JPH02202678A - Parts inspecting device - Google Patents

Parts inspecting device

Info

Publication number
JPH02202678A
JPH02202678A JP1023213A JP2321389A JPH02202678A JP H02202678 A JPH02202678 A JP H02202678A JP 1023213 A JP1023213 A JP 1023213A JP 2321389 A JP2321389 A JP 2321389A JP H02202678 A JPH02202678 A JP H02202678A
Authority
JP
Japan
Prior art keywords
parts
component
polarity
window
light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1023213A
Other languages
Japanese (ja)
Inventor
Yoshinori Yamaguchi
芳徳 山口
Satoru Arita
悟 有田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Omron Corp
Original Assignee
Omron Tateisi Electronics Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Omron Tateisi Electronics Co filed Critical Omron Tateisi Electronics Co
Priority to JP1023213A priority Critical patent/JPH02202678A/en
Publication of JPH02202678A publication Critical patent/JPH02202678A/en
Pending legal-status Critical Current

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  • Image Processing (AREA)
  • Supply And Installment Of Electrical Components (AREA)
  • Image Analysis (AREA)

Abstract

PURPOSE:To discriminate the characteristic of parts by irradiating the observed surface of the parts to be inspected by slit light intersecting the contour line of the parts and in addition, intersecting a feature part at the middle, and setting a window for the reflected image of the parts, and observing a picture in the window. CONSTITUTION:An irradiation direction is set previously so that the slit light 8 goes along the longitudinal direction of this parts 14, and as a result, the light 8 comes to intersect the contour line of the end 18 of the parts, and in addition, intersect a polarity mark 17 at the middle. When reflected light 9 is image-picked up by a camera 2, discontinuity 19 appears at the part of the mark 17 in the reflected image 20, and the window extending over the nearly whole length of the reflected image is set. Brightness is measured as scanning in the lateral direction of the window, and polarity is discriminated according to relation in which direction of a center position the darkest part is positioned. Thus, the polarity or other characteristic is discriminated for the parts whose polarity is defined plainly or the parts of special construction or shape.

Description

【発明の詳細な説明】 〈産業−ヒの利用分野〉 この発明は、基板上の実装部品につき、その部品の極性
1種類、欠陥などの特性を検査するのに用いられる部品
検査装置に関する。
DETAILED DESCRIPTION OF THE INVENTION <Field of Industrial Use> The present invention relates to a component inspection device used to inspect characteristics such as one type of polarity and defects of components mounted on a board.

〈従来の技術〉 例えば部品の極性を検査するのに、被検査部品の表面へ
−様な照明を施してその部品の画像を生成し、その画像
の明るさの分布を計測することにより、極性判別を行っ
てその部品の向きを求めている。
<Prior art> For example, to inspect the polarity of a component, the surface of the component to be inspected is illuminated in various ways to generate an image of the component, and the brightness distribution of the image is measured. The orientation of the part is determined by making a determination.

第8図は、タンタルコンデンサのような部品10の極性
を判別する方法を示している。この部品10はパッケー
ジ全体が黒色をなし、その表面に文字12や極性マーク
11が白色で印刷されている。このような部品10に−
様な光を照射して撮像し、その画像の明るさの分布13
を求めると、極性マーク11の白色部分とパッケージの
黒色部分とでは明度差がはっきりと現れる。このため部
品10の極性を容易に判別でき、この部品10がいずれ
の方向を向いているかを検出できる。
FIG. 8 shows a method for determining the polarity of a component 10, such as a tantalum capacitor. The entire package of this component 10 is black, and characters 12 and polarity marks 11 are printed in white on the surface. In such a part 10-
Image brightness distribution 13
, a brightness difference clearly appears between the white part of the polarity mark 11 and the black part of the package. Therefore, the polarity of the component 10 can be easily determined, and it is possible to detect which direction the component 10 is facing.

〈発明が解決しようとする問題点〉 しかしながらこのような検査方法は、極性マークが印刷
された特定部品の検査に適用できるのみで、極性マーク
が異なる方法で施されていたり、部品が特殊な構造や形
態をもつ場合には、これをそのまま適用することが困難
である。
<Problems to be solved by the invention> However, such inspection methods can only be applied to the inspection of specific parts on which polarity marks are printed. It is difficult to apply this directly when the

第9図は、ガラス管ダイオードと称される円筒状部品1
4であって、金属本体部分15の外周全体をガラス皮膜
16で覆い、このガラス皮膜16の表面に極性を示す帯
状の極性マーク17が一方に偏らせて描かれている。
Figure 9 shows a cylindrical part 1 called a glass tube diode.
4, the entire outer periphery of the metal body portion 15 is covered with a glass film 16, and a band-shaped polarity mark 17 indicating polarity is drawn on the surface of the glass film 16 so as to be biased to one side.

このような部品14の場合、表面がガラス皮膜16で覆
われ、しかも極性マーク17の色も多様であるため、上
記のような検査方法では極性マーク17の部分と他の部
分との間で十分な明度差を得ることができず、安定した
検査は困難である。
In the case of such a component 14, the surface is covered with a glass film 16, and the polarity mark 17 has a variety of colors, so the above inspection method cannot detect a sufficient distance between the polarity mark 17 and other parts. It is difficult to perform stable inspection because it is not possible to obtain a brightness difference.

またこのような部品以外に、パッケージの一端面を切り
欠いて、極性を明示した部品(具体例は後記する)も存
在するが、このような部品についても上記した方法を適
用するのは困難である。
In addition to these types of parts, there are also parts whose polarity is clearly indicated by cutting out one end of the package (specific examples will be given later), but it is difficult to apply the above method to such parts as well. be.

この発明は、上記問題に着目してなされたもので、種々
の方法で極性の明示が行われた部品や特殊な構造や形態
をもつ部品についても極性の判別がなし得ると共に、極
性以外の他の特性についての判別も可能な新規な部品検
査装置を提供することを目的とする。
This invention was made with attention to the above problem, and it is possible to determine the polarity of parts whose polarity has been clearly indicated by various methods or parts with a special structure or form, and also to determine the polarity of parts other than polarity. The purpose of the present invention is to provide a new component inspection device that can also discriminate the characteristics of the parts.

〈問題点を解決するための手段〉 上記目的を達成するため、請求項(1)に記載した発明
では、観測面の輪郭線の内側位置に凹凸をなす特徴部分
が現れる被検査部品につき、その部品の観測面に対し前
記輪郭線と交叉しかつ前記特徴部分と中間で交叉するス
リット光を照射するための投光手段と、前記被検査部品
からのスリット光の反射光を撮像するための撮像手段と
、撮像手段で得た反射像に対し所定のウィンドウを設定
してウィンドウ内の画像より部品の特性を判別する判別
手段とで部品検査装置を構成することにしている。
<Means for Solving the Problems> In order to achieve the above object, the invention as set forth in claim (1) provides a method for inspecting a part to be inspected in which a characteristic portion having an uneven shape appears inside the contour line of the observation surface. a light projection means for irradiating the observation surface of the part with a slit light that intersects the contour line and intersects the characteristic portion in the middle; and an imaging unit for imaging the reflected light of the slit light from the inspected part. A component inspection device is constituted by the device and a determining device that sets a predetermined window for the reflected image obtained by the imaging device and determines the characteristics of the component from the image within the window.

また同じ目的を達成するため、請求項(2)に記載した
発明では、観測面の輪郭線上の中間位置に凹凸をなす特
徴部分が現れる被検査部品につき、その部品の観測面に
対し前記輪郭線に沿いかつ前記特徴部分と中間で交叉す
るスリット光を照射するための投光手段と、前記被検査
部品からのスリット光の反射光を撮像するための撮像手
段と、撮像手段で得た反射像に対し所定のウィンドウを
設定してウィンドウ内の画像より部品の特性を判別する
判別手段とで部品検査装置を構成することにしている。
In addition, in order to achieve the same object, in the invention described in claim (2), for a part to be inspected in which a characteristic portion having an uneven shape appears at an intermediate position on the contour line of the observation surface, the contour line is a light projecting means for irradiating a slit light along and intersecting the characteristic portion in the middle; an imaging means for imaging the reflected light of the slit light from the inspected component; and a reflected image obtained by the imaging means. A component inspection device is configured with a determining means that sets a predetermined window for the image and determines the characteristics of the component from the image within the window.

〈作用〉 観測面に極性マークなどの凹凸をなす特徴部分が現れた
被検査部品につきその極性などの特性を検査するに際し
て、被検査部品の観測面に対し、所定の位置および向き
にスリット光を照射してその反射光を撮像するとき、そ
の反射像には特徴部分に対応して途切れが生ずるため、
その反射像にウィンドウを設定してウィンドウ内の画像
を観測することで容易に部品の特性を判別できる。
<Operation> When inspecting the polarity and other characteristics of a part to be inspected that has uneven features such as polar marks on the observation surface, a slit light is directed at a predetermined position and direction to the observation surface of the part to be inspected. When irradiating and capturing an image of the reflected light, there will be breaks in the reflected image corresponding to the characteristic parts, so
By setting a window on the reflected image and observing the image within the window, the characteristics of the component can be easily determined.

〈実施例〉 第1図は、この発明の一実施例にかかる部品検査装置の
全体構成を示している。
<Embodiment> FIG. 1 shows the overall configuration of a parts inspection apparatus according to an embodiment of the present invention.

図中、投光装置1は基板6上の被検査部品7ヘスリツト
光8を照射し、カメラ2は被検査部品7からのスリット
光の反射光9を撮像する。
In the figure, a light projecting device 1 irradiates a slit light 8 onto a component 7 to be inspected on a substrate 6, and a camera 2 images reflected light 9 of the slit light from the component 7 to be inspected.

制御装置3は、カメラ2より映像信号を入力してその反
射像に所定の画像処理を施し被検査部品7の特性判別を
行うと共に、投光装置1の投光動作やカメラ2の撮像動
作を制御信号により制御する。なお画像メモリ4は反射
像を格納し、モニタ5は反射像を表示するためのもので
ある。
The control device 3 inputs the video signal from the camera 2 and performs predetermined image processing on the reflected image to determine the characteristics of the inspected component 7, and also controls the light projection operation of the light projection device 1 and the imaging operation of the camera 2. Controlled by control signals. Note that the image memory 4 stores the reflected image, and the monitor 5 is for displaying the reflected image.

投光装置lおよびカメラ2は基板6の上方に位置するが
、この場合に被検査部品7に対して投光装置1を真上位
置に、カメラ2を斜め上方位置に、それぞれ位置させる
と、基板6が撓みなどで浮き上がっても、所定位置にス
リット光8を確実に照射でき、かつ確実にその反射像を
得ることができる。
The light projecting device 1 and the camera 2 are located above the board 6, but in this case, if the projecting device 1 is positioned directly above the component 7 to be inspected, and the camera 2 is located diagonally above the component 7, Even if the substrate 6 is lifted due to bending or the like, the slit light 8 can be reliably irradiated to a predetermined position, and its reflected image can be reliably obtained.

第2図は、ガラス管ダイオードのような円筒状部品14
につき、その極性マーク17の位置を検査している状況
を示す。
FIG. 2 shows a cylindrical component 14 such as a glass tube diode.
The situation in which the position of the polarity mark 17 is being inspected is shown.

前記極性マーク17は、ガラス皮膜16の表面に一周し
て描かれており、この部品14を上方より観測すると、
前記極性マーク17は一方の部品端18の輪郭線に対し
その内側位置に全幅にわたって存在する。
The polarity mark 17 is drawn around the surface of the glass film 16, and when this part 14 is observed from above,
The polarity mark 17 is present over the entire width at a position inside the contour line of one component end 18.

この実施例の投光装置lでは、スリット光8がこの部品
14の長手方向に沿うようその照射方向が設定してあり
、その結果、スリット光8は部品14に対し、前記部品
端18の輪郭線と交叉しかつ極性マーク17と中間で交
叉することになる。
In the light projecting device 1 of this embodiment, the irradiation direction of the slit light 8 is set so as to follow the longitudinal direction of the component 14, and as a result, the slit light 8 is directed toward the component 14 along the contour of the component end 18. It intersects the line and intersects the polarity mark 17 in the middle.

このスリッ光ト8は、極性マーク17の部分ではその表
面で反射するが、それ以外の部分ではガラス皮膜16を
透過して内部の金属本体部分15で反射する。このため
この反射光9をカメラ2で描像すると、その反射像には
、第3図(1)(2)に示す如く、極性マークの部分で
途切れ19が生ずることになる。
This slit light 8 is reflected on the surface of the polar mark 17, but is transmitted through the glass film 16 and reflected on the internal metal body portion 15 in other parts. Therefore, when this reflected light 9 is imaged by the camera 2, the reflected image will have a break 19 at the polarity mark, as shown in FIGS. 3(1) and 3(2).

第3図(1)は、前記極性マーク17を光を反射させる
淡色で描いたときの反射像20を示すもので、金属本体
部分15にかかる反射像20aと、極性マーク17にか
かる反射像20bと、電極部分である部品端にかかる反
射像20cとが不連続に現れている。
FIG. 3(1) shows reflected images 20 when the polar mark 17 is drawn in a light color that reflects light, including a reflected image 20a on the metal body portion 15 and a reflected image 20b on the polar mark 17. The reflected image 20c on the end of the component, which is the electrode portion, appears discontinuously.

第3図(2)は、極性マーク17を光を吸収する濃色で
描いたときの反射像20を示すもので、極性マーク17
にかかる反射像は現れずに、金属本体部分15にかかる
反射像20aと電極部分である部品端にかかる反射像2
0cとが不連続に現れている。
FIG. 3 (2) shows a reflected image 20 when the polar mark 17 is drawn in a dark color that absorbs light.
The reflected image 20a on the metal body portion 15 and the reflected image 2 on the end of the component, which is the electrode portion, do not appear.
0c appears discontinuously.

第4図は、第3図(1)に示す反射像20に極性判別用
のウィンドウWを設定した状態を示している。
FIG. 4 shows a state in which a window W for polarity determination is set in the reflected image 20 shown in FIG. 3(1).

このウィンドウ設定は制御装置3による画像処理手順の
中で実行されるもので、同図の例では反射像20のほぼ
全長にわたるウィンドウWが設定されている。制御装置
3はこのウィンドウW内の画像につき、第5図に示すよ
うな明るさの分布21を計測した後、その分布21の重
心位WGが中心位置Sに対していずれの方向に存在する
かにより極性の判別を行っている。
This window setting is executed in the image processing procedure by the control device 3, and in the example shown in the figure, a window W is set that covers almost the entire length of the reflected image 20. After measuring the brightness distribution 21 as shown in FIG. 5 for the image within this window W, the control device 3 determines in which direction the center of gravity WG of the distribution 21 is located with respect to the center position S. The polarity is determined by

なおウィンドウは、第4図(2)に示す如く、極性マー
ク■7にかかる反射像20bとほぼ一致する長さに設定
してもよく、この場合はウィンドウW′を図中矢印の方
向に走査しつつウィンドウW′内の明るさを計測し、最
も暗い部分が中心位置に対していずれの方向に存在する
かにより極性判別を行うことになる。
The window may be set to a length that almost matches the reflected image 20b on the polar mark 7, as shown in FIG. 4 (2). In this case, the window W' is scanned in the direction of the arrow in the figure. At the same time, the brightness within the window W' is measured, and the polarity is determined based on which direction the darkest part is located with respect to the center position.

第6図は、極性が切欠き22により明示された部品23
につき、その切欠き22の位置を検査している状況を示
す。
FIG. 6 shows a part 23 whose polarity is clearly indicated by a notch 22.
The situation in which the position of the notch 22 is being inspected is shown.

前記切欠き22は、部品23の一端面24の中央位置に
設けてあり、この部品23を上方より観測すると、前記
切欠き22が部品23の一端面24の輪郭線上の中間位
置に存在している。
The notch 22 is provided at the center of one end surface 24 of the component 23, and when the component 23 is observed from above, the notch 22 is located at an intermediate position on the contour line of the one end surface 24 of the component 23. There is.

この実施例の投光装置1では、スリット光8がこの被検
査部品23の幅方向に沿うようその照射方向を設定して
おり、その結果、スリット光8は被検査部品23に対し
、前記一端面24の輪郭線と平行しかつ切欠き22と中
間で交叉することになる。
In the light projecting device 1 of this embodiment, the irradiation direction of the slit light 8 is set so as to follow the width direction of the part to be inspected 23, and as a result, the slit light 8 is directed toward the part to be inspected 23 along the width direction of the part to be inspected. It is parallel to the contour line of the end face 24 and intersects with the notch 22 in the middle.

このスリット光8は、部品23の表面で反射するが、切
欠き22の部分では基板の表面で反射する。このためそ
の反射光をカメラ2で撮像すると、その反射像には、第
7図に示す如く、切欠き22の部分で途切れ25が生ず
ることになる。なおこの実施例では、基板からの反射光
は部品23で遮られてカメラ2に届かず、反射像として
現れていない。
This slit light 8 is reflected on the surface of the component 23, and is reflected on the surface of the substrate at the notch 22 portion. Therefore, when the reflected light is imaged by the camera 2, the reflected image will have a break 25 at the notch 22, as shown in FIG. Note that in this embodiment, the reflected light from the board is blocked by the component 23 and does not reach the camera 2, so that it does not appear as a reflected image.

第7図は、この反射像26に極性判別用のウィンドウW
を設定した状態を示す。このウィンドウWの長さは反射
像26のほぼ全長に対応させであるが、これに限らず、
切欠き22の部分に一致する長さのウィンドウW′を用
いてもよい。なおこれらウィンドウw、w’を用いて極
性判別する方法は前記と同様であって、ここではその説
明を省略する。
FIG. 7 shows a window W for polarity determination in this reflected image 26.
Indicates the state where is set. The length of this window W corresponds to almost the entire length of the reflected image 26, but is not limited to this.
A window W' having a length corresponding to the notch 22 may also be used. Note that the method of determining polarity using these windows w and w' is the same as described above, and its explanation will be omitted here.

なお上記の各実施例は、部品の極性を判別するだめの例
であるが、この発明は極性以外の特性、例えば部品に欠
けなどの欠陥が存在するか否かなどを判別する場合にも
適用できる。
Although each of the above embodiments is an example of determining the polarity of a component, the present invention can also be applied to determining characteristics other than polarity, such as whether or not a component has a defect such as a chip. can.

〈発明の効果〉 この発明は上記の如(、観測面に極性マークなどの凹凸
をなす特徴部分が現れる被検査部品につき、その観測面
に対し、所定位置へスリット光を照射してその反射光を
撮像するようにしたから、その反射像は特徴部分で途切
れることになるため、反射像にウィンドウを設定して画
像を観測することで部品の特性を判別でき、種々の方法
で極性が明示された部品や特殊な構造や形態をもつ部品
についても極性その他の特性の判別が可能となるなど、
発明目的を達成した顕著な効果を奏する。
<Effects of the Invention> The present invention is as described above. Since the reflected image will be interrupted at characteristic parts, the characteristics of the part can be determined by setting a window on the reflected image and observing the image, and the polarity can be clarified using various methods. It is now possible to determine the polarity and other characteristics of parts with special structures and shapes.
A remarkable effect has been achieved in achieving the purpose of the invention.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図はこの発明の一実施例にかかる部品検査装置の全
体構成を示す説明図、第2図はガラス管ダイオードの極
性検査の状況を示す斜面図、第3図は第2図の実施例で
得た反射像を示す説明図、第4図は反射像に対してウィ
ンドウを設定した状況を示す説明図、第5図は明るさの
分布を示す説明図、第6図は極性を切欠きで明示した部
品の極性検査の状況を示す斜面図、第7図は第6図の実
施例で得た反射像に対してウィンドウを設定した状況を
示す説明図、第8図は従来の極性検査の方法を示す説明
図、第9図はガラス管ダイオードの構造を示す平面図で
ある。 1・・・・投光装置    2・・・・カメラ3・・・
・制御装置
FIG. 1 is an explanatory diagram showing the overall configuration of a component inspection device according to an embodiment of the present invention, FIG. 2 is a perspective view showing the state of polarity inspection of a glass tube diode, and FIG. 3 is an embodiment of the component inspection device shown in FIG. 2. Figure 4 is an explanatory diagram showing the reflected image obtained in Figure 4 is an explanatory diagram showing the situation where a window is set for the reflected image, Figure 5 is an explanatory diagram showing the brightness distribution, and Figure 6 is an explanatory diagram showing the polarity. Fig. 7 is an explanatory diagram showing a situation where a window is set for the reflected image obtained in the embodiment of Fig. 6, and Fig. 8 is a conventional polarity inspection. FIG. 9 is a plan view showing the structure of a glass tube diode. 1... Light projector 2... Camera 3...
·Control device

Claims (2)

【特許請求の範囲】[Claims] (1)観測面の輪郭線の内側位置に凹凸をなす特徴部分
が現れる被検査部品につき、その部品の特性を判別して
検査するための部品検査装置であって、 前記被検査部品の観測面に対し、前記輪郭 線と交叉しかつ前記特徴部分と中間で交叉するスリット
光を照射するための投光手段と、前記被検査部品からの
スリット光の反射光 を撮像するための撮像手段と、 撮像手段で得た反射像に対し所定のウィン ドウを設定してウィンドウ内の画像より部品の特性を判
別する判別手段とを具備して成る部品検査装置。
(1) A component inspection device for determining and inspecting the characteristics of a component to be inspected that has a characteristic portion that is uneven at an inner position of the contour line of the observation surface, the observation surface of the component to be inspected. , a light projecting means for irradiating a slit light that intersects the contour line and intersects the characteristic portion in the middle, and an imaging means for capturing an image of reflected light of the slit light from the inspected part; A component inspection device comprising: a determining means for setting a predetermined window for a reflected image obtained by an imaging means and determining characteristics of the component from the image within the window.
(2)観測面の輪郭線上の中間位置に凹凸をなす特徴部
分が現れる被検査部品につき、その部品の特性を判別し
て検査するための部品検査装置であって、 被検査部品の観測面に対し、前記輪郭線に 沿いかつ前記特徴部分と中間で交叉するスリット光を照
射するための投光手段と、 前記被検査部品からのスリット光の反射光 を撮像するための撮像手段と、 撮像手段で得た反射像に対し所定のウィン ドウを設定してウィンドウ内の画像より部品の特性を判
別する判別手段とを具備して成る部品判別装置。
(2) A component inspection device for determining and inspecting the characteristics of a part to be inspected that has a characteristic part that is uneven at an intermediate position on the contour line of the observation surface, which On the other hand, a light projection means for irradiating a slit light that follows the contour line and intersects the characteristic portion in the middle, an imaging means for imaging the reflected light of the slit light from the inspected part, and an imaging means 1. A component discriminating device comprising: discriminating means for setting a predetermined window for the reflected image obtained in the window and discriminating the characteristics of the component from the image within the window.
JP1023213A 1989-02-01 1989-02-01 Parts inspecting device Pending JPH02202678A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1023213A JPH02202678A (en) 1989-02-01 1989-02-01 Parts inspecting device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1023213A JPH02202678A (en) 1989-02-01 1989-02-01 Parts inspecting device

Publications (1)

Publication Number Publication Date
JPH02202678A true JPH02202678A (en) 1990-08-10

Family

ID=12104386

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1023213A Pending JPH02202678A (en) 1989-02-01 1989-02-01 Parts inspecting device

Country Status (1)

Country Link
JP (1) JPH02202678A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09237999A (en) * 1996-02-29 1997-09-09 Nagoya Denki Kogyo Kk Direction discriminating method for mounting electronic components
JP2011158477A (en) * 2010-02-01 2011-08-18 Koh Young Technology Inc Three-dimensional shape inspection method
JP2013033792A (en) * 2011-08-01 2013-02-14 Panasonic Corp Component packaging system and inspection image creation method in component packaging system

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09237999A (en) * 1996-02-29 1997-09-09 Nagoya Denki Kogyo Kk Direction discriminating method for mounting electronic components
JP2011158477A (en) * 2010-02-01 2011-08-18 Koh Young Technology Inc Three-dimensional shape inspection method
US9062966B2 (en) 2010-02-01 2015-06-23 Koh Young Technology Inc. Method of inspecting a three dimensional shape
JP2013033792A (en) * 2011-08-01 2013-02-14 Panasonic Corp Component packaging system and inspection image creation method in component packaging system

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