JPH0220827Y2 - - Google Patents
Info
- Publication number
- JPH0220827Y2 JPH0220827Y2 JP20292585U JP20292585U JPH0220827Y2 JP H0220827 Y2 JPH0220827 Y2 JP H0220827Y2 JP 20292585 U JP20292585 U JP 20292585U JP 20292585 U JP20292585 U JP 20292585U JP H0220827 Y2 JPH0220827 Y2 JP H0220827Y2
- Authority
- JP
- Japan
- Prior art keywords
- process tube
- fixing ring
- sleeve
- sleeve hole
- key
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000000034 method Methods 0.000 claims description 49
- 238000009792 diffusion process Methods 0.000 claims description 20
- 238000012423 maintenance Methods 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- 239000011491 glass wool Substances 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 239000010453 quartz Substances 0.000 description 2
- 239000013078 crystal Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Furnace Details (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20292585U JPH0220827Y2 (https=) | 1985-12-27 | 1985-12-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20292585U JPH0220827Y2 (https=) | 1985-12-27 | 1985-12-27 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62109443U JPS62109443U (https=) | 1987-07-13 |
| JPH0220827Y2 true JPH0220827Y2 (https=) | 1990-06-06 |
Family
ID=31167764
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP20292585U Expired JPH0220827Y2 (https=) | 1985-12-27 | 1985-12-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0220827Y2 (https=) |
-
1985
- 1985-12-27 JP JP20292585U patent/JPH0220827Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62109443U (https=) | 1987-07-13 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPH0220827Y2 (https=) | ||
| JPS6372990A (ja) | パイプの横方向接続装置とその方法 | |
| WO2019216564A1 (ko) | 스파이럴 강관을 이용한 소음저감 구조를 갖는 머플러 및 그 제조방법 | |
| JPH01312294A (ja) | 可撓ホースの端部を係合部材に固定する装置および方法 | |
| JPS61146684U (https=) | ||
| JPS6311960Y2 (https=) | ||
| JP2573614B2 (ja) | 半導体拡散炉用炭化珪素質炉芯管 | |
| JPS5831414Y2 (ja) | テ−プ伸長装置 | |
| JPH0570556U (ja) | ダクトの取付構造 | |
| JPS62162835U (https=) | ||
| JPH0369117A (ja) | 半導体装置の製造装置 | |
| JPS61179485U (https=) | ||
| JPH1030771A (ja) | 管接続装置 | |
| JPS6241793A (ja) | シリコン単結晶引上げ用ルツボ | |
| JPS59165003A (ja) | 光フアイバ−束端部の構造 | |
| JPH0482698U (https=) | ||
| JPH0126263Y2 (https=) | ||
| JPS5837933B2 (ja) | 環状けい光ランプの製造方法 | |
| JPS63237410A (ja) | 半導体装置の製造方法 | |
| JPH0382593U (https=) | ||
| JPS5950135A (ja) | アンダ−ヒ−ト型保持炉 | |
| JPH03118U (https=) | ||
| JPS6367236U (https=) | ||
| JPS63116344A (ja) | 防爆型ブラウン管 | |
| JPS62193695U (https=) |