JPH0220130U - - Google Patents
Info
- Publication number
- JPH0220130U JPH0220130U JP9873988U JP9873988U JPH0220130U JP H0220130 U JPH0220130 U JP H0220130U JP 9873988 U JP9873988 U JP 9873988U JP 9873988 U JP9873988 U JP 9873988U JP H0220130 U JPH0220130 U JP H0220130U
- Authority
- JP
- Japan
- Prior art keywords
- pressure
- pressing force
- output voltage
- calculating
- characteristic coefficient
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 claims description 8
- 238000003825 pressing Methods 0.000 claims 4
- 238000005259 measurement Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 2
Landscapes
- Measuring Fluid Pressure (AREA)
Description
第１図はこの考案の圧力センサの機能ブロツク
図、第２図はこの考案の圧力センサの構成を示す
ブロツク図、第３図は圧力に対する出力電圧の製
品毎のばらつきを示すグラフ、第４図はこの考案
の圧力センサにおける係数演算処理部でなされる
制御フローチヤート、第５図は上記圧力センサに
おける圧力算出処理部でなされる制御フローチヤ
ート、第６図は半導体検出素子の一例を示す平面
図、第７図は半導体検出素子を有する圧力センサ
の構造の一例を示す断面模式図、第８図は検出回
路の一例を示す回路図である。
１……圧力検出素子、２……検出回路、４……
係数演算処理部（係数演算手段）、５……圧力算
出処理部（圧力算出手段）、６……記憶部（記憶
手段）。
Fig. 1 is a functional block diagram of the pressure sensor of this invention, Fig. 2 is a block diagram showing the configuration of the pressure sensor of this invention, Fig. 3 is a graph showing variations in output voltage for each product with respect to pressure, and Fig. 4 5 is a flowchart of control performed by the coefficient calculation processing section in the pressure sensor of this invention, FIG. 5 is a flowchart of control performed by the pressure calculation processing section of the pressure sensor, and FIG. 6 is a plan view showing an example of a semiconductor detection element. , FIG. 7 is a schematic cross-sectional view showing an example of the structure of a pressure sensor having a semiconductor detection element, and FIG. 8 is a circuit diagram showing an example of a detection circuit. 1...Pressure detection element, 2...Detection circuit, 4...
Coefficient calculation processing section (coefficient calculation means), 5...pressure calculation processing section (pressure calculation means), 6... storage section (storage means).
Claims (1)
上記圧力検出素子１への加圧力の大小に応じた電
圧を出力すべく構成して成る圧力センサであつて
、さらに、相互に異なる複数の基準加圧力を加え
たときの各出力電圧と上記基準加圧力とから加圧
力に対する出力電圧の特性係数を演算する係数演
算手段４と、上記特性係数を記憶する記憶手段６
と、測定時の出力電圧から上記特性係数に基づい
て測定加圧力を算出する圧力算出手段５とを設け
ていることを特徴とする圧力センサ。 The pressure sensor includes a pressure detection element 1 and a detection circuit 2, and is configured to output a voltage depending on the magnitude of the pressure applied to the pressure detection element 1, and further includes a plurality of mutually different reference voltages. Coefficient calculating means 4 for calculating a characteristic coefficient of output voltage with respect to pressing force from each output voltage when applying pressure and the above-mentioned reference pressing force, and storage means 6 for storing the above-mentioned characteristic coefficient.
and pressure calculation means 5 for calculating the measured pressing force based on the characteristic coefficient from the output voltage at the time of measurement.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9873988U JPH0220130U (en) | 1988-07-26 | 1988-07-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9873988U JPH0220130U (en) | 1988-07-26 | 1988-07-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0220130U true JPH0220130U (en) | 1990-02-09 |
Family
ID=31325266
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9873988U Pending JPH0220130U (en) | 1988-07-26 | 1988-07-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0220130U (en) |
-
1988
- 1988-07-26 JP JP9873988U patent/JPH0220130U/ja active Pending