JPH02214174A - Laminated type thin-film thermocouple - Google Patents
Laminated type thin-film thermocoupleInfo
- Publication number
- JPH02214174A JPH02214174A JP1034475A JP3447589A JPH02214174A JP H02214174 A JPH02214174 A JP H02214174A JP 1034475 A JP1034475 A JP 1034475A JP 3447589 A JP3447589 A JP 3447589A JP H02214174 A JPH02214174 A JP H02214174A
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- thermocouple
- substrate
- edge
- types
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010409 thin film Substances 0.000 title claims abstract description 46
- 239000000758 substrate Substances 0.000 claims abstract description 16
- 239000000463 material Substances 0.000 claims abstract description 15
- 239000000919 ceramic Substances 0.000 claims abstract description 8
- 239000011521 glass Substances 0.000 claims abstract description 8
- 229920003023 plastic Polymers 0.000 claims abstract description 7
- 239000004033 plastic Substances 0.000 claims abstract description 7
- 239000000470 constituent Substances 0.000 claims description 13
- 239000012777 electrically insulating material Substances 0.000 claims description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract description 15
- 239000000377 silicon dioxide Substances 0.000 abstract description 6
- 229910001179 chromel Inorganic materials 0.000 abstract description 5
- 229910000809 Alumel Inorganic materials 0.000 abstract description 4
- 238000009529 body temperature measurement Methods 0.000 description 4
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 4
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 238000005520 cutting process Methods 0.000 description 2
- 239000010408 film Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 229910052697 platinum Inorganic materials 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 229910001006 Constantan Inorganic materials 0.000 description 1
- 229910020169 SiOa Inorganic materials 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000000873 masking effect Effects 0.000 description 1
- PXXKQOPKNFECSZ-UHFFFAOYSA-N platinum rhodium Chemical compound [Rh].[Pt] PXXKQOPKNFECSZ-UHFFFAOYSA-N 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Landscapes
- Measuring Temperature Or Quantity Of Heat (AREA)
Abstract
Description
【発明の詳細な説明】
（産業上の利用分野）
本発明は、測温用の積層型薄膜熱電対に関するものであ
る。DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to a laminated thin film thermocouple for temperature measurement.
（従来技術とその問題点）
従来の薄膜熱電対１は、第２図に示す如くガラス、セラ
ミックス、プラスチックス等の基板２の同一平面上に、
２種類の熱電対構成材料の線状薄膜３ ａ ｓ ３ ｂ
が相対して形成され、且つ一端同志が重合されて接合部
４が形成され、各線状薄膜３ａ、３ｂの他端に導電薄膜
が重合されて端子部５ａ、５ｂが形成されて成るもので
、２種類の熱電対構成材料の線状薄膜３ａ、３ｂを形成
するためにマスキングして行う必要があり、熱電対構成
材料の使用歩留りが低く、多量にしかも安価に製造でき
ない欠点と熱電対の形状から必要とする巾があり、巾の
狭いものの限界があった。(Prior art and its problems) As shown in FIG.
Linear thin film of two types of thermocouple constituent materials 3 a s 3 b
are formed facing each other, and one end is overlapped to form a joint part 4, and a conductive thin film is superposed on the other end of each linear thin film 3a, 3b to form terminal parts 5a, 5b, It is necessary to perform masking to form the linear thin films 3a and 3b of the two types of thermocouple constituent materials, and the yield of the thermocouple constituent materials is low, making it impossible to manufacture them in large quantities and at low cost.Disadvantages and the shape of the thermocouple. There was a required width, and there was a limit to how narrow the width could be.
（発明の目的）
本発明は、上記欠点を解決すべくなされたもので、ガラ
ス、セラミックス、プラスチックス等の基板などを測温
する際、接合部を基板に密着させることのできる巾の狭
い積層型薄膜熱電対を提供することを目的とするもので
ある。(Object of the Invention) The present invention has been made to solve the above-mentioned drawbacks.The present invention has been made to solve the above-mentioned drawbacks. The purpose is to provide a type thin film thermocouple.
（問題点を解決するための手段）
上記欠点を解決するための本発明の積層型薄膜熱電対は
、ガラス、セラミックス、プラスチックス等の基板上に
、２種類の熱電対構成材料のいずれか一方の線状薄膜が
形成され、その薄膜上にもう一方の熱電対構成材料の線
状薄膜がガラス、セラミックス、プラスチックス等の電
気絶縁材料を介して形成され、且つこれら２種類の線状
薄膜の一端同志が重合されて接合部が形成され、他端が
端子部として形成されて成るものである。(Means for Solving the Problems) In order to solve the above-mentioned drawbacks, the laminated thin film thermocouple of the present invention has one of two types of thermocouple constituent materials on a substrate made of glass, ceramics, plastics, etc. A linear thin film of the other thermocouple constituent material is formed on that thin film through an electrically insulating material such as glass, ceramics, plastics, etc., and these two types of linear thin films are One end is overlapped to form a joint part, and the other end is formed as a terminal part.
（作用）
本発明の積層型薄膜熱電対は上記の如く構成されている
ので、ガラス、セラミックス、プラスチックス等の基板
などを測温する際、接合部を基板に密着させることもで
き、従って従来の薄膜熱電対と同等に熱伝導性も良く、
測温の応答性も早いもので、従来の薄膜熱電対は、ガラ
ス、セラミックス、プラスチックス等の基板の同一平面
上に、２種類の熱電対構成材料の線状薄膜が相対して形
成されていたのに対し、本発明では積層型薄膜熱電対で
あるため製造時に繁雑な方法をとる必要が少なく、熱電
対構成材料の使用歩留りが向上し、熱電対の巾を該熱電
対の一方の線状薄膜の巾にまで狭くすることができるも
のである。(Function) Since the laminated thin film thermocouple of the present invention is constructed as described above, when measuring the temperature of a substrate made of glass, ceramics, plastics, etc., the joint part can be brought into close contact with the substrate. Thermal conductivity is as good as that of thin film thermocouples,
Temperature measurement response is fast, and conventional thin film thermocouples consist of thin linear films of two types of thermocouple constituent materials formed facing each other on the same plane of a substrate made of glass, ceramics, plastics, etc. On the other hand, since the present invention is a laminated thin-film thermocouple, there is less need to use complicated manufacturing methods, and the yield of thermocouple constituent materials is improved. It can be made as narrow as the width of a thin film.
（実施例１）
第１図ａに示す如く、１００ｍｍＸ １００ｍｍＸ Ｉ
ＩＩＩｌｌｔのシリカ（ＳｉＯａ）の基板７上に第１図
すに示す如くスパッタリング法でアルメルの２ミクロン
の薄膜８ａを形成し、次いで、第１図Ｃに示す如く先端
と後端をそれぞれ５市レジスト９にてマスキングし、第
１図ｄに示す如くシリカの２ミクロンの薄膜１０を形成
し、次いで、第１図ｅに示す如くレジスト９とその上の
シリカ薄膜１０をとり除き、第１図ｆに示す如く該シリ
カ薄膜１０の後端を５ ｍｍレジスト９にてマスキング
して、第１図ｇに示す如くクロメルの２ミクロンの薄膜
８ｂを形成し、第１図りに示す如くレジスト９とその上
のクロメル薄膜８ｂを除いたのち、第１図１に示す如く
縦方向に５ｍｍ巾で切断して積層型薄膜熱電対１１を得
た。(Example 1) As shown in Figure 1a, 100mm x 100mm x I
A thin film 8a of 2 microns of alumel is formed on a silica (SiOa) substrate 7 of IIIllt by a sputtering method as shown in FIG. 9, a 2 micron thin film 10 of silica is formed as shown in FIG. 1d, and then the resist 9 and the silica thin film 10 thereon are removed as shown in FIG. 1e. As shown in Figure 1, the rear end of the silica thin film 10 is masked with a 5 mm resist 9, and a 2 micron thin film 8b of chromel is formed as shown in Figure 1g. After removing the chromel thin film 8b, the laminated thin film thermocouple 11 was obtained by cutting in the longitudinal direction into a width of 5 mm as shown in FIG.
（従来例）
第２図に示す如＜ １００＋ｎｍＸ ２５＋ｎｍＸ １
ｍｍｔのシリカ（ＳｉＯ２）の基板２上にスパッタリン
グ法によりアルメルとクロメルの熱電対構成材料の厚み
２ミクロン、巾５ｍｍ、長さ１００ｍｍで、それぞれ一
端部が対向するように長さ５ ｍ＋＋＋屈曲した線状薄
膜３ａ、３ｂが形成され、且つ一端同志が重合されて５
市角厚さ４ミクロンの熱起電力を得るだめの接合部４が
形成され、各線状薄膜３ａ、３ｂの他端に５ｍａ＋角厚
さ２ミクロンの銅の薄膜が重合されて端子部５ａ、５ｂ
が形成されている薄膜熱電対１を得た。(Conventional example) As shown in Figure 2 < 100+nmX 25+nmX 1
mmt silica (SiO2) substrate 2 was sputtered to form wires of thermocouple constituent materials of alumel and chromel with a thickness of 2 microns, a width of 5 mm, and a length of 100 mm, each bent to a length of 5 m +++ so that one end faced each other. Thin films 3a and 3b are formed, and their ends are polymerized to form 5
A joint part 4 with a square thickness of 4 microns for obtaining a thermoelectromotive force is formed, and a copper thin film with a square thickness of 5 millimeters and a square thickness of 2 microns is superposed on the other end of each linear thin film 3a, 3b to form terminal parts 5a, 5b.
A thin film thermocouple 1 was obtained.
上記実施例と従来例で得た熱電対１１及び１を白金薄膜
電極の石英ガラス基板を測温するために、その石英ガラ
ス基板上に重ねたところ、密着させることができ、測温
の応答の早さは変わりなかった。When the thermocouples 11 and 1 obtained in the above embodiment and conventional example were stacked on the quartz glass substrate of the platinum thin film electrode in order to measure the temperature of the quartz glass substrate, they could be brought into close contact with each other and the response of the temperature measurement could be improved. There was no change in speed.
なお、上記実施例では、熱電対構成材料としてアルメル
とクロメルを用いたが、本発明はこれに限るものではな
く、白金・白金−ロジウム、銅・コンスタンタンなどい
かなる熱電対材料から成るものでもよいものである。In the above embodiments, alumel and chromel were used as the thermocouple constituent materials, but the present invention is not limited to these, and may be made of any thermocouple material such as platinum/platinum-rhodium, copper/constantan, etc. It is.
また、上記実施例では基板上に熱電対構成材料の薄膜を
スパッタリング法によって形成したが本発明はこれに限
るものではなく、印刷法、蒸着法等によってもよいもの
である。Further, in the above embodiment, a thin film of the thermocouple constituent material was formed on the substrate by sputtering, but the present invention is not limited to this, and printing, vapor deposition, etc. may also be used.
さらに必要に応じて熱電対構成材料から成る薄膜をアル
ミナ、ジルコニア等からなる°保護膜でコーティングし
てもよいものである。Furthermore, if necessary, the thin film made of the thermocouple constituent material may be coated with a protective film made of alumina, zirconia, or the like.
（発明の効果）
以上の説明で判るように本発明の積層型薄膜熱電対は、
ガラス塞板、セラミックス基板等を測温する際、接合部
を基板に密着できるので、熱伝導が良く、測温の応答性
が早く、また、本発明の積層型薄膜熱電対は、そのまま
基板に搭載することが可能であり、熱電対を線巾まで狭
くすることが可能で、熱電対そのものを軽量、小型化す
ることも可能である。(Effects of the Invention) As can be seen from the above explanation, the laminated thin film thermocouple of the present invention has
When measuring the temperature of glass cover plates, ceramic substrates, etc., the bonded part can be brought into close contact with the substrate, resulting in good heat conduction and quick temperature measurement response. It is possible to mount the thermocouple, it is possible to make the thermocouple as narrow as the wire width, and it is also possible to make the thermocouple itself lighter and smaller.
さらに、本発明の実施例中において薄膜形成をしたのち
、縦方向に切断する際、途中までで止めておくと、多数
の端子を持つ一体型の熱電対ができるものであり、コネ
クタ等により、多芯フラットケーブル等につなぐと応用
範囲を広げることができるものである。Furthermore, in the embodiments of the present invention, if the thin film is formed and then cut in the longitudinal direction, if the cutting is stopped halfway, an integrated thermocouple with multiple terminals can be created. By connecting it to a multicore flat cable, etc., the range of applications can be expanded.
第１図ａ乃至ｉは本発明の積層型薄膜熱電対の一実施を
示す斜視図、第２図は従来の薄膜熱電対を示す斜視図で
ある。FIGS. 1a to 1i are perspective views showing one embodiment of the laminated thin film thermocouple of the present invention, and FIG. 2 is a perspective view showing a conventional thin film thermocouple.
Claims (1)
に、２種類の熱電対構成材料のいずれか一方の線状薄膜
が形成され、その薄膜上にもう一方の熱電対構成材料の
線状薄膜がガラス、セラミックス、プラスチックス等の
電気絶縁材料を介して形成され、且つこれら２種類の線
状薄膜の一端同志が重合されて接合部が形成され、他端
が端子部として形成されて成る積層型薄膜熱電対。1. A linear thin film of one of two types of thermocouple constituent materials is formed on a substrate such as glass, ceramics, or plastics, and a linear thin film of the other thermocouple constituent material is formed on the thin film of glass. A laminated thin film formed through electrically insulating materials such as ceramics, plastics, etc., and in which one end of these two types of linear thin films are polymerized to form a joint, and the other end is formed as a terminal. thermocouple.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1034475A JPH02214174A (en) | 1989-02-14 | 1989-02-14 | Laminated type thin-film thermocouple |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1034475A JPH02214174A (en) | 1989-02-14 | 1989-02-14 | Laminated type thin-film thermocouple |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02214174A true JPH02214174A (en) | 1990-08-27 |
Family
ID=12415279
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1034475A Pending JPH02214174A (en) | 1989-02-14 | 1989-02-14 | Laminated type thin-film thermocouple |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02214174A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2017063141A (en) * | 2015-09-25 | 2017-03-30 | Tdk株式会社 | Thin film thermoelectric element |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6186622A (en) * | 1984-10-04 | 1986-05-02 | Sharp Corp | Thermoelectric effect type power sensor |
-
1989
- 1989-02-14 JP JP1034475A patent/JPH02214174A/en active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6186622A (en) * | 1984-10-04 | 1986-05-02 | Sharp Corp | Thermoelectric effect type power sensor |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2017063141A (en) * | 2015-09-25 | 2017-03-30 | Tdk株式会社 | Thin film thermoelectric element |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US6072165A (en) | Thin film metal/metal oxide thermocouple | |
| KR920003339A (en) | SiC thin film thermistor and its manufacturing method | |
| JPS63243885A (en) | Flow velocity detector | |
| JP3483544B2 (en) | Transparent surface temperature sensor and transparent surface temperature control device | |
| US5033299A (en) | Flow sensor | |
| US4160969A (en) | Transducer and method of making | |
| JPH02214174A (en) | Laminated type thin-film thermocouple | |
| US5622586A (en) | Method of fabricating device made of thin diamond foil | |
| US3816182A (en) | Tape thermocouple with insulation piercing junction means | |
| US7674038B2 (en) | Arrangement for temperature monitoring and regulation | |
| SE444875B (en) | WANT TO MANUFACTURE THERMISTORS | |
| JPH06258149A (en) | Thin-film thermocouple element | |
| JP2616476B2 (en) | Probe for temperature measurement | |
| JPH0228525A (en) | Thin film thermocouple | |
| JPS61201484A (en) | Manufacture of thermoelectric conversion element | |
| JPS62139339A (en) | Temperature-measuring wafer | |
| JP2007085880A (en) | Thin thermocouple and manufacturing method therefor | |
| RU2145135C1 (en) | Thermistor-type semiconductor transducer | |
| JP4034142B2 (en) | Flow sensor | |
| JPH0227570Y2 (en) | ||
| JPH0668517B2 (en) | Multi-thermocouple type thermoelectric AC / DC converter | |
| JPH0584867B2 (en) | ||
| JP2645153B2 (en) | Thin film temperature sensor element | |
| JPH0146011B2 (en) | ||
| JPH11329808A (en) | Resistance adjusting method of infrared-ray detecting element |