JPH0328403U - - Google Patents
Info
- Publication number
- JPH0328403U JPH0328403U JP8986889U JP8986889U JPH0328403U JP H0328403 U JPH0328403 U JP H0328403U JP 8986889 U JP8986889 U JP 8986889U JP 8986889 U JP8986889 U JP 8986889U JP H0328403 U JPH0328403 U JP H0328403U
- Authority
- JP
- Japan
- Prior art keywords
- electrodes
- pair
- film thickness
- measurement sensor
- micro
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005259 measurement Methods 0.000 claims 3
- 238000000034 method Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
Landscapes
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
Description
第１図は本考案に関するセンサの一実施例を示
すもので２枚電極法の場合の説明図。第２図は同
上の他の例を示すもので対向電極法の場合の説明
図。第３〜４図は膜厚換算曲線で、第３図は２枚
電極法を第４図は対向電極法の場合を示すもので
ある。
図において、１……静電容量式のセンサ、２…
…被測定物、ａ……被膜、３，４……電極、５…
…弾性体である。
FIG. 1 shows an embodiment of the sensor according to the present invention, and is an explanatory diagram in the case of a two-electrode method. FIG. 2 shows another example of the above, and is an explanatory diagram in the case of the facing electrode method. 3 and 4 are film thickness conversion curves, with FIG. 3 showing the case of the two-electrode method and FIG. 4 showing the case of the facing electrode method. In the figure, 1... capacitive sensor, 2...
...Object to be measured, a...Coating, 3, 4...Electrode, 5...
...It is an elastic body.
Claims (1)
縁性被膜の厚みを静電容量の変化による出力電圧
の測定によつて求める微小膜厚測定センサにおい
て、前記一対の電極における一方の電極の測定面
に設けて、前記被測定物の表面に当接する導電性
の弾性体とを備えさせたことを特徴とする静電容
量式微小膜厚測定センサ。 In a micro film thickness measurement sensor that measures the thickness of an insulating film applied to the surface of an object by a pair of electrodes by measuring an output voltage due to a change in capacitance, the measurement of one electrode in the pair of electrodes is performed. 1. A capacitive micro-film thickness measurement sensor comprising: a conductive elastic body disposed on a surface of the object to be measured;
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8986889U JPH0328403U (en) | 1989-07-31 | 1989-07-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8986889U JPH0328403U (en) | 1989-07-31 | 1989-07-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0328403U true JPH0328403U (en) | 1991-03-20 |
Family
ID=31639424
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8986889U Pending JPH0328403U (en) | 1989-07-31 | 1989-07-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0328403U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007298881A (en) * | 2006-05-02 | 2007-11-15 | Atsuisa Hirao | Light transmissive member |
-
1989
- 1989-07-31 JP JP8986889U patent/JPH0328403U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007298881A (en) * | 2006-05-02 | 2007-11-15 | Atsuisa Hirao | Light transmissive member |
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