JPH04279356A - Recording head and manufacture thereof - Google Patents

Abstract

PURPOSE:To restore the water repellency in the vicinity of an orifice and to prevent not only the adhesion of ink to the orifice but also the deterioration of printing grade by processing an orifice plate by irradiating the same with pulse laser and removing or treating the hydrophilic byproduct bonded to the orifice plate in the vicinity of the orifice. CONSTITUTION:An orifice plate 5 having a water repelling layer on the surface of the emitting orifice 7 thereof or constituted of the water repelling layer 6 itself is irradiated with pulse laser to be subjected to orifice processing. In order to remove the highly hydrophilic byproduct 8 bonded to and accumulated on the orifice plate in the vicinity of the orifice, the orifice plate is subjected to heat treatment, ultrasonic washing or ultrasonic water stream treatment. By this treatment, the water repellency in the vicinity of the orifice is restored and the adhesion of ink in the vicinity of the orifice is prevented.

Description

[Detailed description of the invention]

0001

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method of manufacturing a recording head and a recording head.

[Background Art] In a method of manufacturing an inkjet recording head of the type that ejects ink from ejection ports, the ejection port forming surface of the ejection port forming member (orifice plate) is used to improve the ejection characteristics of the ejected ink. A water-repellent material is formed on the surface, and the surface on which the ejection port is formed, at least in the vicinity of the ejection port, is made to have water repellency. That is, a water-repellent resin is applied to the orifice plate, and the resin is hardened by applying light or heat treatment to form a water-repellent layer on the surface where the discharge ports are formed. In addition, depending on the material, heat treatment may be used to evaporate the solvent in which the material is dissolved or the dispersion medium in which it is dispersed.
A layer of material is formed to form a water-repellent layer on the face. In these heat treatments, the material is generally heated to a temperature higher than the glass transition point Tg or melting point Tmp of the water-repellent material. moreover,. In some cases, the discharge port forming member itself is made of a water-repellent material.

[0003] For such a discharge port forming member, the applicant has adopted a technique of forming discharge ports using laser light.

[0004] In other words, processing of an ejection port using a pulsed laser involves forming an ejection port by irradiating a laser beam onto an orifice plate whose ejection port surface has become water-repellent through the above-described treatment. It is done by doing. When examining the method for manufacturing an inkjet recording head, it was discovered that when ejection ports are formed on the face using a pulsed laser in this manner, by-products from the orifice processing adhere to the vicinity of the ejection ports.

[0005]

[Problems to be Solved by the Invention] When by-products due to laser processing adhere and accumulate near the ejection ports, the ink ejection conditions do not fully satisfy the required characteristics. In other words, as the by-products accumulate on the water-repellent surface near the ejection port, the corresponding area becomes hydrophilic, and when ink is ejected, a phenomenon is observed in which the ink is attracted to the hydrophilic area, and the flying droplets are In some cases, the direction became unstable, leading to a decrease in print quality.

[0006]

[Means for Solving the Problems] The present invention has been made to solve the above-mentioned conventional problems. For the orifice plate that is
After processing the orifice by irradiating the pulsed laser, the highly hydrophilic by-products deposited near the orifice are removed or a prescribed treatment is applied to restore the water repellency near the orifice. It is an object of the present invention to provide a recording head that can prevent ink from adhering to the vicinity and prevent deterioration of print quality, and a method for manufacturing the same.

For this purpose, in the present invention, in an inkjet recording head having an orifice plate, a pulsed laser is irradiated onto the orifice plate which has a water-repellent layer on the ejection port surface or is itself made of a water-repellent material. After discharge machining is performed, the by-products from the machining of the spout that have accumulated around the spout or the orifice plate where by-product parts from the machining of the spout have deposited and deposited around the spout. 1) Heat treatment 2) Ultrasonic cleaning 3) Ultrasonic water cleaning 4) High-pressure water cleaning 5) Repeated application and removal of tape with an adhesive layer 6) The above steps It is characterized by restoring water repellency near the orifice by applying multiple treatments in combination.

According to the above configuration, the hydrophilic state of the hydrophilic portion generated by laser processing near the ejection port can be changed or removed, so that the printing quality due to ink wetting near the ejection port can be improved. It is possible to obtain a recording head that can prevent deterioration of the recording head and perform printing stably even against changes over time.

In particular, when heat treatment is applied to by-products during laser processing, the adhesion of the water-repellent by-products to the underlying water-repellent layer is improved, and changes over time are prevented. An inkjet recording head that performs stable printing can be obtained.

0010

[Example] (Example 1) Figure 1 is a diagram that best represents the features of the present invention. In the figure, 1 is a KrF excimer laser, and 2 is a laser with a wavelength of 248 nm emitted from the excimer laser. 3 is an optical system; 4 is a projection mask having a pattern of all or part of the orifice of the inkjet recording head; and 5 is an orifice plate having a water-repellent layer 6. A laser beam 2 emitted from an excimer laser 1 is processed by an optical system 3 and irradiates a projection mask 4 having a pattern on all or part of the orifice of the inkjet recording head. This optical system 3 allows the pattern of the projection mask 4 to be
Orifice plate 5 with 3x projection and water repellent layer 6
Perform orifice processing. For the orifice plate 5, a polyether sulfone (PES) film was used. In addition, Cytop (product name: Asahi Glass Co., Ltd.) is used as a water repellent.
, Tg=108° C.), Cytop was applied to the PES orifice plate, and then heat treated at 120° C. for 1 hour to form the water-repellent layer 6. This orifice plate 5 was subjected to orifice processing using the orifice processing apparatus shown in FIG.

FIG. 2 is an enlarged view of the orifice plate 5 in FIG. In the figure, 2 is an excimer laser beam, 5 is an orifice plate, 6 is a water repellent layer,
7 is a discharge opening formed by the orifice processing apparatus shown in FIG. 1, and 8 is a by-product produced by the orifice processing and attached near the orifice. In this example, to form the discharge opening 7, the laser beam 2 was incident on the surface of the orifice plate on which the water-repellent layer was not provided.

[0012] The orifice plate with the orifice processed in this manner and on which by-products were deposited near the ejection openings was heat-treated at 120°C for 1 hour, and an inkjet recording head as shown in FIG. 3 was manufactured using the orifice plate. .

The ink jet unit IJU is a bubble jet type unit that performs recording using an electrothermal transducer that generates thermal energy to cause film boiling in ink in response to an electrical signal.

In FIG. 3, reference numeral 100 indicates a structure in which electrothermal converters (discharge heaters) arranged in a plurality of rows on a Si substrate and electrical wiring made of Al or the like for supplying power to the converters are formed by film-forming technology. This is a heater board consisting of 200 is a wiring board for the heater board 100;
It has a wiring corresponding to the wiring 0 (for example, connected by wire bonding) and a pad 201 located at the end of this wiring and receiving an electric signal from the main device.

Reference numeral 1300 denotes a grooved top plate provided with partition walls for dividing a plurality of ink channels, a common liquid chamber for storing ink, and the like for supplying ink to each ink channel.
An ink receiving port 1500 that receives ink supplied from the ink tank IT and introduces it into the above-mentioned common liquid chamber, and an orifice plate 400 having a plurality of ejection ports corresponding to each ink flow path are integrally molded. Although polysulfone is preferable as the material for integrally molding these, other resin materials for molding may also be used.

Reference numeral 300 denotes a support made of metal, for example, which flatly supports the back surface of the wiring board 200, and serves as a bottom plate of the inkjet unit. Reference numeral 500 denotes a pressing spring, which has an M-shape and presses the common liquid chamber with light pressure at the center of the M-shape, and uses a front sag 501 to concentrate linear pressure on a part of the liquid path, preferably in the area near the discharge port. Press. The feet of the springs that press the heater board 100 and the top plate 1300 fit into the holes 3121 of the support body 300.
The heater board 100 and the top plate 1300 are pushed together by the concentrated biasing force of the press spring 500 and its front sagging portion 501 by engaging the back side of the support body 300 through the support body 300 and engaging the two in a sandwiched state. Crimp and fix. The support body 300 also includes two positioning protrusions 1012 of the ink tank IT and a protrusion 18 for positioning and heat-sealing retention.
Positioning holes 312, 190 that engage with 00, 1801
0 and 2000, and also has protrusions 2500 and 2600 on the back side for positioning the apparatus main body IJRA with respect to the carriage HC. In addition, the support 300 has an ink supply pipe 2200 that allows ink to be supplied from an ink tank.
It also has a hole 320 that allows it to pass through. Support body 30
The wiring board 200 is attached to the wiring board 200 by pasting it with an adhesive or the like. Note that the recesses 2400 and 24 of the support body 300
00 are provided in the vicinity of the positioning protrusions 2500 and 2600, respectively, and in the assembled inkjet cartridge IJC, the three sides around them are the extension points of the head tip area formed by the plurality of parallel grooves 3000 and 3001. Therefore, unnecessary objects such as dust and ink are stuck to the protrusion 250.
It is located so that it does not reach 0.2600. This parallel groove 3000 is formed. The lid member 800 is
It forms the outer wall of the inkjet cartridge IJC, and the inkjet unit IJU with the ink tank.
It forms a space for storing. Also, this parallel groove 3
The ink supply member 600 in which 001 is formed is an ink conduit 160 that is continuous with the ink supply pipe 2200 described above.
0 is formed as a cantilever beam with the supply pipe 2200 side fixed, and a sealing pin 602 is inserted to ensure capillarity between the fixed side of the ink conduit and the ink supply pipe 2200. Note that 601 is a packing that seals the connection between the ink tank IT and the supply pipe 2200, and 700 is a filter provided at the tank side end of the supply pipe.

Since the ink supply member 600 is molded, it is not only inexpensive, has high positional accuracy, and eliminates deterioration in manufacturing precision, but also has a cantilevered conduit 1600 that allows the conduit to be easily used during mass production. The state of pressure contact between the ink socket 1600 and the ink receptacle 1500 can be stabilized. In this example, a more complete communication state can be reliably obtained by simply pouring the sealing adhesive from the ink supply member side under this pressure-contact state. In addition, the ink supply member 6
00 to the support body 300, the pins (not shown) on the back side of the ink supply member 600 are connected to the holes 1901 and 1902 of the support body 300.
This can be easily accomplished by meeting the 02 and projecting through it, and heat-sealing the protruding portion to the back side of the support body 300. Note that the slight protruding area of this heat-sealed back surface portion is accommodated in a recess (not shown) in the side wall surface of the inkjet unit IJU mounting surface of the ink tank IT, so that the positioning surface of the unit IJU can be accurately obtained. .

[0018] The printer was installed in a printer, and discharged droplets were observed and recorded on recording paper. As a result, for an inkjet recording head manufactured using an orifice plate that was not heat-treated after orifice processing, the ejection direction of flying ink droplets was stabilized, and good results were obtained for printing.

(Embodiment 2) Another embodiment will be described below.

FIG. 4 shows an orifice plate that has been processed by the orifice processing apparatus shown in FIGS. 1 and 2 and has by-products deposited around the discharge port, which has been subjected to ultrasonic cleaning. . Orifice plate 5 has
A polyether sulfone film was used. In addition, the water repellent agent is KP801 (product name: Shin-Etsu Chemical Co., Ltd.).
After applying the mixture to the orifice plate 5 using the same method, a heat treatment was performed at 150° C. for 1 hour to form a water-repellent layer 6. The orifice plate 5 having the water-repellent layer 6 formed in this way was irradiated with a KrF excimer laser beam from the opposite side from which the water-repellent layer 6 was formed to form the discharge ports 7. By subjecting the orifice plate 5 in which the discharge ports 7 were formed in this manner to ultrasonic cleaning in water, most of the by-products 8 during orifice processing were removed.

An inkjet recording head was manufactured using the orifice plate in which the orifices were processed in this manner and the by-products were removed, and the inkjet recording head was installed in a printer to observe ejected droplets and record them on recording paper. As a result, compared to an inkjet recording head manufactured using an orifice plate that is not subjected to ultrasonic cleaning after orifice processing, the ejection direction of flying ink droplets is stabilized, and good printing results are obtained. Ta.

(Embodiment 3) Another embodiment will be described below.

FIG. 5 shows an orifice plate that has been processed by the orifice processing apparatus shown in FIGS. 1 and 2 and has by-products deposited around the discharge port, which has been cleaned using an ultrasonic water stream. It is. For the orifice plate 5, a polyimide film was used. In addition, KP801 (trade name, Shin-Etsu Chemical Co., Ltd.) was used as a water repellent, and after applying it to the orifice plate 5, it was heated to 150°C.
A heat treatment was performed for a period of time to form a water-repellent layer 6. Orifice plate 5 having the water repellent layer 6 formed in this way
On the other hand, from the opposite side to the side on which the water repellent layer 6 was formed,
An orifice 7 was formed by irradiation with an excimer laser beam. The orifice plate 5 in which the discharge ports 7 were formed in this manner was cleaned by ultrasonic water flow using pure water. As a result, most of the by-products 8 during discharge port processing were removed.

An inkjet recording head was manufactured using the orifice plate in which the orifices were processed and the by-products were removed, and the head was installed in a printer to observe ejected droplets and record them on recording paper. As a result, compared to an inkjet recording head manufactured using an orifice plate that is not cleaned with ultrasonic water after orifice processing, the ejection direction of flying ink droplets is stabilized, and good printing results are obtained. Ta.

(Embodiment 4) Another embodiment will be described below.

FIG. 6 shows an orifice plate on which by-products were deposited around the discharge port after being processed by the orifice processing apparatus shown in FIGS. 1 and 2 and cleaned. For the orifice plate 5, a polyether sulfone film was used. Cytop (trade name: Asahi Glass Co., Ltd.) was used as a water repellent and was applied to the orifice plate 5, followed by heat treatment at 120° C. for 1 hour to form a water repellent layer 6. The orifice plate 5 having the water-repellent layer 6 thus formed was irradiated with a KrF excimer laser beam from the opposite surface to the surface on which the water-repellent layer 6 was formed to form an orifice 7. A high-pressure water stream is formed by continuously discharging pure water pressurized to 200 kgf/cm2 from a 50 micron nozzle made of sapphire from the orifice direction to the orifice 7 formed in the orifice plate 5 in this way. I applied. As a result, as shown in Figure 6,
Although the by-products 8 from the laser processing that were not hit by the high-pressure water stream could not be sufficiently removed, the by-products from the laser processing that had adhered to the vicinity of the discharge port of the orifice plate could be removed.

An inkjet recording head is manufactured using the orifice plate in which the orifice has been processed in this manner and by-products have been removed from the vicinity of the orifice, and the head is installed in a printer to observe ejected droplets and record on recording paper. I did it. As a result, compared to an inkjet recording head manufactured using an orifice plate that is not cleaned with high-pressure water after orifice processing, the ejection direction of flying ink droplets was stabilized, and good printing results were also obtained. .

(Embodiment 5) Another embodiment will be described below.

FIG. 7 shows an orifice plate that has been processed by the orifice processing apparatus shown in FIGS. 1 and 2, and on which by-products have accumulated around the discharge port, and cellophane tape is repeatedly applied and removed five times. It is something that For the orifice plate 5, a polyimide film was used. In addition, after applying KP801 (trade name: Shin-Etsu Chemical Co., Ltd.) to the orifice plate 5 as a water repellent,
A heat treatment was performed at 50° C. for 1 hour to form a water-repellent layer 6. The orifice plate 5 having the water-repellent layer 6 thus formed was irradiated with a XeCl excimer laser beam from the opposite surface to the surface on which the water-repellent layer 6 was formed to form an orifice 7. Cellophane tape was pasted and peeled off five times on each side of the orifice plate 5 on which orifices 7 were formed in this manner. As a result, by-products from orifice processing were removed.

An inkjet recording head was manufactured using the orifice plate in which orifices were processed and by-products were removed, and the head was installed in a printer to observe ejected droplets and record them on recording paper. As a result, compared to an inkjet recording head manufactured using an orifice plate that does not need to be pasted or peeled off after the orifice is processed, the ejection direction of the flying ink droplets is more stable, and better printing results are obtained. Ta.

[0031] In particular, in the inkjet recording system of the present invention, a means for generating thermal energy (for example, an electrothermal converter or a laser beam) is provided as energy to be used for ejecting ink. This provides excellent effects in recording heads and recording apparatuses that use energy to cause changes in the state of ink. This is because such a system can achieve higher recording density and higher definition.

For its typical configuration and principle, see, for example, US Pat. Nos. 4,723,129 and 4,740.
Preferably, it is carried out using the basic principles disclosed in the '796 specification. This method can be applied to both the so-called on-demand type and continuous type, but
In particular, in the case of the on-demand type, the electrothermal transducer placed in correspondence with the sheet holding the liquid (ink) or the liquid path must be able to respond to recorded information and rapidly exceed nucleate boiling. By applying at least one drive signal that causes a temperature increase, the electrothermal transducer generates thermal energy, causing film boiling on the thermally active surface of the recording head, resulting in a one-to-one response to this drive signal. This is effective because bubbles can be formed in the corresponding liquid (ink). The growth and contraction of the bubble causes liquid (ink) to be ejected through the ejection opening to form at least one droplet. If this drive signal is in the form of a pulse, bubble growth and contraction will occur immediately and appropriately, making it especially suitable for liquids (inks) with excellent responsiveness.
can be achieved, which is more preferable. This pulse-shaped drive signal is described in US Pat. No. 4,463,359;
The one described in the specification of the same No. 4345262 is suitable. Furthermore, if the conditions described in US Pat. No. 4,313,124 concerning the invention regarding the temperature increase rate of the heat acting surface are adopted, even more excellent recording can be performed.

[0033] In addition to the configuration of the recording head that combines ejection ports, liquid paths, and electrothermal converters (straight liquid flow path or right-angled liquid flow path) as disclosed in the above-mentioned specifications, The present invention also includes configurations using US Pat. No. 4,558,333 and US Pat. No. 4,459,600, which disclose configurations in which the heat acting portion is disposed in a bending region. In addition, for multiple electrothermal converters,
JP-A-59-123670 discloses a configuration in which a common slit is used as a discharge part of an electrothermal converter, and JP-A-59-1989 discloses a configuration in which an opening for absorbing pressure waves of thermal energy corresponds to a discharge part. The effects of the present invention are also effective even if the structure is based on the publication No.-138461. That is, regardless of the form of the recording head, according to the present invention, recording can be performed reliably and efficiently.

Furthermore, the present invention can be effectively applied to a full-line type recording head having a length corresponding to the maximum width of a recording medium that can be recorded by the recording apparatus. Such a recording head may have a configuration that satisfies the length by a combination of multiple recording heads, or one that is formed integrally.
It may be configured as a separate recording head.

In addition, even in the case of a serial type as in the above example, the recording head is fixed to the main body of the apparatus, or by being attached to the main body of the apparatus, electrical connection with the main body of the apparatus and ink flow from the main body of the apparatus are possible. The present invention is also effective when using a replaceable chip-type recording head that can be supplied with ink or a cartridge-type recording head in which an ink tank is integrally provided in the recording head itself.

Further, it is preferable to add recovery means for the recording head, preliminary auxiliary means, etc., which are also provided as a configuration of the recording apparatus, to the present invention, because the effects of the present invention can be further stabilized. be. Specifically, these include capping means for the recording head, cleaning means, pressure or suction means, preheating means using an electrothermal transducer or another heating element, or a combination thereof, and recording. It is also effective to perform a preliminary ejection mode in which another ejection is performed in order to perform stable recording.

Regarding the type and number of recording heads to be mounted, for example, in addition to one type that corresponds to a single color ink, there are also types and number of recording heads installed to correspond to a plurality of inks of different recording colors and densities. A plurality of them may be provided. That is, for example, the recording mode of the recording apparatus is not limited to a recording mode of only the mainstream color such as black, but may also include a recording head that is configured integrally or a combination of multiple colors; The present invention is also extremely effective for devices equipped with at least one full color by color mixture.

In addition, in the embodiments of the present invention described above, the ink is described as a liquid, but ink that solidifies at room temperature or lower, softens or liquefies at room temperature, or inkjet method. In general, the temperature of the ink itself is adjusted within the range of 30°C to 70°C to keep the viscosity of the ink within the stable ejection range. Any eggplant is fine. In addition, the temperature rise caused by thermal energy can be actively prevented by using the energy to change the state of the ink from a solid state to a liquid state, or ink that solidifies when left standing is used to prevent ink evaporation. However, in any case, the ink is liquefied by applying thermal energy in accordance with the recording signal, and the liquid ink is ejected, or the ink has already begun to individualize by the time it reaches the recording medium. The present invention is also applicable when using ink that is liquefied only by energy. In such cases, the ink is held in a liquid or solid state in the recesses or through holes of the porous sheet, as described in JP-A-54-56847 or JP-A-60-71260. , it may also be in a form that faces the electrothermal converter. In the present invention, the most effective method for each of the above-mentioned inks is to implement the above-mentioned film boiling method.

In addition, the inkjet recording apparatus of the present invention can be used as an image output terminal of information processing equipment such as a computer, a copying machine combined with a reader, etc., and a facsimile machine having a transmitting/receiving function. It may also take a form.

[0040]

[Effects of the Invention] As explained above, after orifice processing is performed by irradiating a pulsed laser on an orifice plate that has a water-repellent layer on its face or is made of a water-repellent agent, By removing or treating highly hydrophilic by-products that have accumulated near the orifice, the water repellency near the orifice is restored, preventing ink from adhering near the orifice and deteriorating print quality. It was possible to provide an inkjet recording head and a method for manufacturing the same.

[Brief explanation of the drawing]

FIG. 1 is a diagram schematically showing an orifice processing device used in an example of the present invention.

FIG. 2 is a schematic diagram showing the state of an orifice plate processed by laser.

FIG. 3 is a diagram showing an outline of a recording head.

FIG. 4 is a schematic diagram showing the state of an orifice plate processed according to Example 2.

FIG. 5 is a schematic diagram showing the state of an orifice plate processed according to Example 3.

FIG. 6 is a schematic diagram showing the state of an orifice plate processed according to Example 4.

7 is a schematic diagram showing the state of an orifice plate processed according to Example 5. FIG.

[Explanation of symbols]

1 Excimer laser device 2 Laser beam oscillated from the excimer laser device 3 Optical lens system 4 Projection mask 5 having a pattern of all or part of the plurality of ejection ports of the inkjet recording head
Orifice plate 6 Water repellent layer 7 formed on the orifice plate
Discharge port 8 By-products from orifice processing

Claims (12)

[Claims] 1. In a method of manufacturing a recording head used in an inkjet printer, the surface of the ejection port forming member on which the ejection ports are formed is treated with a water-repellent material, and then the surface of the ejection port forming member is treated with a water-repellent material.
A discharge port is formed by irradiation with a pulsed laser beam, and then the by-products from orifice processing that have accumulated around the discharge port or the orifice plate with by-products attached around the discharge port are heat-treated. A method of manufacturing a recording head, characterized in that: 2. A method for manufacturing a recording head used in an inkjet printer, wherein the ejection port forming member is made of a water-repellent material, and the ejection port is formed by irradiating the member with a pulsed laser beam, Furthermore, after that, by-products during orifice processing that have adhered and accumulated around the ejection ports or the orifice plate on which the by-products have adhered to the areas around the ejection ports are subjected to heat treatment. 3. A method for manufacturing a recording head, wherein the heat treatment is performed at a temperature higher than the glass transition point Tg or melting point Tmp of the water repellent. 4. In a method of manufacturing a recording head used in an inkjet printer, the ejection port surface of the ejection port forming member is treated with a water-repellent material, and then ejection ports are formed by irradiating the ejection port with a pulsed laser beam. A method for manufacturing a recording head, further comprising performing ultrasonic cleaning on an orifice plate on which by-product parts during orifice processing have adhered and accumulated around the ejection port. 5. A method for manufacturing a recording head used in an inkjet printer, wherein the ejection surface of the ejection port forming member is treated with a water-repellent material and then irradiated with a pulsed laser beam to form the ejection port, further comprising: Thereafter, the orifice plate, on which by-product parts during orifice processing have adhered and accumulated around the ejection port, is cleaned with an ultrasonic water stream. 6. A method for manufacturing a recording head used in an inkjet printer, in which an orifice is formed by treating the ejection orifice surface of an ejection orifice forming member with a water-repellent material and then irradiating it with a pulsed laser beam;
Furthermore, after that, by-products from orifice processing that have accumulated around the discharge port, or the orifice plate where by-product parts from orifice processing have accumulated and accumulated around the discharge port, are cleaned with a high-pressure water stream. A method for manufacturing a recording head characterized by: 7. In a recording head used in an inkjet printer, after treating the ejection orifice surface of the ejection orifice forming member with a water-repellent material, orifices are formed by irradiating the ejection orifice with a pulsed laser beam, and then, Step 1: Apply a tape with an adhesive layer to the discharge port surface of the discharge port forming member, especially around the orifice where by-products from orifice processing have adhered and accumulated, and then peel it off.
A method for manufacturing an inkjet recording head characterized by repeating the process more than once. 8. The ejection port forming member forms an ink path corresponding to a location where the ejection energy generating element is disposed by being joined to a substrate provided with an energy generating element used for ejecting ink. 8. The method of manufacturing a recording head according to claim 1, wherein the top plate and the constituting top plate are integrally molded. 9. The irradiation with the pulsed laser beam comprises:
Manufacture of a recording head according to any one of claims 1 to 7, characterized in that the ejection openings are formed by forming the ejection openings from a side opposite to the face side and connected to the ink path. Method. 10. The method of manufacturing a recording head according to claim 1, wherein the water repellent is a polymer. 11. The method of manufacturing a recording head according to claim 1, wherein the pulsed laser for forming the orifice is an ultraviolet laser, particularly an excimer laser. 12. An inkjet recording head produced by the method according to claim 1.