JPH02190771A - Four-terminal measuring instrument - Google Patents
Four-terminal measuring instrumentInfo
- Publication number
- JPH02190771A JPH02190771A JP1173389A JP1173389A JPH02190771A JP H02190771 A JPH02190771 A JP H02190771A JP 1173389 A JP1173389 A JP 1173389A JP 1173389 A JP1173389 A JP 1173389A JP H02190771 A JPH02190771 A JP H02190771A
- Authority
- JP
- Japan
- Prior art keywords
- contact
- contactors
- voltage
- output
- measured
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001514 detection method Methods 0.000 abstract description 8
- 230000007423 decrease Effects 0.000 abstract description 4
- 238000005259 measurement Methods 0.000 abstract description 3
- 239000003990 capacitor Substances 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
Landscapes
- Measurement Of Resistance Or Impedance (AREA)
Abstract
Description
【発明の詳細な説明】
「産業上の利用分野」
この発明は被測定物の第1電掻に第1接角1子を通じて
信号源を接続し、その被測定物の第2電極に第2接触子
を通じて電流測定手段を接続し、第1電極及び第2電極
間に第3.第4接触子を通じて電圧測定手段を接続した
四端子測定装置に関する。Detailed Description of the Invention "Industrial Application Field" This invention connects a signal source to a first electrode of an object to be measured through a first tangent, and connects a signal source to a second electrode of the object to be measured. A current measuring means is connected through the contact, and a third electrode is connected between the first electrode and the second electrode. The present invention relates to a four-terminal measuring device in which a voltage measuring means is connected through a fourth contact.
「従来の技術」
第4図に従来の四端子測定装置を示す。コンデンサの被
測定物11の第1電極12に第1接触子13を通じて信
号源14が接続され、被測定物11の第2電極15に第
2接触子16を通じて電流電圧変換器17が接続される
。第1電極12、第2を極】5にそれぞれ第3接触子1
8、第4接触子19を通じて高入力インピーダンスの電
圧バッファ増幅器21.22が接続される。電圧バッフ
ァ増幅器21.22の各出力側は差動増幅器23の両入
力側に接続される。電流電圧変換器17、差動増幅器2
3の各出力側はベクトル検波器24に接続され、ベクト
ル検波器24は演算・表示部25に接続される。"Prior Art" Figure 4 shows a conventional four-terminal measuring device. A signal source 14 is connected to the first electrode 12 of the object to be measured 11 of the capacitor through the first contact 13, and a current-voltage converter 17 is connected to the second electrode 15 of the object to be measured 11 through the second contact 16. . The first electrode 12, the second electrode] 5 each have a third contact 1
8. A high input impedance voltage buffer amplifier 21,22 is connected through the fourth contact 19. Each output of the voltage buffer amplifier 21 , 22 is connected to both inputs of the differential amplifier 23 . Current-voltage converter 17, differential amplifier 2
Each output side of 3 is connected to a vector detector 24, and the vector detector 24 is connected to an arithmetic/display section 25.
被測定物11に信号源14より交流電圧を印加し、被測
定物11を流れる電流を電流電圧変換器17により電圧
情報とした後、ベクトル検波器24で複素数情報として
検出し、被測定物11の両端の電圧を電圧検出差動増幅
器23により電圧情報とした後、ベクトル検波器24で
複素数情報として検出し、ベクトル検波器24の再出力
を演算処理して被測定物11の静電容量値やjanδ値
を表示する。An AC voltage is applied to the object to be measured 11 from the signal source 14, and the current flowing through the object to be measured 11 is converted into voltage information by the current-voltage converter 17, and then detected as complex number information by the vector detector 24. After converting the voltage across both ends into voltage information by the voltage detection differential amplifier 23, the vector detector 24 detects it as complex number information, and the re-output of the vector detector 24 is processed to obtain the capacitance value of the object to be measured 11. and janδ value.
[発明が解決しようとする課題」
第1接触子13、第2接触子16の接触が不充分の場合
は所定の電流を被測定物11に流すことができないため
測定値が誤ったものとなる。また第3接触子18、第4
接触子19の接触が不充分の場合は実際の被測定物11
の両端電圧が測定されないため測定値が誤ったものとな
る。[Problem to be Solved by the Invention] If the contact between the first contactor 13 and the second contactor 16 is insufficient, the predetermined current cannot be passed through the object to be measured 11, resulting in incorrect measured values. . Also, the third contact 18, the fourth
If the contact of the contactor 19 is insufficient, the actual object to be measured 11
Since the voltage across the terminal is not measured, the measured value will be incorrect.
被測定物11として高電圧に充電されたコンデンサが接
続された場合、信号源14、電流電圧変換器17に大き
な電流が流れ、電圧検出バッファ増幅器21.22に高
電圧がかかつてこれらを損傷するおそれがあった。When a capacitor charged to a high voltage is connected as the object to be measured 11, a large current flows through the signal source 14 and the current-voltage converter 17, and a high voltage is applied to the voltage detection buffer amplifiers 21 and 22, damaging them. There was a risk.
「課題を解決するための手段」
この発明によれば第1接触子及び第3接触子間の導通を
検出する手段が設けられ、第2接触子及び第4接触子間
の導通を検出する手段が設けられる。更に第1接触子と
第2接触子又は第4接触子との間の電位差の有無を検出
する手段と、第3接触子と第2接触子又は第4接触子と
の間の電位差の有無を検出する手段とが設けられる。"Means for Solving the Problem" According to the present invention, means for detecting conduction between the first contact and the third contact is provided, and means for detecting conduction between the second contact and the fourth contact. is provided. Furthermore, means for detecting the presence or absence of a potential difference between the first contactor and the second contactor or the fourth contactor, and means for detecting the presence or absence of a potential difference between the third contactor and the second contactor or the fourth contactor. and means for detecting.
「実施例」
第1図はこの発明の実施例を示し、第4図と対応する部
分には同一符号を付けである。この発明によれば第1接
触子13及び第3接触子18間の導通を検出する手段と
、第2接触子16及び第4接触子19間の導通を検出す
る手段とが設けられる。このため第1図においては信号
′1IA14の周波数と異なる周波数の接触検出用信号
源31が設けられ、接触検出用信号#31の一端は接地
され、他端はトランス32.33の1次側の各一端に接
続される。トランス32の2次側の両端は第1接触子1
3、第3接触子18に接続され、トランス33の2次側
の両端は第2接触子16、第4 ti触子19に接続さ
れる。トランス32の1次側の他端は抵抗器34を通じ
て接地されると共にダイオード35の一端に接続され、
ダイオード35の他端はコンデンサ36、抵抗器37を
それぞれ通じて接地され、ダイオード35ミコンデンサ
36の接続点38はインバータ39に接続される。トラ
ンス33の1次側の他端は抵抗器41を通じて接地され
ると共にダイオード42の一端に接続され、ダイオード
42の他端はコンデンサ43及び抵抗器44をそれぞれ
通じて接地され、ダイオード42、コンデンサ43の接
続点45はインバータ46に接続される。Embodiment FIG. 1 shows an embodiment of the present invention, and parts corresponding to those in FIG. 4 are given the same reference numerals. According to the present invention, a means for detecting conduction between the first contact 13 and the third contact 18 and a means for detecting conduction between the second contact 16 and the fourth contact 19 are provided. For this reason, in FIG. 1, a contact detection signal source 31 having a frequency different from the frequency of the signal '1IA14 is provided, one end of the contact detection signal #31 is grounded, and the other end is connected to the primary side of the transformer 32, 33. connected to one end of each. Both ends of the secondary side of the transformer 32 are connected to the first contact 1
3. It is connected to the third contactor 18, and both ends of the secondary side of the transformer 33 are connected to the second contactor 16 and the fourth ti contactor 19. The other end of the primary side of the transformer 32 is grounded through a resistor 34 and connected to one end of a diode 35.
The other end of the diode 35 is grounded through a capacitor 36 and a resistor 37, respectively, and a connection point 38 between the diode 35 and the microcapacitor 36 is connected to an inverter 39. The other end of the primary side of the transformer 33 is grounded through a resistor 41 and connected to one end of a diode 42, and the other end of the diode 42 is grounded through a capacitor 43 and a resistor 44, respectively. A connection point 45 is connected to an inverter 46.
第1接触子13と第2接触子16又は第4接触子19と
の間の電位差の有無を検出する手段と、第3接触子18
と第2接触子16又は第4接触子19との間の電位差の
有無を検出する手段とが設けられる。このため第1.第
2.第3.第4接触子13,16,18.19はそれぞ
れ、抵抗器47゜48.49.51の各一端に接続され
、抵抗器47.48.49.51の各他端はそれぞれツ
ェナダイオード52,53,54.55を通じて接地さ
れる。抵抗器47、ツェナダイオード52の接続点はダ
イオード56の陽極に接続され、抵抗器48、ツェナダ
イオード53の接続点はダイオード57の陽極に接続さ
れ、抵抗器49、ツェナダイオード54の接続点はダイ
オード58の陽極に接続され、抵抗器51、ツェナダイ
オード55の接続点はダイオード59の陽極に接続され
る。ダイオード56,57.58.59の各陰極は互い
に接続され、その接続点61はトランジスタ62のベー
スに接続され、トランジスタ62のエミッタは接地され
、コレクタは抵抗器63を通じて電源端子64に接続さ
れると共にインバータ65に接続される。means for detecting the presence or absence of a potential difference between the first contact 13 and the second contact 16 or the fourth contact 19; and a third contact 18.
and means for detecting the presence or absence of a potential difference between the second contactor 16 or the fourth contactor 19. For this reason, the first. Second. Third. The fourth contacts 13, 16, 18.19 are each connected to one end of a resistor 47, 48, 49, 51, and the other end of the resistor 47, 48, 49, 51 is connected to a zener diode 52, 53, respectively. , 54.55. The connection point between the resistor 47 and the Zener diode 52 is connected to the anode of the diode 56, the connection point between the resistor 48 and the Zener diode 53 is connected to the anode of the diode 57, and the connection point between the resistor 49 and the Zener diode 54 is connected to the anode of the diode 56. The connection point between the resistor 51 and the Zener diode 55 is connected to the anode of the diode 59. The cathodes of the diodes 56, 57, 58, 59 are connected to each other, their connection point 61 is connected to the base of the transistor 62, the emitter of the transistor 62 is grounded, and the collector is connected to the power supply terminal 64 through the resistor 63. It is also connected to an inverter 65.
インバータ39,46.65の各出力はノア回路66へ
供給され、ノア回路66の出力はトランジスタ67のベ
ースへ供給される。トランジスタ67のコレクタはリレ
ー68.69,71.72を通じて電源端子64に接続
され、エミッタは接地される。リレー68の接点68a
は第1接触子13と信号源14との間に挿入され、リレ
ー69の接点69aは第2接触子16と電流電圧変換器
17との間に挿入され、リレー71の接点71aは第3
接触子18と電圧バッファ増幅器21との間に挿入され
、リレー72の接点72aは第4接触子19と電圧バッ
ファ増幅器22との間に挿入される。The outputs of the inverters 39, 46, and 65 are supplied to a NOR circuit 66, and the output of the NOR circuit 66 is supplied to the base of a transistor 67. The collector of transistor 67 is connected to power supply terminal 64 through relays 68, 69, 71, 72, and the emitter is grounded. Contact 68a of relay 68
is inserted between the first contact 13 and the signal source 14, the contact 69a of the relay 69 is inserted between the second contact 16 and the current-voltage converter 17, and the contact 71a of the relay 71 is inserted between the third contact 13 and the signal source 14.
The contact 72 a of the relay 72 is inserted between the fourth contact 19 and the voltage buffer amplifier 22 .
インバータ39.46の各出力はノア回路73にも供給
され、ノア回路73の出力と、インバータ65の出力と
、自動指令とがアンド回路74へ供給され、アンド回路
74の出力はトランジスタ75のベースに供給され、ト
ランジスタ75のコレクタはリレー76を通じて電源端
子64に接続され、エミッタは接地される。リレー76
の接点76aが第3接触子18と第4接触子19との間
に接続される。Each output of the inverters 39 and 46 is also supplied to the NOR circuit 73, and the output of the NOR circuit 73, the output of the inverter 65, and the automatic command are supplied to the AND circuit 74, and the output of the AND circuit 74 is supplied to the base of the transistor 75. The collector of the transistor 75 is connected to the power supply terminal 64 through the relay 76, and the emitter is grounded. relay 76
A contact 76a is connected between the third contact 18 and the fourth contact 19.
上述した構成において、第1接触子13及び第3接触子
18間の抵抗が減少すると、トランス32の2次側に大
きなiIt流が流れ、トランス32の1次側、抵抗器3
4に大きな電流が流れ、その電流がダイオード35で検
波されて抵抗器37に流れる。従って接続点38の電位
が上り、インバータ39の出力は高レベルから低レベル
に変化する。In the above-described configuration, when the resistance between the first contact 13 and the third contact 18 decreases, a large iIt current flows to the secondary side of the transformer 32, and the primary side of the transformer 32 and the resistor 3
A large current flows through the resistor 4, which is detected by the diode 35 and flows through the resistor 37. Therefore, the potential at the connection point 38 rises, and the output of the inverter 39 changes from high level to low level.
同様に第2接触子16及び第4接触子19間の抵抗が減
少するとインバータ46の出力は高レベルから低しヘル
に変化する。このようにして第1接触子13、第3接触
子18間の導通、第2接触子16、第4接触子19間の
導通が検出される。Similarly, when the resistance between the second contact 16 and the fourth contact 19 decreases, the output of the inverter 46 changes from a high level to a low level. In this way, conduction between the first contactor 13 and the third contactor 18 and conduction between the second contactor 16 and the fourth contactor 19 are detected.
被測定物11の第1電極12、第2電極15に接触する
第1.第2.第3.第4接触子13.16゜18.19
の内生なくとも2つの接触子間にある程度、例えば3■
以上の電位差がある場合は接続点61の電位が上りトラ
ンジスタ62が導通じてインバータ65の出力が低レベ
ルから高レベルに変化する。例えば第1接触子13と第
4接触子19との間にIOVの電位差(第1接触子13
が正、第4接触子19が負)があると、電流が抵抗器4
7ツエナダイオード52−ツェナダイオード55抵抗器
51と流れ、2つのツェナダイオード52゜55の内、
逆方向のツェナダイオード52にのみツェナ電圧、例え
ば3■が発生する。この両端電圧はダイオード56を順
バイアスして接続点61の電位を上げる。よってトラン
ジスタ62が導通し、インバータ65の出力が高レベル
になる。The first electrode contacts the first electrode 12 and the second electrode 15 of the object to be measured 11. Second. Third. 4th contact 13.16°18.19
endogenous at least to some extent between two contacts, for example 3■
If there is a potential difference above, the potential at the connection point 61 increases, the transistor 62 becomes conductive, and the output of the inverter 65 changes from a low level to a high level. For example, the IOV potential difference between the first contact 13 and the fourth contact 19 (first contact 13
is positive and the fourth contact 19 is negative), the current flows through the resistor 4
7 Zener diode 52 - Zener diode 55 flows through resistor 51, and among the two Zener diodes 52, 55,
A Zener voltage, for example 3.5 cm, is generated only in the Zener diode 52 in the reverse direction. This voltage across the terminal forward biases the diode 56 to raise the potential at the connection point 61. Therefore, transistor 62 becomes conductive, and the output of inverter 65 becomes high level.
次に逆方向に電圧がかかった場合、つまり第1接触子1
3が負で第4接触子19が正の場合、電流は抵抗器51
−ツェナダイオード55−ツェナダイオード52−抵抗
器47と流れ、2つのツェナダイオード52.55の内
、逆方向のツェナダイオード55にのみツェナ電圧が発
生し、そのツェナ電圧はダイオード59を順バイアスし
、接続点61の電位を上げ、トランジスタ62が導通し
、インバータ65の出力が高レベルになる。同様にして
全ての接触子間に発生する高電圧を四端子接続が成立す
る前に検出できる。Next, if voltage is applied in the opposite direction, that is, the first contact 1
3 is negative and the fourth contact 19 is positive, the current flows through the resistor 51
- Zener diode 55 - Zener diode 52 - resistor 47, and of the two Zener diodes 52 and 55, a Zener voltage is generated only in the opposite Zener diode 55, and the Zener voltage forward biases the diode 59, The potential of the connection point 61 is raised, the transistor 62 becomes conductive, and the output of the inverter 65 becomes high level. Similarly, the high voltage generated between all the contacts can be detected before the four-terminal connection is established.
第1接触子13及び第3接触子18間が低抵抗であり、
第2接触子16及び第4接触子19が低抵抗であり、か
つ第1電掻12及び第2電極15間に高電圧が発生して
いない場合はインバータ39゜46゜65の各出力は共
に低レベルであって、ノア回路66の出力は高レベルと
なり、トランジスタ67が導通し、リレー68,69,
71.72が共に動作して、信号源14の測定信号が被
測定物11に印加され、被測定物11を流れる電流が電
流電圧変換器17で検出され、被測定物11の両端間の
電圧が差動増幅器23で検出され、被測定物11のキャ
パシタンスが測定される。There is low resistance between the first contact 13 and the third contact 18,
When the second contact 16 and the fourth contact 19 have low resistance and no high voltage is generated between the first electric scraper 12 and the second electrode 15, the outputs of the inverter 39°46°65 are both The output of the NOR circuit 66 becomes a high level, the transistor 67 becomes conductive, and the relays 68, 69,
71 and 72 operate together, the measurement signal of the signal source 14 is applied to the device under test 11, the current flowing through the device under test 11 is detected by the current-voltage converter 17, and the voltage across the device 11 is detected. is detected by the differential amplifier 23, and the capacitance of the device under test 11 is measured.
四端子接続が成立した状態、つまり第1接触子13及び
第3接触子18間、第2接触子16及び第4接触子19
間が共に低抵抗でインバータ39゜46の出力が共に低
レベルの状態において、第1電極12及び第2電極15
間に高電圧が発生している場合は接続点61の電位が上
がり、インバータ65の出力が高レベルとなり、ノア回
路73の出力も高レベルであるから自動指令が与えられ
ているとアンド回路74の出力が高レベルとなり、トラ
ンジスタ75がオンし、リレー76が動作して、リレー
接点76aを通じて第1電極12及び第2電極15間が
接続され、被測定物11の電荷はインバータ65の出力
が低レベルになるまで自動放電される。A state in which a four-terminal connection is established, that is, between the first contact 13 and the third contact 18, and between the second contact 16 and the fourth contact 19.
When the first electrode 12 and the second electrode 15
If a high voltage is generated between them, the potential at the connection point 61 increases, the output of the inverter 65 becomes high level, and the output of the NOR circuit 73 is also high level, so if an automatic command is given, the AND circuit 74 The output of the inverter 65 becomes high level, the transistor 75 is turned on, the relay 76 is operated, and the first electrode 12 and the second electrode 15 are connected through the relay contact 76a. It will automatically discharge until it reaches a low level.
四端子接触検出は第2図に示すように構成してもよい。Four-terminal contact detection may be configured as shown in FIG.
第1接触子13及び第3接触子18間が低抵抗になると
リレー77が動作し、リレー77の接点??aにより論
理回路78の入力側が接地され、論理回路78の出力が
高レベルより低レベルになる。同様に第2接触子16及
び第4接触子19間が低抵抗になるとリレー79が動作
し、その接点79aがオンして論理回路81の入力側が
接地され、論理回路81の出力が高レベルより低しヘル
になる。第3図に示すようにリレー77゜79の代りに
フォトカプラ82.83を用いてもよい。When the resistance between the first contact 13 and the third contact 18 becomes low, the relay 77 operates, and the contact of the relay 77? ? The input side of the logic circuit 78 is grounded by a, and the output of the logic circuit 78 becomes a low level rather than a high level. Similarly, when the resistance between the second contact 16 and the fourth contact 19 becomes low, the relay 79 is activated, its contact 79a is turned on, and the input side of the logic circuit 81 is grounded, causing the output of the logic circuit 81 to rise above the high level. It becomes low and healthy. As shown in FIG. 3, photocouplers 82 and 83 may be used in place of the relays 77 and 79.
「発明の効果」
以上述べたように、この発明によれば各接触子の接触状
態を検出でき、被測定物に所定電流を流すことができ、
かつ被測定物の両端電圧を正しく測定することができ、
正しい測定値が得られる。"Effects of the Invention" As described above, according to the present invention, the contact state of each contact can be detected, and a predetermined current can be passed through the object to be measured.
It is also possible to accurately measure the voltage across the object under test.
Correct measurements can be obtained.
高電圧に充電されている被測定物が接続されると、イン
バータ65の出力が高レベルとなって、そのことが検出
される。この検出を利用して被測定物の電荷を自動放電
させることも可能であり、その場合は信号源、電流電圧
変換器、電圧検出用バッファ増幅器などを損傷するおそ
れはない。When a device under test charged to a high voltage is connected, the output of the inverter 65 becomes high level, and this is detected. Using this detection, it is also possible to automatically discharge the charge of the object under test, in which case there is no risk of damaging the signal source, current-voltage converter, voltage detection buffer amplifier, etc.
【図面の簡単な説明】
第1図はこの発明の実施例を示す接続図、第2図及び第
3図はそれぞれその一部変形を示す接続図、第4図は従
来の四端子測定装置を示す接続図である。[Brief Description of the Drawings] Fig. 1 is a connection diagram showing an embodiment of the present invention, Figs. 2 and 3 are connection diagrams showing partial modifications thereof, and Fig. 4 is a connection diagram showing a conventional four-terminal measuring device. FIG.
Claims (1)
を接続し、その被測定物の第2電極に第2接触子を通じ
て電流測定手段を接続し、上記第1電極及び第2電極間
に第3、第4接触子を通じて電圧測定手段を接続した四
端子測定装置において、上記第1接触子及び上記第3接
触子間の導通を検出する手段と、 上記第2接触子及び上記第4接触子間の導通を検出する
手段と、 上記第1接触子と上記第2接触子又は上記第4接触子と
の間の電位差の有無を検出する手段と、上記第3接触子
と上記第2接触子又は上記第4接触子との間の電位差の
有無を検出する手段とを具備する四端子測定装置。(1) A signal source is connected to the first electrode of the object to be measured through the first contact, a current measuring means is connected to the second electrode of the object to be measured through the second contact, and the signal source is connected to the first electrode of the object to be measured through the second contact. In a four-terminal measuring device in which a voltage measuring means is connected between the electrodes through third and fourth contacts, means for detecting continuity between the first contact and the third contact, the second contact and the above. means for detecting continuity between the fourth contact; means for detecting the presence or absence of a potential difference between the first contact and the second contact or the fourth contact; and the third contact and the fourth contact. A four-terminal measuring device comprising means for detecting the presence or absence of a potential difference between the second contactor and the fourth contactor.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1173389A JP2889264B2 (en) | 1989-01-19 | 1989-01-19 | Four terminal measuring device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1173389A JP2889264B2 (en) | 1989-01-19 | 1989-01-19 | Four terminal measuring device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH02190771A true JPH02190771A (en) | 1990-07-26 |
JP2889264B2 JP2889264B2 (en) | 1999-05-10 |
Family
ID=11786233
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1173389A Expired - Fee Related JP2889264B2 (en) | 1989-01-19 | 1989-01-19 | Four terminal measuring device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2889264B2 (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006322821A (en) * | 2005-05-19 | 2006-11-30 | Hioki Ee Corp | Impedance measuring instrument |
JP2012013588A (en) * | 2010-07-02 | 2012-01-19 | Hioki Ee Corp | Four-terminal type impedance measurement apparatus |
CN117075003A (en) * | 2023-10-19 | 2023-11-17 | 青岛锐捷智能仪器有限公司 | Four-terminal test line contact detection method and system |
-
1989
- 1989-01-19 JP JP1173389A patent/JP2889264B2/en not_active Expired - Fee Related
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006322821A (en) * | 2005-05-19 | 2006-11-30 | Hioki Ee Corp | Impedance measuring instrument |
JP4695920B2 (en) * | 2005-05-19 | 2011-06-08 | 日置電機株式会社 | Impedance measuring device |
JP2012013588A (en) * | 2010-07-02 | 2012-01-19 | Hioki Ee Corp | Four-terminal type impedance measurement apparatus |
CN117075003A (en) * | 2023-10-19 | 2023-11-17 | 青岛锐捷智能仪器有限公司 | Four-terminal test line contact detection method and system |
Also Published As
Publication number | Publication date |
---|---|
JP2889264B2 (en) | 1999-05-10 |
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