JPH02206373A - Ultrasonic motor - Google Patents
Ultrasonic motorInfo
- Publication number
- JPH02206373A JPH02206373A JP1024987A JP2498789A JPH02206373A JP H02206373 A JPH02206373 A JP H02206373A JP 1024987 A JP1024987 A JP 1024987A JP 2498789 A JP2498789 A JP 2498789A JP H02206373 A JPH02206373 A JP H02206373A
- Authority
- JP
- Japan
- Prior art keywords
- ultrasonic motor
- voltage
- vibration
- phase
- vibrating body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000034 method Methods 0.000 abstract 2
- 230000010355 oscillation Effects 0.000 abstract 2
- 238000004904 shortening Methods 0.000 abstract 1
- 238000010586 diagram Methods 0.000 description 8
- 238000013016 damping Methods 0.000 description 4
- 238000003384 imaging method Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 239000002131 composite material Substances 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
Landscapes
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Abstract
Description
【発明の詳細な説明】
産業上の利用分野
本発明は超音波振動を利用した超音波モータに関するも
のである。DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application The present invention relates to an ultrasonic motor that utilizes ultrasonic vibrations.
従来の技術
従来のモータでは、高速応答特性のモータを得るために
、平衡値として必要とする出力以上の出力を有するモー
タを用い、そのモータに制御をかけて高速応答を得るこ
とが一般的である。このことは装置の大型化を招く。半
導体素子の進歩と共に電気機器の小型化が進む中でモー
タもやはり小型化が要求されている。しかし、モータの
構成材料の特性が半導体素子程の進歩が無いため、モー
タが常に装置の最大部品となっている。したがって、小
型化の要求を加工精度の上昇などでカバーしてきた。Conventional technology In conventional motors, in order to obtain a motor with high-speed response characteristics, it is common to use a motor with an output greater than the output required as an equilibrium value, and then control that motor to obtain high-speed response. be. This leads to an increase in the size of the device. 2. Description of the Related Art As semiconductor devices progress and electrical equipment becomes smaller, motors are also required to be smaller. However, since the properties of the materials that make up motors have not advanced as much as semiconductor devices, the motor has always been the largest component of the device. Therefore, the demand for miniaturization has been met by increasing processing accuracy.
これらの欠点を解決するものとして、回転型、及びリニ
ア型超音波モータが注目されている。この超音波モータ
は本質的に従来のモータに比較して高速応答のモータが
可能となる。その理由はモータの応答特性はトルクとモ
ータの慣性モーメントと到達速度で決まるが、いずれの
値を比較しても超音波モータが優れているためである。Rotary type and linear type ultrasonic motors are attracting attention as a solution to these drawbacks. This ultrasonic motor inherently allows for a faster response motor than conventional motors. The reason for this is that the response characteristics of a motor are determined by the torque, the moment of inertia of the motor, and the achieved speed, and ultrasonic motors are superior no matter which values are compared.
発明が解決しようとする課題
しかしながらこのような超音波モータにおいても常に高
速応答とは限らず、従来のモータと同程度の応答性しか
得られない場合が発生するといった欠点があった。Problems to be Solved by the Invention However, such an ultrasonic motor does not always have a high-speed response, and has the disadvantage that there are cases in which the response is only comparable to that of conventional motors.
なお、これらの超音波モータの応答特性を下げる要因の
一つとして振動体く超音波モータのステータ)の応答特
性が挙げられる。ステータに電力の供給を断った時、ス
テータはそれ自身が有している振動エネルギー、言い換
えるなら振動体のQ値分のエネルギー分だけ応答速度の
劣化をもたらす。具体的には振動の周期の数十倍から数
百倍の時間に相当する。位置周期を30マイクロ秒とす
るとその値は大きい場合には数十ミリ秒に達して決して
小さい値では無く、いかにしてこの値を小さくするかが
問題となっていた。Note that one of the factors that lowers the response characteristics of these ultrasonic motors is the response characteristics of the vibrating body (the stator of the ultrasonic motor). When power is cut off to the stator, the response speed is degraded by the vibration energy of the stator itself, in other words, the energy corresponding to the Q value of the vibrating body. Specifically, it corresponds to a time several tens to hundreds of times the period of vibration. When the position period is 30 microseconds, the value reaches several tens of milliseconds in the case of a large value, which is by no means a small value, and the problem has been how to reduce this value.
本発明は応答特性、特に停止時の所要時間を短くするこ
とができる超音波モータを提供するものである。The present invention provides an ultrasonic motor that can shorten response characteristics, particularly the time required for stopping.
課題を解決するための手段
上記従来の課題を解決するために本発明は、駆動電圧の
位相を反転した電圧を振動体に印加するものである。Means for Solving the Problems In order to solve the above-mentioned conventional problems, the present invention applies a voltage with the phase of the drive voltage inverted to the vibrating body.
振動体の振動を停止させるために通常振動回路に並列に
シャント抵抗でショートさせるものである。又、本発明
はさらに停止時間を短縮するために、駆動周波数の位相
を反転した電圧を印加することによってより一層短い時
間で振動を停止させるものである。In order to stop the vibration of the vibrating body, a shunt resistor is used to short-circuit the vibration circuit in parallel. Further, in order to further shorten the stopping time, the present invention applies a voltage with the phase of the drive frequency reversed, thereby stopping the vibration in an even shorter time.
超音波モータでは振動体に進行波を発生させるため、2
つの位相の異なる波を合成して発生させているが、本発
明はその2つの波に対して反転信号を印加しても良いし
、あるいは1つの相のみに反転信号を印加しても良い。In an ultrasonic motor, in order to generate a traveling wave in the vibrating body, 2
Although two waves with different phases are combined and generated, the present invention may apply an inverted signal to the two waves, or may apply an inverted signal to only one phase.
上記の反転した電圧の印加は必ず印加時間と印加電圧と
の積に最適値があり、必要以上の逆電圧の印加はむしろ
劣化した特性を招くことがある。When applying the above-mentioned reverse voltage, there is always an optimum value for the product of the application time and the applied voltage, and application of a reverse voltage more than necessary may rather lead to deteriorated characteristics.
最適値を容易に決定するためには振動体の振動の検出を
常に行いそれに応じて電圧をコントロールすることによ
ってより一層短時間での停止が可能となる。In order to easily determine the optimum value, the vibration of the vibrating body is constantly detected and the voltage is controlled accordingly, thereby making it possible to stop the motor in a much shorter time.
作用
本発明は回転型、及びリニア型超音波モータをより高速
に応答させるため、モータの停止時の立ち下がり特性を
改善するための超音波モータの駆動電圧並びに位相を改
善することによって、停止時の停止特性を改善すること
が可能となる。Function The present invention improves the driving voltage and phase of the ultrasonic motor to improve the falling characteristic when the motor stops, in order to make the rotary type and linear type ultrasonic motor respond faster. This makes it possible to improve the stopping characteristics of the vehicle.
実施例
第1図に位相反転回路を用いて回転型、及びリニア型超
音波モータに逆電圧を印加した時の応答特性を示す。こ
の場合には位相反転の駆動時間並びに電圧は回路でコン
トロールした。Embodiment FIG. 1 shows response characteristics when a reverse voltage is applied to a rotary type and a linear type ultrasonic motor using a phase inversion circuit. In this case, the drive time and voltage for phase inversion were controlled by a circuit.
第2図に回転型超音波モータ停止時の振動減衰の様子を
示す。超音波モータの減衰特性要因の1つはロータの慣
性力であり、もう1つはステータ撮動の瞬時慣性力を合
成した慣性力で第1図〜第2図の減衰時間が決まる。第
1図〜第2図の実施例では駆動周波数として40kll
zを用いたため撮動の1周期は25マイクロ秒となる。Figure 2 shows the vibration damping when the rotary ultrasonic motor is stopped. One of the damping characteristic factors of the ultrasonic motor is the inertial force of the rotor, and the other is the inertial force that is a composite of the instantaneous inertial force of stator imaging, which determines the damping times shown in FIGS. 1 and 2. In the embodiment shown in Figures 1 and 2, the driving frequency is 40 kll.
Since z is used, one imaging period is 25 microseconds.
超音波モータは25マイクロ秒の数十倍振動を続ける。The ultrasonic motor continues to vibrate several tens of times for 25 microseconds.
その間に超音波モータは運動を続けて初期の停止位置と
は異なった場所で停止する。超音波モータの高速応答に
はこの値が問題となる。Meanwhile, the ultrasonic motor continues to move and stops at a location different from the initial stop position. This value poses a problem for the high-speed response of ultrasonic motors.
第3図は位相反転した電圧を停止時に印加するための回
路のブロック図を示す。さらに第4図に圧電体の一部あ
るいは超音波モータの振動電流検出回路より振動を検出
して、その信号を最小にするための回路を示す。さらに
第5図にスイッチング回路で停止と同時に超音波モータ
を最適抵抗に接続してステータの振動をダンピングさせ
る回路図を示す。FIG. 3 shows a block diagram of a circuit for applying a phase-inverted voltage when stopped. Further, FIG. 4 shows a circuit for detecting vibrations from a part of the piezoelectric body or a vibration current detection circuit of an ultrasonic motor and minimizing the signal. Furthermore, FIG. 5 shows a circuit diagram in which the ultrasonic motor is connected to the optimum resistance at the same time as the switching circuit stops, thereby damping the vibrations of the stator.
第6図に本発明の回転型、及びリニア型超音波モータの
応答特性の一例を示す。FIG. 6 shows an example of the response characteristics of the rotary type and linear type ultrasonic motors of the present invention.
第6図から明らかなように本実施例では、立ち上り、立
ち下がりともに1ミリ秒以下の高速応答が可能となった
。As is clear from FIG. 6, in this example, high-speed response of 1 millisecond or less is possible for both rise and fall.
発明の効果
本発明は回転型、及びリニア型超音波モータをより高速
に停止させ、応答特性を向上させるもので、従来数ミリ
秒の停止時間がかかっていたが、本発明による超音波モ
ータの停止時間はそれを10分の1程度に減少させるこ
とが可能となった。Effects of the Invention The present invention enables rotary and linear ultrasonic motors to stop faster and improves response characteristics. Conventionally, it took several milliseconds to stop, but the ultrasonic motor of the present invention It has become possible to reduce the downtime to about one-tenth.
第1図は超音波モータ停止時の振動応答速度特性図、第
2図は他の超音波モータの応答特性図、第3図は位相反
転回路のブロック図、第4図は超音波モータのステータ
の振動信号を検出して振動を最小にするための回路のブ
ロック図、第5図はシャント抵抗を挿入した場合の回路
図、第6図は本発明の超音波モータ及び回路の停止時の
立ち上り、立ち下がり特性図である。
代理人の氏名 弁理士 粟野重孝 ほか1名第
図
20/″sec
H2
駈動儂彬
A加電表渣彬Figure 1 is a vibration response speed characteristic diagram when the ultrasonic motor is stopped, Figure 2 is a response characteristic diagram of another ultrasonic motor, Figure 3 is a block diagram of the phase inversion circuit, and Figure 4 is the stator of the ultrasonic motor. Figure 5 is a circuit diagram when a shunt resistor is inserted, Figure 6 is a diagram of the ultrasonic motor of the present invention and its rise when the circuit is stopped. , is a falling characteristic diagram. Name of agent: Patent attorney Shigetaka Awano and 1 other person Figure 20/″sec H2 Akira Kaden Akaden Omote
Claims (5)
て、超音波モータの停止の際、駆動電圧の位相を反転し
た電圧を振動体に印加して停止する超音波モータ。(1) In an ultrasonic motor that uses ultrasonic vibration as a driving force source, when the ultrasonic motor is stopped, a voltage with the phase of the driving voltage reversed is applied to the vibrating body to stop the ultrasonic motor.
て、超音波モータの停止の際、駆動体であるステータに
駆動用の圧電体に抵抗を接続して停止する超音波モータ
。(2) In an ultrasonic motor that uses ultrasonic vibration as a driving force source, when the ultrasonic motor is stopped, a resistor is connected to a driving piezoelectric body in a stator, which is a driving body, to stop the ultrasonic motor.
を印加する回路を設けた請求項1又は2に記載の超音波
モータ。(3) The ultrasonic motor according to claim 1 or 2, further comprising a circuit that applies a voltage whose phase is reversed simultaneously with the stop command.
がりの時間に印かする様にした超音波モータの停止回路
を有する請求項1又は2に記載の超音モータ。(4) The ultrasonic motor according to claim 1 or 2, further comprising an ultrasonic motor stop circuit in which the application time of the reverse voltage is applied to the fall time of vibration of the ultrasonic motor.
位相及び電圧を制御する超音波モータの停止回路を有す
る請求項1,2,3のいずれかに記載の超音波モータ。(5) The ultrasonic motor according to any one of claims 1, 2, and 3, further comprising an ultrasonic motor stop circuit that detects the vibration of the vibrating body and controls the phase and voltage so that the vibration becomes zero.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1024987A JPH02206373A (en) | 1989-02-03 | 1989-02-03 | Ultrasonic motor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1024987A JPH02206373A (en) | 1989-02-03 | 1989-02-03 | Ultrasonic motor |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH02206373A true JPH02206373A (en) | 1990-08-16 |
Family
ID=12153332
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1024987A Pending JPH02206373A (en) | 1989-02-03 | 1989-02-03 | Ultrasonic motor |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH02206373A (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5436521A (en) * | 1992-06-12 | 1995-07-25 | Canon Kabushiki Kaisha | Vibration type actuator apparatus |
US7061156B2 (en) | 2001-06-01 | 2006-06-13 | Canon Kabushiki Kaisha | Control apparatus for vibration type actuator |
US7154208B2 (en) | 2001-06-01 | 2006-12-26 | Canon Kabushiki Kaisha | Control apparatus for vibration type actuator |
JP2009089517A (en) * | 2007-09-28 | 2009-04-23 | Olympus Corp | Drive device for ultrasonic motor |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61116980A (en) * | 1984-11-08 | 1986-06-04 | Nippon Kogaku Kk <Nikon> | Drive device of surface wave motor |
JPS63209478A (en) * | 1987-02-26 | 1988-08-31 | Hitachi Maxell Ltd | Very fine response ultrasonic motor |
-
1989
- 1989-02-03 JP JP1024987A patent/JPH02206373A/en active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61116980A (en) * | 1984-11-08 | 1986-06-04 | Nippon Kogaku Kk <Nikon> | Drive device of surface wave motor |
JPS63209478A (en) * | 1987-02-26 | 1988-08-31 | Hitachi Maxell Ltd | Very fine response ultrasonic motor |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5436521A (en) * | 1992-06-12 | 1995-07-25 | Canon Kabushiki Kaisha | Vibration type actuator apparatus |
US7061156B2 (en) | 2001-06-01 | 2006-06-13 | Canon Kabushiki Kaisha | Control apparatus for vibration type actuator |
US7154208B2 (en) | 2001-06-01 | 2006-12-26 | Canon Kabushiki Kaisha | Control apparatus for vibration type actuator |
JP2009089517A (en) * | 2007-09-28 | 2009-04-23 | Olympus Corp | Drive device for ultrasonic motor |
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