JPH0220106U - - Google Patents
Info
- Publication number
- JPH0220106U JPH0220106U JP9806788U JP9806788U JPH0220106U JP H0220106 U JPH0220106 U JP H0220106U JP 9806788 U JP9806788 U JP 9806788U JP 9806788 U JP9806788 U JP 9806788U JP H0220106 U JPH0220106 U JP H0220106U
- Authority
- JP
- Japan
- Prior art keywords
- imaging
- correction circuit
- shading correction
- image processing
- detection
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000003705 background correction Methods 0.000 claims description 6
- 238000001514 detection method Methods 0.000 claims description 5
- 238000000034 method Methods 0.000 claims description 2
- 238000003384 imaging method Methods 0.000 claims 8
- 238000007689 inspection Methods 0.000 claims 4
- 238000005286 illumination Methods 0.000 claims 1
- 230000035945 sensitivity Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Picture Signal Circuits (AREA)
- Closed-Circuit Television Systems (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988098067U JPH0740165Y2 (ja) | 1988-07-25 | 1988-07-25 | 欠陥検査装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988098067U JPH0740165Y2 (ja) | 1988-07-25 | 1988-07-25 | 欠陥検査装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0220106U true JPH0220106U (US06815460-20041109-C00097.png) | 1990-02-09 |
| JPH0740165Y2 JPH0740165Y2 (ja) | 1995-09-13 |
Family
ID=31324002
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988098067U Expired - Lifetime JPH0740165Y2 (ja) | 1988-07-25 | 1988-07-25 | 欠陥検査装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0740165Y2 (US06815460-20041109-C00097.png) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06281588A (ja) * | 1993-03-29 | 1994-10-07 | Toyo Glass Co Ltd | 曲面を有する透明物体の微小欠点検査方法 |
| JP2006113020A (ja) * | 2004-10-18 | 2006-04-27 | Hitachi High-Technologies Corp | 検査装置及び検査方法 |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58144959U (ja) * | 1982-03-26 | 1983-09-29 | 日立電子株式会社 | シエ−デイング補正回路 |
| JPS60187189A (ja) * | 1984-03-06 | 1985-09-24 | Matsushita Electric Ind Co Ltd | シエ−デイング補正回路 |
| JPS61132845A (ja) * | 1984-12-02 | 1986-06-20 | Dainippon Screen Mfg Co Ltd | 表面欠陥検査装置 |
-
1988
- 1988-07-25 JP JP1988098067U patent/JPH0740165Y2/ja not_active Expired - Lifetime
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58144959U (ja) * | 1982-03-26 | 1983-09-29 | 日立電子株式会社 | シエ−デイング補正回路 |
| JPS60187189A (ja) * | 1984-03-06 | 1985-09-24 | Matsushita Electric Ind Co Ltd | シエ−デイング補正回路 |
| JPS61132845A (ja) * | 1984-12-02 | 1986-06-20 | Dainippon Screen Mfg Co Ltd | 表面欠陥検査装置 |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06281588A (ja) * | 1993-03-29 | 1994-10-07 | Toyo Glass Co Ltd | 曲面を有する透明物体の微小欠点検査方法 |
| JP2006113020A (ja) * | 2004-10-18 | 2006-04-27 | Hitachi High-Technologies Corp | 検査装置及び検査方法 |
| JP4485904B2 (ja) * | 2004-10-18 | 2010-06-23 | 株式会社日立ハイテクノロジーズ | 検査装置及び検査方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0740165Y2 (ja) | 1995-09-13 |
