JPH0221585A - フレキシブル差込み端子を有する静電吸着板の電極切断防止装置 - Google Patents

フレキシブル差込み端子を有する静電吸着板の電極切断防止装置

Info

Publication number
JPH0221585A
JPH0221585A JP63170275A JP17027588A JPH0221585A JP H0221585 A JPH0221585 A JP H0221585A JP 63170275 A JP63170275 A JP 63170275A JP 17027588 A JP17027588 A JP 17027588A JP H0221585 A JPH0221585 A JP H0221585A
Authority
JP
Japan
Prior art keywords
layer
adhesive layer
positive
adsorption
terminal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP63170275A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0447434B2 (enrdf_load_stackoverflow
Inventor
Keiji Kasahara
敬次 笠原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Abisare Co Ltd
Original Assignee
Abisare Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Abisare Co Ltd filed Critical Abisare Co Ltd
Priority to JP63170275A priority Critical patent/JPH0221585A/ja
Publication of JPH0221585A publication Critical patent/JPH0221585A/ja
Publication of JPH0447434B2 publication Critical patent/JPH0447434B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Coupling Device And Connection With Printed Circuit (AREA)
JP63170275A 1988-07-08 1988-07-08 フレキシブル差込み端子を有する静電吸着板の電極切断防止装置 Granted JPH0221585A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP63170275A JPH0221585A (ja) 1988-07-08 1988-07-08 フレキシブル差込み端子を有する静電吸着板の電極切断防止装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP63170275A JPH0221585A (ja) 1988-07-08 1988-07-08 フレキシブル差込み端子を有する静電吸着板の電極切断防止装置

Publications (2)

Publication Number Publication Date
JPH0221585A true JPH0221585A (ja) 1990-01-24
JPH0447434B2 JPH0447434B2 (enrdf_load_stackoverflow) 1992-08-03

Family

ID=15901927

Family Applications (1)

Application Number Title Priority Date Filing Date
JP63170275A Granted JPH0221585A (ja) 1988-07-08 1988-07-08 フレキシブル差込み端子を有する静電吸着板の電極切断防止装置

Country Status (1)

Country Link
JP (1) JPH0221585A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0447434B2 (enrdf_load_stackoverflow) 1992-08-03

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