JPH02188446A - Formation of carbon coating film on quartz glass globe - Google Patents
Formation of carbon coating film on quartz glass globeInfo
- Publication number
- JPH02188446A JPH02188446A JP1006337A JP633789A JPH02188446A JP H02188446 A JPH02188446 A JP H02188446A JP 1006337 A JP1006337 A JP 1006337A JP 633789 A JP633789 A JP 633789A JP H02188446 A JPH02188446 A JP H02188446A
- Authority
- JP
- Japan
- Prior art keywords
- quartz glass
- carbon film
- globe
- flow
- glass bulb
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 title claims abstract description 41
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 title claims abstract description 34
- 229910052799 carbon Inorganic materials 0.000 title claims abstract description 34
- 238000000576 coating method Methods 0.000 title abstract description 8
- 239000011248 coating agent Substances 0.000 title abstract description 7
- 230000015572 biosynthetic process Effects 0.000 title description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims abstract description 13
- 239000007789 gas Substances 0.000 claims abstract description 10
- 238000000034 method Methods 0.000 claims description 7
- 239000002994 raw material Substances 0.000 claims description 2
- UHOVQNZJYSORNB-UHFFFAOYSA-N Benzene Chemical compound C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 abstract description 9
- 229910052739 hydrogen Inorganic materials 0.000 abstract 5
- 239000001257 hydrogen Substances 0.000 abstract 5
- 239000007858 starting material Substances 0.000 abstract 2
- 238000010438 heat treatment Methods 0.000 abstract 1
- 238000006243 chemical reaction Methods 0.000 description 11
- 239000010453 quartz Substances 0.000 description 11
- 239000012159 carrier gas Substances 0.000 description 6
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- 229910001873 dinitrogen Inorganic materials 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- HTDIUWINAKAPER-UHFFFAOYSA-N trimethylarsine Chemical compound C[As](C)C HTDIUWINAKAPER-UHFFFAOYSA-N 0.000 description 4
- 239000000700 radioactive tracer Substances 0.000 description 3
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000011810 insulating material Substances 0.000 description 2
- 230000000903 blocking effect Effects 0.000 description 1
- 150000001721 carbon Chemical class 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 229910001385 heavy metal Inorganic materials 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 239000012495 reaction gas Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 238000005979 thermal decomposition reaction Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/22—Surface treatment of glass, not in the form of fibres or filaments, by coating with other inorganic material
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2217/00—Coatings on glass
- C03C2217/20—Materials for coating a single layer on glass
- C03C2217/28—Other inorganic materials
- C03C2217/282—Carbides, silicides
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2218/00—Methods for coating glass
- C03C2218/10—Deposition methods
- C03C2218/15—Deposition methods from the vapour phase
- C03C2218/152—Deposition methods from the vapour phase by cvd
Landscapes
- Chemical & Material Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Surface Treatment Of Glass (AREA)
- Carbon And Carbon Compounds (AREA)
Abstract
Description
【発明の詳細な説明】
（産業上の利用分野）
本発明はカーボン被膜の形成方法に係わるものであり、
特に石英ガラス球への均一かつ付着性の良好なカーボン
被膜形成方法に関するものである。[Detailed Description of the Invention] (Industrial Application Field) The present invention relates to a method of forming a carbon film,
In particular, the present invention relates to a method for forming a carbon film that is uniform and has good adhesion to a quartz glass bulb.
（従来の技術）
被膜形成技術は、材料の外部環境からの保護、材料から
外部環境への影響の遮断、材料表面の性質の改質等の用
途に広〈産業界に利用されている。本発明の係わるカー
ボン被膜形成技術も以上に挙げられた用途の例外ではな
い。例えば、石英管内壁にカーボンの被膜をコーティン
グして、成形が容易な石英ガラスを石英との反応性の高
い反応ガスを用いるプロセスの反応管として利用するこ
とを可能にしている。あるいは、絶縁性の材料の表面に
カーボンの被膜を形成して絶縁性材料の帯電を防止した
り表面を導電性に改質したりすることができる。(Prior Art) Film forming technology is widely used in industry for purposes such as protecting materials from the external environment, blocking the effects of materials on the external environment, and modifying the properties of material surfaces. The carbon film forming technology to which the present invention relates is also no exception to the above-mentioned applications. For example, by coating the inner wall of a quartz tube with a carbon film, it is possible to use easily moldable quartz glass as a reaction tube in a process that uses a reaction gas that is highly reactive with quartz. Alternatively, a carbon film can be formed on the surface of an insulating material to prevent the insulating material from being charged or to modify the surface to be conductive.
このようなカーボン被膜を石英ガラス球の表面に形成す
る目的は、例えば、石英ガラス球の表面を腐食性の外部
環境から保護することにある。あるいは、このカーボン
被膜の密着性が良好であれば、小物体同士が擦れ合うと
きの潤滑性を向上させることができる。実例として、最
近の基礎化学分野での研究ツールとしてのトレーサ小体
を挙げることができる。例えば、このトレーサ小体は、
重金属を内部に包み込んだ石英製の小球であるが、これ
によってトレーサの密度およびＸ線透過能を調整してい
る。トレーサは激しく腐食性の環境で用いられることが
あり、また周囲との同化（融体中のトレーサでは濡れ性
）が良いことが求められ、石英ガラス球にカーボンの被
膜を形成すると効果があることがある。The purpose of forming such a carbon film on the surface of a quartz glass bulb is, for example, to protect the surface of the quartz glass bulb from a corrosive external environment. Alternatively, if the adhesion of this carbon film is good, it is possible to improve the lubricity when small objects rub against each other. An example of this is the recent use of tracer bodies as research tools in the field of basic chemistry. For example, this tracer body is
It is a small sphere made of quartz that contains heavy metals, which adjusts the density of the tracer and the ability to transmit X-rays. Tracers are sometimes used in highly corrosive environments, and require good assimilation with the surroundings (wettability for tracers in molten liquid), and forming a carbon film on a quartz glass bulb is effective. There is.
石英製小球表面へのカーボン被膜形成は、−役向には、
溶剤に分散されたグラファイト微粉末を丁寧に表面に擦
りつけて乾燥あるいはさらに焼成している。しかしなが
ら、このようなカーボン被膜形成方法では、第一に被膜
の均一性に問題があり膜にかかるストレスを原因として
亀裂が入る恐れがある。第二に乾燥の過程でも膜に亀裂
が入り易い。第三には、表面に突部あるいは谷部のある
小物体、すなわち球体以外の小物体への均一な被膜形成
は不可能なことである。さらに、カーボン被膜が剥離し
がちであることも問題であった。The formation of a carbon film on the surface of quartz globules has the following functions:
Fine graphite powder dispersed in a solvent is carefully rubbed onto the surface and then dried or further fired. However, in such a method of forming a carbon film, firstly, there is a problem in the uniformity of the film, and there is a risk that cracks may occur due to the stress applied to the film. Second, the film tends to crack during the drying process. Thirdly, it is impossible to uniformly form a coating on small objects having protrusions or valleys on the surface, that is, small objects other than spheres. Another problem was that the carbon film was prone to peeling off.
本発明の目的はこの点に鑑み石英ガラス球への均一かつ
付着性の良好なカーボン被膜形成技術を提供することに
ある。In view of this point, an object of the present invention is to provide a technique for forming a carbon film that is uniform and has good adhesion to a quartz glass bulb.
（問題を解決するための手段）
本発明は、石英ガラス球をガス流中に浮遊させて石英ガ
ラス球を含む該環境を所定の温度に加熱して、上記ガス
流中に水素ガスを加え、しかるのちに水素ガスを加えた
ままあるいは水素ガスを除外してカーボン膜形成原料を
添加して、石英ガラス球にカーボン被膜を形成すること
を特徴とする石英ガラス球へのカーボン被膜形成方法で
ある。(Means for solving the problem) The present invention suspends a quartz glass bulb in a gas flow, heats the environment containing the quartz glass bulb to a predetermined temperature, and adds hydrogen gas to the gas flow, This is a method for forming a carbon film on a quartz glass bulb, which is characterized in that a carbon film forming material is then added with or without hydrogen gas added thereto to form a carbon film on the quartz glass bulb. .
（作用）
従来の塗布法では石英ガラス球を保持するのに必ず石英
ガラス球を何らかの保持体に接触させなければならなか
った。ところが、本発明によれば石英ガラス球はガス流
中に浮遊するので保持体は不要であり、しかも、石英ガ
ラス球はガス流中で高速の回転運動をおこなうことにな
るので、ガス流中のカーボン原料物質が熱分解して形成
されるカーボン被膜の均一性は理想的なものとなる。さ
らに、本発明のカーボン被膜形成前水素ガス処理によっ
て、石英球表面の還元されたシリコンとカーボン被膜の
カーボンが化学結合性の付着力を生じることが十分に期
待でき、付着力が強く剥離し難いカーボン被膜が形成さ
れることになるのであ・る。(Function) In the conventional coating method, in order to hold the quartz glass bulb, it was necessary to bring the quartz glass bulb into contact with some kind of holder. However, according to the present invention, the quartz glass bulb floats in the gas flow, so a holder is not necessary.Furthermore, the quartz glass bulb rotates at high speed in the gas flow, so the quartz glass bulb floats in the gas flow. The uniformity of the carbon film formed by thermal decomposition of the carbon raw material is ideal. Furthermore, it can be fully expected that by the hydrogen gas treatment before forming the carbon film of the present invention, the reduced silicon on the surface of the quartz sphere and the carbon of the carbon film will create a chemically bonded adhesive force, and the adhesive force is strong and difficult to peel off. A carbon film will be formed.
（実施例）
実施例１
内径５０ｍｍの石英管を縦方向に設置して下部から２１
／ｍｉｎの窒素ガスを流した。この中心軸上にキャリア
ガス噴出口を設け１１／ｍｉｎの窒素ガスを上方に向け
て噴出させた。このキャリアガス中に直径１．８ｍｍの
石英ガラス球を入れて浮遊させた。しかるのちに、石英
反応管を取り囲む電気炉によって全体を１０００°Ｃに
加熱した。中心の噴出口から反応管に流入し石英球を浮
遊させているキャリアガス中に反応管外部において水素
ガスを混入させた。その後、ベンゼン蒸気を混入させ反
応管に導入せしめた。１時間経過後ベンゼン蒸気の混入
を停止し、さらに５分間経過後電気炉の電源をオフして
反応管を室温に戻した。電気炉は割り型であり内部が観
察できるが、カーボン被膜が形成された小球を下部の受
は皿に回収した。非常に緻密で均一性が良く剥離し難い
カーボン被膜が形成されていた。(Example) Example 1 A quartz tube with an inner diameter of 50 mm was installed vertically and
/min nitrogen gas was flowed. A carrier gas jetting port was provided on the central axis to jet nitrogen gas upward at a rate of 11/min. A quartz glass sphere with a diameter of 1.8 mm was placed and suspended in this carrier gas. Thereafter, the whole was heated to 1000°C using an electric furnace surrounding the quartz reaction tube. Hydrogen gas was mixed outside the reaction tube into the carrier gas that flowed into the reaction tube from the central spout and suspended the quartz spheres. Thereafter, benzene vapor was mixed and introduced into the reaction tube. After one hour, the addition of benzene vapor was stopped, and after another five minutes, the electric furnace was turned off and the reaction tube was returned to room temperature. The electric furnace was a split type, so the inside could be observed, and the small balls with a carbon coating were collected in a tray at the bottom. A carbon film was formed that was extremely dense, had good uniformity, and was difficult to peel off.
実施例２
内径５０ｍｍの石英管を縦方向に設置して下部から２１
／ｍｉｎの窒素ガスを流した。この中心軸上にキャリア
ガス噴出口を設け１１／ｍｉｎの窒素ガスを上方に向け
て噴出させた。このキャリアガス中に直径１．８ｍｍの
石英ガラス球を入れて浮遊させた。ガラス球には０．５
ｍｍの凹みを２箇所設けた。しかるのちに、石英反応管
を取り囲む電気炉によって全体を１０００°Ｃに加熱し
た。中心の噴出口から反応管に流入し石英球を浮遊させ
ているキャリアガス中に反応管外部において水素ガスを
混入せしめた。その後、トリメチルアルシン蒸気を混入
させ反応管に導入せしめた。−時間経過後トリメチルア
ルシン蒸気の混入を停止し、さらに５分間経過後電気炉
の電源をオフして反応管を室温に戻した。電気炉は割り
型であり内部が観察できるが、カーボン被膜が形成され
た小球を下部の受は皿に回収した。非常に緻密で密着性
および均一性が良い被膜が形成されていた。しかも、凹
み部にも均一なカーボン被膜が形成された。Example 2 A quartz tube with an inner diameter of 50 mm was installed vertically and 21
/min nitrogen gas was flowed. A carrier gas jetting port was provided on the central axis to jet nitrogen gas upward at a rate of 11/min. A quartz glass sphere with a diameter of 1.8 mm was placed and suspended in this carrier gas. 0.5 for glass bulb
Two mm recesses were provided. Thereafter, the whole was heated to 1000°C using an electric furnace surrounding the quartz reaction tube. Hydrogen gas was mixed outside the reaction tube into the carrier gas that flowed into the reaction tube from the central spout and suspended the quartz spheres. Thereafter, trimethylarsine vapor was mixed and introduced into the reaction tube. - After the lapse of time, the mixing of trimethylarsine vapor was stopped, and after another 5 minutes, the power to the electric furnace was turned off and the reaction tube was returned to room temperature. The electric furnace was a split type and the inside could be observed, but the small balls with a carbon coating were collected in a tray at the bottom. A very dense film with good adhesion and uniformity was formed. Furthermore, a uniform carbon film was formed even in the recessed portions.
（発明の効果）
以上のように、本発明によれば、石英ガラス球への均一
かつ付着性の良好なカーボン被膜形成が容易に可能とな
り、産業およびこれを支える基礎科学の分野まで貢献す
るところ大であることが了解されよう。(Effects of the Invention) As described above, according to the present invention, it is possible to easily form a carbon film that is uniform and has good adhesion on a quartz glass bulb, and contributes to the field of industry and the basic science that supports it. It is understood that it is large.
Claims (1)
させて石英ガラス球を含む該環境を所定の温度に加熱し
て、上記ガス流中に水素ガスを加え、しかるのちに水素
ガスを加えたままあるいは水素ガスを除外して前記ガス
流中にカーボン膜形成原料を添加して、石英ガラス球に
カーボン被膜を形成することを特徴とする石英ガラス球
へのカーボン被膜形成方法。The quartz glass bulb was suspended in a gas flow that did not react with the quartz glass, the environment containing the quartz glass bulb was heated to a predetermined temperature, hydrogen gas was added to the gas flow, and then the hydrogen gas was added. 1. A method for forming a carbon film on a quartz glass bulb, which comprises adding a carbon film forming raw material to the gas stream as it is or excluding hydrogen gas to form a carbon film on the quartz glass bulb.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1006337A JPH02188446A (en) | 1989-01-13 | 1989-01-13 | Formation of carbon coating film on quartz glass globe |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1006337A JPH02188446A (en) | 1989-01-13 | 1989-01-13 | Formation of carbon coating film on quartz glass globe |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02188446A true JPH02188446A (en) | 1990-07-24 |
Family
ID=11635551
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1006337A Pending JPH02188446A (en) | 1989-01-13 | 1989-01-13 | Formation of carbon coating film on quartz glass globe |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02188446A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5378527A (en) * | 1991-02-15 | 1995-01-03 | Toyota Jidosha Kabushiki Kaisha | Carbon film coated glass |
-
1989
- 1989-01-13 JP JP1006337A patent/JPH02188446A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5378527A (en) * | 1991-02-15 | 1995-01-03 | Toyota Jidosha Kabushiki Kaisha | Carbon film coated glass |
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