JPH0221759U - - Google Patents

Info

Publication number

JPH0221759U

JPH0221759U JP10044888U JP10044888U JPH0221759U JP H0221759 U JPH0221759 U JP H0221759U JP 10044888 U JP10044888 U JP 10044888U JP 10044888 U JP10044888 U JP 10044888U JP H0221759 U JPH0221759 U JP H0221759U

Authority

JP

Japan

Prior art keywords

fixed part

resistor

strain

crystal

axis

Prior art date

1988-07-28

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000013078 crystal Substances 0.000 claims 3
• XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 1
• 238000005530 etching Methods 0.000 claims 1
• 238000000034 method Methods 0.000 claims 1
• 239000004065 semiconductor Substances 0.000 claims 1
• 229910052710 silicon Inorganic materials 0.000 claims 1
• 239000010703 silicon Substances 0.000 claims 1
• 238000010586 diagram Methods 0.000 description 3
• 239000011521 glass Substances 0.000 description 1