
へ匂い物質ガスが送り込まれるようになっている。Figure 1 shows an AT-cut 9 MHz crystal resonator 7 coated with an azo lectin film 5 and an azo lectin/cholesterol 3:1 mixed film 6 as two polymer film-coated piezoelectric elements.
．． 7a and relay 8.8a, and a sensor system using an impedance analyzer and a computer as the electrical impedance and resonance frequency measuring device 2. FIG. In Figure 1, crystal oscillator 7.
7a is fixed in a flow cell 9, into which an odorant gas is fed.
共振抵抗の測定は、アドミッタンスの虚数成分サセプタ
ンスの最大値、最小値を与える周波数の間に共振周波数
変化があることから、まず、この範囲を周波数掃引して
アドミッタンスの測定を行った。測定したコンダクタン
スとサセプタンスのデータをＸＹ軸上にプロットした場
合描かれる円の直径を求め、この逆数を共振抵抗の値と
した。To measure the resonant resistance, since there is a change in the resonant frequency between the frequencies that give the maximum and minimum values of the imaginary component of the admittance, the admittance was first measured by sweeping the frequency within this range. When the measured conductance and susceptance data were plotted on the XY axis, the diameter of the circle drawn was determined, and the reciprocal of this was taken as the value of the resonant resistance.
また、コンダクタンスの最大値を示す周波数を共振周波
数として求めた。この処理はすべてコンピューターで行
うことが可能であり、１回の測定は、４秒以内で行うこ
とが可能であった。Furthermore, the frequency showing the maximum value of conductance was determined as the resonant frequency. All of this processing could be performed by computer, and one measurement could be performed within 4 seconds.
本発明の装置によって、共振抵抗と共振周波数変化の比
は、ガスの種類によって変化し、ガスの識別に利用可能
であることがわかる。第２図は、横軸に、２つのセンサ
ーの共振周波数変化の標準化した値（共振周波数変化を
それぞれ膜形成時の周波数変化で割った値）の比（混合
膜で得た値をアゾレクチンで得た値で割った値）をとっ
たもので、縦軸は、アゾレクチンに対する標準化した共
振周波数変化と標準化した共振抵抗の比（共振周波数変
化を共振抵抗変化で割った値）をとったものであり、測
定対象として、β−イオノン、シトラール、メントン、
ｎ−アミルアセテート、エタノール、メタノール、アセ
トン、エチルエーテルを使用したものである。第２図に
示されるように、２つの感応膜を有するセンサーによっ
て、匂い物質の識別を行なうことが可能であることが示
された。It can be seen that with the device of the present invention, the ratio of resonance resistance to resonance frequency change changes depending on the type of gas, and can be used to identify gases. In Figure 2, the horizontal axis shows the ratio of the standardized values of the resonant frequency changes of the two sensors (values obtained by dividing the resonant frequency changes by the frequency changes during film formation) (the value obtained with the mixed film and the value obtained with azolectin). The vertical axis is the ratio of the standardized resonant frequency change to the standardized resonant resistance (resonant frequency change divided by the resonant resistance change). , β-ionone, citral, menthone,
It uses n-amyl acetate, ethanol, methanol, acetone, and ethyl ether. As shown in FIG. 2, it has been shown that it is possible to identify odorants using a sensor having two sensitive membranes.
一方、インピーダンスおよび共振周波数変化測定回路と
して、発振回路と周波数カウンターと高周波電流計を用
い、発振周波数と共振抵抗に変わる指標として水晶振動
子に流れる電流の７１ＰＩ定を行なうことによっても同
様にガスの識別を行なうことができた。On the other hand, by using an oscillation circuit, a frequency counter, and a high-frequency ammeter as an impedance and resonance frequency change measurement circuit, and performing 71PI determination of the current flowing through the crystal oscillator as an index that changes to the oscillation frequency and resonance resistance, it is also possible to I was able to make the identification.
さらに、インピーダンスアナライザーの代わりに、周波
数走引回路と周波数カウンターを使用し、マイクロコン
ピュータ−を用いて、電流がピークを示す周波数を近似
的に共振周波数とし、ピークの高さから、近似的に共振
抵抗を算出することによっても、測定が可能だった。Furthermore, instead of an impedance analyzer, a frequency scanning circuit and a frequency counter are used, and a microcomputer is used to approximate the resonance frequency at the frequency at which the current peaks, and from the height of the peak, approximately resonate. Measurement was also possible by calculating the resistance.
°また、本装置で得られた共振抵抗または共振周波数の
変化量からガスの濃度を測定することも可能である。It is also possible to measure the gas concentration from the amount of change in resonance resistance or resonance frequency obtained with this device.
本発明のガス識別センサーシステムによって、従来より
少ない数のセンサーによって、ガスの識別を行なうこと
が可能となった。The gas identification sensor system of the present invention makes it possible to identify gases using fewer sensors than before.
次元パターンを示す図である。It is a figure showing a dimensional pattern.
以上 出願人 セイコー電子工業株式会社 代理人 弁理士 林 敬 之 助that's all Applicant: Seiko Electronics Industries Co., Ltd. Agent: Patent Attorney: Keinosuke Hayashi
第１図ａは、本発明のガス識別センサーシステムの模式
図、第１図すは、本発明の実施例で使用したセンサーシ
ステムの模式図、第２図は、本発明のセンサーシステム
によるガス識別のための２本光朗のガス爲別センサーシ
ステムの模式図第
図
α
不完り月の実施イ列τイ更用したセンサーシステムのＰ
Ａ式図２フのセンサーｌｒ′）夫捩周液数変化の比本茫
朗の乞ン寸−システム（でより力゛ス蔦別Ｏｒのの２次
元パワーンを示す邸FIG. 1a is a schematic diagram of the gas identification sensor system of the present invention, FIG. 1 is a schematic diagram of the sensor system used in the embodiment of the present invention, and FIG. Schematic diagram of the sensor system for separating the two gases for Mitsuo.
A-type Figure 2 F sensor lr') A system showing the two-dimensional power of Tsutabetsu or
Claims (8)
波数変化の比を指標とし、ガスの識別を行なうガス識別
センサーシステム。(1) A gas identification sensor system that identifies gases using the ratio of changes in electrical impedance of a crystal oscillator to changes in resonance frequency as an index.
ーダンスおよび共振周波数測定装置、記録装置（または
表示装置）より構成される請求項１記載のガス識別セン
サーシステム。(2) The gas identification sensor system according to claim 1, comprising at least a crystal resonator having a sensitive film, an impedance and resonance frequency measuring device, and a recording device (or display device).
波数変化の比、および、２つの水晶振動子の共振周波数
変化の比を指標とし、ガスの識別を行なうガス識別セン
サーシステム。(3) A gas identification sensor system that identifies gases using the ratio of the electrical impedance change to the resonant frequency change of a crystal resonator and the ratio of the resonant frequency changes of two crystal resonators as indicators.
同数のリレー、インピーダンスおよび共振周波数測定装
置、記録装置（または表示装置）より構成される請求項
３記載のガス識別センサーシステム。(4) The gas identification sensor system according to claim 3, comprising at least a plurality of crystal oscillators each having a sensitive film, as many relays, an impedance and resonance frequency measuring device, and a recording device (or display device).
、周波数走引型インピーダンスアナライザーとコンピュ
ーターより構成される請求項１あるいは３記載のガス識
別センサーシステム。(5) The gas identification sensor system according to claim 1 or 3, wherein the impedance and resonance frequency measuring device comprises a frequency scanning impedance analyzer and a computer.
、発振回路と周波数カウンターと高周波電流計により構
成される請求項１あるいは３記載のガス識別センサーシ
ステム。(6) The gas identification sensor system according to claim 1 or 3, wherein the impedance and resonance frequency measuring device comprises an oscillation circuit, a frequency counter, and a high frequency ammeter.
請求項１あるいは３記載のガス識別センサーシステム。(7) The gas identification sensor system according to claim 1 or 3, wherein the crystal resonator is an AT cut crystal resonator.
である請求項１あるいは３記載のガス識別センサーシス
テム。(8) The gas identification sensor system according to claim 1 or 3, wherein the sensitive membrane is a lipid or other cell membrane constituent material.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5056389A JP2764109B2 (en) | 1989-03-02 | 1989-03-02 | Gas identification sensor system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5056389A JP2764109B2 (en) | 1989-03-02 | 1989-03-02 | Gas identification sensor system |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02228538A true JPH02228538A (en) | 1990-09-11 |
| JP2764109B2 JP2764109B2 (en) | 1998-06-11 |
Family
ID=12862471
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5056389A Expired - Lifetime JP2764109B2 (en) | 1989-03-02 | 1989-03-02 | Gas identification sensor system |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2764109B2 (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04121651A (en) * | 1990-09-13 | 1992-04-22 | Seiko Instr Inc | Sensor apparatus for discriminating chemical substance |
| JPH05306983A (en) * | 1991-08-16 | 1993-11-19 | Kaoru Santo | Odorant sensor |
| CN104303025A (en) * | 2012-05-24 | 2015-01-21 | 气体产品与化学公司 | Method of, and apparatus for, regulating the mass flow rate of a gas |
| JP2021143980A (en) * | 2020-03-13 | 2021-09-24 | 東京瓦斯株式会社 | Gas leakage detection system, gas leakage detection device, and program |
-
1989
- 1989-03-02 JP JP5056389A patent/JP2764109B2/en not_active Expired - Lifetime
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04121651A (en) * | 1990-09-13 | 1992-04-22 | Seiko Instr Inc | Sensor apparatus for discriminating chemical substance |
| JPH05306983A (en) * | 1991-08-16 | 1993-11-19 | Kaoru Santo | Odorant sensor |
| CN104303025A (en) * | 2012-05-24 | 2015-01-21 | 气体产品与化学公司 | Method of, and apparatus for, regulating the mass flow rate of a gas |
| CN104303025B (en) * | 2012-05-24 | 2017-02-08 | 气体产品与化学公司 | Method of, and apparatus for, regulating the mass flow rate of a gas |
| US9804010B2 (en) | 2012-05-24 | 2017-10-31 | Air Products And Chemicals, Inc. | Method of, and apparatus for, regulating the mass flow rate of a gas |
| JP2021143980A (en) * | 2020-03-13 | 2021-09-24 | 東京瓦斯株式会社 | Gas leakage detection system, gas leakage detection device, and program |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2764109B2 (en) | 1998-06-11 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US5211054A (en) | Method and system for analyzing a gelation reaction by utilizing a piezoelectric resonator | |
| JP4476496B2 (en) | High-frequency measurement circuit with intrinsic noise reduction for resonant chemical sensors | |
| JPH02228538A (en) | Gas identification sensor system | |
| Ma et al. | Thickness shear mode quartz crystal resonators with optimized elliptical electrodes | |
| Massa et al. | Computerized measurement of viscoelastic properties of macromolecular solutions: Frequency dependence over and extended range of solvent viscosity | |
| US20080012578A1 (en) | System for detecting molecular structure and events | |
| Fioretto et al. | Dynamics of polybutadiene above the glass transition studied by Brillouin light scattering | |
| Matsiev et al. | Application of low frequency mechanical resonators to liquid property measurements | |
| CN104034798A (en) | Cell suspension concentration detection system and its detection method | |
| JP2003240697A (en) | Analytical method and device for membrane properties | |
| JP2811315B2 (en) | Piezoelectric gas sensor system | |
| US7350403B2 (en) | Method and apparatus for determination of food quality and authenticity | |
| Menon et al. | Coated-quartz crystal resonator (QCR) sensors for on-line detection of organic contaminants in water | |
| Kankare et al. | Method for measuring the losses and loading of a quartz crystal microbalance | |
| EP0304283A2 (en) | Apparatus for measuring a characteristic of a liquid | |
| Iglesias et al. | Proof of concept and preliminary results of gas detection by measuring the admittance at the resonance and anti-resonance of an uncoated CMUT | |
| Cumpson | Quartz crystal microbalance: A new design eliminates sensitivity outside the electrodes, often wrongly attributed to the electric fringing field | |
| JP3376417B2 (en) | Calibration method for ultra-low-mass detectors using high-frequency quartz oscillators | |
| JP2007071722A (en) | Method of measuring parameter of elastic wave element | |
| Wang et al. | Measurement of liquid viscosity using series resonant resistance response of quartz crystal microbalance | |
| CN112213384A (en) | Humidity sensor and system based on surface acoustic wave | |
| JP2819167B2 (en) | Erythrocyte sedimentation velocity measuring method and apparatus | |
| JPH0618577A (en) | Instrument for measuring q-value of crystal resonator | |
| Fort et al. | Impedance characterization of a QCM-based measurement system in liquid media | |
| Bouche-Pillon et al. | Validation of the quartz-crystal microbalance response in liquid for sensor applications |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| S533 | Written request for registration of change of name |
Free format text: JAPANESE INTERMEDIATE CODE: R313533 |
|
| R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20090403 Year of fee payment: 11 |
|
| EXPY | Cancellation because of completion of term |