JPH0221651U - - Google Patents
Info
- Publication number
- JPH0221651U JPH0221651U JP9848488U JP9848488U JPH0221651U JP H0221651 U JPH0221651 U JP H0221651U JP 9848488 U JP9848488 U JP 9848488U JP 9848488 U JP9848488 U JP 9848488U JP H0221651 U JPH0221651 U JP H0221651U
- Authority
- JP
- Japan
- Prior art keywords
- pellicle
- air
- excitation means
- attaching
- vibration
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005284 excitation Effects 0.000 claims description 3
- 239000000758 substrate Substances 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 3
- 239000000428 dust Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9848488U JPH0221651U (xx) | 1988-07-27 | 1988-07-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9848488U JPH0221651U (xx) | 1988-07-27 | 1988-07-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0221651U true JPH0221651U (xx) | 1990-02-14 |
Family
ID=31324795
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9848488U Pending JPH0221651U (xx) | 1988-07-27 | 1988-07-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0221651U (xx) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005010700A (ja) * | 2003-06-23 | 2005-01-13 | Toppan Printing Co Ltd | 露光用原板の検査装置及び検査方法 |
-
1988
- 1988-07-27 JP JP9848488U patent/JPH0221651U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005010700A (ja) * | 2003-06-23 | 2005-01-13 | Toppan Printing Co Ltd | 露光用原板の検査装置及び検査方法 |