JPH02188448A - Formation of carbon coating film on small body - Google Patents
Formation of carbon coating film on small bodyInfo
- Publication number
- JPH02188448A JPH02188448A JP1006339A JP633989A JPH02188448A JP H02188448 A JPH02188448 A JP H02188448A JP 1006339 A JP1006339 A JP 1006339A JP 633989 A JP633989 A JP 633989A JP H02188448 A JPH02188448 A JP H02188448A
- Authority
- JP
- Japan
- Prior art keywords
- carbon film
- small body
- coating film
- forming
- small
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 title claims abstract description 28
- 229910052799 carbon Inorganic materials 0.000 title claims abstract description 28
- 238000000576 coating method Methods 0.000 title abstract description 8
- 239000011248 coating agent Substances 0.000 title abstract description 7
- 230000015572 biosynthetic process Effects 0.000 title description 2
- 238000000034 method Methods 0.000 claims description 7
- 239000002994 raw material Substances 0.000 claims description 3
- 239000007858 starting material Substances 0.000 abstract 3
- 238000010438 heat treatment Methods 0.000 abstract 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 12
- 238000006243 chemical reaction Methods 0.000 description 11
- 239000010453 quartz Substances 0.000 description 9
- UHOVQNZJYSORNB-UHFFFAOYSA-N Benzene Chemical compound C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 description 6
- 239000012159 carrier gas Substances 0.000 description 6
- 239000007789 gas Substances 0.000 description 6
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- 229910001873 dinitrogen Inorganic materials 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- HTDIUWINAKAPER-UHFFFAOYSA-N trimethylarsine Chemical compound C[As](C)C HTDIUWINAKAPER-UHFFFAOYSA-N 0.000 description 4
- 230000000694 effects Effects 0.000 description 2
- 239000011810 insulating material Substances 0.000 description 2
- 238000002156 mixing Methods 0.000 description 2
- 239000000700 radioactive tracer Substances 0.000 description 2
- 230000000903 blocking effect Effects 0.000 description 1
- 150000001721 carbon Chemical class 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000012768 molten material Substances 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000005979 thermal decomposition reaction Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/22—Surface treatment of glass, not in the form of fibres or filaments, by coating with other inorganic material
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2217/00—Coatings on glass
- C03C2217/20—Materials for coating a single layer on glass
- C03C2217/28—Other inorganic materials
- C03C2217/282—Carbides, silicides
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2218/00—Methods for coating glass
- C03C2218/10—Deposition methods
- C03C2218/15—Deposition methods from the vapour phase
- C03C2218/152—Deposition methods from the vapour phase by cvd
Landscapes
- Chemical & Material Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Surface Treatment Of Glass (AREA)
- Carbon And Carbon Compounds (AREA)
Abstract
Description
【発明の詳細な説明】
（産業上の利用分野）
本発明はカーボン被膜の形成方法に係わるものであり、
特に小物体への均一なカーボン被膜形成方法に関するも
のである。[Detailed Description of the Invention] (Industrial Application Field) The present invention relates to a method of forming a carbon film,
In particular, it relates to a method for forming a uniform carbon film on small objects.
（従来の技術）
被膜形成技術は、材料の外部環境からの保護、材料から
外部環境への影響の遮断、材料表面の性質の改質等の用
途に広〈産業界に利用されている。本発明の係わるカー
ボン被膜形成技術も以上に挙げられた用途の例外ではな
い。例えば、石英管内壁にカーボンの被膜をコーティン
グして、成形が容易な石英ガラスを石英との反応性の高
い反応ガスを用いるプロセスの反応管として利用するこ
とを可能にしている。あるいは、絶縁性の材料の表面に
カーボンの被膜を形成して絶縁性材料の帯電を防止した
り表面を導電性に改質したりすることができる。(Prior Art) Film forming technology is widely used in industry for purposes such as protecting materials from the external environment, blocking the effects of materials on the external environment, and modifying the properties of material surfaces. The carbon film forming technology to which the present invention relates is also no exception to the above-mentioned applications. For example, by coating the inner wall of a quartz tube with a carbon film, it is possible to use easily moldable quartz glass as a reaction tube in a process that uses a reactive gas highly reactive with quartz. Alternatively, a carbon film can be formed on the surface of an insulating material to prevent the insulating material from being charged or to modify the surface to be conductive.
このようなカーボン被膜を小物体の表面に形成する目的
は、例えば、小物体表面を腐食性の外部環境から保護す
ることにある。あるいは、このカーボン被膜の密着性が
良好であれば、小物体同士が擦れ合うときの潤滑性を向
上させることができる。実例として、最近の基礎科学分
野での研究ツールとしてのトレーサ小体を挙げることが
できる。上述のトレーサ小体は、激しく腐食性の環境で
用いられることがあり周囲物質との同化（融体中のトレ
ーサでは濡れ性）が良いことが求められ、例えば、石英
製の小球にカーボンの被膜を形成すると効果があること
がある。The purpose of forming such a carbon film on the surface of a small object is, for example, to protect the surface of the small object from a corrosive external environment. Alternatively, if the adhesion of this carbon film is good, it is possible to improve the lubricity when small objects rub against each other. A practical example is the recent use of tracer bodies as research tools in basic science. The above-mentioned tracer bodies are sometimes used in highly corrosive environments and are required to have good assimilation (wettability for tracers in molten material) with surrounding materials. Forming a film may be effective.
石英製小球表面へのカーボン被膜形成は、−役向には、
溶剤に分散されたグラファイト微粉末を丁寧に表面に擦
りつけて乾燥あるいはさらに焼成している。しかしなが
ら、このようなカーボン被膜形成方法では、第一に被膜
の均一性に問題があり膜にかかるストレスを原因として
亀裂が入る恐れがある。第二に乾燥の過程でも膜に亀裂
が入り易い。第三には、表面に突部あるいは谷部のある
小物体、すなわち球体以外の小物体への均一な被膜形成
は不可能なことである。The formation of a carbon film on the surface of quartz globules has the following functions:
Fine graphite powder dispersed in a solvent is carefully rubbed onto the surface and then dried or further fired. However, in such a method of forming a carbon film, firstly, there is a problem in the uniformity of the film, and there is a risk that cracks may occur due to the stress applied to the film. Second, the film tends to crack during the drying process. Thirdly, it is impossible to uniformly form a coating on small objects having protrusions or valleys on the surface, that is, small objects other than spheres.
本発明の目的はこの点に鑑み小物体への均一なカーボン
被膜形成技術を提供することにある。In view of this point, an object of the present invention is to provide a technique for forming a uniform carbon film on a small object.
（問題を解決するための手段）
本発明は、小物体をガス流中に浮遊させて小物体を含む
該環境を所定の温度に加熱して上記ガス流中にカーボン
膜形成原料を添加して小物体にカーボン被膜を形成する
ことを特徴とする小物体へのカーボン被膜形成方法であ
る。(Means for solving the problem) The present invention suspends small objects in a gas flow, heats the environment containing the small objects to a predetermined temperature, and adds a carbon film forming raw material to the gas flow. This is a method for forming a carbon film on a small object, characterized by forming a carbon film on the small object.
（作用）
従来の塗布法では小物体を保持するのに必ず小物体を何
らかの保持体に接触させなければならなかった。ところ
が、本発明によれば小物体はガス流中に浮遊するので保
持体は不要であり、しかも、小物体はガス流中で高速の
回転運動をおこなうことになるので、ガス流中のカーボ
ン原料物質が熱分解して形成されるカーボン被膜の均一
性は理想的なものとなる。(Function) In the conventional coating method, in order to hold a small object, it was necessary to bring the small object into contact with some kind of holder. However, according to the present invention, since the small objects are suspended in the gas flow, a holder is not necessary, and since the small objects perform high-speed rotational motion in the gas flow, the carbon raw material in the gas flow is The uniformity of the carbon film formed by thermal decomposition of the substance is ideal.
（実施例）
実施例１
内径５０ｍｍの石英管を縦方向に設置して下部から２１
／ｍｉｎの窒素ガスを流した。この中心軸上にキャリア
ガス噴出口を設け１１／ｍｉｎの窒素ガスを上方に向け
て噴出させた。このキャリアガス中に直径１．８ｍｍの
石英ガラス球を入れて浮遊させた。しかるのちに、石英
反応管を取り囲む電気炉によって全体を８００°Ｃに加
熱した。中心の噴出口から反応管に流入して石英球を浮
遊させているキャリアガス中に反応管外部においてベン
ゼン蒸気を混入させ反応管に導入せしめた。１時間経過
後ベンゼン蒸気の混入を停止し、さらに５分間経過後電
気炉の電源をオフして反応管を室温に戻した。電気炉は
割り型であり、内部が観察できるが、カーボン被膜が形
成された小球を下部の受は皿に回収した。非常に緻密で
均一性が良いカーボン被膜が形成されていた。(Example) Example 1 A quartz tube with an inner diameter of 50 mm was installed vertically and
/min nitrogen gas was flowed. A carrier gas jetting port was provided on the central axis to jet nitrogen gas upward at a rate of 11/min. A quartz glass sphere with a diameter of 1.8 mm was placed and suspended in this carrier gas. Thereafter, the whole was heated to 800°C using an electric furnace surrounding the quartz reaction tube. Benzene vapor was mixed outside the reaction tube into the carrier gas flowing into the reaction tube from the central spout and suspending the quartz spheres, and introduced into the reaction tube. After 1 hour, the mixing of benzene vapor was stopped, and after another 5 minutes, the electric furnace was turned off and the reaction tube was returned to room temperature. The electric furnace was a split type, and the inside could be observed, but the small balls with a carbon coating were collected in a tray at the bottom. A very dense and uniform carbon film was formed.
実施例２
内径５０ｍｍの石英管を縦方向に設置して下部から２１
／ｍｉｎの窒素ガスを流した。この中心軸上にキャリア
ガス噴出口を設け１１／ｍｉｎの窒素ガスを上方に向け
て噴出させた。このキャリアガス中に直径１．８ｍｍの
石英ガラス球を入れて浮遊させた。ガラス球には０．５
ｍｍの凹みを２箇所設けた。しかるのちに、石英反応管
を取り囲む電気炉によって全体を８００°Ｃに加熱した
。中心の噴出口から反応管に流入し石英球を浮遊させて
いるキャリアガス中に反応管外部においてトリメチルア
ルシン蒸気を混入させ反応管に導入せしめた。１時間経
過後トリメチルアルシン蒸気の混入を停止し、さらに５
分間経過後電気炉の電源をオフして反応管を室温に戻し
た。電気炉は割り型であり内部が観察できるが、カーボ
ン被膜が形成された小球を下部の受は皿に回収した。Example 2 A quartz tube with an inner diameter of 50 mm was installed vertically and 21
/min nitrogen gas was flowed. A carrier gas jetting port was provided on the central axis to jet nitrogen gas upward at a rate of 11/min. A quartz glass sphere with a diameter of 1.8 mm was placed and suspended in this carrier gas. 0.5 for glass bulb
Two mm recesses were provided. Thereafter, the whole was heated to 800°C using an electric furnace surrounding the quartz reaction tube. Trimethylarsine vapor was mixed outside the reaction tube into the carrier gas flowing into the reaction tube from the central spout and suspending the quartz spheres, and introduced into the reaction tube. After 1 hour, the mixing of trimethylarsine vapor was stopped, and
After a few minutes had elapsed, the electric furnace was turned off and the reaction tube was returned to room temperature. The electric furnace was a split type and the inside could be observed, but the small balls with a carbon coating were collected in a tray at the bottom.
非常に緻密で密着性および均一性が良い被膜が形成され
ていた。しかも、凹み部にも均一なカーボン被膜が形成
された。A very dense film with good adhesion and uniformity was formed. Furthermore, a uniform carbon film was formed even in the recessed portions.
（発明の効果）
以上のように、本発明によれば、小物体への均一なカー
ボン被膜形成が容易に可能となり、産業およびこれを支
える基礎科学の分野まで貢献するところ大であることが
了解されよう。(Effects of the Invention) As described above, it is understood that according to the present invention, it is possible to easily form a uniform carbon film on small objects, and it will greatly contribute to industry and the basic science field that supports it. It will be.
Claims (1)
体を含む該環境を所定の温度に加熱して、上記ガス流中
にカーボン膜形成原料を添加して小物体にカーボン被膜
を形成することを特徴とする小物体へのカーボン被膜形
成方法。A small object is suspended in a gas flow that does not react with the small object, the environment containing the small object is heated to a predetermined temperature, and a carbon film forming raw material is added to the gas flow to form a carbon film on the small object. A method for forming a carbon film on a small object, characterized by:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1006339A JPH02188448A (en) | 1989-01-13 | 1989-01-13 | Formation of carbon coating film on small body |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1006339A JPH02188448A (en) | 1989-01-13 | 1989-01-13 | Formation of carbon coating film on small body |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02188448A true JPH02188448A (en) | 1990-07-24 |
Family
ID=11635608
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1006339A Pending JPH02188448A (en) | 1989-01-13 | 1989-01-13 | Formation of carbon coating film on small body |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02188448A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5378527A (en) * | 1991-02-15 | 1995-01-03 | Toyota Jidosha Kabushiki Kaisha | Carbon film coated glass |
-
1989
- 1989-01-13 JP JP1006339A patent/JPH02188448A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5378527A (en) * | 1991-02-15 | 1995-01-03 | Toyota Jidosha Kabushiki Kaisha | Carbon film coated glass |
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