JPH0222133A - Production of quartz glass - Google Patents
Production of quartz glassInfo
- Publication number
- JPH0222133A JPH0222133A JP16904888A JP16904888A JPH0222133A JP H0222133 A JPH0222133 A JP H0222133A JP 16904888 A JP16904888 A JP 16904888A JP 16904888 A JP16904888 A JP 16904888A JP H0222133 A JPH0222133 A JP H0222133A
- Authority
- JP
- Japan
- Prior art keywords
- gel
- alcohol
- silicone oil
- quartz glass
- wet gel
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 title claims abstract description 38
- 238000004519 manufacturing process Methods 0.000 title claims description 8
- 239000011240 wet gel Substances 0.000 claims abstract description 27
- 239000000203 mixture Substances 0.000 claims abstract description 12
- 239000000377 silicon dioxide Substances 0.000 claims abstract description 9
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 8
- 239000010703 silicon Substances 0.000 claims abstract description 8
- 239000003921 oil Substances 0.000 claims 1
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 abstract description 19
- 229920002545 silicone oil Polymers 0.000 abstract description 16
- 239000000499 gel Substances 0.000 abstract description 15
- 238000001035 drying Methods 0.000 abstract description 14
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 abstract description 6
- -1 silicon alkoxide Chemical class 0.000 abstract description 6
- 238000000034 method Methods 0.000 abstract description 4
- 229910002012 Aerosil® Inorganic materials 0.000 abstract description 2
- 238000005336 cracking Methods 0.000 abstract 1
- 238000007598 dipping method Methods 0.000 abstract 1
- 230000003301 hydrolyzing effect Effects 0.000 abstract 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 13
- 239000000843 powder Substances 0.000 description 4
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000010304 firing Methods 0.000 description 3
- 238000007654 immersion Methods 0.000 description 3
- 239000001301 oxygen Substances 0.000 description 3
- 229910052760 oxygen Inorganic materials 0.000 description 3
- 239000010453 quartz Substances 0.000 description 3
- 238000003980 solgel method Methods 0.000 description 3
- 238000009834 vaporization Methods 0.000 description 3
- 230000008016 vaporization Effects 0.000 description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- LRHPLDYGYMQRHN-UHFFFAOYSA-N N-Butanol Chemical compound CCCCO LRHPLDYGYMQRHN-UHFFFAOYSA-N 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 239000012530 fluid Substances 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 239000001307 helium Substances 0.000 description 2
- 229910052734 helium Inorganic materials 0.000 description 2
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 2
- 239000011259 mixed solution Substances 0.000 description 2
- 239000004033 plastic Substances 0.000 description 2
- 239000000243 solution Substances 0.000 description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 239000004721 Polyphenylene oxide Substances 0.000 description 1
- BOTDANWDWHJENH-UHFFFAOYSA-N Tetraethyl orthosilicate Chemical compound CCO[Si](OCC)(OCC)OCC BOTDANWDWHJENH-UHFFFAOYSA-N 0.000 description 1
- 150000001298 alcohols Chemical class 0.000 description 1
- 150000004703 alkoxides Chemical class 0.000 description 1
- AGBZIWDKCKUACI-UHFFFAOYSA-N butyl ethyl methyl propyl silicate Chemical compound CCCCO[Si](OC)(OCC)OCCC AGBZIWDKCKUACI-UHFFFAOYSA-N 0.000 description 1
- 239000000084 colloidal system Substances 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 230000007062 hydrolysis Effects 0.000 description 1
- 238000006460 hydrolysis reaction Methods 0.000 description 1
- 238000009776 industrial production Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 230000001404 mediated effect Effects 0.000 description 1
- 239000005416 organic matter Substances 0.000 description 1
- 229920000570 polyether Polymers 0.000 description 1
- 229920001296 polysiloxane Polymers 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- XJKVPKYVPCWHFO-UHFFFAOYSA-N silicon;hydrate Chemical compound O.[Si] XJKVPKYVPCWHFO-UHFFFAOYSA-N 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B19/00—Other methods of shaping glass
- C03B19/12—Other methods of shaping glass by liquid-phase reaction processes
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Manufacturing & Machinery (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Glass Melting And Manufacturing (AREA)
Abstract
Description
【発明の詳細な説明】
[産業上の利用分野]
本発明は石英ガラスの製造方法、特にゾルゲル法による
石英ガラスの製造方法に関するものである。DETAILED DESCRIPTION OF THE INVENTION [Industrial Field of Application] The present invention relates to a method for producing quartz glass, particularly a method for producing quartz glass by a sol-gel method.
[従来の技術]
ゾルゲル法による石英ガラスの製造においては、まず、
シリカ成分となるシリコンアルキシド、シリカ粉末ある
いは両者の混合物を、水あるいは水とアルコールの混合
液に溶解又は分散させ、流動性をもつコロイド溶液であ
るゾルを作製する。ついでこのゾルを型に流し込んで固
化させ、内部に多量の水又は水とアルコールを含んでい
るゼリー状のウェットゲルを作製する。その後、このウ
ェットゲルを乾燥させて、内部に含まれる水やアルコー
ルを除いて、乾燥多孔質体であるドライゲルにした後、
酸素雰囲気で500〜600°Cまで加熱して、ドライ
ゲル内の残留有機物を除き、その後、ヘリウム雰囲気で
1200〜1500°Cまで加熱して透明石英ガラスを
得る。[Prior art] In the production of quartz glass using the sol-gel method, first,
A sol, which is a fluid colloidal solution, is prepared by dissolving or dispersing silicon alkoxide, silica powder, or a mixture of both as the silica component in water or a mixture of water and alcohol. This sol is then poured into a mold and solidified to produce a jelly-like wet gel containing a large amount of water or water and alcohol inside. After that, this wet gel is dried to remove the water and alcohol contained inside and become a dry gel, which is a dry porous body.
The dry gel is heated to 500 to 600°C in an oxygen atmosphere to remove residual organic matter, and then heated to 1200 to 1500°C in a helium atmosphere to obtain transparent quartz glass.
[発明が解決しようとする課題]
この従来技術の大きな欠点の一つは、内部に多量の水や
アルコールを含んでいるウェットゲルの乾燥工程で、割
れが発生し易く、それを防ぐためには、乾燥を極めてゆ
っくり行う必要があり、このことが工業生産を妨げてい
る大きな要因の一つであった。[Problems to be Solved by the Invention] One of the major drawbacks of this prior art is that cracks tend to occur during the drying process of the wet gel, which contains a large amount of water and alcohol. Drying had to be carried out extremely slowly, and this was one of the major factors hindering industrial production.
本発明の目的は、短い乾燥時間でクラックの無い乾燥ゲ
ルを得て、この乾燥ゲルを焼成することにより石英ガラ
スを作製する方法を提供することにある。An object of the present invention is to provide a method for producing quartz glass by obtaining a crack-free dry gel in a short drying time and firing the dry gel.
[課題を解決するための手段及び作用]本発明の要旨は
、シリカからなるウェットゲルを作製後、そのウェット
ゲルを乾燥、焼成して石英ガラスを作製する方法におい
て、上記ウェットゲルを、アルコール−シリコンオイル
混合液に浸漬した後、乾燥し、焼成するものである。
先ず、ウェットゲルを作製するには、シリコンアルコキ
シド、シリカ粉末又は両者の混合物を、水あるいは水と
アルコールの混合液に溶解又は分散させ、流動性をもつ
コロイド溶液であるゾルを作製し、このゾルを型に流し
込んで固化させてゼリー状のウェットゲルとする6
シリコンアルキシドとしてはメトキシ、エトキシ、プロ
ポキシ、ブトキシシラン等を用いることができる。[Means and effects for solving the problems] The gist of the present invention is to provide a method for producing silica glass by producing a wet gel made of silica, then drying and firing the wet gel. After being immersed in a silicone oil mixture, it is dried and fired.
First, to create a wet gel, silicon alkoxide, silica powder, or a mixture of both is dissolved or dispersed in water or a mixture of water and alcohol to create a sol, which is a fluid colloidal solution. The mixture is poured into a mold and solidified to form a jelly-like wet gel.6 As the silicon alkoxide, methoxy, ethoxy, propoxy, butoxysilane, etc. can be used.
シリカ粉末としては、気相法で作製したエアロジルやシ
リコンアルコキシドの加水分解で生じるコロイド/8液
の乾燥により得られるアルコキシド経由シリカ粉末を用
いることができる。As the silica powder, it is possible to use Aerosil produced by a gas phase method or an alkoxide-mediated silica powder obtained by drying a colloid/8 liquid produced by hydrolysis of silicon alkoxide.
アルコールとしては、メタノール、エタノール。Alcohols include methanol and ethanol.
グロバノール、ブタノール等を用いることができる。Globanol, butanol, etc. can be used.
シリコンオイルとしてはアルコール類に可溶な高級脂肪
酸変性シリコンオイルやシリコンポリエーテル共重合体
を用いることができる。As the silicone oil, alcohol-soluble higher fatty acid-modified silicone oil or silicone polyether copolymer can be used.
このウェットゲルをアルコール−シリコンオイル混合液
に浸漬後乾燥することで、乾燥時水やアルコールの気化
によるゲルの歪をシリコンオイルが緩和し、その乾燥時
間を大幅に短くする。また、加熱により、シリコンオイ
ル中の炭素、水成分が除去され、残ったケイ素は焼成過
程でゲル成分と同等となり、一体止した石英ガラスとな
る。By immersing this wet gel in an alcohol-silicone oil mixture and then drying it, the silicone oil alleviates the distortion of the gel due to vaporization of water and alcohol during drying, and the drying time is significantly shortened. Also, by heating, the carbon and water components in the silicone oil are removed, and the remaining silicon becomes equivalent to gel components during the firing process, forming a solid silica glass.
[実施例] 以下本発明の具体的な実施例を説明する。[Example] Specific examples of the present invention will be described below.
(実施例1)
モル比でシリコンエトキシドとp Hが9の水を1=4
に混合した液を円筒状のプラスチック容器に入れて室温
でゲル化させ、直径3011、長さ3001111のウ
ェットゲルを10本作製した。このうちの5本のウェッ
トゲルをエタノールとアルコール可溶性シリコンオイル
のモル比で2=1の混合液1oo。(Example 1) Silicon ethoxide and water with a pH of 9 in a molar ratio of 1 = 4
The mixed solution was placed in a cylindrical plastic container and allowed to gel at room temperature to produce 10 wet gels each having a diameter of 3011 mm and a length of 3001111 mm. Five of these wet gels were mixed into 1 oo of a mixture of ethanol and alcohol-soluble silicone oil in a molar ratio of 2=1.
mlに24時間浸漬した0次にこれらのウェットゲル1
0本を乾燥器に入れ、1日に40℃の割合で70℃から
140°Cまで3日間で温度を上昇させて、乾燥させた
ところ、浸漬処理無しのウェットゲルは5本ともずべて
多くの亀裂が入ったが、浸漬処理を行ったウェットゲル
は5中1本だけ亀裂が生じ、他の4本は亀裂無しの直径
15111、長さ15軸信のドライゲルを得た。これら
の亀裂無しのドライゲルを電気炉内で酸素雰囲気で60
0℃まで加熱し、次にヘリウム雰囲気で1250℃まで
加熱して直径1011、長さ100111の透明石英ガ
ラス棒を得た。These wet gels were soaked for 24 hours in ml.
When we put 0 gels in a dryer and raised the temperature from 70°C to 140°C at a rate of 40°C per day for 3 days to dry them, we found that all 5 wet gels without immersion treatment were much larger. However, only one of the five wet gels subjected to the immersion treatment had cracks, and the other four had no cracks, resulting in dry gels with a diameter of 15111 mm and a length of 15 axes. These crack-free dry gels were heated in an oxygen atmosphere in an electric furnace for 60 minutes.
It was heated to 0° C. and then heated to 1250° C. in a helium atmosphere to obtain a transparent quartz glass rod with a diameter of 1011 and a length of 100111.
エタノール−シリコンオイル浸漬処理を行ったウェット
ゲルに亀裂が入りにくかったのは、140’Cdでの加
熱において、水やアルコールの気化に伴ってウェットゲ
ル内に生じる歪の緩和作用をシリコンオイルが果たすた
めである。さらに乾燥処理に続く酸素雰囲気における6
00°Cまでの加熱処理でシリコンオイルの炭素と水素
成分はゲルより除去され、ゲイ素成分はSiO□となっ
てゲル成分と同等になり、焼結過程でゲル由来のS i
O2と一体化して石英ガラスとなると考えられる。The reason why the wet gel subjected to the ethanol-silicone oil immersion treatment was difficult to crack is that the silicone oil acts to alleviate the strain that occurs in the wet gel due to the vaporization of water and alcohol when heated at 140'Cd. It's for a reason. 6 in an oxygen atmosphere following further drying treatment.
The carbon and hydrogen components of the silicone oil are removed from the gel by heat treatment up to 00°C, and the silicon component becomes SiO□, which is equivalent to the gel component, and during the sintering process, the Si derived from the gel
It is thought that it becomes integrated with O2 to form quartz glass.
(実施例2)
石英棒でなく、石英管を作製するなめ、同心円状のプラ
スチック容器を用いて、外径30Ill、内径2011
N、長さ300inのウェットゲルを作製した。(Example 2) Instead of a quartz rod, a quartz tube was made using a concentric plastic container with an outer diameter of 30 Ill and an inner diameter of 2011 Ill.
A wet gel with a length of 300 inches was prepared.
この管状ウェットゲルを棒状ウェットゲルと同様にエタ
ノールとアルコール可溶性シリコンオイル混合液で処理
後、乾燥、焼結して外径10nn、内径61m11、長
さ100111の石英管を得た。この場合も比較のため
に処理をしない管状ウェットゲルを乾燥したところ、全
て多数の亀裂が入った。This tubular wet gel was treated with a mixed solution of ethanol and alcohol-soluble silicone oil in the same manner as the rod-shaped wet gel, then dried and sintered to obtain a quartz tube with an outer diameter of 10 nn, an inner diameter of 61 m11, and a length of 100111 mm. In this case as well, when tubular wet gels without any treatment were dried for comparison, all of them had numerous cracks.
し発明の効果] 本発明によれば、次のごとき優れた効果を発揮する。[Effects of the invention] According to the present invention, the following excellent effects are exhibited.
(1)アルコールとアルコール可溶性シリコンオイルの
混合液に浸漬したウェットゲルを乾燥する時、水やアル
コールの気化に伴ってウェットゲル内に生じる歪の緩和
作用をシリコンオイルが果たすため、ウェットゲルの乾
燥時間の大幅な短縮ができる。(1) When drying a wet gel immersed in a mixture of alcohol and alcohol-soluble silicone oil, the silicone oil acts to alleviate the strain that occurs in the wet gel due to the vaporization of water and alcohol, so the wet gel dries. It can save a lot of time.
(2)ゾルゲル法による石英カラスの製作において、長
時間にわたる乾燥工程が必要であったのを大幅に短縮で
きるため、省エネルギー、時間短縮の点からコスト低減
につながる。(2) In the production of quartz glass using the sol-gel method, the long drying process that was required can be significantly shortened, leading to cost reductions in terms of energy savings and time savings.
(3)従来は乾燥時間が長過ぎて実際上作製困難であっ
た大型の石英ガラスも造ることができる。(3) It is also possible to produce large-sized quartz glass, which was previously difficult to produce because the drying time was too long.
Claims (1)
トゲルを乾燥、焼成して石英ガラスを作製する方法にお
いて、上記ウェットゲルを、アルコール−シリコンオイ
ル混合液に浸漬した後、乾燥し、焼成することを特徴と
する石英ガラスの製造方法。1. After producing a wet gel made of silica, the wet gel is dried and fired to produce quartz glass, in which the wet gel is immersed in an alcohol-silicon oil mixture, then dried and fired. A method for producing quartz glass characterized by:
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16904888A JPH0222133A (en) | 1988-07-08 | 1988-07-08 | Production of quartz glass |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16904888A JPH0222133A (en) | 1988-07-08 | 1988-07-08 | Production of quartz glass |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0222133A true JPH0222133A (en) | 1990-01-25 |
Family
ID=15879358
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP16904888A Pending JPH0222133A (en) | 1988-07-08 | 1988-07-08 | Production of quartz glass |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0222133A (en) |
-
1988
- 1988-07-08 JP JP16904888A patent/JPH0222133A/en active Pending
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