JPH0217860U - - Google Patents
Info
- Publication number
- JPH0217860U JPH0217860U JP1988095959U JP9595988U JPH0217860U JP H0217860 U JPH0217860 U JP H0217860U JP 1988095959 U JP1988095959 U JP 1988095959U JP 9595988 U JP9595988 U JP 9595988U JP H0217860 U JPH0217860 U JP H0217860U
- Authority
- JP
- Japan
- Prior art keywords
- laminate
- electrode layers
- side end
- electrode
- insulating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000009413 insulation Methods 0.000 claims description 2
- 238000007789 sealing Methods 0.000 claims 1
- 239000013013 elastic material Substances 0.000 abstract 1
- 238000003475 lamination Methods 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
- H10N30/508—Piezoelectric or electrostrictive devices having a stacked or multilayer structure adapted for alleviating internal stress, e.g. cracking control layers
Landscapes
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1988095959U JPH0217860U (US07906523-20110315-C00004.png) | 1988-07-20 | 1988-07-20 | |
US07/381,285 US4978881A (en) | 1988-07-20 | 1989-07-18 | Piezoelectric actuator of lamination type |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1988095959U JPH0217860U (US07906523-20110315-C00004.png) | 1988-07-20 | 1988-07-20 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0217860U true JPH0217860U (US07906523-20110315-C00004.png) | 1990-02-06 |
Family
ID=14151768
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1988095959U Pending JPH0217860U (US07906523-20110315-C00004.png) | 1988-07-20 | 1988-07-20 |
Country Status (2)
Country | Link |
---|---|
US (1) | US4978881A (US07906523-20110315-C00004.png) |
JP (1) | JPH0217860U (US07906523-20110315-C00004.png) |
Families Citing this family (31)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02240977A (ja) * | 1989-03-14 | 1990-09-25 | Toshiba Corp | 変位発生装置 |
DE69014954T2 (de) * | 1989-04-07 | 1995-05-24 | Mitsui Petrochemical Ind | Geschichtete Keramikanordnung und Verfahren zu deren Herstellung. |
US5163209A (en) * | 1989-04-26 | 1992-11-17 | Hitachi, Ltd. | Method of manufacturing a stack-type piezoelectric element |
US5260723A (en) * | 1989-05-12 | 1993-11-09 | Ricoh Company, Ltd. | Liquid jet recording head |
ES2087089T3 (es) * | 1989-11-14 | 1996-07-16 | Battelle Memorial Institute | Metodo para fabricar un accionador piezoelectrico apilado multicapa. |
US5089739A (en) * | 1990-03-19 | 1992-02-18 | Brother Kogyo Kabushiki Kaisha | Laminate type piezoelectric actuator element |
DE4201937C2 (de) * | 1991-01-25 | 1997-05-22 | Murata Manufacturing Co | Piezoelektrisches laminiertes Stellglied |
DE4103657A1 (de) * | 1991-02-07 | 1992-08-13 | Tridelta Ag | Translatorstapel und verfahren zu dessen herstellung |
US5350639A (en) * | 1991-09-10 | 1994-09-27 | Matsushita Electric Industrial Co., Ltd. | Dielectric ceramic for use in microwave device, a microwave dielectric ceramic resonator dielectric ceramics |
US5168189A (en) * | 1991-09-18 | 1992-12-01 | Caterpillar Inc. | Solderless connector for a solid state motor stack |
US5175465A (en) * | 1991-10-18 | 1992-12-29 | Aura Systems, Inc. | Piezoelectric and electrostrictive actuators |
TW241363B (US07906523-20110315-C00004.png) * | 1991-12-05 | 1995-02-21 | Hoechst Ceram Tec Ag | |
DE69315767T2 (de) * | 1992-08-25 | 1998-05-07 | Canon Kk | Verfahren zur Herstellung einer laminierten piezoelektrischen Anordnung und Polarisationsverfahren und vibrationswellengetriebener Motor |
US6050679A (en) * | 1992-08-27 | 2000-04-18 | Hitachi Koki Imaging Solutions, Inc. | Ink jet printer transducer array with stacked or single flat plate element |
US5493165A (en) * | 1993-10-14 | 1996-02-20 | At&T Corp. | Force generator for electrostrictive actuators |
US5730429A (en) * | 1993-10-29 | 1998-03-24 | Lord Corporation | Decouplers for active devices |
WO1998024296A2 (en) * | 1996-11-20 | 1998-06-11 | The Regents Of The University Of California | Multilaminate piezoelectric high voltage stack |
US6175182B1 (en) * | 1998-03-18 | 2001-01-16 | Penn State Research Foundation | Pseudo-shear mode actuator |
US6465931B2 (en) * | 2000-03-29 | 2002-10-15 | Qortek, Inc. | Device and method for driving symmetric load systems |
US6437487B1 (en) * | 2001-02-28 | 2002-08-20 | Acuson Corporation | Transducer array using multi-layered elements and a method of manufacture thereof |
DE10201641A1 (de) * | 2002-01-17 | 2003-08-07 | Epcos Ag | Piezoelektrisches Bauelement und Verfahren zu dessen Herstellung |
DE10207530A1 (de) * | 2002-02-22 | 2003-09-11 | Epcos Ag | Piezoaktor mit strukturierter Außenelektrode |
US7019438B2 (en) * | 2002-06-21 | 2006-03-28 | Ngk Insulators, Ltd. | Piezoelectric/electrostrictive film device |
US7067961B2 (en) * | 2002-07-12 | 2006-06-27 | Ngk Insulators, Ltd. | Piezoelectric/electrostrictive film device, and manufacturing method of the device |
US20040051763A1 (en) * | 2002-09-13 | 2004-03-18 | Shogo Matsubara | Piezoelectric thin film element, actuator, ink-jet head and ink-jet recording apparatus therefor |
JP4483275B2 (ja) * | 2003-02-05 | 2010-06-16 | 株式会社デンソー | 積層型圧電素子及びその製造方法 |
JP2004297041A (ja) * | 2003-03-12 | 2004-10-21 | Denso Corp | 積層型圧電体素子 |
US7651587B2 (en) | 2005-08-11 | 2010-01-26 | Applied Materials, Inc. | Two-piece dome with separate RF coils for inductively coupled plasma reactors |
JP4657082B2 (ja) * | 2005-10-28 | 2011-03-23 | オリンパスメディカルシステムズ株式会社 | 超音波治療装置 |
JP5211553B2 (ja) * | 2006-06-27 | 2013-06-12 | コニカミノルタアドバンストレイヤー株式会社 | アクチュエータ素子、及びアクチュエータ素子の製造方法 |
JP6828331B2 (ja) * | 2016-09-09 | 2021-02-10 | Tdk株式会社 | 圧電駆動装置 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61142780A (ja) * | 1984-12-17 | 1986-06-30 | Toshiba Corp | 積層型変位発生素子及びその製造方法 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58140173A (ja) * | 1982-02-15 | 1983-08-19 | Seiko Epson Corp | 固体変位装置 |
JPS59204288A (ja) * | 1983-05-04 | 1984-11-19 | Nippon Soken Inc | 積層セラミツク圧電体 |
JPS59231884A (ja) * | 1983-06-15 | 1984-12-26 | Nippon Soken Inc | 積層形圧電体 |
JPS60176282A (ja) * | 1984-02-22 | 1985-09-10 | Toyota Motor Corp | 積層型圧電磁器およびその製造方法 |
-
1988
- 1988-07-20 JP JP1988095959U patent/JPH0217860U/ja active Pending
-
1989
- 1989-07-18 US US07/381,285 patent/US4978881A/en not_active Expired - Fee Related
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61142780A (ja) * | 1984-12-17 | 1986-06-30 | Toshiba Corp | 積層型変位発生素子及びその製造方法 |
Also Published As
Publication number | Publication date |
---|---|
US4978881A (en) | 1990-12-18 |