JPH02187356A - Discharge port plate for ink jet recording head, manufacture thereof, and ink jet recording head with same plate - Google Patents

Discharge port plate for ink jet recording head, manufacture thereof, and ink jet recording head with same plate

Info

Publication number
JPH02187356A
JPH02187356A JP747089A JP747089A JPH02187356A JP H02187356 A JPH02187356 A JP H02187356A JP 747089 A JP747089 A JP 747089A JP 747089 A JP747089 A JP 747089A JP H02187356 A JPH02187356 A JP H02187356A
Authority
JP
Japan
Prior art keywords
recording head
plate
discharge port
coating layer
forming
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP747089A
Other languages
Japanese (ja)
Other versions
JP2831368B2 (en
Inventor
Toshio Kashino
俊雄 樫野
Akio Saito
昭男 斉藤
Kazuaki Masuda
益田 和明
Takashi Watanabe
隆 渡辺
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=11666682&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=JPH02187356(A) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP1007470A priority Critical patent/JP2831368B2/en
Priority to DE1989618663 priority patent/DE68918663T2/en
Priority to EP19890311199 priority patent/EP0367541B1/en
Priority to ES99200740T priority patent/ES2207908T3/en
Priority to ES89311199T priority patent/ES2060789T3/en
Priority to DE1989629489 priority patent/DE68929489T2/en
Priority to EP94200483A priority patent/EP0602021A2/en
Priority to EP99200740A priority patent/EP0937579B1/en
Publication of JPH02187356A publication Critical patent/JPH02187356A/en
Priority to US07/752,909 priority patent/US5208604A/en
Priority to US08/741,529 priority patent/US5682187A/en
Publication of JP2831368B2 publication Critical patent/JP2831368B2/en
Application granted granted Critical
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Abstract

PURPOSE:To perform a mass production with high yield by providing a liquid repellency coating layer on the upper surface of a plate member formed with a discharge port and an adhesive layer on the lower surface. CONSTITUTION:A discharge port plate is formed with a liquid repellency coating layer and an adhesive layer on a plate member of a state that a through hole for forming a discharge port is not provided. Thus, it can be formed by a method which does not require a specially advanced technique required in case of forming these layers after the through hole is formed with high yield and operability. After the liquid repellency coating layer is formed, the through hole for forming the discharge port is opened. Thus, a material for forming the liquid repellency coating layer is not invaded into the through hole, and the surface of the discharge port plate to become an outer wall in case of adhering to a recording head is easily coated uniformly with the material for forming the water repellency coating layer to obtain a desirable ink discharging state. The liquid repellency coating layer 3 may be a layer which has sufficient adhesive properties to a plate member 2 to repel aqueous ink used for recording and has repellency of the degree in which ink is adhered to the surface and not retained in a liquid manner.

Description

【発明の詳細な説明】 [産業上の利用分野] 本発明は、インクジェット記録ヘットの構成に用いる吐
出「1プレート及びその製造方法、並びに該吐出口プレ
ートを有するインクジェット記録ヘッドに関する。
DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to an ejection plate used in the construction of an inkjet recording head, a method for manufacturing the same, and an inkjet recording head having the ejection port plate.

[従来の技術] 吐出口プレートを利用したインクジェット記録ヘッドと
しては、例えば第2図(A)〜(C)及び第3図(A)
、(B)に示す構成のものが知られている。
[Prior Art] Examples of inkjet recording heads using ejection port plates include those shown in FIGS. 2(A) to (C) and FIG. 3(A).
, (B) are known.

第2図に示された構成の記録ヘッドは、第2図(A)に
示す発熱素子、圧電素子等のインク吐出エネルギー発生
体6か配置されたガラス等からなる基板5上に、第2図
(B)に示しように、例えば感光性樹脂の硬化膜等から
なるインク流路壁7及び液室等を構成する外枠8を設け
た後、インク供給孔9を有するインク通路の覆い11を
これに接合し、更に得られた接合体(記録ヘッド本体部
分)の流路下流部をC−C線に沿って切断して流路長を
調整してから、該切断しより形成された流路開目端面に
第2図(C)に示すように吐出口を形成するための貫通
孔を有する吐出口プレート12を所定の位置関係で接合
して得られる構成を有する。
The recording head having the configuration shown in FIG. 2 is mounted on a substrate 5 made of glass or the like on which an ink ejection energy generator 6 such as a heating element or a piezoelectric element shown in FIG. 2(A) is disposed. As shown in (B), after providing the ink flow path wall 7 made of a cured film of photosensitive resin or the like and the outer frame 8 constituting the liquid chamber, etc., the cover 11 of the ink path having the ink supply hole 9 is installed. The downstream part of the flow path of the obtained bonded body (recording head main body part) is cut along the C-C line to adjust the flow path length, and then the flow path formed by the cutting is It has a configuration obtained by joining a discharge port plate 12 having a through hole for forming a discharge port in a predetermined positional relationship to the end surface of the channel opening, as shown in FIG. 2(C).

また、第3図の構成の記録ヘッドは、第3図(A)に示
す発熱素子、圧電素子等のインク吐出エネルギー発生体
6が配置されたガラス等からなる基板5上に、第3図(
B)に示しように、例えば感光性樹脂の硬化膜等からな
るインク流路壁7及び外枠8を設けた記録ヘッド本体部
分を形成後、そのL部に吐出口プレート12を所定の位
置関係で接合して得られる構成を有する。
Further, the recording head having the configuration shown in FIG. 3 is arranged on a substrate 5 made of glass or the like on which an ink ejection energy generating body 6 such as a heating element or a piezoelectric element shown in FIG. 3(A) is disposed.
As shown in B), after forming the recording head main body portion including the ink flow path wall 7 and the outer frame 8 made of a cured film of photosensitive resin, for example, the ejection port plate 12 is placed in a predetermined positional relationship at the L portion thereof. It has a configuration obtained by joining.

[発明が解決しようとする課題] 上述したような構成のインクジェット記録ヘッドの構成
に用いる吐出口プレートの構成やインクに対する特性は
、インクの吐出方向や吐出インク液的9等のインクジェ
ット記録ヘッドの記録特性に与える影習が大きく、従来
より吐出口プレートの形成に用いる材料やその構造につ
いて種々の検討がなされてきた。
[Problems to be Solved by the Invention] The configuration of the ejection port plate used in the configuration of the inkjet recording head having the above-mentioned configuration and the characteristics with respect to the ink are related to the recording of the inkjet recording head, such as the ink ejection direction and the ejected ink liquid level 9. Since this has a large effect on the characteristics, various studies have been made regarding the materials used to form the discharge port plate and its structure.

従来技術における吐出口プレートの特性に関して改善さ
れるべき問題としては、例えば以下のような問題が挙げ
られる。
Problems that should be improved regarding the characteristics of the discharge port plate in the prior art include, for example, the following problems.

a)吐出口プレートと記録ヘッド本体部分との接合に際
して、本体部分側の接合面に接着剤を塗布する必要があ
るが、その際本体部分側の接合面に均一に接着剤を効率
良く、かつ作業性良く塗布することが困難であり、しか
も流路部内への接着剤のまわり込みが生じ易く、製造歩
留りが低く、量産性に乏しい。
a) When joining the ejection port plate and the recording head main body part, it is necessary to apply adhesive to the joint surface on the main body part side. It is difficult to apply the adhesive with good workability, and moreover, the adhesive tends to leak into the flow path, resulting in a low manufacturing yield and poor mass productivity.

更に。流路内へ接着剤が流入しないように接着剤の塗布
を行なうと、流路周辺部への接着剤の部分に供給できな
い場合が多く、その状態で吐出口プレートとの接合を行
なうと、吐出口プレートと本体部分との間に隙間が生じ
、そこにインクが溜フて安定なインク吐出を阻害する原
因となり易い。
Furthermore. If adhesive is applied to prevent the adhesive from flowing into the flow path, it will often not be possible to supply the adhesive to the area around the flow path, and if the adhesive is connected to the discharge port plate in this state, the A gap is created between the outlet plate and the main body portion, and ink tends to accumulate there, which may impede stable ink ejection.

b)記録ヘッドに接合された際の外壁面となる吐出l」
プレートの面(インクが吐出される側の面、以後「吐出
口面」という)に、良好なインク吐出状態を得るために
澄液性(#11インク性)被覆層を設ける場合、核部へ
の溌液性被覆層形成用材料の均一な塗布が困難であり、
かつ親インク性であることが要求される吐出口内面への
溌液性被覆層形成用材料のまわり込みを抑えることが困
難であり、製造歩留りが低く量産性に乏しい。
b) Discharge l that becomes the outer wall surface when joined to the recording head
When a clear liquid (#11 ink property) coating layer is provided on the surface of the plate (the surface on which ink is ejected, hereinafter referred to as the "ejection port surface") in order to obtain a good ink ejection condition, it is necessary to It is difficult to uniformly apply the liquid-repellent coating layer forming material,
In addition, it is difficult to prevent the liquid-repellent coating layer forming material from entering the inner surface of the ejection port, which is required to be ink-philic, resulting in low manufacturing yields and poor mass productivity.

本発明は上述のような吐出口プレートを用いた記録ヘッ
ドにおける問題点に鑑みなされたものであり、吐出口面
のみに撥液性被覆層が設けられ、かつインクジェット記
録ヘッド本体部分との良好な接合操作を簡単に行なうた
めの接着層を該吐出口面に対する裏面に有し、歩留り良
く量産できる構成の吐出口プレートを提供することをそ
の目的とする。
The present invention was made in view of the problems with recording heads using ejection orifice plates as described above, and includes a liquid-repellent coating layer provided only on the ejection orifice surface and a good connection with the main body of the inkjet recording head. It is an object of the present invention to provide a discharge port plate having an adhesive layer on the back side of the discharge port surface for easy bonding, and which can be mass-produced with high yield.

本発明の他の目的は、該吐出口プレートを有するインク
ジェット記録ヘッドを提供することにある。
Another object of the present invention is to provide an inkjet recording head having the ejection port plate.

[課題を解決するための手段] 本発明の吐出口プレートは、板部材と、該板部材上面に
設けられた撥液性被覆層と、該板部材下面に設けられた
接着剤層と、インクジェット記録ヘッドの吐出口を形成
するための貫通孔とを有して構成される。この吐出口プ
レートは、板部材上面に溌液性被覆層を設ける過程と、
該板部材下面に接着剤層を設ける過程と、これらの層が
設けられた板部材にインクジェット記録ヘッドの吐出口
を形成するための貫通孔を穿孔する過程とを含む方法に
より形成できる。
[Means for Solving the Problems] The ejection port plate of the present invention includes a plate member, a liquid-repellent coating layer provided on the upper surface of the plate member, an adhesive layer provided on the lower surface of the plate member, and an inkjet The through hole is configured to have a through hole for forming an ejection port of the recording head. This discharge port plate includes the steps of providing a liquid-repellent coating layer on the top surface of the plate member;
It can be formed by a method including a step of providing an adhesive layer on the lower surface of the plate member, and a step of drilling through holes for forming ejection ports of the inkjet recording head in the plate member provided with these layers.

史に、吐出口の構成に該吐出口プレートを用いて、本発
明のインクジェット記録ヘッドを得ることができる。
Historically, the inkjet recording head of the present invention can be obtained by using the ejection port plate in the ejection port configuration.

本発明の吐出口プレートは、吐出口を形成するための貫
通孔が設けられていない状態の板部材に撥液性被覆層及
び接着剤層が形成されるので、貫通孔形成後にこれらの
層を形成する際に要求される特別高度な技術を要しない
方法によって歩留り良く、かつ作業性良く形成できる。
In the discharge port plate of the present invention, the liquid-repellent coating layer and the adhesive layer are formed on the plate member without through holes for forming the discharge ports, so these layers are removed after the through holes are formed. It can be formed with high yield and good workability by a method that does not require particularly advanced technology.

しかも、撥液性被覆層形成後に吐出口を形成する貫通孔
が穿孔されるので、該貫通孔内への撥液性被覆層形成用
材料の侵入がなく、ト述したような従来技術における問
題点b)の発生を避けることができる。
Moreover, since the through-holes forming the discharge ports are drilled after the formation of the liquid-repellent coating layer, the material for forming the liquid-repellent coating layer does not enter into the through-holes, which eliminates the problem in the prior art as described above. The occurrence of point b) can be avoided.

しかも、本発明によって得られた吐出口プレートには、
記録ヘッド本体部分との接合用の接着剤層が既に設けら
れているので、該接着剤層を利用して、記録ヘッド本体
部分へ吐出口プレートを簡単に接合できる。その際、記
録ヘッド本体部分の接合面に接着剤を塗布する必要がな
く、かつ吐出口開[1縁部まで接着剤層が形成されてい
るので、前述したような接着剤に係る上述の従来技術に
おける問題点a)が生じることがない。
Moreover, the discharge port plate obtained by the present invention has
Since the adhesive layer for bonding to the recording head main body portion is already provided, the ejection port plate can be easily bonded to the recording head main body portion using the adhesive layer. At that time, there is no need to apply adhesive to the bonding surface of the recording head main body, and since the adhesive layer is formed up to the edge of the discharge port opening, it is not necessary to apply adhesive to the bonding surface of the recording head main body. Technical problem a) does not occur.

以下、本発明の一例について詳細に説明する。An example of the present invention will be described in detail below.

本発明の方法においては、まず第1図(B)に示すよう
に吐出口プレートを構成し得る板部材2の一方の面に撥
液性(溌インク性)被覆層3及び接着剤層4を設ける。
In the method of the present invention, first, as shown in FIG. 1(B), a liquid-repellent (ink-repellent) coating layer 3 and an adhesive layer 4 are coated on one surface of a plate member 2 that can constitute a discharge port plate. establish.

板部材2としては、樹脂、金属等からなるものが利用で
きる。
The plate member 2 may be made of resin, metal, or the like.

なお、接着剤層4に熱硬化性樹脂を用いる場合における
板部材に用いる樹脂としては、接着剤層4の熱硬化時に
変形等を生じない耐熱性の高い樹脂を用いるのが好まし
く、例えば、ポリイミド、ポリエーテルサルフオン、ポ
リサルフオン、ポリエステル、アクリル樹脂、フェノー
ル樹脂、エリア樹脂、メラミン樹脂、エポキシ樹脂、シ
リコン樹脂等を用いることができる。
In addition, in the case where a thermosetting resin is used for the adhesive layer 4, it is preferable to use a resin with high heat resistance that does not cause deformation when the adhesive layer 4 is thermoset, such as polyimide. , polyether sulfon, polysulfon, polyester, acrylic resin, phenol resin, area resin, melamine resin, epoxy resin, silicone resin, etc. can be used.

また、樹脂製板部材は、樹脂に種々の添加剤や充填剤が
付加されて強度や他の特性が改善されたものであっても
良い。
Further, the resin plate member may be one in which various additives and fillers are added to the resin to improve strength and other properties.

板部材として金属製のものを用いる場合には、例えば、
ステンレス、ニッケル、金、銀、白金などからなる板部
材が利用できる。
When using a metal plate member, for example,
Plate members made of stainless steel, nickel, gold, silver, platinum, etc. can be used.

なお、該板部材は、後述の吐出口を形成するための貫通
孔の形成時にパリや残渣をインク吐出に悪影響が出ない
程度まで抑える、あるいは作業性良く連続穿孔を行なう
ためにはその厚みが薄い方が都合が良が、強度との兼ね
合いから例えば5〜100μmの範囲の厚みを有してし
るものが望ましい 撥液性被覆層3は、板部材2との十分な接着特性を有し
、かつ記録に用いられる水性インクをはじきその表面に
インクか付着して液的として残留しない程度の撥液性を
有する層であればどのような材料から形成しても良く、
例えば通常の撥液処理剤として知られている材料から適
宜選択して形成することができる。また、その形成に際
しては吐出[1面での良好な撥液性か得られるように層
厚やその形成条件等を適宜設定すれば良い。
In addition, the thickness of the plate member is required to suppress particles and residue to a level that does not adversely affect ink ejection when forming through holes for forming ejection ports (described later), or to perform continuous perforation with good workability. The liquid repellent coating layer 3 preferably has a thickness in the range of 5 to 100 μm, for example, from the viewpoint of strength, although it is convenient to be thin.The liquid repellent coating layer 3 has sufficient adhesive properties with the plate member 2. The layer may be formed from any material as long as it repels water-based ink used for recording and has a liquid repellency to the extent that the ink does not adhere to the surface and remain as a liquid.
For example, the material can be appropriately selected from materials known as ordinary liquid repellent agents. In addition, when forming the layer, the layer thickness and forming conditions may be appropriately set so as to obtain good liquid repellency on one surface.

また、接着剤層4は、吐出口プレートと記録ヘッド本体
部分との良好な接合状態が得られるものを適宜選択して
用いれば良く、例えば100℃〜120℃、30〜60
分の条件での加熱処理処理によりBステージ化したエポ
キシ系接着剤、等が利用でき、例えば1〜5μm程度の
層厚に設けることができる。
Further, the adhesive layer 4 may be appropriately selected and used so as to provide a good bonding state between the ejection port plate and the main body of the recording head.
An epoxy adhesive that has been made into a B stage by heat treatment under conditions of 100 to 200 m can be used, and can be provided to a layer thickness of about 1 to 5 μm, for example.

撥液性被覆層3及び接着層4の形成には、例えば、浸漬
性、塗布法、印刷法、スプレー法、予め形成した撥液性
被覆層や接着層を所定部分に転写する方法などの方法か
利用できる。
The liquid-repellent coating layer 3 and adhesive layer 4 can be formed using methods such as dipping, coating, printing, spraying, and transferring a pre-formed liquid-repellent coating layer or adhesive layer to a predetermined portion. Or available.

次に、以北のようにして撥液性被覆層3及び接着剤層4
か設けられた板部材2の所定部に貫通孔1をあけて吐出
口プレートを形成する。
Next, from the north, the liquid repellent coating layer 3 and the adhesive layer 4 are
A through-hole 1 is formed in a predetermined portion of the plate member 2 provided in the above-described manner to form a discharge port plate.

vI通孔1の形成には、プレス加工法、電子ビーム加工
法、レーザービーム加工法、液体ジェット加工法等が利
用できる。なお、を記の構成の板部材2とこれらの方法
を組み合せることにより、高精度の穿孔加工が高速かつ
簡便に行なえる。
For forming the vI through hole 1, a press processing method, an electron beam processing method, a laser beam processing method, a liquid jet processing method, etc. can be used. By combining these methods with the plate member 2 having the configuration described above, highly accurate drilling can be performed quickly and easily.

以上のようにして形成された吐出口プレートを例えばB
ステージ化接着剤層4を介して、例えば第2図及び第3
図に示す構成の流路壁等が基板トに設けられた記録ヘッ
ド本体部分の所定部に位置決めして爪ね合せて仮接合を
行なった後、150〜200℃の条件で30〜120分
間加熱処理して、Bステージ化接着剤層4を完全硬化さ
せてこれらを接合して、本発明の記録ヘッドを得ること
ができる。
For example, the discharge port plate formed as described above is
2 and 3 via the staging adhesive layer 4.
After positioning the flow path walls and the like having the structure shown in the figure at a predetermined part of the recording head body provided on the substrate and twisting the nails together to perform temporary bonding, heat at 150 to 200°C for 30 to 120 minutes. The recording head of the present invention can be obtained by processing to completely cure the B-staged adhesive layer 4 and bonding them together.

[実施例] 以下、実施例及び比較例により本発明を更に詳細に説明
する。
[Examples] Hereinafter, the present invention will be explained in more detail with reference to Examples and Comparative Examples.

実施例1 30μ厚のポリイミドフィルム(板材)の一方の面に以
Fの各成分を混合したエポキシ系接着剤を下記の各種条
件でスピンコード法によりそれぞれ塗布し、更に 10
0℃〜120℃、30〜60分の条件での加熱処理を行
ない、乾燥・固化させてBステージ化させ、接着剤層付
き板材を多数得た。なお、Bステージ化接着剤層の層厚
は 1〜5μであった。
Example 1 An epoxy adhesive containing the following components F was applied to one side of a 30μ thick polyimide film (plate material) using a spin cord method under the various conditions listed below, and further 10
Heat treatment was performed at 0° C. to 120° C. for 30 to 60 minutes to dry and solidify the material to B stage, thereby obtaining a large number of plates with adhesive layers. Note that the layer thickness of the B-staged adhesive layer was 1 to 5 μm.

接着剤層組成1 (1)エピコート1004 (商品名、    社製)
とメチルエチルケトンとを2:1(重量比)で配合した
混合物    ・・・・・・100重墳部(2)ジシア
ンジアミドとジメチルホルムアミドとを1 + 4 (
ffi蛍比)で配合した混合物・・・・・・ 3重量部 (3)N−Nジメチルベンジルアミン ・・・・・・0.2重量部 スピンコード条件; 回転数 500〜1100Orp 時間  5〜10秒 次に、上記のようにして得られた接着剤層付き板材の接
着剤層が設けられた面と相対する面(裏面)に、フッ素
シリコーンコーティング剤KP−801(商品名、信越
化学工業社製)をダイフロン5−3(商品名、ダイキン
工業社製)に0.07重量%の添加して調整した溶液を
以下の各種条件でスピンコードし、80℃〜120℃の
加熱処理を行ない、1u1以下の溌液性被覆層を形成し
た。
Adhesive layer composition 1 (1) Epikote 1004 (trade name, manufactured by the company)
and methyl ethyl ketone in a ratio of 2:1 (weight ratio)...100 mounds (2) Dicyandiamide and dimethylformamide in a ratio of 1 + 4 (
Mixture blended with ffi fluorescence ratio: 3 parts by weight (3) N-N dimethylbenzylamine: 0.2 parts by weight Spin code conditions: Number of revolutions: 500-1100 Orp Time: 5-10 Second, apply a fluorosilicone coating agent KP-801 (trade name, Shin-Etsu Chemical Co., Ltd. A solution prepared by adding 0.07 wt. A liquid-repellent coating layer of 1 u1 or less was formed.

スピンコード条件; 回転数 2500〜3000rpm 時間  20〜30秒 次に、以上の操作で得られた各板材に48個のば通孔(
直径、30±2μs、ピッチ70.6±2u)を所定の
配置で、プレスによる連続穿孔加工法により形成し、吐
出口プレートを得た。
Spin cord conditions; rotation speed 2500-3000 rpm time 20-30 seconds Next, 48 through holes (
A discharge port plate was obtained by forming holes with a diameter of 30±2 μs and a pitch of 70.6±2 u in a predetermined arrangement by a continuous drilling method using a press.

得られた吐出口プレートにおける溌液性被覆層及び接着
剤層の状態を検査したところ、いずれもプレートの表面
のみに所定の層厚で均一・に形成され、吐出口を形成す
るための貫通孔内はポリイミドフィルムのみが露出した
状態にあった。
When we inspected the state of the liquid-repellent coating layer and adhesive layer on the obtained discharge port plate, we found that both were uniformly formed with a predetermined layer thickness only on the surface of the plate, and that there were no through holes for forming the discharge port. Inside, only the polyimide film was exposed.

こうして得られた吐出口プレートを、その接着剤層を介
して第2図及び第3図に示す構成の基板上に流路壁等を
有する記録ヘッド本体部分のそれぞれの図示した所定位
置に位置決めし、仮接着を行なフだ後、その状態で15
0℃〜200℃、30〜120分間の加熱処理により吐
出口プレートの接着剤層を完全硬化させて、記録ヘッド
を完成した。
The ejection port plate obtained in this manner is positioned on the substrate having the structure shown in FIGS. 2 and 3 via the adhesive layer at the predetermined positions shown in each of the recording head main body portions having channel walls, etc. , after temporary adhesion, 15 minutes in that state.
The adhesive layer of the ejection port plate was completely cured by heat treatment at 0° C. to 200° C. for 30 to 120 minutes, and a recording head was completed.

なお、本実施例で用いた記録ヘッド本体部分としては、
通常この分野で利用されているものを使用した。また、
インク吐出エネルギー発生体、該発生体に吐出信号を印
加するための電気系等は通常この分野で用いられている
材料を利用して形成した。
The recording head main body used in this example is as follows:
We used those commonly used in this field. Also,
The ink ejection energy generator, the electric system for applying an ejection signal to the ink ejection energy generator, etc. were formed using materials commonly used in this field.

実施例2 板材として厚さ50間のステンレス板を用い、貫通孔の
穿孔を電r−ヒームによる連続穿孔加工により形成する
以外は実施例1と同様にして吐出口プレートを得た。
Example 2 A discharge port plate was obtained in the same manner as in Example 1, except that a stainless steel plate with a thickness of 50 mm was used as the plate material, and the through holes were formed by continuous drilling using an electric r-heam.

得られた吐出[1プレートは実施例1と同様に良好な品
質を有していた。
The obtained discharge [1 plate had good quality as in Example 1.

これらの吐出口プレートを、第3図に示す構成の記録ヘ
ッド本体部分(通常この分野で用いられている材料を利
用して形成)の、図示した所定位置に位置決めして仮接
着した後、150℃〜200℃、30分〜120分の加
熱処理により吐出[1プレートの接着材層を完全硬化さ
せて、記録ヘッドを完成した。
After positioning and temporarily adhering these ejection port plates to the predetermined positions shown in the recording head main body portion having the configuration shown in FIG. 3 (formed using materials normally used in this field), The adhesive layer of one plate was completely cured to complete the recording head.

比較例1 厚さ30μlのポリイミドフィルムにプレスによる連続
穿孔加工法により実施例1と同様の大きさ及び配置で貫
通孔を設けた。
Comparative Example 1 Through-holes were formed in a polyimide film having a thickness of 30 μl using a continuous perforation method using a press to have the same size and arrangement as in Example 1.

一方、2液温合エポキシ接着剤(商品名:HP−2R/
2H,キャノンケミカル製)をメチルエチルケトンに0
.5重量%の割合で混合して得た溶液を以下の条件で厚
さ0.5mmのシリコンゴム上に均−にスピンコードし
て接着剤層を形成した。
On the other hand, two-component hot epoxy adhesive (product name: HP-2R/
2H, manufactured by Cannon Chemical) to methyl ethyl ketone.
.. A solution obtained by mixing at a ratio of 5% by weight was spin-coded uniformly on a silicone rubber having a thickness of 0.5 mm under the following conditions to form an adhesive layer.

スピンコード条件: 回転数 500〜l000rpa+ 時間  5〜lO秒 次に、実施例1で用いた記録ヘッド本体部分(第2図及
び第3図に示す構成のもの)のそれぞれの吐出口プレー
トの接合面を、F記の操作で得たシリコンゴム上の2液
温合エポキシ接着剤層に約2 kg7cm2の荷重で押
し付けた後、シリコンゴムを剥離して、接着剤層を記録
ヘッド本体へ転写させた。
Spin code conditions: Rotation speed: 500 to 1000 rpa + Time: 5 to 10 seconds Next, the bonding surface of each ejection port plate of the recording head main body portion (configured as shown in FIGS. 2 and 3) used in Example 1 was was pressed onto the two-component heated epoxy adhesive layer on the silicone rubber obtained by the procedure in F with a load of about 2 kg 7 cm2, and then the silicone rubber was peeled off and the adhesive layer was transferred to the recording head body. .

こうして得られた転写接着剤層に先に得た吐出口プレー
トを位置決めして仮接着した後、60℃〜100℃、3
0分〜60分の加熱処理を行ない接着剤を硬化させた。
After positioning and temporarily adhering the previously obtained discharge port plate to the transfer adhesive layer obtained in this way, the transfer adhesive layer was heated at 60°C to 100°C for 30 minutes.
The adhesive was cured by heat treatment for 0 to 60 minutes.

次に、実施例1で用いたフッ素シリコーンコーティング
剤溶液を以Fの条件で厚さ0.5+n+++のシリコン
ゴム上に均一にスピンコードした。
Next, the fluorosilicone coating agent solution used in Example 1 was spin-coded uniformly onto a silicone rubber having a thickness of 0.5+n+++ under the following conditions.

スピンコード条件: 回転数 2500〜3000rpm 時間  20〜30秒 こうして得られたシリコンゴム上のフッ素シリコーンコ
ーティング剤層に先に得た記録ヘッド本体に接合された
吐出口プレート全面を約2 kg/cm2の荷重で押し
付けた後、シリコンゴムを剥離して、フッ素シリコーン
コーティング剤層を記録ヘッド本体の吐出口プレート面
へ転写させ、更に80℃〜120℃で加熱により硬化さ
せ、記録ヘッドを完成させた。
Spin code conditions: Rotation speed: 2500-3000 rpm Time: 20-30 seconds The entire surface of the ejection port plate bonded to the recording head body obtained earlier was coated with about 2 kg/cm2 onto the fluorosilicone coating agent layer on the silicone rubber thus obtained. After pressing with a load, the silicone rubber was peeled off and the fluorosilicone coating agent layer was transferred to the ejection port plate surface of the recording head main body, and further hardened by heating at 80° C. to 120° C. to complete the recording head.

比較例2 厚さ50鱗ステンレス板を板材として用い、記録ヘッド
本体として実施例2で用いたのと同様のものを使用する
以外は比較例1と同様にして記録ヘッドを作製した。
Comparative Example 2 A recording head was produced in the same manner as in Comparative Example 1, except that a 50-scale stainless steel plate was used as the plate material, and the same one as used in Example 2 was used as the recording head body.

以上の各実施例及び比較例で得た記録ヘッドにおける吐
出口プレートの接合工程及び發液処理工程の歩留りと、
得られた記録ヘッドを用いた記録操作における初期印字
及び長期印字試験を行なったところ表1に示す結果を得
た。
Yields of the ejection port plate bonding process and the effluent treatment process in the recording head obtained in each of the above Examples and Comparative Examples;
Initial printing and long-term printing tests were conducted in a recording operation using the obtained recording head, and the results shown in Table 1 were obtained.

なお、各試験において、各側で作製した記録ヘッドを各
々50個づつ使用した。
In each test, 50 recording heads manufactured on each side were used.

表  1 [発明の効果] 本発明によれば簡便かつ効率良い方法により、撥液性被
覆層及び接着剤層を有する吐出口プレートを得ることが
できる。しかも、得られた吐出口プレートの撥液性被覆
層及び接着剤層はそれぞれ所定位置に良好な形成状態で
正確に配置され、吐出[1内へのこれら層の侵入が避け
される。
Table 1 [Effects of the Invention] According to the present invention, a discharge port plate having a liquid-repellent coating layer and an adhesive layer can be obtained by a simple and efficient method. Moreover, the liquid-repellent coating layer and the adhesive layer of the obtained discharge port plate are each accurately placed in a predetermined position in a well-formed state, and intrusion of these layers into the discharge port plate is avoided.

従って、本発明の吐出口プレートを用いた記録ヘッドは
、その製造歩留りが向上されており、また吐出口面や吐
出[1プレートと記録ヘッド本体部分との接合部におけ
るインク溜りの発生によるインク吐出不良等の発生がな
く、良好な印字性能を安定して得ることができ、信頼性
の高いものとなる。
Therefore, the print head using the ejection port plate of the present invention has an improved manufacturing yield, and also has an improved production yield due to the formation of ink pools at the ejection port surface and the joint between the plate and the main body of the print head. There is no occurrence of defects, good printing performance can be stably obtained, and the reliability is high.

更に、例えば大版の板材に接着剤層及び撥液性被覆層を
形成後に、連続穿孔加工を行なうことにより、従来技術
におけるような1ヘツドづつの処理がなくなり、吐出L
1プレート接合工程における工程数を著しく低下させて
記録ヘッドのコストを低下させることが可能となる。
Furthermore, by performing continuous perforation after forming an adhesive layer and a liquid-repellent coating layer on a large plate material, for example, the process for each head as in the prior art is eliminated, and the discharge length is reduced.
It becomes possible to significantly reduce the number of steps in one plate bonding process and reduce the cost of the recording head.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明の吐出口プレートの構成を示す図であり
、第1図(A)はその平面図、第1図(B)は第1図(
A)におけるA−A線断面図である。第2図(A)〜(
C)並びに第3図(A)及び(B)は吐出口プレートを
用いたインクジェット記録ヘッドの構成を示す図である
。 :貫通孔 :板部材 :@液性被覆層 :接着剤層 :記録ヘッド本体部分基板 :エネルギー発生体 二流路壁 :外枠 :インク供給孔 0:フィルター 1:覆い 2:吐出口プレート
FIG. 1 is a diagram showing the configuration of the discharge port plate of the present invention, FIG. 1(A) is a plan view thereof, and FIG.
It is a sectional view taken along the line A-A in A). Figure 2 (A) - (
C) and FIGS. 3(A) and 3(B) are diagrams showing the structure of an inkjet recording head using an ejection port plate. :Through hole:Plate member:@Liquid coating layer:Adhesive layer:Recording head main body part substrate:Energy generator 2 channel wall:Outer frame:Ink supply hole 0:Filter 1:Cover 2:Ejection port plate

Claims (1)

【特許請求の範囲】 1)板部材と、該板部材上面に設けられた溌液性被覆層
と、該板部材下面に設けられた接着剤層と、インクジェ
ット記録ヘッドの吐出口を形成するための貫通孔とを有
することを特徴とするインクジェット記録ヘッド用吐出
口プレート。 2)前記板部材が樹脂または金属からなる請求項1に記
載のインクジェット記録ヘッド用吐出口プレート。 3)板部材上面に溌液性被覆層を設ける過程と、該板部
材下面に接着剤層を設ける過程と、これらの層が設けら
れた板部材にインクジェット記録ヘッドの吐出口を形成
するための貫通孔を穿孔する過程とを含むことを特徴と
するインクジェット記録ヘッド用吐出口スプレートの製
造方法。 4)前記板部材が樹脂または金属からなる請求項3に記
載のインクジェット記録ヘッド用吐出口プレートの製造
方法。 5)請求項1または2に記載の吐出口プレートを有する
インクジェット記録ヘッド。
[Claims] 1) A plate member, a liquid-repellent coating layer provided on the upper surface of the plate member, an adhesive layer provided on the lower surface of the plate member, and for forming an ejection port of an inkjet recording head. An ejection port plate for an inkjet recording head, characterized in that it has a through hole. 2) The ejection port plate for an inkjet recording head according to claim 1, wherein the plate member is made of resin or metal. 3) A step of providing a liquid-repellent coating layer on the upper surface of the plate member, a step of providing an adhesive layer on the lower surface of the plate member, and a step of forming an ejection port of an inkjet recording head on the plate member provided with these layers. 1. A method of manufacturing an ejection opening splate for an inkjet recording head, the method comprising the step of drilling through holes. 4) The method for manufacturing an ejection port plate for an inkjet recording head according to claim 3, wherein the plate member is made of resin or metal. 5) An inkjet recording head comprising the ejection port plate according to claim 1 or 2.
JP1007470A 1988-10-31 1989-01-13 Method of manufacturing ejection port forming member for ink jet recording head Expired - Lifetime JP2831368B2 (en)

Priority Applications (10)

Application Number Priority Date Filing Date Title
JP1007470A JP2831368B2 (en) 1989-01-13 1989-01-13 Method of manufacturing ejection port forming member for ink jet recording head
DE1989629489 DE68929489T2 (en) 1988-10-31 1989-10-30 Ink jet head and its manufacturing method, orifice plate for this head and manufacturing method, and ink jet device provided with it
EP99200740A EP0937579B1 (en) 1988-10-31 1989-10-30 Ink jet head and manufacturing method thereof, discharge opening plate for head and manufacturing method thereof, and ink jet apparatus with ink jet head
EP19890311199 EP0367541B1 (en) 1988-10-31 1989-10-30 Method of manufacturing an ink jet head
ES99200740T ES2207908T3 (en) 1988-10-31 1989-10-30 HEAD FOR INK JETS AND METHOD FOR THE MANUFACTURING OF THE SAME, PLATE WITH DOWNLOAD OVERS FOR THE HEAD AND ITS METHOD OF MANUFACTURING AND APPARATUS FOR INK JETS WITH HEAD FOR INK JETS.
ES89311199T ES2060789T3 (en) 1988-10-31 1989-10-30 MANUFACTURE METHOD OF A PRINT HEAD BY INK JETS.
DE1989618663 DE68918663T2 (en) 1988-10-31 1989-10-30 Process for manufacturing an inkjet printhead.
EP94200483A EP0602021A2 (en) 1988-10-31 1989-10-30 Ink jet head and manufacturing method thereof, discharge opening plate for head and manufacturing method thereof, and ink jet apparatus with ink jet head
US07/752,909 US5208604A (en) 1988-10-31 1991-08-26 Ink jet head and manufacturing method thereof, and ink jet apparatus with ink jet head
US08/741,529 US5682187A (en) 1988-10-31 1996-10-31 Method for manufacturing an ink jet head having a treated surface, ink jet head made thereby, and ink jet apparatus having such head

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1007470A JP2831368B2 (en) 1989-01-13 1989-01-13 Method of manufacturing ejection port forming member for ink jet recording head

Publications (2)

Publication Number Publication Date
JPH02187356A true JPH02187356A (en) 1990-07-23
JP2831368B2 JP2831368B2 (en) 1998-12-02

Family

ID=11666682

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1007470A Expired - Lifetime JP2831368B2 (en) 1988-10-31 1989-01-13 Method of manufacturing ejection port forming member for ink jet recording head

Country Status (1)

Country Link
JP (1) JP2831368B2 (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH021320A (en) * 1988-03-29 1990-01-05 Ricoh Co Ltd Ink jet recording head
JPH04279356A (en) * 1991-03-08 1992-10-05 Canon Inc Recording head and manufacture thereof
JP2002210964A (en) * 2001-01-15 2002-07-31 Konica Corp Ink jet head and its manufacturing method
JP2002210985A (en) * 2001-01-15 2002-07-31 Konica Corp Ink jet head and its manufacturing method

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6087055A (en) * 1983-10-19 1985-05-16 Fuji Xerox Co Ltd Recording head of ink jet printer
JPS633963A (en) * 1986-06-24 1988-01-08 Ricoh Co Ltd Preparation of ink jet nozzle

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6087055A (en) * 1983-10-19 1985-05-16 Fuji Xerox Co Ltd Recording head of ink jet printer
JPS633963A (en) * 1986-06-24 1988-01-08 Ricoh Co Ltd Preparation of ink jet nozzle

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH021320A (en) * 1988-03-29 1990-01-05 Ricoh Co Ltd Ink jet recording head
JPH04279356A (en) * 1991-03-08 1992-10-05 Canon Inc Recording head and manufacture thereof
JP2002210964A (en) * 2001-01-15 2002-07-31 Konica Corp Ink jet head and its manufacturing method
JP2002210985A (en) * 2001-01-15 2002-07-31 Konica Corp Ink jet head and its manufacturing method

Also Published As

Publication number Publication date
JP2831368B2 (en) 1998-12-02

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