JPH0220080A - Laminated type displacement element - Google Patents
Laminated type displacement elementInfo
- Publication number
- JPH0220080A JPH0220080A JP63170373A JP17037388A JPH0220080A JP H0220080 A JPH0220080 A JP H0220080A JP 63170373 A JP63170373 A JP 63170373A JP 17037388 A JP17037388 A JP 17037388A JP H0220080 A JPH0220080 A JP H0220080A
- Authority
- JP
- Japan
- Prior art keywords
- plate
- thin plate
- thin
- electrodes
- laminated
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000006073 displacement reaction Methods 0.000 title claims description 18
- 239000000463 material Substances 0.000 claims abstract description 22
- 230000001681 protective effect Effects 0.000 claims description 17
- 230000005684 electric field Effects 0.000 claims description 6
- 238000006243 chemical reaction Methods 0.000 claims description 5
- 239000004020 conductor Substances 0.000 claims description 4
- 230000010287 polarization Effects 0.000 abstract description 16
- 239000011810 insulating material Substances 0.000 abstract description 2
- 238000010008 shearing Methods 0.000 abstract 2
- 238000003475 lamination Methods 0.000 abstract 1
- 230000000694 effects Effects 0.000 description 11
- 239000010410 layer Substances 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 239000000853 adhesive Substances 0.000 description 3
- 230000001070 adhesive effect Effects 0.000 description 3
- 229910010293 ceramic material Inorganic materials 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 2
- 230000006866 deterioration Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000010030 laminating Methods 0.000 description 2
- 239000012790 adhesive layer Substances 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 238000004898 kneading Methods 0.000 description 1
- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 1
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
Landscapes
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
Abstract
Description
【発明の詳細な説明】 〔産業上の利用分野〕 本発明は、産業用ロボットのアクチュエータ。[Detailed description of the invention] [Industrial application field] The present invention relates to an actuator for an industrial robot.
超音波モータ等に使用する電気機械変換素子に関するも
のであり、特に電気機械変換材料からなる薄板を、電極
を介して複数枚積層することにより変位量を増大させた
積層型変位素子の改良に関するものである。This relates to electromechanical transducers used in ultrasonic motors, etc., and in particular to improvements to laminated displacement elements in which the amount of displacement is increased by laminating multiple thin plates made of electromechanical transducer material via electrodes. It is.
従来、X−Yステージの位置決め機構や制動ブレーキ等
に用いられている変位用素子に使用する積層型圧電素子
は、所定の形状に加工した圧電セラミック材料からなる
薄板に電極を設けて分極した後、直接若しくは薄い金属
を介して有機系の接着材で接合する方法が採用されてい
る。しかし上記のように接着剤を使用して積層したもの
は、使用条件により、圧電素子の振動による変位を接着
剤層が吸収したり、高温の環境若しくは長期間の使用に
より接着剤が劣化する等の欠点がある。Conventionally, laminated piezoelectric elements used as displacement elements used in X-Y stage positioning mechanisms and brakes, etc., are made by attaching electrodes to a thin plate of piezoelectric ceramic material processed into a predetermined shape, and then polarizing it. , a method of joining using an organic adhesive directly or via a thin metal has been adopted. However, when stacking layers using adhesive as described above, depending on the usage conditions, the adhesive layer may absorb displacement due to vibration of the piezoelectric element, or the adhesive may deteriorate due to high temperature environment or long-term use. There are drawbacks.
このため、最近では積層チップコンデンサ構造方式の積
層型圧電素子が実用化されている。すなわち1例えば特
公昭59−32040号公報に記載のように、原料粉末
にバインダーを添加、混練したペースト状の圧電セラミ
ック材料を、所定の厚さの薄板に形成し、この薄板の一
方の面若しくは両面に恨−パラジウム等の導電材料を塗
布して内部電極を形成する。上記薄板を所定枚数積層し
て圧着し更に所定の形状に加工した後、焼成することに
よってセラミック化し、積層体の両側面に外部電極を形
成したものである。上記構成の積層型圧電素子は、圧電
セラミック材料からなる薄板と内部電極の接合部の密着
性に優れると共に、熱的特性も安定であるため高温環境
においても充分に使用可能であり、また長期間に亘って
劣化が極めて少ない等の利点がある。For this reason, recently, multilayer piezoelectric elements having a multilayer chip capacitor structure have been put into practical use. That is, 1. For example, as described in Japanese Patent Publication No. 59-32040, a paste-like piezoelectric ceramic material made by adding a binder to raw material powder and kneading is formed into a thin plate of a predetermined thickness, and one side of this thin plate or A conductive material such as palladium is coated on both sides to form internal electrodes. A predetermined number of the above thin plates are laminated and pressed together, further processed into a predetermined shape, and then fired to form a ceramic, and external electrodes are formed on both sides of the laminate. The laminated piezoelectric element with the above structure has excellent adhesion between the thin plate made of piezoelectric ceramic material and the internal electrode, and has stable thermal properties, so it can be used satisfactorily even in high-temperature environments, and can be used for long periods of time. It has the advantage of extremely little deterioration over time.
第3図は上記従来のものの一例を模式的に示す説明図で
ある。同図において1は薄板であり1例えばジルコン酸
チタン酸鉛その他の圧電材料により2例えば10flX
10龍X0.2 tmの層状に形成する。2は内部電
極であり、導電性の金属膜により前記薄板1と接触させ
ると共に、薄板1の一方の側面に突出するように形成す
る。上記薄板1と内部電極2とを交互に積層し、内部電
極2の突出端2aを一層置きに外部電極3.4の端子と
接続する。而して両端部の内部電極2の外方には保護板
5を接触させて、積層型圧電素子と外部との絶縁を確保
すると共に、他の部材との接続部として利用できるよう
に構成する。なお前記薄板lの積層数を例えば50層と
して、積層型圧電素子としての厚さを略IQniに形成
する。以上の構成により外部電極3.4の端子に正負の
電圧を印加すると前記内部電極2.2間に電界が発生し
、薄板lは圧電材料の縦効果により厚さ方向に伸びて歪
を発生する。一方上記電界の発生によって、圧電材料の
横効果に起因する薄板1の面に沿う方向に縮むため横歪
も同時に発生する。従って積層型圧電素子は全体として
、第3図に鎖線で示すよう!′″弯形するのである。FIG. 3 is an explanatory diagram schematically showing an example of the above-mentioned conventional device. In the figure, 1 is a thin plate, 1 is made of, for example, lead zirconate titanate or other piezoelectric material, and 2 is made of, for example, 10flX.
Form into a layer of 10 x 0.2 tm. Reference numeral 2 denotes an internal electrode, which is brought into contact with the thin plate 1 through a conductive metal film and is formed so as to protrude from one side of the thin plate 1. The thin plates 1 and internal electrodes 2 are alternately stacked, and the protruding ends 2a of the internal electrodes 2 are connected to the terminals of the external electrodes 3.4 every other layer. Protective plates 5 are brought into contact with the outer sides of the internal electrodes 2 at both ends to ensure insulation between the laminated piezoelectric element and the outside, and to make it usable as a connecting part with other members. . The number of laminated thin plates 1 is, for example, 50, and the thickness of the laminated piezoelectric element is approximately IQni. With the above configuration, when positive and negative voltages are applied to the terminals of the external electrodes 3.4, an electric field is generated between the internal electrodes 2.2, and the thin plate 1 is stretched in the thickness direction due to the longitudinal effect of the piezoelectric material, causing strain. . On the other hand, due to the generation of the electric field, the piezoelectric material shrinks in the direction along the surface of the thin plate 1 due to the lateral effect, and lateral strain also occurs at the same time. Therefore, the stacked piezoelectric element as a whole looks like the one shown by the chain line in Figure 3! It is curved.
前記第3図に鎖線で示した変形は、縦横方向における変
位が全く抑制されない場合においてのみ実現可能である
。しかしながら実際の積層型圧電素子においては、前記
のように両端部の内部電極2の外方に保護板5を接着し
た構成となっているため、上記変位が抑制されるのであ
る。すなわち。The deformation indicated by the chain line in FIG. 3 can only be realized if displacement in the longitudinal and lateral directions is not suppressed at all. However, in an actual laminated piezoelectric element, the above-mentioned displacement is suppressed because the protection plate 5 is bonded to the outside of the internal electrode 2 at both ends as described above. Namely.
保護板5と隣接している薄板1aにおいては、電界の印
加によって圧電材料の横効果による力が発生し、薄板1
aの面に沿う方向に縮もうとするが保護板5においては
電界の印加が無いため、前記圧電材料の縦効果および横
効果による伸び歪および縮み歪を発生しない。このため
保護板5と隣接している薄板1aに発生する横効果によ
る縮み変位を抑制することとなり、この梼果薄板1aと
保護板5との界面に、せん断心力が発生し、積層型圧電
素子の分権工程における電圧印加時または実際の駆動時
において割れその他の非所望な現象発生の原因となり、
信頼性を低下させるという問題点がある。In the thin plate 1a adjacent to the protective plate 5, the application of an electric field generates a force due to the transverse effect of the piezoelectric material, and the thin plate 1
Although the piezoelectric material tries to shrink in the direction along the plane a, since no electric field is applied to the protection plate 5, no elongation or shrinkage strain occurs due to the longitudinal effect and transverse effect of the piezoelectric material. Therefore, the shrinkage displacement due to the lateral effect occurring in the thin plate 1a adjacent to the protective plate 5 is suppressed, and a shear center force is generated at the interface between the conduit thin plate 1a and the protective plate 5, and the laminated piezoelectric element This may cause cracks or other undesirable phenomena to occur during voltage application during the decentralization process or during actual driving.
There is a problem that reliability is reduced.
上記問題点を解決するために、保護板5と隣接する薄板
1aの厚さを他の薄板1の厚さより大に形成したものが
提案されている(特公昭63−10596号公報参照)
。しかしながら上記のものにおけるような7R仮の厚さ
の異なるものを組み合わせて(を成することは、製造工
程を別個にする必要がある他2部品管理その他が極めて
煩雑であるという問題点がある。In order to solve the above problems, it has been proposed that the thickness of the thin plate 1a adjacent to the protective plate 5 is made larger than the thickness of the other thin plates 1 (see Japanese Patent Publication No. 10596/1983).
. However, combining the 7R tentatives with different thicknesses as in the above-mentioned one has problems in that it requires separate manufacturing processes and the management of the two parts is extremely complicated.
更に上記の構成においても、保護板5の外方には電極が
設けられていないため、薄板1,1aの分極時において
、薄板1aが変位するにも拘らず保護板5は全く変位せ
ず、前記同様の不都合が発生する。しかも分極時の変位
■の方が駆動時の変位量より大であるため、上記割れそ
の他の非所望な現象が発生する傾向が大であると共に、
積層型圧電素子の特性を低下させる結果となるという問
題点がある。Furthermore, even in the above configuration, since no electrode is provided on the outside of the protective plate 5, when the thin plates 1 and 1a are polarized, the protective plate 5 is not displaced at all even though the thin plate 1a is displaced. The same inconvenience as described above occurs. Moreover, since the displacement during polarization (■) is larger than the amount of displacement during driving, there is a greater tendency for the above-mentioned cracks and other undesirable phenomena to occur.
There is a problem that this results in deterioration of the characteristics of the multilayer piezoelectric element.
本発明は上記従来の技術に存在する問題点を解決し、保
護板と薄板との界面におけるせん断心力の発生およびこ
れに起因する割れその他の非所望な現象の発生を防止し
、特性の良好なる積層型変位素子を提供することを目的
とする。The present invention solves the problems existing in the above-mentioned conventional techniques, prevents the occurrence of shear core force at the interface between the protective plate and the thin plate, and prevents the occurrence of cracks and other undesirable phenomena caused by this, and improves properties. The present invention aims to provide a laminated displacement element.
上記目的を達成するために2本発明においては。 In order to achieve the above object, there are two aspects of the present invention.
略同一の輪郭および接触面積に形成した電気機械変換材
料からなる薄板と導電材料からなる内部電極とを交互に
積層し2両端部の内部電極の外方にこれらと略同一の輪
郭および接触面積に形成した電気機械変換材料からなる
保護板を設け、前記内部電極を介して前記薄板に電界を
印加するように構成した積層型変位素子において、保護
板を電気機械変換材料により形成し、かつ薄板と同一方
向に分極する。という技術的手段を採用した。Thin plates made of an electromechanical transducer material and internal electrodes made of a conductive material are alternately laminated to have substantially the same contour and contact area, and 2 thin plates made of an electromechanical transducer material and internal electrodes made of a conductive material are formed to have substantially the same contour and contact area on the outside of the internal electrodes at both ends. In the laminated displacement element configured to include a protective plate made of a formed electromechanical conversion material and to apply an electric field to the thin plate via the internal electrode, the protective plate is formed of the electromechanical conversion material and the thin plate is Polarize in the same direction. A technical method was adopted.
上記の構成により、保3i板と隣接する薄板との界面に
おけるせん断応力の発生を防止する作用が期待できるの
である。The above configuration can be expected to have an effect of preventing the generation of shear stress at the interface between the 3i plate and the adjacent thin plate.
第1図は本発明の実施例を示す要部正面図であり、同一
部分は前記第3図と同一の参照符号で示す。第1図にお
いて薄板1は前記同様の圧電材料によって例えば1辺1
0mm、厚さ1008mの正方形状に形成すると共に、
内部電極2を介して例えば100枚積面積る。次に外部
電極3.4は薄板1による積層体の両側面部に、絶縁材
6を下地として一層おきに内部電極2の端縁部を接続す
るように1対設ける。次に保護板5は前記薄板1と同一
の圧電材料によって1例えばn倍のHさに形成し、薄板
1を積層してなる積層体の上下両端面に内部電極2を介
して固着する。なお保護板5は後述する手段によって予
め薄板1と同一方向に分極した構成とする。FIG. 1 is a front view of essential parts showing an embodiment of the present invention, and the same parts are designated by the same reference numerals as in FIG. 3. In FIG. 1, the thin plate 1 is made of the same piezoelectric material as described above.
Formed into a square shape with a thickness of 0 mm and a thickness of 1008 m,
For example, a total area of 100 sheets is provided via the internal electrodes 2. Next, a pair of external electrodes 3.4 are provided on both side surfaces of the laminated body of the thin plates 1, with an insulating material 6 as a base, so as to connect the end edges of the internal electrodes 2 every other layer. Next, the protection plate 5 is formed of the same piezoelectric material as the thin plate 1 and has a H of 1, for example, n times, and is fixed via the internal electrodes 2 to both upper and lower end surfaces of the laminate formed by laminating the thin plates 1. Note that the protective plate 5 is configured to be polarized in advance in the same direction as the thin plate 1 by means described later.
第2図は第1図に示す素子の分極時の状態を示す要部正
面図であり、同一部分は第1図と同一の参照符号で示す
。第2図において、5aは電極であり、保護板5の上下
端面に設ける。但し、電極5aは外部電極3,4とは電
気的に接続しない。FIG. 2 is a front view of essential parts showing the polarized state of the element shown in FIG. 1, and the same parts are designated by the same reference numerals as in FIG. 1. In FIG. 2, reference numeral 5a denotes an electrode, which is provided on the upper and lower end surfaces of the protection plate 5. However, the electrode 5a is not electrically connected to the external electrodes 3 and 4.
上記の構成により、外部電極3,4間に分極電圧を印加
するのであるが、この場合保護板5は薄板lより厚さを
n倍の厚さに形成しであるため。With the above configuration, a polarization voltage is applied between the external electrodes 3 and 4, but in this case, the protection plate 5 is formed to be n times thicker than the thin plate 1.
夫々の薄板1の分極に必要な分極電圧pに対してnpな
る値の分極電圧が電極5aに印加されるようにする。こ
のような分極により、薄板1と同様に保護板5にも電極
5aによって分極電圧が印加されるから、保護板5を薄
板1と同一方向に分極することができる。従って保護板
5と隣接する薄板1aとの間にせん断応力および歪が発
生することがない。次に上記分極終了後、保護板5の上
下端面に設けた電極5aを除去して、第1図に示す素子
とするのである。A polarization voltage having a value of np is applied to the electrode 5a with respect to the polarization voltage p necessary for polarization of each thin plate 1. Due to such polarization, a polarization voltage is applied to the protection plate 5 by the electrode 5a as well as to the thin plate 1, so that the protection plate 5 can be polarized in the same direction as the thin plate 1. Therefore, no shear stress or strain is generated between the protective plate 5 and the adjacent thin plate 1a. Next, after the above polarization is completed, the electrodes 5a provided on the upper and lower end surfaces of the protection plate 5 are removed to obtain the element shown in FIG.
上記のようにして形成した素子は5保護板5が分極時に
おいて隣接する7gJ仮1aおよび他の薄板1の分極方
向および分極方向と直角方向の変位を抑制することがな
いため、保護板5と薄板1aとの界面および他の薄板1
相互の界面におけるせん断応力の発生を完全に防止する
ことができるので本実施例においては保護板を薄板の厚
さのn倍に形成した例を示したが2例えば内部電極を介
して積層したn枚の薄板によって形成し1分)へ処理後
上下端面の分極用の電極および外部電極の一部を除去し
て構成してもよい。また内部電極の型式は本実施例に示
す全面電極のみでなく2所謂交互電極としても作用は同
一である。更に保護板、薄板および内部電極の平面外形
輪郭形状が正方形である場合を示したが、正方形以外の
円形、矩形その他の幾何学的形状を任意に選定すること
ができる。In the element formed as described above, the protection plate 5 does not suppress the polarization direction of the adjacent 7gJ temporary 1a and other thin plates 1 and the displacement in the direction perpendicular to the polarization direction during polarization. Interface with thin plate 1a and other thin plate 1
Since the generation of shear stress at the mutual interface can be completely prevented, this example shows an example in which the protective plate is formed to be n times the thickness of the thin plate. It may be formed by forming a thin plate and removing part of the polarization electrodes and external electrodes on the upper and lower end surfaces after processing for 1 minute. Furthermore, the type of internal electrodes is not limited to the full-surface electrode shown in this embodiment, but also two so-called alternating electrodes, which have the same effect. Furthermore, although a case has been shown in which the planar outline shapes of the protection plate, thin plate, and internal electrode are square, any other geometric shape such as circular, rectangular, etc. can be arbitrarily selected.
本発明は9以上記述のような構成および作用であるから
1分極処理時において電圧を印加した場合における保護
板と薄板との界面および薄板相互間の界面におけるせん
断応力の発生を完全に阻止することができ、上記せん断
応力に起因する非所望な割れその他の不都合な現象の発
生を皆無としある。Since the present invention has the structure and operation as described in section 9 above, it is possible to completely prevent the generation of shear stress at the interface between the protective plate and the thin plate and at the interface between the thin plates when a voltage is applied during the polarization process. This eliminates the occurrence of undesirable cracks and other undesirable phenomena caused by the above-mentioned shear stress.
得る。従って積層型変位素子の特性および信頼性を大幅
に向上させ得るという効果がある。obtain. Therefore, there is an effect that the characteristics and reliability of the laminated displacement element can be significantly improved.
第1図は本発明の実施例を示す要部正面図、第2図は第
1図に示す素子の分極処理時の状態を示す要部正面図、
第3図は従来のものの一例を模式的に示す説明図である
。
l:薄板、2:内部電極、5:保護板55a:電極。
特許出廓人 日立金属株式会社FIG. 1 is a front view of the main part showing an embodiment of the present invention, FIG. 2 is a front view of the main part showing the state of the element shown in FIG. 1 during polarization processing,
FIG. 3 is an explanatory diagram schematically showing an example of a conventional device. 1: Thin plate, 2: Internal electrode, 5: Protective plate 55a: Electrode. Patent distributor Hitachi Metals, Ltd.
Claims (3)
械変換材料からなる薄板と導電材料からなる内部電極と
を交互に積層し,両端部の内部電極の外方にこれらと略
同一の輪郭および接触面積に形成した電気機械変換材料
からなる保護板を設け,前記内部電極を介して前記薄板
に電界を印加するように構成した積層型変位素子におい
て,保護板を電気機械変換材料により形成し,かつ薄板
と同一方向に分極したことを特徴とする積層型変位素子
。(1) Thin plates made of an electromechanical transducer material and internal electrodes made of a conductive material are alternately laminated to have approximately the same contour and contact area, and a layer having approximately the same contour and contact area as these is formed on the outside of the internal electrodes at both ends. In a laminated displacement element configured to provide a protective plate made of an electromechanical conversion material formed in a contact area and apply an electric field to the thin plate via the internal electrode, the protection plate is formed of the electromechanical conversion material, A laminated displacement element characterized by being polarized in the same direction as the thin plate.
(1)記載の積層型変位素子。(2) The laminated displacement element according to claim (1), wherein the protective plate is formed to have approximately the same thickness as the thin plate.
)若しくは(2)記載の積層型変位素子。(3) Claim (1) in which the electromechanical conversion material is a piezoelectric material
) or the laminated displacement element described in (2).
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP63170373A JPH0220080A (en) | 1988-07-08 | 1988-07-08 | Laminated type displacement element |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP63170373A JPH0220080A (en) | 1988-07-08 | 1988-07-08 | Laminated type displacement element |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0220080A true JPH0220080A (en) | 1990-01-23 |
Family
ID=15903734
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP63170373A Pending JPH0220080A (en) | 1988-07-08 | 1988-07-08 | Laminated type displacement element |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0220080A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007335664A (en) * | 2006-06-15 | 2007-12-27 | Tdk Corp | Stacked piezoelectric element, and piezoelectric device |
-
1988
- 1988-07-08 JP JP63170373A patent/JPH0220080A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007335664A (en) * | 2006-06-15 | 2007-12-27 | Tdk Corp | Stacked piezoelectric element, and piezoelectric device |
JP4725432B2 (en) * | 2006-06-15 | 2011-07-13 | Tdk株式会社 | Multilayer piezoelectric element and piezoelectric device |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP5584066B2 (en) | Multilayer piezoelectric structure | |
JPH05160459A (en) | Laminated displacement element | |
JPS62211974A (en) | Laminated piezoelectric element and manufacture thereof | |
JP2002084008A (en) | Sheared piezoelectric element of laminated structure | |
JPH0220080A (en) | Laminated type displacement element | |
JP3881474B2 (en) | Multilayer piezoelectric actuator | |
JPH08306979A (en) | Laminated piezoelectric device | |
JP2892672B2 (en) | Stacked displacement element | |
JP3250918B2 (en) | Multilayer piezoelectric element | |
JP2884378B2 (en) | Multilayer piezoelectric actuator and method of manufacturing the same | |
JPH02162782A (en) | Driving method for bimorph displacement element | |
JPH03106082A (en) | Laminated piezoelectric actuator element | |
JP2791838B2 (en) | Multilayer piezoelectric actuator and method of manufacturing the same | |
JP2941456B2 (en) | Stacked displacement element | |
JPS63275192A (en) | Laminated type piezoelectric actuator and manufacture thereof | |
JPH02203578A (en) | Manufacture of lamination type displacement element | |
JPS63299384A (en) | Layer-built type piezoelectric actuator | |
JPH0442947Y2 (en) | ||
JPH0372684A (en) | Lamination type piezoelectric element | |
JPS63194378A (en) | Laminated piezoelectric element | |
JPH03104290A (en) | Laminate coupled piezoelectric element | |
JP3567330B2 (en) | Multilayer type piezoelectric ceramic actuator | |
JP3184991B2 (en) | Multilayer piezoelectric actuator | |
JPH0577958U (en) | Piezoelectric ceramic actuator | |
JP2782750B2 (en) | Method for manufacturing electrostrictive effect element |