JPH02181399A - Synchrotron device - Google Patents

Abstract

PURPOSE:To improve the beam efficiency by exciting a steering electromagnet by a preprogrammed pattern in the same way as in a deflection magnet or a tetrode electromagnet. CONSTITUTION:The device is composed of a steering electromagnet 11, an exciting power source 4 for the steering electromagnet 11, a pattern memory 2 to deliver the pattern depending on a timing, a computer 1 to write the pattern to the pattern memory, and a timer 3 to deliver an instruction value renewal signal to the pattern memory. A pattern for beam orbit correction from the incidence to the projection is written in the pattern memory 2 by the computer 1. The pattern memory 2 transmits the written pattern to the steering electromagnet exciting power source 4 depending on the signal from the timer 3. Consequently, since the beam orbit can be corrected from the incidence to the projection of the beam, the beam efficiency can be improved.

Description

DETAILED DESCRIPTION OF THE INVENTION [Object of the Invention] (Field of Industrial Application) The present invention relates to a synchrotron device used for semiconductor exposure and medical purposes.

(Prior Art) A synchrotron device used for semiconductor exposure or medical purposes is generally composed of equipment as shown in FIG. namely, a deflection electromagnet for deflecting the beam; 6. Quadrupole electromagnet 7 for preventing beam divergence and consolidating the beam into a certain size, high frequency acceleration chamber JIM for accelerating the beam
8. Beam duct 1-0 provides the necessary vacuum to avoid beam radiation;
Exit device 10, steering electromagnet 11 for improving beam turning efficiency. It is.

According to the prior art, the method of rapid rotation of the steering electromagnet 11 is different from the pattern operation of the bending electromagnet 6, and a steady operation with a constant value is performed. This is because in conventional synchrotron devices, beams are often lost during beam injection, and the idea was to correct deviations in the beam trajectory only at the time of beam injection.

(Problem to be Solved by the Invention) According to the above-mentioned conventional technology, the current value of the beam immediately before incidence is
After the emission, the efficiency was only about 10%, which was quite inefficient.

In recent years, synchrotron devices have come to be used for semiconductor exposure and medical purposes, and it is said that synchrotron devices with efficiency as low as 10% as described above are extremely problematic.

Therefore, in the synchrotron device according to the present invention, it is an object of the present invention to improve beam efficiency in the process from beam input to beam output.

[Structure of the invention]

(Means for Solving the Problems) In the synchrotron device of the present invention, the steering electromagnet is pattern-excited.

(Function) By pattern-exciting the steering electromagnet, it is possible not only to correct the beam trajectory when it enters the synchrotron device, but also to make corrections that are suitable for when it is exiting during acceleration.

(Example) An embodiment will be described below with reference to one drawing.

FIG. 1 shows an embodiment of the present invention, in which a steering electromagnet 11, an open excitation power source 4. It is composed of a pattern memory 2 for sending out a pattern according to timing, a computer 1 for writing the pattern into the pattern memory, and a timer 3 for sending out a command value update signal to the pattern memory.

A pattern for correcting the beam trajectory from incidence to exit is written into pattern memory 2 by computer 1. The pattern memory 2 transmits the written pattern to the steering electromagnet excitation power source 4 in accordance with the signal coming from the timer 3. The steering electromagnet excitation power source 4 excites the steering electromagnet 11 in accordance with the sent pattern in synchronization with the excitation pattern of the bending electromagnet, as shown in FIG.

2, the configuration of this embodiment allows for
Since the beam trajectory can be corrected, the beam efficiency of the synchrotron device can be dramatically improved.

〔Effect of the invention〕

As described above, by using the excitation method of the steering electromagnet in the synchrotron device of the present invention, the beam efficiency, which was extremely poor in the conventional method, can be dramatically improved.

[Brief explanation of the drawing]

FIG. 1 is a diagram showing an embodiment of the present invention, FIG. 2 is a diagram showing the operation of the present invention, and FIG. 3 is a diagram showing a general synchrotron device. 1...Calculator 2...Pattern memory 3
...Timer 4...Steering electromagnet excitation power supply +1 Each...Steering electromagnet agent Patent attorney Noriyuki Chika Ken Yudo Daishimaru Ken Fig. 1 Time Fig. 2

Claims (1)

[Claims] A synchrotron device for a beam accelerator, characterized in that a steering electromagnet is excited by a preprogrammed pattern in the same way as a deflection magnet or a quadrupole electromagnet.