JPH02224515A - Piezoelectric vibrator and manufacture thereof - Google Patents

Piezoelectric vibrator and manufacture thereof

Info

Publication number
JPH02224515A
JPH02224515A JP4598389A JP4598389A JPH02224515A JP H02224515 A JPH02224515 A JP H02224515A JP 4598389 A JP4598389 A JP 4598389A JP 4598389 A JP4598389 A JP 4598389A JP H02224515 A JPH02224515 A JP H02224515A
Authority
JP
Japan
Prior art keywords
piezoelectric vibrator
piezoelectric
electrode
electrodes
contact
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4598389A
Other languages
Japanese (ja)
Inventor
Toru Takahashi
透 高橋
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
TDK Corp
Original Assignee
TDK Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by TDK Corp filed Critical TDK Corp
Priority to JP4598389A priority Critical patent/JPH02224515A/en
Publication of JPH02224515A publication Critical patent/JPH02224515A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To obtain a piezoelectric vibrator with ease of assembling and low cost by providing a contact piece being an electric contact part with an outer conductor to part of input and output electrodes and bonding the contact piece with the electrode independently through the use of an isotropic elastic conductor material. CONSTITUTION:Contact pieces 13, 14 being electric contact parts with an outer conductor are bonded to electrodes 22, 32 with a conductive adhesives made of an isotropic elastic conductive material showing equal conductivity in all directions and bonded to electrodes 22, 32 with a conductive adhesives and integrated with a piezoelectric vibrator. Moreover, the contact pieces 13, 14 are made independent via a distance d1 and the electrodes 22, 23 are isolated electrically. Then the contact piece 13, 14 are arranged in the midposition being a node of the vibration in the lengthwise direction and the vibration fault is evaded. Thus, the piezoelectric vibrator with ease of assembling and mounting in a case, no position deviation of the contact piece and inexpensive cost is obtained.

Description

【発明の詳細な説明】 〈産業上の利用分野〉 本発明は、主として、長さ方向振動モードを利用した圧
電振動子及びその製造方法に関し、圧電素体の一面上に
設けられた入力電極及び出力電極のそれぞれに、等方性
弾性導電材でなる接触片を、互いに独立して接合するこ
とにより、組立が容易で、外部導体と電気的に接触する
接触片の位置ずれを招くことがなく、しかもコストの安
価な圧電振動子及びその製造方法を提供できるようにし
たものである。
Detailed Description of the Invention <Industrial Application Field> The present invention mainly relates to a piezoelectric vibrator using a longitudinal vibration mode and a method for manufacturing the same, and relates to an input electrode and a piezoelectric vibrator provided on one surface of a piezoelectric element. By independently bonding contact pieces made of isotropic elastic conductive material to each of the output electrodes, assembly is easy and the contact pieces that make electrical contact with the external conductor do not become misaligned. Moreover, it is possible to provide an inexpensive piezoelectric vibrator and a manufacturing method thereof.

〈従来の技術〉 長さ方向振動モードを利用した圧電振動子の従来技術と
しては、例えば特開昭58−99017号公報、特開昭
58−99022号公報等に記載されたものがある。第
4図は上記公報によって開示された従来の圧電振動子を
示し、圧電素体1の1面側に長さ方向に沿って、溝Sl
を設けると共に、長さ方向の両端側に、端部から適当な
間隔を残して、前記溝51と直交する如く、スプリアス
低減のための溝32及びS3を設け、8溝Sl〜S3に
よって区画された面に、電極21〜23及び電極31〜
33を被着形成し、他面側に電極4を被着形成した構造
となっている。電極21〜23及び電極31〜33は、
一方が人力電極であるとき、他方が出力電極となる。電
極4は電極21〜23.31〜33に対して共通に対向
する共通電極となる。
<Prior Art> Conventional technologies for piezoelectric vibrators using a longitudinal vibration mode include those described in, for example, Japanese Patent Laid-Open No. 58-99017, Japanese Patent Laid-Open No. 58-99022, and the like. FIG. 4 shows a conventional piezoelectric vibrator disclosed in the above-mentioned publication, in which grooves Sl
In addition, grooves 32 and S3 for spurious reduction are provided on both ends in the length direction, leaving an appropriate interval from the end, and perpendicular to the groove 51, and are partitioned by eight grooves Sl to S3. On the surface, electrodes 21 to 23 and electrodes 31 to
33 is deposited and the electrode 4 is deposited on the other side. The electrodes 21 to 23 and the electrodes 31 to 33 are
When one is a manual electrode, the other is an output electrode. The electrode 4 serves as a common electrode that commonly faces the electrodes 21 to 23 and 31 to 33.

上記の圧電振動子は、通常、ケース内に組込んで使用さ
れる。入出力電極となる電極21〜23.31〜33及
び共通電極4は、端子によってケース外部に導出する。
The piezoelectric vibrator described above is usually used by being built into a case. The electrodes 21 to 23, 31 to 33, and the common electrode 4, which serve as input/output electrodes, are led out of the case through terminals.

電極21〜23及び電極31〜33は、第4図に示した
ように、圧電素体1の同一面上にあり、互いに接近して
いるので、端子による電極取出しに当っては、電気的に
独立した状態で、しかも振動障害とならないような構造
が必要である。その手段として、従来は、例えば実開昭
60−158324号に開示される如く、入出力電極と
端子との間に異方性導電ゴムを介在させていた。第5図
にその1例を示す。第5図において、5は圧電振動子、
6は異方性導電ゴム、7〜9は金属薄板でなる端子、1
oは絶縁樹脂等で成型されたケース、11は蓋、12は
外装ケースである。
As shown in FIG. 4, the electrodes 21 to 23 and the electrodes 31 to 33 are on the same surface of the piezoelectric element 1 and are close to each other, so when taking out the electrodes with the terminal, there is no electrical It is necessary to have a structure that is independent and does not cause vibration disturbances. Conventionally, as a means for this purpose, anisotropic conductive rubber has been interposed between the input/output electrodes and the terminals, as disclosed in, for example, Japanese Utility Model Application Publication No. 60-158324. An example is shown in FIG. In FIG. 5, 5 is a piezoelectric vibrator;
6 is anisotropic conductive rubber, 7 to 9 are terminals made of thin metal plates, 1
o is a case molded from insulating resin, 11 is a lid, and 12 is an exterior case.

圧電振動子5は電極21〜23.31〜33がケース1
0の底面側を向くように配置し、共通電極4のある上面
側に端子9のバネ片91によるバネ圧を加えるようにな
っている。
The piezoelectric vibrator 5 has electrodes 21 to 23, and 31 to 33 in case 1.
The terminal 9 is arranged so as to face the bottom side of the terminal 9, and spring pressure is applied by the spring piece 91 of the terminal 9 to the top side where the common electrode 4 is located.

ケース10の底面には、端子71.8が配置されており
、端子7.8と圧電振動子5の電極22.32との間に
、異方性導電ゴム6を非接着状態で介在させである。異
方性導電ゴム6は、圧電振動子の振動障害とならないよ
うに、振動の節となる長さ方向の中間部、即ち電極22
.33のほぼ中間部において接触するように配置す−る
A terminal 71.8 is arranged on the bottom surface of the case 10, and an anisotropic conductive rubber 6 is interposed in a non-adhered state between the terminal 7.8 and the electrode 22.32 of the piezoelectric vibrator 5. be. The anisotropic conductive rubber 6 is arranged at an intermediate portion in the longitudinal direction that becomes a node of vibration, that is, an electrode 22 so as not to interfere with the vibration of the piezoelectric vibrator.
.. 33, so as to be in contact with each other approximately in the middle.

異方性導電ゴム6は、厚み方向に導電性を持つが、厚み
方向と直交する面方向には導電性を持たない。従って、
電極22と端子7、及び、電極32と端子8とは、異方
性導電ゴム6の導電性により互いに電気的に導通するが
、電極22と電極32とは、異方性導電ゴム6を共用し
ていても電気的には互いに絶縁された状態にある。
The anisotropic conductive rubber 6 has conductivity in the thickness direction, but not in the plane direction perpendicular to the thickness direction. Therefore,
The electrode 22 and the terminal 7 and the electrode 32 and the terminal 8 are electrically connected to each other due to the conductivity of the anisotropic conductive rubber 6, but the electrode 22 and the electrode 32 share the anisotropic conductive rubber 6. However, they are electrically isolated from each other.

端子7〜9の導出端部は、外装ケース12によって全体
を覆った後に、−点鎖線で示す如く、所定の形状に折曲
げられる。
After the lead-out ends of the terminals 7 to 9 are entirely covered by the outer case 12, they are bent into a predetermined shape as shown by the dashed line.

〈発明が解決しようとする問題点〉 上述したように、従来の圧電振動子は、ケース内組込に
当って、異方性導電ゴム6を利用して、入出力電極とな
る電極22.32を端子7.8に電気的に接触させてい
た。このため、高価な異方性導電ゴム6を使用すること
が必須で、製品のコスト高を招いていた。
<Problems to be Solved by the Invention> As described above, the conventional piezoelectric vibrator utilizes the anisotropic conductive rubber 6 to form the electrodes 22 and 32 that serve as input and output electrodes when incorporated into the case. was in electrical contact with terminal 7.8. For this reason, it is essential to use the expensive anisotropic conductive rubber 6, which increases the cost of the product.

また、ケース10内への組込みに当って、異方性導電ゴ
ム6をケース10内に収納した後、その上に圧電振動子
5を載せる組立順序を経なければならず、組立工数が増
え、組立が面倒にな・る・という問題点もあった。圧電
振動子5は、幅が0. 6111m程度の微小部品であ
り、異方性導電ゴム6はこれよりも更に小さい微小部品
となるから、異方性導電ゴム6と圧電振動子5とを別々
に扱わなければならない従来構造では、組立がきわめて
煩わしかった。
Furthermore, when assembling the anisotropic conductive rubber 6 into the case 10, the piezoelectric vibrator 5 must be placed on top of the anisotropic conductive rubber 6, which increases the number of assembly steps. There was also the problem that assembly was troublesome. The piezoelectric vibrator 5 has a width of 0. The anisotropic conductive rubber 6 is an even smaller component, so the conventional structure in which the anisotropic conductive rubber 6 and the piezoelectric vibrator 5 have to be handled separately is difficult to assemble. was extremely bothersome.

しかも、異方性導電ゴム6の上に圧電振動子5を非接着
状態で載せて、端子9のバネ片91のバネ圧により押え
付ける構造のため、異方性導電ゴム6が位置ズレを生じ
易く、それに伴ってスプリアスが発生するという危険性
もあった。
Moreover, since the piezoelectric vibrator 5 is placed on the anisotropic conductive rubber 6 in a non-adhered state and is pressed down by the spring pressure of the spring piece 91 of the terminal 9, the anisotropic conductive rubber 6 may be misaligned. There was also a risk that spurious signals would occur.

そこで本発明の課題は、上述する従来の問題点を解決し
、組立が容易で、外部との接触部分となる接触片の位置
ずれを招くことがなく、しかもコストの安価な圧電振動
子及びその製造方法を提供することである。
SUMMARY OF THE INVENTION An object of the present invention is to provide a piezoelectric vibrator that solves the above-mentioned conventional problems, is easy to assemble, does not cause displacement of the contact piece that contacts the outside, and is inexpensive. An object of the present invention is to provide a manufacturing method.

〈課題を解決するための手段〉 上述する課題解決のため、本発明は、圧電素体の一面側
に入力電極及び出力電極を有する圧電振動子であって、 前記入力電極及び出力電極のそれぞれは、一部に外部導
体との電気的接触部となる接触片を有しており、 前記接触片のそれぞれは、全方向において実質的に等し
い導電性を示す等方性弾性導電材でなり、互いに独立し
て、前記入力電極及び出力電極のそれぞれに接合されて
いること を特徴とする。
<Means for Solving the Problems> In order to solve the above-mentioned problems, the present invention provides a piezoelectric vibrator having an input electrode and an output electrode on one side of a piezoelectric element body, each of the input electrode and the output electrode , a part thereof has a contact piece that becomes an electrical contact part with the external conductor, and each of the contact pieces is made of an isotropic elastic conductive material that exhibits substantially equal conductivity in all directions, and It is characterized in that it is independently connected to each of the input electrode and the output electrode.

上述の圧電振動子を得るための本発明に係る製造方法は
、圧電基板の一面上に電極用導電膜を形成した後、前記
圧電基板を切断して圧電振動子単体を得る圧電振動子の
製造方法であって、前記導電膜を形成した後、前記圧電
基板を切断する前に、前記導電膜の表面上に、全方向に
おいて実質的に等しい導電性を示す等方性弾性導電材を
間隔を隔てて条状に被着させ、 各圧電振動子の入力電極及び出力電極のそれぞれに、互
いに独立する等方性弾性導電片が残るように、前記圧電
基板を切断すること を特徴とする。
The manufacturing method according to the present invention for obtaining the piezoelectric vibrator described above includes forming a conductive film for an electrode on one surface of a piezoelectric substrate, and then cutting the piezoelectric substrate to obtain a single piezoelectric vibrator. After forming the conductive film and before cutting the piezoelectric substrate, an isotropic elastic conductive material exhibiting substantially equal conductivity in all directions is placed on the surface of the conductive film at intervals. The piezoelectric substrate is cut so that independent isotropic elastic conductive pieces remain on each of the input electrode and the output electrode of each piezoelectric vibrator.

く作用〉 外部導体との電気的接触部となる接触片のそれぞれは、
全方向において実質的に等しい導電性を示す等方性弾性
導電材でなるので、従来の異方性導電ゴムと比較して、
著しくコストが安価になる。
Each of the contact pieces that make electrical contact with the external conductor is
Since it is made of an isotropic elastic conductive material that exhibits substantially equal conductivity in all directions, compared to conventional anisotropic conductive rubber,
The cost becomes significantly lower.

また、接触片のそれぞれは、入力電極及び出力電極のそ
れぞれに接合されているので、接触片が圧電振動子と一
体化され、ケース内組込みが容易になると共に、位置ズ
レを生じることもなくなり、位置ズレに伴うスプリアス
発生等を回避できる。
In addition, since each contact piece is joined to each of the input electrode and the output electrode, the contact piece is integrated with the piezoelectric vibrator, making it easy to incorporate it into the case, and eliminating the possibility of misalignment. It is possible to avoid the occurrence of spurious signals due to positional deviation.

接触片のそれぞれは、互いに独立しているので、入出力
電極間が電気的に分離され、ケース内組込みにおいて、
接触片に外部導体たる端子を接触させることにより、入
出力電極をケース外部に導出することができる。
Since each of the contact pieces is independent from each other, the input and output electrodes are electrically separated, and when installed in the case,
By bringing a terminal, which is an external conductor, into contact with the contact piece, the input/output electrode can be led out to the outside of the case.

上述の圧電振動子を得るに当り、本発明に係る製造方法
は、圧電基板上に電極用導電膜を形成した後、圧電基板
を切断する前に、導電膜の表面上に、全方向において実
質的に等しい導電性を示す等方性弾性導電材を間隔を隔
てて条状に被着させ、次に、各圧電振動子の入力電極及
び出力電極のそれぞれに、互いに独立する等方性弾性導
電片が残るように、圧電基板を切断するので、本発明に
係る圧電部品を能率良く製造できる。
In order to obtain the piezoelectric vibrator described above, the manufacturing method according to the present invention includes forming a conductive film for electrodes on a piezoelectric substrate, and then, before cutting the piezoelectric substrate, substantially forming a film on the surface of the conductive film in all directions. Isotropic elastic conductive materials that exhibit equal conductivity are applied in strips at intervals, and then independent isotropic elastic conductive materials are applied to the input and output electrodes of each piezoelectric vibrator. Since the piezoelectric substrate is cut so that pieces remain, the piezoelectric component according to the present invention can be manufactured efficiently.

〈実施例〉 第1図は本発明に係る圧電振動子の斜視図である。図に
おいて、第4図と同一の参照符号は同一性ある構成部分
を示している。13.14は外部導体との電気的接触部
となる接触片である。接触片13.14のそれぞれは、
全方向において実質的に等しい導電性を示す等方性弾性
導電材で構成されている。等方性弾性導電材は、一般的
には、導電ゴムであり、従来の異方性導電ゴムと比較し
て、著しく安価である。
<Example> FIG. 1 is a perspective view of a piezoelectric vibrator according to the present invention. In the figure, the same reference numerals as in FIG. 4 indicate the same components. 13 and 14 are contact pieces that serve as electrical contact portions with the external conductor. Each of the contact pieces 13.14 is
It is constructed from an isotropic elastic conductive material that exhibits substantially equal conductivity in all directions. The isotropic elastic conductive material is generally a conductive rubber, which is significantly cheaper than conventional anisotropic conductive rubber.

接触片13.14のそれぞれは、電極22及び電極32
のそれぞれに接合されている。接合手段としては、等方
性弾性導電材自体の接着力を利用するか、または、導電
性接着剤による接着等が考えられる。これにより、接触
片13.14と圧電振動子とが一体化され、ケース10
内への組込みが容易になると共に、位置ズレを生じるこ
とがなくなる。
Each of the contact pieces 13.14 has an electrode 22 and an electrode 32.
are joined to each. As a joining means, it is possible to use the adhesive force of the isotropic elastic conductive material itself, or to use a conductive adhesive. As a result, the contact pieces 13 and 14 and the piezoelectric vibrator are integrated, and the case 10
It is easy to incorporate the device into the interior, and no misalignment occurs.

また、接触片13.14のそれぞれは、間隔d1を介し
て、互いに独立しており、電極22−32間が電気的に
分離されている。間隔d1は電極21〜23と電極31
〜33との間に設けられた溝S1とほぼ等しくなってい
る。
Further, each of the contact pieces 13, 14 is independent from each other with a distance d1 between them, and the electrodes 22-32 are electrically isolated from each other. The distance d1 is between the electrodes 21 to 23 and the electrode 31.
It is almost equal to the groove S1 provided between .

図示の長さ方向振動モードを利用した圧電振動子の場合
、接触片13.14は、振動の節となる長さ方向の中間
部、即ち両端からの長さ10、l。
In the case of the illustrated piezoelectric vibrator using the longitudinal vibration mode, the contact pieces 13, 14 have a length of 10,1 from the middle part in the longitudinal direction, which is the node of vibration, that is, from both ends.

がほぼ等しくなる位置に配置する。こうすることにより
、接触片13.14による振動障害を回避できる。
Place it at a position where the values are approximately equal. By doing so, vibration disturbances caused by the contact pieces 13, 14 can be avoided.

第2図は本発明に係る圧電振動子をケース内に組込んだ
圧電振動部品の部分断面図である。図において、第4図
と同一の参照符号は同一性ある構成部分を示している。
FIG. 2 is a partial sectional view of a piezoelectric vibrating component in which a piezoelectric vibrator according to the present invention is incorporated into a case. In the figure, the same reference numerals as in FIG. 4 indicate the same components.

圧電振動子5は、第1図に示した如く、電極22.32
の上に接触片13.14を一体的に接合した構造となっ
ているから、圧電振動子5の組込みと一緒に、接触片1
3.14も同時に組み込まれ、ケース内組込みが容易に
なる。しかも接触片13.14に位置ズレを生じること
がないので、位置ズレに伴うスプリアス発生を回避でき
る。
The piezoelectric vibrator 5 has electrodes 22, 32, as shown in FIG.
Since it has a structure in which the contact pieces 13 and 14 are integrally joined on top of the piezoelectric vibrator 5, the contact piece 1
3.14 is also incorporated at the same time, making it easy to integrate into the case. Moreover, since no positional deviation occurs in the contact pieces 13, 14, it is possible to avoid spurious generation due to positional deviation.

接触片13.14は、間隔dlを隔てて互いに独立して
おり、電極22−32間が電気的に分離されているから
、接触片13.14に外部導体たる端子7.8を接触さ
せて、電極22.32をケース10の外部に導出するこ
とができる。
Since the contact pieces 13.14 are independent from each other with a distance dl between them, and the electrodes 22-32 are electrically isolated, the terminal 7.8, which is an external conductor, is brought into contact with the contact piece 13.14. , the electrodes 22.32 can be led out of the case 10.

第3図(a) 、(b)は本発明に係る圧電振動子の製
造方法を示す図である。まず、第3図(a)に示すよう
に、圧電基板A上に電極用導電膜B、Cを形成した後、
圧電基板Aを切断する前に、導電膜Bの表面上に、全方
向において実質的に等しい導電性を示す等方性弾性導電
材D1〜D、を、間隔を隔てて条状に被着させる。等方
性弾性導電材D1〜Dsは、導電成分と、ゴム等の有機
系弾性材と、適当な溶媒とを混合してペースト化したも
のを、所定のパターンとなるように塗布する等の手段に
よって形成できる。塗布手段としては、スクリーン印刷
等が使用できる。
FIGS. 3(a) and 3(b) are diagrams showing a method for manufacturing a piezoelectric vibrator according to the present invention. First, as shown in FIG. 3(a), after forming electrode conductive films B and C on a piezoelectric substrate A,
Before cutting the piezoelectric substrate A, isotropic elastic conductive materials D1 to D, which exhibit substantially equal conductivity in all directions, are deposited in strips at intervals on the surface of the conductive film B. . The isotropic elastic conductive materials D1 to Ds are prepared by mixing a conductive component, an organic elastic material such as rubber, and an appropriate solvent to form a paste, and applying it in a predetermined pattern. It can be formed by As a coating means, screen printing or the like can be used.

次に、等方性弾性導電材り、−D、の乾燥、硬化等の工
程を経た後、第3図(b)に示すように、ダイシングソ
ー等を用いて、必要な溝S1〜S3人れを行なうと共に
、分割線(X+  X+)〜(X4−X4)、(y+ 
−Yl) 〜(Y5−Ys)に沿って分割する。これに
より、第1図に示した圧電振動子が得られる。
Next, after going through the steps of drying and curing the isotropic elastic conductive material -D, as shown in Figure 3(b), the required grooves S1 to S3 are cut using a dicing saw or the like. At the same time, the dividing lines (X+ X+) to (X4-X4), (y+
-Yl) to (Y5-Ys). As a result, the piezoelectric vibrator shown in FIG. 1 is obtained.

この製造方法によれば、微小部品である圧電素体の上に
、更に微小な接触片を一体的に接合した圧電振動子を能
率良く量産できる。
According to this manufacturing method, it is possible to efficiently mass-produce a piezoelectric vibrator in which a microscopic contact piece is integrally bonded to a piezoelectric element body that is a microscopic component.

〈発明の効果〉 以上述べたように、本発明に係る圧電振動子は、圧電素
体の一面側に入力電極及び出力電極を有する圧電振動子
であって、入力電極及び出力電極のそれぞれは、一部に
外部導体との電気的接触部となる接触片を有しており、
接触9片のそれぞれは、全方向において実質的に等しい
導電性を示す等方性弾性導電材でなり、互いに独立して
、入力電極及び出力電極のそれぞれに接合されユいるか
ら、ケース内組込み、組立が容易で、外部導体と電気的
に接触する接触片の位置ずれを招くことがなく、しかも
コストの安価な圧電振動子を提供できる。
<Effects of the Invention> As described above, the piezoelectric vibrator according to the present invention is a piezoelectric vibrator having an input electrode and an output electrode on one side of a piezoelectric element body, and each of the input electrode and the output electrode has the following characteristics: Part of it has a contact piece that becomes an electrical contact with the external conductor,
Each of the nine contact pieces is made of an isotropic elastic conductive material that exhibits substantially equal conductivity in all directions, and is independently joined to each of the input and output electrodes. It is possible to provide a piezoelectric vibrator that is easy to assemble, does not cause displacement of a contact piece that electrically contacts an external conductor, and is inexpensive.

また、本発明に係る製造方法によれば、上述した圧電振
動子を能率良く量産できる。
Further, according to the manufacturing method according to the present invention, the piezoelectric vibrator described above can be efficiently mass-produced.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明に係る圧電振動子の斜視図、第2図は本
発明に係る圧電振動子を組込んだ圧電部品の要部部分断
面図、第3図(a)、(b)は本発明に係る圧電振動子
の製造方法を示す図、第4図は従来の圧電振動子の斜視
図、第5図は従来の圧電振動子を組込んだ圧電部品の部
分断面図である。 1・・・圧電素体 21〜23・・・入力電極または出力電極31〜33・
・・出力電極または人力電極4・・・共通電極 13.14・・・接触片 51%52、S3・・・溝 第 図 第 図 第 図
FIG. 1 is a perspective view of a piezoelectric vibrator according to the present invention, FIG. 2 is a partial sectional view of a main part of a piezoelectric component incorporating a piezoelectric vibrator according to the present invention, and FIGS. 3(a) and (b) are FIG. 4 is a perspective view of a conventional piezoelectric vibrator, and FIG. 5 is a partial sectional view of a piezoelectric component incorporating a conventional piezoelectric vibrator. 1... Piezoelectric element bodies 21-23... Input electrodes or output electrodes 31-33.
...Output electrode or manual electrode 4...Common electrode 13.14...Contact piece 51%52, S3...Groove diagram diagram diagram diagram diagram

Claims (3)

【特許請求の範囲】[Claims] (1)圧電素体の一面側に入力電極及び出力電極を有す
る圧電振動子であって、 前記入力電極及び出力電極のそれぞれは、一部に外部導
体との電気的接触部となる接触片を有しており、 前記接触片のそれぞれは、全方向において実質的に等し
い導電性を示す等方性弾性導電材でなり、互いに独立し
て、前記入力電極及び出力電極のそれぞれに接合されて
いること を特徴とする圧電振動子。
(1) A piezoelectric vibrator having an input electrode and an output electrode on one side of a piezoelectric element, each of the input electrode and output electrode having a contact piece that serves as an electrical contact portion with an external conductor. each of the contact pieces is made of an isotropic elastic conductive material that exhibits substantially equal conductivity in all directions, and is independently joined to each of the input and output electrodes. A piezoelectric vibrator characterized by:
(2)長さ方向振動モードを利用した圧電振動子であっ
て、 前記入力電極及び出力電極は、前記圧電素体の前記一面
上に直線状に設けられた溝によって分離されており、 前記接触片は、長さ方向振動における節の付近に配置さ
れていること を特徴とする圧電振動子。
(2) A piezoelectric vibrator using a longitudinal vibration mode, wherein the input electrode and the output electrode are separated by a groove linearly provided on the one surface of the piezoelectric element, and the contact A piezoelectric vibrator characterized in that the pieces are arranged near nodes in longitudinal vibration.
(3)圧電基板の一面上に電極用導電膜を形成した後、
前記圧電基板を切断して圧電振動子単体を得る圧電振動
子の製造方法であって、 前記導電膜を形成した後、前記圧電基板を切断する前に
、前記導電膜の表面上に、全方向において実質的に等し
い導電性を示す等方性弾性導電材を間隔を隔てて条状に
被着させ、 各圧電振動子の入力電極及び出力電極のそれぞれに、互
いに独立する等方性弾性導電片が残るように、前記圧電
基板を切断すること を特徴とする圧電振動子の製造方法。
(3) After forming a conductive film for an electrode on one surface of the piezoelectric substrate,
A method for manufacturing a piezoelectric vibrator in which a single piezoelectric vibrator is obtained by cutting the piezoelectric substrate, the method comprising: after forming the conductive film, and before cutting the piezoelectric substrate, a film is formed on the surface of the conductive film in all directions. Isotropic elastic conductive material exhibiting substantially equal conductivity is applied in strips at intervals, and independent isotropic elastic conductive pieces are attached to each of the input electrode and output electrode of each piezoelectric vibrator. A method of manufacturing a piezoelectric vibrator, characterized in that the piezoelectric substrate is cut so that a portion of the piezoelectric substrate remains.
JP4598389A 1989-02-27 1989-02-27 Piezoelectric vibrator and manufacture thereof Pending JPH02224515A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4598389A JPH02224515A (en) 1989-02-27 1989-02-27 Piezoelectric vibrator and manufacture thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4598389A JPH02224515A (en) 1989-02-27 1989-02-27 Piezoelectric vibrator and manufacture thereof

Publications (1)

Publication Number Publication Date
JPH02224515A true JPH02224515A (en) 1990-09-06

Family

ID=12734407

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4598389A Pending JPH02224515A (en) 1989-02-27 1989-02-27 Piezoelectric vibrator and manufacture thereof

Country Status (1)

Country Link
JP (1) JPH02224515A (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19739494C2 (en) * 1997-01-14 1999-12-16 Murata Manufacturing Co Piezoelectric element and method of manufacturing the same
DE19739495C2 (en) * 1997-01-14 2000-01-05 Murata Manufacturing Co Piezoelectric device and method for manufacturing the same
US6297581B1 (en) 1997-09-11 2001-10-02 Murata Manufacturing Co., Ltd. Piezoelectric element and electronic component including same
CN1127209C (en) * 1997-10-01 2003-11-05 株式会社村田制作所 Electronic component, ladder filter and communication apparatus
CN1127211C (en) * 1997-10-03 2003-11-05 株式会社村田制作所 Electronic component and ladder filter
JP2006105933A (en) * 2004-10-08 2006-04-20 Matsushita Electric Ind Co Ltd Membrane with bump, and manufacturing method thereof, and inspection method of wafer

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59212A (en) * 1982-06-25 1984-01-05 Murata Mfg Co Ltd Piezoelectric resonance element and its manufacture
JPS6259929A (en) * 1985-09-10 1987-03-16 Casio Comput Co Ltd Liquid crystal optical shutter

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59212A (en) * 1982-06-25 1984-01-05 Murata Mfg Co Ltd Piezoelectric resonance element and its manufacture
JPS6259929A (en) * 1985-09-10 1987-03-16 Casio Comput Co Ltd Liquid crystal optical shutter

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19739494C2 (en) * 1997-01-14 1999-12-16 Murata Manufacturing Co Piezoelectric element and method of manufacturing the same
DE19739495C2 (en) * 1997-01-14 2000-01-05 Murata Manufacturing Co Piezoelectric device and method for manufacturing the same
US6158098A (en) * 1997-01-14 2000-12-12 Murata Manufacturing Co. Ltd Method of producing a piezoelectric element
US6192562B1 (en) 1997-01-14 2001-02-27 Murata Manufacturing Co., Ltd. Method of producing piezoelectric component
CN1118105C (en) * 1997-01-14 2003-08-13 株式会社村田制作所 Piezoelectric element and method of producing same
US6297581B1 (en) 1997-09-11 2001-10-02 Murata Manufacturing Co., Ltd. Piezoelectric element and electronic component including same
KR100327909B1 (en) * 1997-09-11 2002-05-09 무라타 야스타카 Piezoelectric element and electronic component including same
CN1127209C (en) * 1997-10-01 2003-11-05 株式会社村田制作所 Electronic component, ladder filter and communication apparatus
CN1127211C (en) * 1997-10-03 2003-11-05 株式会社村田制作所 Electronic component and ladder filter
JP2006105933A (en) * 2004-10-08 2006-04-20 Matsushita Electric Ind Co Ltd Membrane with bump, and manufacturing method thereof, and inspection method of wafer

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