JPH02189478A - Analyzing apparatus - Google Patents

Abstract

PURPOSE:To make it possible to detect only a locally concentrated current with high precision and high sensitivity by combining a light amplifier device with a microscope and by reducing the quantity of light applied onto the surface of a substance to be observed to a level near the lower limit of the sensitivity of the light amplifier device. CONSTITUTION:A device 2 to be observed whereon a liquid crystal is applied and a voltage is impressed is set under a microscope 1, and an image thereof is screened on a video monitor 6 through a light amplifier device 4 and a video camera 5 provided on the microscope 1. By this method, the quantity of light applied onto the device 2 can be reduced, generation of a light-excited current and a rise in temperature of an irradiated part can be suppressed and only a locally concentrated current can be detected with high precision and high sensitivity.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to an analysis device used for detecting locally concentrated current in an observed device coated with liquid crystal.

[Summary of the invention]

The present invention provides l! The JI mirror is equipped with an optical amplification device for observation, thereby increasing the accuracy and sensitivity of detecting current leaks, etc.

[Conventional technology]

Conventionally, as shown in Figure 2, a device to be observed coated with liquid crystal (
For example, apply a voltage to IC)2, observe it with a microscope, and
BACKGROUND OF THE INVENTION Analyzers have been known that identify a current concentration location in an IC (an IC failure location) by detecting a phase transition of a liquid crystal due to a local concentration of current. In addition, 3 is a light source,
5 is a video camera.

[Problem to be solved by the invention]

However, in order to observe the transition of liquid crystals with conventional analysis devices, it is necessary to increase the amount of light irradiated onto the device to be observed and brighten the observation surface. In this state, the temperature rise caused by the light irradiated onto the surface to be observed, and in devices that generate photoexcitation current, the excitation current causes liquid crystal transition, making it difficult to distinguish from the original current concentration point. there were.

Furthermore, if the value of the locally concentrated current is about 1 mA or less, there is a drawback that it cannot be detected because the temperature rise due to the irradiation light is greater than the amount of heat generated by the locally concentrated current.

Therefore, in order to solve these conventional drawbacks, this invention suppresses the generation of photoexcitation current and suppresses the local temperature rise of the observation surface, thereby making it possible to detect only the original locally concentrated current with high precision and sensitivity. The purpose is to provide equipment.

(Means for Solving the Problem) In order to solve the above problems, the present invention combines a microscope with a light amplification device, reduces the amount of light irradiated onto the surface of the object to be observed, and directs the amount of light irradiation to the light amplification device. By lowering the sensitivity to near the lower limit, only locally concentrated currents can be detected with high precision and sensitivity.

[Effect]

With the analysis device configured as described above, the amount of light irradiated onto the observed device coated with liquid crystal can be minimized, which suppresses the generation of photo-excited current and the temperature rise of the irradiated part, so that only locally concentrated current can be suppressed. It is possible to detect with high precision and sensitivity without making mistakes.

〔Example〕

Embodiments of the present invention will be described below based on the drawings.

In FIG. 1, a device to be observed 2 coated with liquid crystal and applied with a voltage is installed on a microscope 1, and is displayed on a video monitor 6 via a light amplifying device 4 and a video camera 5 provided on the microscope 1.

Of course, the optical amplification device 4 may be directly observed without attaching the video camera 5 and video monitor 6.

Further, there may be a mechanism for adjusting the temperature of the observed device 1. Furthermore, the present invention does not refer to a mechanism for applying voltage to the observed device 1, and can be applied to, for example, a blowing device. Furthermore, the present invention can be applied to any microscope such as a polarizing microscope and a stereoscopic microscope.

〔Effect of the invention〕

As explained above, the present invention has the effect of easily detecting locally concentrated current with high accuracy and high sensitivity using a simple configuration in which a microscope is combined with an optical amplifying device.

Furthermore, the more the irradiation amount to the observed device is reduced, and the higher the sensitivity of the optical amplification device is, the more effective the effect becomes.

[Brief explanation of the drawing]

FIG. 1 is an overall view of an analysis device according to the present invention, and FIG. 2 is an overall view of a conventional analysis device. I...Microscope 4...Optical amplification device and above Applicant Seiko Electronic Industries Co., Ltd. Agent Patent attorney Keinosuke Hayashi

Claims (1)

[Claims] An analysis device that applies a voltage to a device to be observed coated with liquid crystal and uses a microscope to detect phase transition of the liquid crystal caused by heat or electric field caused by locally flowing current, the analysis device comprising an optical amplification device installed in the microscope.