JPH02196454A - Semiconductor package - Google Patents

Semiconductor package

Info

Publication number
JPH02196454A
JPH02196454A JP1013973A JP1397389A JPH02196454A JP H02196454 A JPH02196454 A JP H02196454A JP 1013973 A JP1013973 A JP 1013973A JP 1397389 A JP1397389 A JP 1397389A JP H02196454 A JPH02196454 A JP H02196454A
Authority
JP
Japan
Prior art keywords
semiconductor package
radiator
heat
package
cooling
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1013973A
Other languages
Japanese (ja)
Inventor
Takayuki Okinaga
隆幸 沖永
Kanji Otsuka
寛治 大塚
Yasuyuki Uchiumi
内海 康行
Shoji Matsugami
松上 昌二
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi ULSI Engineering Corp
Hitachi Ltd
Original Assignee
Hitachi ULSI Engineering Corp
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi ULSI Engineering Corp, Hitachi Ltd filed Critical Hitachi ULSI Engineering Corp
Priority to JP1013973A priority Critical patent/JPH02196454A/en
Publication of JPH02196454A publication Critical patent/JPH02196454A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/4805Shape
    • H01L2224/4809Loop shape
    • H01L2224/48091Arched
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/161Cap
    • H01L2924/1615Shape
    • H01L2924/16195Flat cap [not enclosing an internal cavity]

Landscapes

  • Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
  • Cooling Or The Like Of Electrical Apparatus (AREA)

Abstract

PURPOSE:To eliminate the necessity of a cooling system of a large scale, to eliminate deviation in heat distribution and to enable an effective heat design by providing a semiconductor package itself with a radiator to dissipate heat on the surface of the package. CONSTITUTION:A radiator 9 to dissipate heat on a surface of a semiconductor package 1 is attached to the package 1 itself which is airtightly sealed or resin- sealed. A cooling means is provided to the semiconductor package 1 itself to cool the semiconductor package 1 itself by the radiator 9. Therefore, the semiconductor package 1 is constituted so that it can be cooled without requiring a heat dissipation means such as an air cooling radiating fan besides the radiator 9. For example, a cooling fan 12 is contained inside a radiation base 10 of the radiator 9, and the cooling fan 12 is interconnected with a driving motor 13 which is provided to an upper part of the radiation base 10 through a driving shaft 14 at a center of the radiation base 10, and revolves inside the radiation base 10 through an operation of the driving motor 13 to diffuse heat produced on a surface of a package base 2 and to release it externally through an open window 11.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は、従来の半導体パッケージ表面に放熱フィンを
取付け、当該フィンに放熱ファンなどから冷却用空気を
送ってシステム全体を冷却するものと異なり、半纏体パ
ッケージ自身(システム内の半導体パッケージ個々)に
冷却手段を備え、従って、上記放熱ファンによる送風な
ど全必要とせずに冷却可能な半導体パッケージに関する
[Detailed Description of the Invention] [Field of Industrial Application] The present invention differs from the conventional method in which heat radiation fins are attached to the surface of a semiconductor package and cooling air is sent to the fins from a heat radiation fan to cool the entire system. The present invention relates to a semiconductor package in which the semi-integrated package itself (individual semiconductor packages in the system) is provided with a cooling means, and therefore can be cooled without the need for air blowing by the above-mentioned heat dissipation fan.

〔従来の技術〕[Conventional technology]

従来のコンピュータにおける放熱(冷却)手段は、プリ
ント配線基板などの実装用基板に、個々に放熱フィン全
搭載した半導体パッケージを多数プラグイン実装などに
より実装し、一般に、放熱ファンにより前記放熱フィン
に冷却用空気を送風して空冷するという手段が採用され
ている。
Conventional heat dissipation (cooling) means for computers involves mounting a large number of semiconductor packages, each fully equipped with heat dissipation fins, on a mounting board such as a printed wiring board, using plug-in mounting, etc., and generally using a heat dissipation fan to cool the heat dissipation fins. A method of blowing and cooling air is used.

尚放熱フ、インの取付および上記冷却手段について述べ
た文献の例としては、日経マグロウヒル社刊[日経エレ
クトロニクス41984年9月24日号p280〜28
5および(株)工業調査会1980年1月15日発行「
Ic化実装技術Jp211〜240が挙げられる。
Examples of literature describing the installation of heat dissipation vents and ins and the above-mentioned cooling means include Nikkei Electronics 4, September 24, 1984 issue, p. 280-28, published by Nikkei McGraw-Hill.
5 and Kogyo Kenkyukai Co., Ltd., published on January 15, 1980.
Examples include IC mounting technology Jp211 to Jp240.

〔発明が解決しようとする課題〕[Problem to be solved by the invention]

しかしながら、上記冷却手段では、送風用に大型ファン
を必要とし、大規模な冷却系が必要となったり、当該フ
ァンに近い方は良好に冷却されるが、遠いところに配設
された半導体パッケージの放熱性は悪くなるというよう
にシステム全体カラみると放熱に偏りが生じるし、近年
のミニコンピユータのようにシステム中央に例えばIO
W程度の消費電力の32ビツトCPU(中央制御装置)
を置き、その周辺に例えばLSI当り0.1 W程度の
SRAMを置くというよう々場合には、最も冷却を必要
とするのは中央のCPUであるのに周辺がやたらと冷却
されるという事態を生じてきており、当該冷却が必要な
箇所が限定されるというシステムが増加しているのに、
これに対応できないという欠点がある。
However, the above-mentioned cooling means requires a large fan for blowing air, which necessitates a large-scale cooling system.Although the area near the fan is well cooled, the semiconductor package located far away is If you look at the entire system, the heat dissipation performance will be poor, and if you look at the whole system, the heat dissipation will be uneven.
32-bit CPU (central control unit) with power consumption of about W
For example, if you place an SRAM of about 0.1 W per LSI around it, the CPU in the center is the one that needs cooling the most, but the surrounding area is cooled too much. Although there are an increasing number of systems in which the areas that require cooling are limited,
The drawback is that it cannot handle this.

本発明はかかる従来技術の有する欠点を解消することの
できる技術を提供することを目的とする。
An object of the present invention is to provide a technique that can eliminate the drawbacks of such conventional techniques.

本発明の前記ならびKそのほかの目的と新規な特徴は、
本明細書の記述および添付図面からあきらかになるであ
ろう。
The above and other objects and novel features of the present invention are:
It will become clear from the description of this specification and the accompanying drawings.

〔課題を解決するための手段〕[Means to solve the problem]

本願において開示される発明のうち代表的なものの概要
を簡単に説明すれば、下記のとおりである。
A brief overview of typical inventions disclosed in this application is as follows.

本発明では、駆動用モータにより駆動する小型の扇風機
(冷却ファン)の如き放熱器を、半導体パッケージ自身
に取付けして、当該パッケージ自身を冷却するようにし
た。
In the present invention, a heat radiator such as a small electric fan (cooling fan) driven by a drive motor is attached to the semiconductor package itself to cool the package itself.

〔作用〕[Effect]

これにより、半導体パッケージ自身が放熱器により冷却
されるので、従来の如く放熱フィンを取付け、当該フィ
ンを放熱ファンで風を送って冷却する必要がなく、従っ
て、放熱ファンや放熱フィンを必要とせず、本発明では
放熱器が個々の半導体パッケージに取付け、これを冷却
するので、放熱を特に必要とする箇所のパッケージの放
熱器を作動させること’75Eでき、従来の放熱ファン
により風を送る場合に生起される放熱の偏りをなくすこ
とができる。
As a result, the semiconductor package itself is cooled by the radiator, so there is no need to attach a radiator fin and cool the fin by blowing air with a radiator fan, as in the conventional method.Therefore, there is no need for a radiator fan or fins. In the present invention, the heat sink is attached to each semiconductor package and cools it, so it is possible to operate the heat sink of the package in a place where heat radiation is particularly required, and when blowing air with a conventional heat radiation fan, it is possible to Unbalanced heat radiation can be eliminated.

また、従来の如きシステム全体を放熱する放熱ファンを
要しないので、大規模な冷却系が必要なくなる。
Furthermore, since there is no need for a heat dissipation fan that dissipates heat from the entire system as in the prior art, there is no need for a large-scale cooling system.

〔実施例〕〔Example〕

次に、本発明の実施例を図面に基づいて説明する。 Next, embodiments of the present invention will be described based on the drawings.

第1図は本発明の実施例を示す一部断面側面図で、当該
半導体パッケージ1におけるパッケージペース2のキャ
ビティ3にはチップ4が固着されている。
FIG. 1 is a partially sectional side view showing an embodiment of the present invention, in which a chip 4 is fixed in a cavity 3 of a package paste 2 in a semiconductor package 1. As shown in FIG.

当該パッケージペース2は多層回路基板より成り、例え
ばセラミック基板によりm成されている。
The package base 2 is made of a multilayer circuit board, for example, a ceramic board.

チップ4は、例えばシリコン単結晶基板から成り、周知
の技術によってこのチップ内には多数の回路素子が形成
され、1つの回路機能が与えられている。回路素子の具
体例は、例えばMOS)ランジスタから成り、これらの
回路素子によって、例えば論理回路およびメモリの回路
機能が形成されている。
The chip 4 is made of, for example, a silicon single crystal substrate, and a large number of circuit elements are formed within this chip using well-known techniques to provide one circuit function. A concrete example of a circuit element is, for example, a transistor (MOS), and these circuit elements form, for example, a logic circuit and a memory circuit function.

チップ4のポンディングパッドとパッケージペース2の
底面から突出されたリード5とは、ボンディングワイヤ
6を介して、当該ぺ゛−ス2内の内部配線7により電気
的導通がとられている。ボンディングワイヤ6は、例え
ばAu線により構成されている。
The bonding pads of the chip 4 and the leads 5 protruding from the bottom surface of the package space 2 are electrically connected to each other by internal wiring 7 within the space 2 via bonding wires 6. The bonding wire 6 is made of, for example, an Au wire.

パッケージペース2の底部中央には、キャップ8が取付
けられ、チップ4などを気密封止している。
A cap 8 is attached to the center of the bottom of the package paste 2 to hermetically seal the chip 4 and the like.

キャップ8は、例えばセラミック材により構成されてい
る。
The cap 8 is made of, for example, a ceramic material.

パッケージペース2の上面には、放熱器9が搭載されて
いる。
A heat sink 9 is mounted on the upper surface of the package paste 2.

放熱器9の放熱基台10には開放窓11が設けられてい
る。
An open window 11 is provided on the heat radiation base 10 of the heat radiator 9.

放熱器9.の放熱基台10内部には、冷却ファン12が
収納され、当該冷却ファン12は、放熱基台10の上部
に設けた駆動用モータ13と放熱基台10中夫の駆動軸
14を介して連設されており、駆動用モータ13の作動
によシ、放熱基台10内部で施回し、パッケージペース
2の表面に生じた熱を拡散させ、開放窓11を通して外
部に放熱するO 駆動用モータ13は、放熱基台10上面に設置した、駆
動用モータを駆動させる為の駆動用電源15により駆動
される。
Heat sink9. A cooling fan 12 is housed inside the heat dissipation base 10, and the cooling fan 12 is connected to a drive motor 13 provided on the upper part of the heat dissipation base 10 via a drive shaft 14 of the shaft of the heat dissipation base 10. The drive motor 13 is provided with an O drive motor 13 which is circulated inside the heat dissipation base 10 by the operation of the drive motor 13, diffuses the heat generated on the surface of the package paste 2, and radiates the heat to the outside through the open window 11. is driven by a drive power source 15 installed on the top surface of the heat dissipation base 10 for driving a drive motor.

駆動用モータ13には、カバー16が覆設されている。The drive motor 13 is covered with a cover 16 .

当該放熱器9を取付けた半導体パッケージ1は、プリン
ト配線基板などの実装用基板17に実装される。
The semiconductor package 1 to which the heat sink 9 is attached is mounted on a mounting board 17 such as a printed wiring board.

ここでは、当該パッケージ1を一個取付けた実施例を示
したが、通常、当該実装用基板17上に多数取付けられ
る。
Here, an embodiment in which one package 1 is mounted is shown, but normally, a large number of packages 1 are mounted on the mounting board 17.

特に、当該基板17上で放熱を必要とするものについて
、駆動用電源15を入れ、駆動用モータ13を作動させ
るよう圧してもよい。
In particular, for those requiring heat dissipation on the substrate 17, the driving power source 15 may be turned on and the driving motor 13 may be pressed to operate.

当該駆動用モータ13の作動により、ノイズを生じ、チ
ップ4に影響するときKは、図示のように、パッケージ
ベース2の上面に、ノイズ対策用のバイパスコンデンサ
18を設けるとよい。
When the operation of the drive motor 13 generates noise and affects the chip 4, it is preferable to provide a bypass capacitor 18 on the top surface of the package base 2 as shown in the figure for noise countermeasures.

バイパスコンデンサ18け、リード5やチップ4と内部
配線7jと接続し、さらに、図示していないが、駆動用
モータ13と結線する。
Bypass capacitors 18 are connected to the leads 5, the chip 4, and the internal wiring 7j, and are further connected to the drive motor 13, although not shown.

本発明によれば、上記のように、半導体パッケージ1自
身に1冷却フアン12を備えた放熱器9を取付け、当該
放熱器9の冷却ファン12により、パッケージベース2
表面の発熱を放散させるよう圧したので、従来の半導体
パッケージの放熱フィンに放熱ファンからの風を送る形
式の冷却手段を採る必要がなく、大規模な冷却系が必要
なく、実装用基板17上に多数実装された放熱器9付半
導体パッケージの特に放熱を必要とするものについてそ
の冷却ファン12を作動させれば熱分布に偏よりを生ぜ
ず、また、例えば放熱が必要な実装用基板17Q中央に
のみかかる放熱器9を備えた半導体パッケージ1を配置
するというような事も可能となり、熱設計を効率的に行
うことができる。
According to the present invention, as described above, the radiator 9 equipped with one cooling fan 12 is attached to the semiconductor package 1 itself, and the cooling fan 12 of the radiator 9 cools the package base 2.
Since the pressure is applied to dissipate the heat generated on the surface, there is no need to use a cooling method that blows air from a heat dissipation fan to the heat dissipation fins of the conventional semiconductor package, and there is no need for a large-scale cooling system. If the cooling fan 12 is operated for a large number of semiconductor packages with heat sinks 9 mounted on the semiconductor package that require heat dissipation, the heat distribution will not be uneven. It is also possible to arrange the semiconductor package 1 equipped with the heat sink 9 only in the area, and thermal design can be carried out efficiently.

以上本発明者によってなされた発明を実施例にもとづき
具体的に説明したが、本発明は上記実施例に限定される
ものではなく、その要旨を逸脱しない範囲で種々変更可
能であることはいう1でもない。
Although the invention made by the present inventor has been specifically explained based on Examples above, the present invention is not limited to the above Examples, and it is possible to make various changes without departing from the gist of the invention. not.

例えば、前記実施例では放熱器を冷却ファンにより構成
するものを例示したが、圧[素子による送風機(ブロア
ー)やベルチェ効果を利用した放熱器やi!解イオンに
よるブロアーなどであってもよく、その他、パッケージ
表面の境界層に滞留する熱せられた空気を移動させるも
のであれば他のものでもよい。
For example, in the above embodiments, the radiator is configured with a cooling fan, but there are also radiators that use pressure elements such as blowers, radiators that utilize the Beltier effect, and i! It may be a blower that uses deionization, or it may be any other device that moves the heated air that remains in the boundary layer on the surface of the package.

本発明は前記で例示し7たビングリッドアレイ半導体パ
ッケージの他、各種の半纏体パッケージに適用すること
ができる。
The present invention can be applied to various semi-integrated packages in addition to the bin grid array semiconductor package exemplified in the seventh example above.

〔発明の効果〕〔Effect of the invention〕

本願において開示される発明のうち代表的なものによっ
て得られる効果を簡単に説明すれば、下記のとおりであ
る。
A brief explanation of the effects obtained by typical inventions disclosed in this application is as follows.

本発明によれば、熱設計を考える上において極めて有利
な技術を提供することができた。
According to the present invention, an extremely advantageous technique can be provided when considering thermal design.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明の実施例を示す一部を断面で表わす側面
図である。 1・・・半導体パッケージ、2・・・パッケージベース
、3・・・キャビティ、4・・・チップ、5・・・リー
ド、6・・・ボンディングワイヤ、7・・・内部配線、
計・・キャップ、9・・・放熱器、10・・・放熱基台
、11・・・開放窓、12・・・冷却ファン、13・・
・駆動用モータ、14・・・駆動軸、15・・・駆動用
電源、16・・・カバー 17・・・実装用基板、18
・・・バイパスコンデンサ。
FIG. 1 is a partially sectional side view showing an embodiment of the present invention. DESCRIPTION OF SYMBOLS 1... Semiconductor package, 2... Package base, 3... Cavity, 4... Chip, 5... Lead, 6... Bonding wire, 7... Internal wiring,
Total... Cap, 9... Heat radiator, 10... Heat radiation base, 11... Open window, 12... Cooling fan, 13...
- Drive motor, 14... Drive shaft, 15... Drive power supply, 16... Cover 17... Mounting board, 18
...Bypass capacitor.

Claims (2)

【特許請求の範囲】[Claims] 1.気密封止または樹脂封止された半導体パッケージ自
身に、当該パッケージ表面の熱を放散できる放熱器を取
付けして、当該放熱器により半導体パッケージ自身を冷
却するようになしたことを特徴とする自身に冷却手段を
備え前記放熱器の他に空冷用放熱ファンなどの放熱手段
を要せずして冷却可能な半導体パッケージ。
1. A radiator capable of dissipating heat on the surface of the package is attached to the semiconductor package itself that is hermetically sealed or resin-sealed, and the semiconductor package itself is cooled by the radiator. A semiconductor package that is equipped with a cooling means and can be cooled without requiring a heat radiation means such as an air cooling fan in addition to the heat radiator.
2.放熱器が、冷却ファンで、当該ファンを駆動させる
駆動用モータと当該モータを駆動させるための駆動電源
とを備えて成る、請求項1に記載の半導体パッケージ。
2. 2. The semiconductor package according to claim 1, wherein the radiator is a cooling fan and includes a driving motor for driving the fan and a driving power source for driving the motor.
JP1013973A 1989-01-25 1989-01-25 Semiconductor package Pending JPH02196454A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1013973A JPH02196454A (en) 1989-01-25 1989-01-25 Semiconductor package

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1013973A JPH02196454A (en) 1989-01-25 1989-01-25 Semiconductor package

Publications (1)

Publication Number Publication Date
JPH02196454A true JPH02196454A (en) 1990-08-03

Family

ID=11848164

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1013973A Pending JPH02196454A (en) 1989-01-25 1989-01-25 Semiconductor package

Country Status (1)

Country Link
JP (1) JPH02196454A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5504924A (en) * 1990-11-28 1996-04-02 Hitachi, Ltd. Cooling system of electronic computer using flexible members in contact with semiconductor devices on boards

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5504924A (en) * 1990-11-28 1996-04-02 Hitachi, Ltd. Cooling system of electronic computer using flexible members in contact with semiconductor devices on boards

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