JPH0221128B2 - - Google Patents

Info

Publication number
JPH0221128B2
JPH0221128B2 JP56145421A JP14542181A JPH0221128B2 JP H0221128 B2 JPH0221128 B2 JP H0221128B2 JP 56145421 A JP56145421 A JP 56145421A JP 14542181 A JP14542181 A JP 14542181A JP H0221128 B2 JPH0221128 B2 JP H0221128B2
Authority
JP
Japan
Prior art keywords
electrode
oxide semiconductor
ohmic
voltage
ion plating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP56145421A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5848402A (ja
Inventor
Michihiro Nishioka
Takaaki Ito
Masahiro Furukawa
Kazuyoshi Kodera
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Mining and Cement Co Ltd
Original Assignee
Mitsubishi Mining and Cement Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Mining and Cement Co Ltd filed Critical Mitsubishi Mining and Cement Co Ltd
Priority to JP56145421A priority Critical patent/JPS5848402A/ja
Publication of JPS5848402A publication Critical patent/JPS5848402A/ja
Publication of JPH0221128B2 publication Critical patent/JPH0221128B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Thermistors And Varistors (AREA)
  • Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Ceramic Capacitors (AREA)
  • Apparatuses And Processes For Manufacturing Resistors (AREA)
JP56145421A 1981-09-17 1981-09-17 酸化物半導体素子の電極形成方法 Granted JPS5848402A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56145421A JPS5848402A (ja) 1981-09-17 1981-09-17 酸化物半導体素子の電極形成方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56145421A JPS5848402A (ja) 1981-09-17 1981-09-17 酸化物半導体素子の電極形成方法

Publications (2)

Publication Number Publication Date
JPS5848402A JPS5848402A (ja) 1983-03-22
JPH0221128B2 true JPH0221128B2 (enExample) 1990-05-11

Family

ID=15384855

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56145421A Granted JPS5848402A (ja) 1981-09-17 1981-09-17 酸化物半導体素子の電極形成方法

Country Status (1)

Country Link
JP (1) JPS5848402A (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01287902A (ja) * 1988-05-13 1989-11-20 Murata Mfg Co Ltd 正特性サーミスタ

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS513576A (ja) * 1974-06-27 1976-01-13 Murata Manufacturing Co Sankabutsuhandotaisoshino denkyokukeiseiho
JPS54152145A (en) * 1978-05-22 1979-11-30 Tdk Electronics Co Ltd Method of forming electrode for electronic component
JPS607026B2 (ja) * 1979-05-12 1985-02-21 株式会社村田製作所 銅被膜の熱処理法

Also Published As

Publication number Publication date
JPS5848402A (ja) 1983-03-22

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